MOSFET
Dr. S L Pinjare
[email protected]
9/27/2020
1
Introduction
• Mosfet is a 4 terminal device Source, Drain, Gate and Body
Vgs = 0 Vgd
+ g +
- -
s d
n+ n+
p-type body
b
2
• When transistor is on , It passes a finite amount of current
– The current depends on the terminal voltages
• Derive current-voltage (I-V) relationships
3
MOS Capacitor
• Transistor gate, source, drain all
have capacitance
– Capacitance and current Vg < 0
polysilicon gate
silicon dioxide insulator
determine speed +
- p-type body
– I = C (DV/Dt) -> Dt = (C/I)
(a)
DV
• Gate and body form MOS
0 < Vg < V t
depletion region
+
-
capacitor
• Operating modes (b)
– Accumulation Vg > Vt
inversion region
– Depletion
+
- depletion region
– Inversion (c)
Slide 4
3: CMOS Transistor Theory 4
Terminal Voltages
• Mode of operation depends on the terminal voltages V g, Vd, Vs
– Vgs = Vg – Vs
– Vgd = Vg – Vd Vg
– Vds = Vd – Vs = Vgs - Vgd +
Vgs
+
Vgd
• Source and drain are symmetric diffusion terminals - -
– By convention, source terminal is at lower voltage Vs
- +
Vd
Vds
– Hence Vds 0
• nMOS body is grounded. First assume source is 0 too.
• Three regions of operation
– Cutoff
– Linear
– Saturation
Slide 5
3: CMOS Transistor Theory 5
nMOS Cutoff
• No channel
• Vgs = 0 , Vgs <vth
• Ids = 0
Vgs = 0 Vgd
+ g +
- -
s d
n+ n+
p-type body
b
Slide 6
3: CMOS Transistor Theory 6
nMOS Linear
• As Vgs increases , the Channel forms when Vgs > Vth the
threshold voltage and Vds< Vgs-Vth,
• Current flows from d to s V > V
gs t V =V
g
– e- from s to d + + gd gs
- -
s
• Ids increases with Vds d
V =0
n+ n+ ds
• Similar to linear resistor
p-type body
b
Vgs > Vt
Vgs > Vgd > Vt
+ g +
- - Ids
s d
n+ n+
0 < Vds < Vgs-Vt
p-type body
b
7
nMOS Saturation
• As Vgs increases beyond Vth, the Channel is pinched off if
Vds>Vgs-Vth forms when Vgs > Vth the threshold voltage
– Ids independent of Vds
• We say current saturates and the transistor acts like a
constant current source.
Vgs > Vt
g Vgd < Vt
+ +
- -
s d Ids
n+ n+
Vds > Vgs-Vt
p-type body
b
3: CMOS Transistor Theory 8
I-V Characteristics
• In Linear region, Ids depends on
– How much charge is in the channel?
– How fast is the charge moving?
Slide 9
3: CMOS Transistor Theory 9
Channel Charge
• MOS structure looks like parallel plate capacitor while
operating in inversion
– Gate – oxide – channel
• Qchannel =
gate
Vg
polysilicon + +
gate source Vgs Cg Vgd drain
W
Vs - - Vd
channel
tox n+ - + n+
SiO2 gate oxide
Vds
L
n+ n+ (good insulator, ox = 3.9) p-type body
p-type body
Slide 10
3: CMOS Transistor Theory 10
Channel Charge
• MOS structure looks like parallel plate capacitor while
operating in inversion
– Gate – oxide – channel
• Qchannel = CV
• C=
gate
Vg
polysilicon + +
gate source Vgs Cg Vgd drain
W
Vs - - Vd
channel
tox n+ - + n+
SiO2 gate oxide
Vds
L
n+ n+ (good insulator, ox = 3.9) p-type body
p-type body
Slide 11
3: CMOS Transistor Theory 11
Channel Charge
• MOS structure looks like parallel plate capacitor while
operating in inversion
– Gate – oxide – channel
• Qchannel = CV
• C = Cg = eoxWL/tox = CoxWL Cox = eox / tox
• V=
gate
Vg
polysilicon + +
gate source Vgs Cg Vgd drain
W
Vs - - Vd
channel
tox n+ - + n+
SiO2 gate oxide
Vds
L
n+ n+ (good insulator, ox = 3.9) p-type body
p-type body
Slide 12
3: CMOS Transistor Theory 12
Channel Charge
• MOS structure looks like parallel plate capacitor while
operating in inversion
V = Vgc – Vt = Vg –Vc –Vt
– Gate – oxide – channel
=Vg-(Vd+Vs)/2 -Vt
• Qchannel = CV =Vg-Vs+Vs-Vs/2-vd/2-Vt
=vgs-(Vd/2-Vs/2)-Vt
• C = Cg = eoxWL/tox = CoxWL =(V – V /2) – V gs ds Cox = et ox / tox
• V = Vgc – Vt = (Vgs – Vds/2) – Vt
gate
Vg
polysilicon + +
gate source Vgs Cg Vgd drain
W
Vs - - Vd
channel
tox n+ - + n+
SiO2 gate oxide
Vds
L
n+ n+ (good insulator, ox = 3.9) p-type body
p-type body
Slide 13
3: CMOS Transistor Theory 13
Carrier velocity
• Charge is carried by e-
• Carrier velocity v proportional to lateral E-field between
source and drain
• v=
Slide 14
3: CMOS Transistor Theory 14
Carrier velocity
• Charge is carried by e-
• Carrier velocity v proportional to lateral E-field between
source and drain
• v = mE m called mobility
• E=
Slide 15
3: CMOS Transistor Theory 15
Carrier velocity
• Charge is carried by e-
• Carrier velocity v proportional to lateral E-field between
source and drain
• v = mE m called mobility
• E = Vds/L
• Time for carrier to cross channel:
– t=
Slide 16
3: CMOS Transistor Theory 16
Carrier velocity
• Charge is carried by e-
• Carrier velocity v proportional to lateral E-field between
source and drain
• v = mE m called mobility
• E = Vds/L
• Time for carrier to cross channel:
– t =L/ v
– = L/uE =L L/(u Vds)
Slide 17
3: CMOS Transistor Theory 17
nMOS Linear I-V
• Now we know
– How much charge Qchannel is in the channel
– How much time t each carrier takes to cross
I ds
Slide 18
3: CMOS Transistor Theory 18
nMOS Linear I-V
• Now we know
– How much charge Qchannel is in the channel
– How much time t each carrier takes to cross
Qchannel
I ds
t
– Q=CV=CoxWL (Vgs-Vds/2-Vth)
– t=L2/Vds
Slide 19
3: CMOS Transistor Theory 19
nMOS Linear I-V
• Now we know
– How much charge Qchannel is in the channel
– How much time t each carrier takes to cross
– Qchannel = Cox W L(Vgs-Vth-Vds/2)/(L L/(uVds))
I ds
– t =
W V V Vds V
Cox gs ds
L
t 2
V W
Vgs Vt ds Vds = Cox
2 L
Slide 20
3: CMOS Transistor Theory 20
nMOS Saturation I-V
• If Vgd < Vt, channel pinches off near drain
– When Vds > Vdsat = Vgs – Vt
• Now drain voltage no longer increases current
I ds
Slide 21
3: CMOS Transistor Theory 21
nMOS Saturation I-V
• If Vgd < Vt, channel pinches off near drain
– When Vds > Vdsat = Vgs – Vt
• Now drain voltage no longer increases current
• I u Cox (W/L)(vgs-Vth-(vgs-Vth)/2)(Vgs-Vth)
ds
V
I ds Vgs Vt dsat V
dsat
2
W
= Cox
L
Slide 22
3: CMOS Transistor Theory 22
nMOS Saturation I-V
• If Vgd < Vt, channel pinches off near drain
– When Vds > Vdsat = Vgs – Vt
• Now drain voltage no longer increases current
V
I ds Vgs Vt dsat V
dsat
2
Vt
2
V gs
2
W
= Cox
L
Slide 23
3: CMOS Transistor Theory 23
nMOS I-V Summary
• Shockley 1st order transistor models
0 Vgs Vt cutoff
V V V V
I ds Vgs Vt ds ds linear
2
ds dsat
Vgs Vt
2
Vds Vdsat saturation
2
W
= Cox
L
Slide 24
3: CMOS Transistor Theory 24
Example
• 0.6 mm process (Example)
– From AMI Semiconductor
– tox = 100 Å
– m = 350 cm2/V*s 2.5
Vgs = 5
– Vt = 0.7 V 2
• Plot Ids vs. Vds 1.5 Vgs = 4
Ids (mA)
– Vgs = 0, 1, 2, 3, 4, 5 1
Vgs = 3
– Use W/L = 4/2 l 0.5
Vgs = 2
Vgs = 1
0
0 1 2 3 4 5
W 3.9 8.85 10 14 W W Vds
Cox 350 8 120 A /V 2
L 100 10 L L
Slide 25
3: CMOS Transistor Theory 25
pMOS I-V
• All dopings and voltages are inverted for pMOS
• Mobility mp is determined by holes
– Typically 2-3x lower than that of electrons mn
– 120 cm2/V*s in AMI 0.6 mm process
• Thus pMOS must be wider to provide same current
– assume mn / mp = 2
Slide 26
3: CMOS Transistor Theory 26
MOSFET Characterstics
27
MOS Characterstics
• Setup model library
• Tsmc180nm.lib
28
Tsmc018.lib
29
Tsmc018.lib
30
NMOS Characterstics
idsVs Vgs
31
NMOS Characterstics
idsVs Vgs
32
NMOS Characterstics
idsVs Vds
33
34
Ids vs vgs
35
36
• Measure Vth = .46 V
• Lambda= gds/Id = 1.81e-5/3.86e-4=.047
• W/L= 600/180
37
NMOS Characterstics
.op
38
NMOS Characterstics
.op
• Ids Vs Vgs
• Ids vs Vds
39
NMOS Characterstics
.op
40
NMOS Characterstics
.op
41
NMOS Characterstics
.op
• Vth= .388
• Gds=8.86e-6
• Id=1.73e-4
• Lambda=gds/Id=.005
• Gm= 1.29e-4
• Vdsat=.42
• Kp=Ucox = gm/vdsat= 307 uA/V2
42
pmos characterstics
43
PMOS Characterstics
• W=1275nm
• L=180nm
44
45
46
Ids vs vds
47
Ids Vs Vgs
48
PMOS Characterstics
.op
49
PMOS Characterstics
.op
50
• Vth= .39
• Gds=5.19e-6
• Id=8.47e-5
• Lambda=gds/Id=.061
• Gm= 1.02e-4
• Vdsat=.891
• Kp=Ucox = gm/vdsat= 114 uA/V2
51
• 1 Shichman-Hodges
• 2 MOS2(see A. Vladimirescu and S. Liu, The Simulation of
MOS Integrated Circuits Using SPICE2, ERL Memo No.
M80/7, Electronics Research Laboratory University of
California, Berkeley, October 1980)
• 3 MOS3, a semi-empirical model(see reference for level 2)
• 4 BSIM (see B. J. Sheu, D. L. Scharfetter, and P. K. Ko,
SPICE2 Implementation of BSIM. ERL Memo No. ERL
M85/42, Electronics Research Laboratory University of
California, Berkeley, May 1985)
• 5 BSIM2 (see Min-Chie Jeng, Design and Modeling of Deep-
Submicrometer MOSFETs ERL Memo Nos. ERL M90/90,
Electronics Research Laboratory University of California,
Berkeley, October 1990)
52
• 6 MOS6 (see T. Sakurai and A. R. Newton, A Simple
MOSFET Model for Circuit Analysis and its application to
CMOS gate delay analysis and series-connected MOSFET
Structure, ERL Memo No. ERL M90/19, Electronics Research
Laboratory, University of California, Berkeley, March 1990)
• 8 BSIM3v3.3.0 from University of California, Berkeley as of
July 29, 2005
• 9 BSIMSOI3.2 (Silicon on insulator) from the BSIM
Research Group of the University of California, Berkeley,
February 2004.
53
• 12 EKV 2.6 based on code from Ecole Polytechnique
Federale de Lausanne. See http://legwww.epfl.ch/ekv and
"The EPFL-EKV MOSFET Model Equations for Simulation,
Version 2.6", M. Bucher, C. Lallement, F. Theodoloz, C. Enz,
F. Krummenacher, EPFL-DE-LEG, June 1997.
• 14 BSIM4.6.1 from the University of California, Berkeley
BSIM Research Group, May 18, 2007.
• 73 HiSIMHV version 1.2 from the Hiroshima University and
STARC.
54
ucox
• From the TSMC.lib file
• Un = 273.809 cm2V/S up = 115.689cm2 V/s
• Tox = 4.1e-9 εox = 3.9εo = 3.9(8.854x10–12 F/m)
• Un/up = 2.366
• Cox =8.422 fF/um2
• Uncox = 230.6uA/v2
• Upcox = 97.43uA/v2
55
• W = 180n
• L = 180n
• Plot sqrt of Id vs Vgs and from slope determine the value of
ucox
56
57
58
• From maximum value nmos
• 21.6346ma^1/2 /V2
• Ucox = 468.07uA/V2
• W=L=180nm
• W=L=1u
• 15.40088ma^1/2 /V2
• Ucox = 237.2uA/v2
59
60
61
• From maximum value pmos
• 9.6555ma^1/2 /V2
• Ucox = 93.25uA/V2
• W=L=180nm
• W=L=1u
• 7.40665ma^1/2 /V2
• Ucox = 54.858uA/v2
62
• Determine Cin by simulation
• Determine Channel resistance in saturation region.
63
Input Capacitance
• Delay = .69RC
• R= 1449 ohm
• C = delay/1449*.69= ~delay/1000 = (delay in ps ) fF
64
Input capacitance
65
• R= 1449 ohm
• Tdn = 6.79ps Cin = 6.8 fF
• Tdp = 6.15 ps Cin = 6.2 fF
• 1 micron gate length and width
66
Input capacitance
67
• W=L =180nm
• R =1449 Ohm
• Tdn = 0.459ps Cin = 0.459 fF
• Tdp = 0.350ps Cin = 0.350 fF
68
Gate Capacitance
69
• Gate Capacitance
• R= 1449 Ohm
• W=L=1um
• Tdn=7.62ps
• Tdp=4.71ps
• Cgbn =7.62fF
• Cgbp =4.71 fF
70