Unit Iii
Unit Iii
processes
• MOS layers
• Design rules
• Stick diagrams
• Layout diagrams
• Examples
MOS AND BICMOS circuit design processes
• Outcome:
– At the end of this module you will be able draw the stick
diagram for simple MOS circuits
Stick Diagrams
Stick Diagrams
VDD
VDD
X
X
x x x
x Stick
Diagram X
Gnd Gnd
6
Stick Diagrams
Stick Diagrams
VDD
VDD
X
X
x x x
x X
Gnd Gnd
7
Stick Diagrams
Stick Diagrams
• VLSI design aims to translate circuit concepts
onto silicon.
• stick diagrams are a means of capturing
topography and layer information using simple
diagrams.
• Stick diagrams convey layer information through
colour codes (or monochrome encoding).
• Acts as an interface between symbolic circuit
and the actual layout.
8
Stick Diagrams
Stick Diagrams
9
Stick Diagrams
Stick Diagrams
11
Stick Diagrams
12
Stick Diagrams
14
Stick diagrams
Rules for different layer contacts
Stick Diagrams
18
Stick Diagrams
19
Stick Diagrams
Power
A Out
Ground
20
Stick Diagrams
Stick Diagrams
• Summary:
21
Basics of Layout Design and
Design Rules
Lambda Based Design Rules
• Design rules based on single parameter, λ
• Simple for the designer
• Wide acceptance
• Provide feature size independent way of setting
out mask
• If design rules are obeyed, masks will produce
working circuits
• Minimum feature size is defined as 2 λ
• Used to preserve topological features on a chip
• Prevents shorting, opens, contacts from slipping
out of area to be contacted
Layout Design Rules
• Layout design rules describe how small features can be and how
closely they can be packed in a particular manufacturing process.
• Industrial design rules are usually specified in microns. This makes
migrating from one process to a more advanced process difficult
because not all rules scale in the same way.
• Mead and Conway popularized Lambda-based design rules based on
a single parameter, λ, which characterizes the resolution of the
process.
Layout Design Rules
• λ is generally half of the minimum drawn transistor channel length, is the
distance between the source and drain of a transistor and is set by the
minimum width of a polysilicon wire.
– For example, a 180nm process has a minimum polysilicon width (and
hence transistor length) of 0.18 microns and uses design rules with λ =
0.09 µm
• By using lambda based design rules, they make scaling layout trivial; the same
layout can be moved to a new process simply by specifying a new value of λ.
• Designers often describe a process by its feature size. Feature size refers to
minimum transistor length, so λ is half the feature size.
Layout Design Rules:
– Micron Rules, in which the layout constraints such as minimum feature sizes
and minimum allowable feature separations are stated in terms of absolute
dimensions in micrometers.
– Lambda Rules, which specify the layout constraints in terms of a single
parameter(λ) that has units of µm and that can be easily scaled to different
processes.
• All widths, spacings and distances are written in the form: Value=mλ,
where ‘m’ is scaling multiplier.
• Design rules can be classified into four main types: minimum width,
minimum spacing, surround and extension.
Design Rules - The Reality
• Manufacturing processes have
inherent limitations in accuracy and
repeatability
• Design rules specify geometry of
masks that provide reasonable yield
• Design rules are determined by
experience
Problems - Manufacturing
• Photoresist shrinking / tearing
• Variations in material deposition
• Variations in temperature
• Variations in oxide thickness
• Impurities
• Variations between lots
• Variations across the wafer
Problems - Manufacturing
• Variations in threshold voltage
– oxide thickness
– ion implantation
– poly variations
• Diffusion - changes in doping (variation in R, C)
• Poly, metal variations in height and width -> variation in
R, C
• Shorts and opens
• Via may not be cut all the way through
• Undersize via has too much resistance
• Oversize via may short
Design Rules
• Under worst case misalignment and
maximum edge movement of any
feature, no serious performance
degradation should occur
Layouts
Rules for different layer contacts
Lamda Based Design Rules:
Contd…
Contd….
Contd…
Contd…
2um design rules:
Contd…
Contd….
Contd…
N MOSFET Layout
Drawing the N-Diffusion (Active)
The Gate Poly:
The second step is to draw the gate. We will use a vertical polysilicon rectangle to create the
channel
Making Active Contacts:
The next step is to make the active contacts. These contacts will provide access to the drain and source regions of the NMOS transistor.
Contd…
Covering Contacts with Metal-1:
Active contacts in fact only define holes in the oxide (connection terminals). The actual connection to the corresponding diffusion region is made by
the Metal layer.
The N-Select Layer:
Each diffusion area of each transistor must be selected as being of n-type or p-type. This is accomplished by a defining
the "window: of n-type (or p-type) doping (implantation), through a special mask layer called n-select (p-select).
As with the NMOS transistor, the p-type doping (implantation) window over the active area must be
defined using the P-select layer.
Drawing the N-Well:
A larger n type region (n-well) must be created, which acts like a substrate for the PMOS transistors.
CMOS INVERTER Layout:
Placing the PMOS and NMOS transistors:
Connecting the Output: Draw a Metal-1 rectangle between NMOS and PMOS drain region contacts.
Connecting the Input:
Making a Metal-1 connection for the Input:
Power Rails:
Draw the Power Rail in Metal-1 above the PMOS.
Draw the Ground Rail in Metal-1 below the NMOS.
P-Substrate Contact:
VDD
V DD
V DD
NOT(AB)
NOT(AB)
B A and B
A
A
B
GND
GND
GND
NOR2
V DD
V DD
A
A
B NOT(A+B)
NOT(A+B)
B The output here is
GND connected to one
GND p-trans drain and
one n-trans drain.
Double Metal MOS Process Rules:
• Use the second level metal for the global distribution
of power buses, that is, VDD and GND (VSS), and for
clock lines.