EB Sources’

Model: EB2
Your New
Full Production
Source
 Model: EB2
Multi-Pocket Source
______________________________________________________
______________________________________________________

Instruction Manual

Part Number #EB2-0001

Copyright © EB Sources, 2001-2004 - All rights reserved

October, 2004

Brand and Product Names are trademarks or

registered trademarks of their respective companies

i
 Safety Warning__
__________________________________
High (Potentially Lethal) Voltages are present within an
Evaporation System. Great care must be exercised when
performing maintenance.

Human Contact With High Voltages Can Be Fatal.

Short all HV Feed thru connections with a grounding hook!

Danger- High Voltage

ii
 Warranty
This Electron Beam Gun is guaranteed against faulty materials, function, and
workmanship for a period of 24 months from delivery date of source.

This warranty is valid only for normal use where regular maintenance has been
performed as instructed. This warranty shall not apply if repair has been performed
or an alteration made by anyone other than an authorized EBSources’
Representative, or if a malfunction occurs through abuse, misuse, negligence, or
accident. No charge for repairs will be made under warranty at EB Sources’ facili-
ties.
Defective parts will be repaired or replaced at EB Sources’ option. Customer
will be responsible for freight charges to EB Sources’ facility.

For the safety of the EB Sources’ technicians, customers are requested

to supply a list of materials which have been evaporated in the crucible when
the e-gun is returned for repair.

User Responsibility
The user is responsible for proper operation and ordinary maintenance of the
Equipment and for following procedures described in this manual - including refer-
ence documents. Proper operation includes timely replacement of parts that are
missing, broken or plainly worn. If the user has a reasonable doubt about
understanding the use or installation of a component, EB Sources or your local
representative should be called.

It is very important that the user properly install the equipment as

described in Section 3, (Installation) and (Grounding) of this manual.

Failure to install or ground properly will void this warranty!!!

Alteration of the design or any function of equipment voids

this warranty and is entirely the responsibility of the user.

iii
 Table of Contents
Safety Warning ii
Warranty iii
User Responsibility iii
Photo Reference v

1 Unpacking
Installation Kit 1-1

2 Description
Specifications 2-1

3 Installation
Required Components 3-0
Vacuum Tank Ground 3-2
High Voltage 3-5
Multi-Source Installation 3-6
Accessories 3-7

iv
4 Operation
Getting Started 4-0
Shutdown 4-1
Adjusting the Electromagnetic Field 4-1

5 Servicing
Emitter Removal 5-0
Crucible Removal 5-0
Coil Housing Removal 5-0
Filament Replacement 5-1
Emitter Disassembly 5-1
Emitter Reassembly 5-1
Emitter Alignment Specifications 5-3
Coil Assembly 5-4
Coil Connector Assembly 5-4
Bearing Housing Sub Assembly 5-5
Crucible Rotation Assembly 5-5
Base Plate Assembly 5-7
Coil Housing Install 5-8

6 Trouble Shooting
Power Problems 6.0
Beam Problems 6.1
Rotation Problems 6.2
Photo Reference:
Installation Kit 1.1
Coil Wire Reference 3.1
Side and Bottom Drive Kit 3.3
Adjusting Electromagnetic Field 4.1
Emitter 5.2,5.3
Coil Assembly 5.5
Coil Connector 5.5
Rotation Assembly 5.6,5.7
Base Plate Assembly 5.8,5.9,5.10

v
 Unpacking
1
Your Model EB2 Multi-pocket Source is packed in a specially designed double wall
carton and heavy foam padding surrounds your new source. Please save this box and the
padding in the unlikely event that you need to return your EB2 for repair. EB Sources
cannot be held liable, and may not be able to repair without charges, sources which are
damaged in shipment due to improper packing.

You will find your new source, manual, spare parts, and of course the tool kit, inside
the double walled-carton. Please check for shipping damage. Your new source is very
rugged, so this should not be a problem. Please report any deficiencies to your
representative or to EB Sources immediately. Also take care to read the warranty on Page
ii as to the limits of our liability.

Your new source has been assembled under clean-room conditions and sealed in a
polyethylene bag for shipment. A pair of gloves is included for installation of your new
source into your system.

1.0
 Installation kit
Description Part Number Qty.

Emitter Rebuild Kit EB-5270 1

O ring Kit EB-5200 1
Screwdriver Kit EB-5050 1
Allen Wrench 5/32” 1
Allen Wrench 7/64” 1
Allen Wrench 3/32” 1
Powder Free Latex Gloves 1pr
Shunt Bar EB2-2424 2
Copper Buss Bar EB-2434 2
Quad Ring Tool EB-2433 1
Thumb Screw EB-2825 1
VCR Nut, Female EB-2304c 2
VCR Gland EB-2304b 2

1-1
 2
Description
The EB2’s most notable feature is: Ease of maintenance

1 The crucible is removable from above by using air or nitrogen to blow down
the waterlines to the source assembly. Next, remove the 6 screws that hold the
water-cooled cover plate, and remove the screws which hold the crucible in
place. Attach the thumb screw to the center of the crucible and lift out.

2 The EB2’s coil housing is also removable for cleaning at this time without
removing the base assembly or the magnet from the chamber. This means
you won’t need to regauss your magnet because you needed to clean the
coil housing. You will find that there are no water lines attached to the
coil housing to get bumped or broken.

3 The magnet arms are just that, for magnetic fields only, not water passages
like other equipment manufacturers.

4 The coil is a stand-alone assembly which can be easily removed for cleaning
or repair. It has a 4-pin connector which keeps the terminals free of deposits
and shorting when mated with the 4-pin connector plug which is wired to the
octal feed thru -unlike some sources where you forget which wire goes where
or break a terminal while cleaning or rewiring the coil.

2.0
 EB-2 Specifications
Electron Beam Deflection: 270°
Power Rating: 10kW
Maximum High Voltage: 10kW
High Voltage Range: 5kV to 10kV
Lateral Coil Resistance: 3.0 Ohm
Sweep, Lateral Coil: +/- 1 Amp
Longitudinal Coil Resistance: 9.5 Ohm
Sweep Longitudinal Coil : +/- 1 Amp
Emission Current: up to 1 Amp@10kV
Filament Power: 600 Watts Maximum

Water Requirements: 3 gpm @ 10kW

Impute water temperature should
be 60° F (15° C) @ 60 psi (4.2 kg/cm)
with 3/8” (10mm) lines.

Weight: 46 lbs. (20.81 kg)

As delivered, less shipping carton

Dimensions: 4.310”H x 8.060”W x 13.050”L

Note: dimensions 10.947 cm H x 20.472 cm W x 33.147 cm L
less drive protrusions

Maximum Crucible Volume: 4 x 40cc or 325cc Trough

2.1
 EB2 Reference Dimensions

# of Pockets Size “ A” “B”___

4 7,15,25,30 cc with web 1.750” 3.550”

4 30,40 cc without web 1.750” 3.750”

4 40 cc with web 1.800” 3.800”

6 7,15 cc with web 1.930” 3.550”

6 25 cc with web 1.930” 3.675”

1 235 cc trough 1.750 3.550”

1 325 cc trough 1.800” 3.800”

2.2
 Crucible Dimensions

Size Pockets “A” “B” Part Number

7cc 4 .500 1.125 EB-7407

6 EB-7607
15cc 4 .670 1.485 EB-7415
6 EB-7615
25cc 4 .680 1.855 EB-7425

25cc 6 .920 1.633 EB-7625

30cc w/web 4 .790 1.920 EB-7430 w/web

30cc w/o web 4 .940 1.800 EB-7430 w/o web

40cc w/web 4 1.020 2.030 EB-7440 w/web

40cc w/o/web 4 1.020 2.030 EB-7440 w/o web

235cc Trough .820 1.925 EB-7235 trough

325cc Trough 1.145 2.030 EB-7325 trough

2.3
 3
Installation
Required Components:
The following is the minimum list of components required for setting up the new
source for safe operation.

1 Two high voltage feedthrus (15 kv@ 70 Amps). Bare copper straps are
provided for hookup inside chamber. Use #6 AGW copper wire with lugs for
attaching the feedthru to the filament transformer.
2 Use a solid copper strap or wire #6 or greater, no more than 7 strands ( not
copper braid), to attach between the base plate ground and the two 8’
grounding rods (6’ apart). Connections must be extremely tight and oxide
free. Before attaching the #6 wire, check that the resistance is 3ohms or
less Note: we suggest that you use an additional HV feedthru as a ground
point. Attach one side directly to the base plate of your new source and
the other side to the 8’ grounding rods.

3 Attach a grounding hook with at least 6’ of #6 copper wire to the grounding

rod. Note:This is the first step in safety: Ground your system before touching
anything.

4 Mount the filament transformer as close as possible to the HV feedthu.

Ensure that there is clearance to ground, as the HV feedthru will arc 1” to
ground at 10 thousand volts!!!!! You can use plexiglass 1/4” thick to build an
enclosure. Be sure to maintain a 2” minimum clearance all the way around.

3.0
6 Use 3/8” O.D. x 1/16” wall 304 stainless steel tubing for the water connections. You
will need to weld or braze the fittings to the tubing and to the feedthru
you have chosen. Use of bellows for water is a very bad idea ( i e: very thin
walls, lots of harmonics).

7 Use three-way valves on the inlet and outlet water lines for your source.
Attach either a nitrogen or an air line on the inlet water line with a three-way
valve to use for blow down of your source. Attach a three-way valve on the out
let water line to a drain or bucket. (Especially important on closed loop water
systems.)

8 Use a flow meter w/interlocks on the source outlet water line.

9 Use a standard water filter on the inlet water line. Mount the filter away from
your system for easy maintenance.

10 Interlocks: thermocouple, water, chamber door, transformer cover, (if

available), temperature, and Ion gauge. Should be placed in series (logically
ANDed) so that if one interlock fails, the source is shut off automatically.

11 Use a shutter assembly to protect your product from contamination during

material warm up, pre-deposit and post-deposit. A min. 5” dia. stainless steel
disk x 1/8”thick will work quite well for this application. The shutter disk
should be a min. of 3” from the top of the source pocket. Insure that it is easy
to remove for periodic cleaning.

Figure 1 coil wire Ref. +I - II

+
IIII

-
III

3.1
 Note: Never use mild steel for the mounting of your new source. This includes
chambers, system base plate, standoffs, feedthrus, shutter assemblies, rotation
assemblies, shielding, screws, or bolts.

304 stainless steel is the material of choice for mounting your new source and
related hardware.

Your new source can be either mounted flush to the system base plate (for side drive),
or you can mount it on standoffs (for bottom drive or even side drive).

3.2
 NOTE: DO NOT use water pipes for system ground connections.
Use ground rods as shown in Figure 3. It shows you the correct way to ground your
vacuum system: Earth ground rods (2) to source base plate (Note: An old HV feedthru
works really well as a base plate ground point); from the base plate to the power supply;
and from the base plate to the filament transformer.

The crucible rotation can either be right- or left-side mounted for side drive, or bottom
mounted for bottom drive. Conversion kits are available to convert from:

Side to Bottom Kit: Drive Housing Assembly

Spur gear #EB2-2420 Drive Housing #EB2-2418
Drive gear #EB2-2419 Drive Bearing #EB2-2428
Drive shaft #EB2-2425 Bearing Spacer #EB2-2427
Bottom to Side Kit: Clip Ring #EB2-2430
Bevel gear #EB2-2422 Snap Ring #EB2-2429
Drive gear #EB2-2423
Drive shaft #EB2-2426
Bevel Gear #EB2422 Drive Gear #EB2423

Drive Gear #EB2419

Spur Gear #EB2420
Drive Housing
#EB2419

Side Drive Shaft

#EB2-2426

Bottom Drive Shaft #EB2-2425 Bearing #EB2428

Bearing Spacer #EB2427

Clip Ring #EB2430
Snap Ring #EB2429

Note: bearing housing assembly is the same for both side and bottom drives

3.3
 High Voltage
1 Use decals or other warning labels to inform employees and
customers, as to the Lethal Voltages that are present during process.
(Note: always use a grounding hook before touching any high- voltage
component, even if the High Voltage is off.)

2 Jumping interlocks means you are putting someone’s life in

danger. Double check your system for jumped interlocks prior to
running your process.

3 High Voltage: 10,000 volts can jump 1” (inch) at

atmosphere! Make sure all safety shields and
doors are secure before starting your process.

Danger___

High Voltage
3.4
 Multi-Gun Installation
Multi-source installation can be achieved by use of a Magnetic Shunt
Assembly. The magnetic shunt is a combination of magnetic and non-
magnetic materials sandwiched together to form a magnetic
barrier between the two sources.

Warning!!! You must mount the sources with the same

side facing each other - i.e.: South to South or North to
North (oppose each other) for the coils to work properly.
The assembly must extend 1” beyond all parts of your sources.
1 Magnetic metals, new metal or mild steel: .020 to .030 inch thick,
qty. 5
2 Non-magnetic metals, copper or 300 series stainless steel: .020
to .030 inch thick, qty. 6
3 300 series stainless steel washers: .020 to .050 thick

4 Alternate the assembly of metals, air gaping with washers (i.e.:

magnetic, washer, non-magnetic, washer, …)

3.5
 Recommended Accessories
1 We recommend the switcher type power supplies made by Niles
Electronics (Nileselectronics.com) Really tough, hard-working power
supplies. (Note: these supplies are like that watch commercial: It takes a
licking and keeps on ticking.)
2 Filament Transformer
EB-3620 7V 40Amp
EB-3640 12V 50 Amp
EB-3641 12V 70 Amp/ 6V 140Amp
3 Feedthru by EB Sources
Side Drive Kit : #EB-5001
EB-2200 High Voltage F/T 2ea
EB-2300 3/8” Water F/T 1ea
EB-2750 Rt. Angle Rotary F/T 1ea
EB-2700 Rotary (Shutter) F/T 1ea
EB-2100 Octal (8-pin) F/T 1ea
Bottom Drive Kit: #EB-5002
EB-2200 High Voltage F/T 2ea
EB-2300 3/8” Water F/T 1ea
EB-2700 1/4” Rotary F/T 2ea (1 shutter)
EB-2100 Octal (8 pin) F/T 1ea
Additional Feedthru:
EB-2000 1/2” Water F/T
EB-2500 3/4” Shaft Seal F/T
EB-2550 Gas: 1/8” FPT F/T
or 6” welded pipe , (1/8”,1/4”,or 3/8” Dia.)
Optional Components:
EB-1000 Ground Buss Bar
EB-2204 H.V. Clamp (Pr)
EB-2456 Coil Connector Assembly
EB-2450 EB2 Coil Assy. (9 x 3 ohm)
EB-1086 Emitter Assy. (STD)
EB–1087 Emitter Assy. (Dielectric)
EB– 5051 Water Flow Switch:
1/4” NPT fittings, 1-6 gpm adjustable

3.6
 4
Operation
General Operation: Getting Started
Check your system, water on, pumps running, interlocks made. Make sure
the operating controls of the power supply are within reach of the view port.
Now you are ready to load your new source with vacuum-grade material.
Insure a clear view of the pocket from the view port window. Close up and
pump down. At an operating pressure of 1 x 10 torr or better, set the operating
voltage to 7kV or 10kV; beam position to neuteral, emissions to zero, reset
the sweeps amplitudes to zero.
When the system reaches the desired pressure, turn on the High Voltage.
Watching the pocket, turn on the filament current. Slowly turn up the
current until you can see the beam spot on the material.
Note: Never increase the current more than 100ma if you
cannot see the beam in the center of the crucible!!!!
Use the sweeper controls - longitudinal (front to rear) and lateral (left to
right) - to help locate the beam spot. If you cannot find it, Shut off the
emission current and the High Voltage !!!!
Check the leads on the coil to see if they are reversed. If not, go to the
Troubleshooting Section 6 checklist.

4.0
 General Operation :Shutdown
After terminating the final layer of the run sequence, turn down the
filament current, turn off the High Voltage. Allow the emitter several minutes to
cool down before opening the chamber. (A yellow oxide will form around the
filament if you vent too quickly. (Use nitrogen gas to vent, and you will avoid
this problem.)

Adjusting the Electromagnetic Field

Position: The beam can be pulled towards the coil by either

increasing the magnetic field or reducing the accelerating
voltage. The ways of achieving this are: reducing the High
Voltage, or increasing the coil current, or removing the shunt
bar, or bringing the pole pieces in closer to the pocket.

Shape: You can change the shape of the beam by sliding the
pole extensions in or out.

Intensity: Is controlled by the filament current. It can be

affected by the way the emitter is assembled. Be sure to follow
the instructions on how to adjust your emitter.

4.1
 5 Servicing
Your new EB2 source has been designed for high production and ease of
maintenance. You need to be familiar with the assembly of this source.
Emitter Removal
Caution: Make sure to use a ground hook to short all HV connections. The
emitter may be extremely hot.
Remove the leads from the HV feedthru on the emitter side. Remove the
#6-32 that holds the emitter to the base plate. You can now rebuild this emitter
or install a rebuilt emitter.
Crucible Removal
Turn off the water; make sure you use the three-way valves to blow down
your source of all water. Now, remove the six #10-32 screws that hold down
the cover plate. Remove the screws that hold down the crucible. Insert the 10-
32 thumb screw in the center of the crucible and lift out. Caution: take care to
protect “O” ring surfaces at all times.
Coil Housing Removal
First, follow the instructions for the crucible removal. Now, remove the
eight #10-32 screws that hold the housing down and carefully lift the housing
off the base assembly. There are four #10-32 screws that hold the field exten-
sions to the sides of the coil housing. Remove the two #10-32 screws that hold
the coil in place. Remove coil. Lift coil housing off the base assembly.
Caution: Take care to protect “O” ring surfaces at all
times.
5.0
 Filament Replacement
Squirt alcohol on the two screws that hold the filament clamps in place,
remove the filament. Note: This will help stop the screws from seizing.
Emitter Disassembly
You will need a bottle of alcohol for tight screws, to keep from galling. Next
you will need wire to string the emitter parts on for cleaning. (A bead blaster works
well for this application). Wash with alcohol and vapor dry. You can clean the
ceramics in the same way. Note: Discard any broken or cracked ceramics.
The #6-32 x 1/4” screws - which hold the filament clamps down - and the beam
former need to be replaced, as they have been subjected to very high heat and could
possibly gall.
Emitter Reassembly
Most problems are related to the emitter. With a little care, you can avoid
serious problems. Note: Do not tighten the screws down until instructed to do so.
all screws are stainless steel.

Assemble the Mounting Bracket (EB-1015), Left Hand Cathode Block

(EB-1013), and Left Hand Buss Bar (EB-1021) using (2) #6-32 x 3/8”
screws. Mount the #6 screws through the left buss bar and left cathode
block into the mounting bar. Leave screws loose.

Next, mount the L Insulator (EB-1018), to the mounting bar, the Right
Hand Cathode Block (EB-1012) and Right Hand Buss Bar (EB-1022)
using (2) #6-32 x 1/2”screws. Mount (1) #6 washer and (1) Collar Ceramic
(EB-1019) on each screw. Mount through right hand buss bar, through right
cathode block, through L insulator into the mounting bar. Leave screws
loose. Note:Be careful not to break the L insulator.

Stand the assembly up and install the Insulator Cross (EB-1020) into the
top of the right hand cathode block. Next, mount the Beam Former (EB-
1011) on the assembly and secure with (1) 6-32 x 1/4” screw loosely.
Spread the two cathode blocks apart as far as they are able and still be
parallel, push down on the beam former and snug all screws of this
assembly.

5.1
4 Install the filament (check the orientation) into this assembly, use (2)
#6-32 x 1/4” screws and (2) Filament Clamps (EB-1058), loosely mount.
Gently tap down on the assembly to settle the filament in place. Carefully
slide the left hand filament clamp so that it is flush with the inside edge of
the left cathode block, then snug down the #6 screw. Next, snug the right
hand filament clamp in place. Do not adjust this clamp as you may warp
your filament. Check to see the clearance between the right and left filament
clamps. Check the alignment of the filament to the beam former. Is it parallel?
If not, loosen one filament clamp (low side of filament) and gently lift up on
the filament (with the allen wrench) to align it while pressing down on the
clamp with your thumb, snug the #6 screw.

5 Note: Look at the back of this assembly. Are the screws sticking out from the
mounting bar? If so, you will need to replace with shorter screws or carefully
grind or file them off flush to the mounting bar.

5.2
 6 Mount the Anode (EB-1010) to the U Bracket (EB-1014) with (2) #6-32
x 1/4” screws, set aside. Next, loosely mount (2) HV insulators (EB-
1083),and (2) HV Shields to the Emitter Support Bracket (EB-1016)
using (2) #6-32 x 3/8” screws.

7 Attach the emitter support bracket assembly to the mounting bracket

assembly with (2) # 6-32 x 1/4” screws. Set this assembly on a flat
surface with the support bracket hanging over the edge. Gently push
down on the support bracket and tighten the (2) #6-32 x 3/8” screws.
Now reach around and tighten the (2) #6-32 x 1/4” screws thru the
mounting bracket into the HV insulators.

8 Mount the U Bracket to the support bracket with (2) #6-32 x 1/4” screws.
Gently push down on the mounting bracket, tighten the (2) #6-32 x 1/4”
screws. Push down on the anode and tighten the last (2)# 6-32 x 1/4”
screws.

9 Check your completed assembly for the alignment of the

Beam Former to the Anode.

5.3
 Emitter Components (EB-1087)
Description Part Number Qty. Reference
Anode EB-1023 1ea 1
Beam Former EB-1011 1ea 2
Cathode Block RH EB-1012 1ea 3
Cathode Block LH EB-1013 1ea 4
Filament Clamp EB-1058 2ea 5
Filament Buss Bar RH EB-1022 1ea 6
Filament Buss Bar LH EB-1021 1ea 7
Mounting Bar EB-1015 1ea 8
Emitter Support Bracket EB-1016 1ea 9
U Bracket EB-1014 1ea 10
HV Shield EB-1017 2ea 11
HV Insulator EB-1083 2ea 12
Collar Insulator EB-1019 2ea 13
“L” Insulator EB-1018 1ea 14
Cross Insulator EB-1020 1ea 15
Filament 7 1/2 turn EB-1023 1ea 16
Screw, 6-32 x 1/4” 7ea 17
Screw, 6-32 x 3/8” 6ea 18
Screw, 6-32 x 1/2” 2ea 19

5.4
 Coil Assembly
The Coil (EB-2450-1) is in a self-contained stainless steel housing that is
hermetically sealed, with no user-serviceable parts.

Coil Connector Assembly

The Coil Connector Assembly (EB-2456) consists of (2) Ceramic Inserts
(EB-2452B), (4) Kapton Wire Assemblies (EB-2456-1)(standard length is 2’),
(1) Coil Connector Housing (EB-2452A ) and (2) #4-40 x 3/16” pan head
screws
Kapton Wire Assembly (EB-2456) Coil Connector Housing (EB-2452A)

Ceramic Insert (EB-2452B) Pan Head Screw, 4-40 x 3/16”

5.5
 Bearing Housing Sub Assembly
Mount (1) Bearing (EB-2432) onto Pivot Shaft (EB-2411). Next place the
bearing housing onto the pivot shaft and place the next Bearing (EB-2432) onto
the pivot shaft. Carefully mount the snap ring into the slot on the pivot shaft,
being careful not to scratch the sealing surface of the pivot shaft. Next,
mount the Spacer Ring (EB-2416) into the assembly. Mount the spacer ring
into the assembly.
Spacer Ring (EB-2416) Snap Ring (EB-2431) Bearing Housing (EB-2414)

Bearing (EB-2432) Bearing (EB-2432) Pivot Shaft (EB-2411)

Crucible Rotation Assembly

For this part of the assembly, you will need Apizon grease (type M) for the
Quad Ring (#4-214) to fully lubricate the quad ring. Install the quad ring into
the Crucible Base Plate (EB2-2404). Now you will need a gear, Bottom Drive
Spur Gear(EB-2420), or the Side Drive Gear (EB-2422). Mount the gear
facing down onto the bearing housing assembly; next, place the Quad Ring
Tool (EB-2433) onto the top of the pivot shaft. Note: this will help keep from
tearing the quad ring during assembly. Mount the crucible base with the quad
ring installed onto the quad ring tool, and gently push down while rocking it
slightly back and forth. Once in place, turn the assembly over and install (4)
#6-32 x 7/8” screws into the bearing housing and snug down.
Turn the assembly back over and remove the alignment cone. Install the
Water Baffle (EB-2415) using (2) # 6-32 x 1/4” flat head screws. Holding
bearing housing, rotate the water baffle to insure free movement.

5.6
 Rotation Assembly (EB-2400)
Flt. Hd.Screws#6-32 x 1/4” Gear (EB-2419) or (EB-2422)
Crucible Base Plate (EB2 -2412) Bearing Housing Assembly

Water Baffel (EB-2415) Quad Ring (#4-214) Mounting Screws #6-32 x 7/8”

Rotation Final Assembly

Rotation Assembly
(EB2-2400) Crucible

O Ring (#2-250) #6-32 x 1 3/4” (4) pkt.

O Ring (#2-123) Crucible Mounting Screws #8-32 x 1 3/4” (6) pkt.

5.7
 Base Plate Assembly
The Base Plate assembly consists of; (1) Base Plate (EB2-2404), (2) Magnet
Arms (EB2-2402), (2) Riser Block (EB2-2405), (4) O-Rings (#2-211), use (4)
#10-32 x 3/8” screws to mount the (2) Mounting Straps (EB2-2410), (1)
Magnet (EB-2411), (South facing the left side of source from front), and
(12) #10-32 x 1/2” screws.

Magnet (EB-2411)

Riser Block (EB2-2105)

Base Plate (EB2-2404)

Magnet Arm
(EB2-2402)

Mounting Strap (EB2-2410)

O Ring (#2-211)

Screws #10-32 x 1/2”

Mount the Crucible Rotation

(EB2-2400) to the base plate
assembly with (4) #10-32 x 1/2”
screws.
Note: the water baffle faces the
front of your source.

5.8
 Insure the (2) O Rings (2-111) are in place on top of the riser blocks. Mount the
Coil Housing (EB2-2404) onto the source base assembly. Next, mount the Field
Extensions (EB2–2409) (with the counter bore facing out), onto the side of the
coil housing with (4) 10-32 x 1/2” screws. Finish the assembly with (8)
10-32 x 1” screws.

Next, mount the (2) Pole Extensions (EB-2421)with (2) 10-32 x 3/8” screws
and install (2) O Rings (2-106) into the Coil Housing (EB2-2404)

5.9
 Now you can mount the Cover Plate (EB2-2408x) onto the assembly using
(6)10-32 x 1/2” screws. Place (2) O Rings (2-110) into the water line fittings
welded to the source base plate. Next mount the Coil Assembly (EB-2450-1)
into the coil housing with the Coil Clips (EB-2455) using (2) #10-32 x 1/4”
screws. Mount Rear shield (EB2-2417) with (2) 10-32 x 1/2”screws. Finally,
install the emitter assembly with (1) #6-32 x 3/8” screw. You can now leak
check your assembly.

Note: Mount the drive onto your source with (3) 10-32 x 3/8” screws before
installing into your system.

5.10
 EB-2 Source Assembly Parts List
Description Part # Qty. Reference Page
Base Plate EB2-2404 1 5.8
Mounting Strap EB2-2410 2 5.8
Riser Block EB-2405 2 5.8
Field Extension RH EB2-2409R 1 5.9
Field Extension LH EB2-2409L 1 5.9
Magnet Arm RH EB2-2403 1 5.8
Magnet Arm LH EB2-2402 1 5.8
Pole extension EB-2421 2 5.9
Crucible Rotation Assy. EB2-2400 1 5.7
Coil Plate Housing EB2-2406 1 5.9
Permanent Magnet EB-2411 1 5.8
Crucible Cover Plate EB2-2408x 1 5.10
Crucible EB2-2xxx 1 5.7
Rear Shield EB2-2417 1 5.10
Coil Clip EB-2455 2 5.10
Emitter Assy. EB-1087 1 5.1
Coil Connector EB-2456 1 5.5
Coil Assembly EB-2450-1 1 5.5
VCR Nut, Female EB-2304c 2 1.1
VCR Gland EB-2304b 2 1.1
O Rings Mtl.
Water Line 2-110 2 viton
Bottom Pivot Shaft 2-123 1 viton
Riser Block 2-111 4 viton
Crucible Cover Plate 2-106 2 viton
Crucible 2-250 1 viton
Screws Type Mtl.
6-32 x 3/8” socket head cap 1 sst
10-32 x 1/4” socket head cap 2 sst
10-32 x 3/8” socket head cap 4 sst
10-32 x 1/2” socket head cap 20 sst
10-32 x 1” socket head cap 8 sst

5.11
 6
Trouble Shooting
Power Problems:
Emission Current: must be turned higher than normal to evaporate !
Cause: Filament is warped badly or was installed backwards.

Correction: Remove emitter assembly and replace filament.

Emission Current: Goes to Maximum when voltage is turned on!

Cause: Metal flakes shorting emitter, or ceramics are coated with metal.

Correction: Ohm emitter assembly, remove metal flake, or replace

ceramics. Re Ohm assembly, (0) Ohm to ground.

No Emission Current!

Cause 1: Filament broken or leads loose.

Correction: Replace filament and tighten connections.

6.0
 No Voltage!

Cause: High ground resistance.

Correction: Check emitter, filament, or HV feedthru for shorts.

Beam Problems:
No beam visible in crucible as current is increased !(Note: Do not exceed
60 ma in this condition)

Cause 1: Magnet reversed.

Correction: Reassemble source with magnet’ s “S” end to the right side
from the rear of your source.

Beam centered to the front of crucible, without coil current !

Cause 1: Voltage below 10 kV

Correction: Adjust voltage to 10kV.

Cause 2: Magnet strong

Correction: Place a shunt on rear of source, across both arms. Note: This
will cause the beam to be defused ( fuzzy)

Beam Centered to the back of crucible, without coil current!

Cause 1: Voltage above 10kV.

Correction: Adjust voltage to 10kV.

Cause 2: Magnet weak.

Correction: Remove shunts. If still weak, regauss magnet.

6.1
Beam: Does not have the desired shape
Cause 1: Filament is warped or misaligned.

Correction: Replace filament.

Cause 2: Pole extensions are in or out too far.

Correction: Adjust pole extensions.

Cause 3: Voltage set below 10 kV, will cause beam to spread out .

Correction: Adjust voltage.

Arcing and Blue Fluorescence Occur in Chamber!

Cause: Pressure is too high. Vacuum leak or water leak will cause this
condition.

Correction: Check recently opened chamber seals, door, or feedthru

for clean surfaces. Check water fittings on source, clean and snug.
If necessary, leak check chamber.

Rotation Problems:
Loss of vacuum when crucible is rotated!
Cause: Quad ring is leaking.

Correction: Replace Quad Ring #4-214

Crucible is difficult to rotate!

Cause: Quad ring in need of lubrication.

Correction: Install new Quad Ring #4-214

6.2
 Repair Supplies
EB-2 Maintenance Kit
Part Number Description Qty.

EB-5200 O Ring Kit 1

EB-5270 Emitter Rebuild Kit 1

EB-2 O Ring Kit: #EB-5200 (Note: O Ring material: Viton)

#2-123 Bottom, Pivot Shaft 1
#2-106 Crucible Cover Plate 2
#2-110 Water Line 2
#2-111 Riser Block 4
#2-250 Crucible 1
#4-214 Quad Ring, Pivot Shaft 1

Emitter Rebuild Kit: #EB-5270

EB-1010 Anode Plate 1
EB-1011 Beam Former 1
EB-1017 HV Shield 2
EB-1087 HV Insulator 2
EB-1019 Collar Insulator 2
EB-1018 “L” Insulator 1
EB-1020 Cross Insulator 1
EB-1023 Filament, 7 1/2 turn 5
Screw 6-32 x 1/4” 7
Screw 6-32 x 3/8” 6
Screw 6-32 x 1/2” 2
Note: All screws: 300 series stainless steel, socket head cap screw

6.3