Unit 5 - Micro Sensor and Micro actuators

Micro-sensors are miniaturized devices that detect physical, chemical, or biological parameters and convert
them into measurable electrical signals. They consist of a sensing element and a transduction mechanism.
Fabrication techniques
🔹 1. Substrate Selection
•Most common substrate: Silicon (Si).
•Others: Glass, polymers, SOI (Silicon on Insulator).
•Acts as the base on which structures are built.

Deposition of thin layers of SiO2 over the surface of the substrate

Acts as an insulation layer preventing entry of foreign bodies in to the substrate
Wet- Material is removed by dissolving when immersed in a chemical solution (KOH)
Dry- – Material is removed by sputtering/dissolving using a vapor phase etchant (plasma gas
etchant)
Micro machining

• Micromachining is the basic technology for fabrication of micro-components

of size in the range of 1 to 500 micrometers.
• They help to achieve the desired dimension of the final micro structure
MEMS fabrication process video

https://www.youtube.com/watch?v=6gO0IRprJPU
A microactuator is a miniaturized device that converts energy (electrical, thermal, magnetic, etc.) into
mechanical motion—typically displacement, force, or torque—on the micro or nano scale.

Types of Microactuators

1. Electrostatic Microactuators
2. Piezoelectric Microactuators
3. Thermal Microactuators
4. Magnetic Microactuators
Electrostatic Microactuators

Electrostatic force is the force of attraction or repulsion between two electrically charged objects due to
their electric fields.
In MEMS and microactuators, it typically refers to the attractive force generated between two oppositely
charged conductive surfaces—like capacitor plates—when a voltage is applied across them.

A microactuator driving units which are driven through

electrostatic force is known as an electrostatic
microactuator.

In this type of microactuator, each driving unit includes

wave-like electrodes where these electrodes are pulled &
insulated from each other through the electrostatic force.
This type of actuator deformation mainly depends on the
electrostatic force, the external force & the structure’s
elasticity.
Application :
•Move tiny parts (e.g., micromirrors)
•Switch circuits (e.g., MEMS RF switches)
•Change capacitance (e.g., tunable capacitors)
Piezoelectric Microactuators

Piezoelectric microactuators are devices that convert electrical energy into mechanical motion using
the piezoelectric effect—a property of certain materials to deform (expand or contract) when subjected
to an electric field.

Structure of a Piezoelectric Element

Typically includes:
1.Piezoelectric Material (core)
1. Common materials: PZT (Lead Zirconate Titanate), Quartz
2.Electrodes
1. Thin metal coatings (like silver or gold) on top and bottom for applying voltage
• Piezoelectric microactuators are very famous and
most frequently used in different fields.
• These are designed by mounting piezoelectric
elements on top of each other.
• Once a voltage is given to both sides of these
elements, then they can expand.
• Piezoelectric micro-actuator is used in different
servo control systems to provide ultra-precise
positioning & compensation with the potential
Application

1. Precision Positioning Systems

2. Micro Speakers and Buzzers
3. Medical Devices
Piezo-resistive Microactuators
• Piezo-resistive Microactuators are miniature devices that convert electrical energy into mechanical
motion using piezo-resistive materials, which change their electrical resistance in response to
mechanical strain.

• These devices combine sensing and actuation functionalities in a single structure, making them
valuable in applications requiring compactness, precision, and responsiveness.
•Piezo-resistivity:
•The property of certain materials (e.g., doped silicon, polysilicon) to change their electrical resistance
when subjected to mechanical stress.
•Commonly used in MEMS (Micro-Electro-Mechanical Systems) for sensing strain.

•Microactuators:
•Tiny devices that perform mechanical actions like bending, moving, or pushing.

•Piezo-resistive Microactuators:
•Integrate strain sensing (via piezoresistivity) with microactuation.
•Actuated through thermal, electrostatic, magnetic, or piezoelectric/piezoresistive mechanisms.
•Often use thermal expansion or electrothermal actuation to generate movement, and then
piezoresistive elements measure the resulting strain or position.
•Piezo-resistivity:
•The property of certain materials (e.g., doped silicon, polysilicon) to change their electrical resistance
when subjected to mechanical stress.
•Commonly used in MEMS (Micro-Electro-Mechanical Systems) for sensing strain.

•Microactuators:
•Tiny devices that perform mechanical actions like bending, moving, or pushing.

•Piezo-resistive Microactuators:
•Integrate strain sensing (via piezoresistivity) with microactuation.
•Actuated through thermal, electrostatic, magnetic, or piezoelectric/piezoresistive mechanisms.
•Often use thermal expansion or electrothermal actuation to generate movement, and then
piezoresistive elements measure the resulting strain or position.
Working Principle
•A current or voltage is applied to an actuator
structure (e.g., cantilever, bridge).
•The structure deforms due to electrothermal or
electrostatic forces.
•Piezoresistive elements embedded in the
structure detect the resulting strain by a change
in resistance, enabling feedback control.
Piezoresistive Micro Actuators

Piezoresistive Micro Actuators are a type of MEMS (Micro-Electro-Mechanical Systems) device that utilizes the
piezoresistive effect for sensing or feedback control and are often combined with an actuation mechanism for
movement or deformation at the microscale.

Basic Concept
The piezoresistive effect refers to the change in electrical resistance of a material due to mechanical stress. In micro
actuators, this property can be used for:
•Sensing the mechanical displacement or force.
•Providing feedback for precise control in closed-loop systems.

Working Principle
1.A mechanical structure (like a cantilever beam or diaphragm) is deformed by an external signal
(electrothermal, electrostatic, or piezoelectric actuation).
2.Piezoresistive elements, often made from doped silicon, are embedded or deposited in areas of high
mechanical stress.
3.As the actuator deforms, stress changes the resistance of the piezoresistors.
4.The change in resistance is measured and used for control or monitoring.
Thermal Microactuators

Thermal Microactuators are a class of MEMS (Micro-Electro-Mechanical Systems) actuators that operate based on the
thermal expansion of materials when heated.
These are among the simplest and most widely used types of microactuators due to their high force output, simple
fabrication, and compatibility with standard MEMS processes.

Working Principle
When a material is heated, it expands. In thermal microactuators:
1.Joule heating (resistive heating) is commonly used — current passes through a conductive material, generating heat.
2.The material (usually a beam or structure) expands due to the temperature rise.
3.The expansion leads to displacement, bending, or motion of the structure.
Magnetic Transduction in Microactuators

Magnetic Transduction in Microactuators refers to the use of magnetic fields to generate mechanical motion or
force at the microscale. These actuators are a part of MEMS (Micro-Electro-Mechanical Systems) and operate by
exploiting Lorentz forces, magnetic attraction/repulsion, or magnetostrictive effects.
Working:

A microstructure (beam, membrane, etc.) is integrated with a magnetic element (like a thin-film magnetic
material or coil).
•When current flows through the structure or it is exposed to an external magnetic field:
• In Lorentz type, the structure moves due to force generated by the interaction.
• In magnetostrictive type, the material itself expands/contracts.
•This mechanical movement can be used to actuate valves, levers, or cantilevers.