SPECIFICAT I O N S H E E T

Varian 810-MS and 820-MS

ICP MASS SPECTROMETERS

Design Overview
The Varian 810-MS and 820-MS systems are compact, floor-mounted inductively coupled plasma
mass spectrometers (ICP-MS) with full PC control of all instrument settings and compatible
accessories. They feature patented1 90 degree reflecting ion optics system for gigahertz sensitivity
(1000 Mc/s/mg/L) and low background and interferences. The Varian ICP-MS systems include a
sample introduction system, solid state 27 MHz RF generator, and patented2 Turner Interlaced Coils.
Full PC control of plasma positioning, triple stage vacuum system, all plasma gas flows, mass analyzer,
and Discrete Dynode Electron Multiplier (DDEM) detector is also included. The vacuum system is
fully contained within the instrument for the smallest instrument footprint. Unique DDEM detector
provides nine decades of dynamic range in an all-digital pulse design. Fully web-integrated
ICP-MS Expert software uses Varian’s worksheet concept for ease of use, rapid operator training,
and commonality with other Varian, Inc. spectroscopy products. The Varian 820-MS system also
features a unique Collision Reaction Interface (CRI) providing fast, flexible, interference-free analysis
using simple collision and reaction gases.

Instrument Hardware
Sample introduction - External Sample Introduction Assembly (ESIA) with Peltier-cooled spraychamber,
ESIA nebulizer, and peristaltic pump mounted outside the torch box to eliminate
temperature-induced drift. Features rapid start-up, easy access for maintenance
and cleaning, and rapid switchover to accessories.
• Low (400 µL/min) glass concentric nebulizer. Optional inert PFA nebulizer and
a range of low-flow, inert microconcentric nebulizers
• Peltier-cooled spraychamber with variable temperature control for enhanced
stability and reduced oxide ion interferences. PC-controlled temperature
from -15 °C to room temperature, insulated with inert polypropylene foam.
• Fully PC-controlled peristaltic pump, variable speed from 0–50 rpm,
three independently pressure adjustable channels for sample, drain, and
internal standards or diluent
• Standard one-piece, low flow, ball-and-socket connection torch.
Optional semi-demountable torch and inert PFA transfer tubes available
Gas control • One button automated optimization of all gas flows,
including CRI gases (820-MS only)
RF generator • 27.12 MHz solid-state, air-cooled, crystal locked RF generator in main
instrument housing, 600–1600 W in 10 W increments. Optimum power
settings defined and stored within each method for different sample types
• Automatic ignition and shutdown. User-customizable ignition sequence for
different accessories and plasma types
Plasma • Optimize plasma parameters according to specified performance targets
(sensitivity, interferences, etc.)
• Full PC control of horizontal, vertical and sampling depth (Z position) of
plasma for maximum sensitivity and minimum polyatomic interferences
• Spacious plasma compartment simplifies routine maintenance
Cool plasma • Patented Turner Interlaced Coils minimize polyatomic interferences without
the use of a mechanical torch shield
Varian 810-MS and 820-MS
Instrument Hardware continued
Collision Reaction Interface • Standard on 820-MS, optional upgrade for 810-MS
• Reduces interferences by injecting simple collision and reaction gases (hydrogen or helium) into the plasma as it
passes through the orifice of the cones
• Gas may be injected through the sampler cone, skimmer cone, or both
• All CRI gas flows controlled by mass flow controllers
• Rapid switchover between gas on and gas off, or between different collision and reaction gases
Plasma interface • Easy access and removal of sampler and skimmer cone from simple threaded mounts
• One set of C-series high performance Ni cones provided as standard (810-MS)
Platinum tipped C-series high performance cones optional. One set of CRI cones provided as standard (820-MS only)
• Orifice diameters: 1.1 mm sampler, 0.5 mm skimmer
• Water-cooled plasma interface for stability including individual and independent cooling of the cones for faster
warm-up, improved stability, and faster cool down
Ion optics • Patented1 ion mirror reflects analyte ion beam through 90 degrees while photons and neutrals pass to the vacuum
system. Ion mirror creates parabolic electrostatic field to focus the analyte ions with optimum efficiency at the
quadrupole entrance aperture. Results in gigahertz sensitivity (1000 Mc/s/mg/L)
• Features easy access to extraction lens 1 and 2 for cleaning without breaking the vacuum
• Auto-optimization of all ion optics settings, including ion mirror, based on selected optimization criteria such as
signal and interferences
• Quadrupole mass analyzer is off-axis using patented3 curved stainless steel entrance rods to ensure low background
by further eliminating excited neutrals before the quadrupole
Vacuum system • Pumps consist of two rotary (SD602 and SD302) and two V-301 turbomolecular pumps for efficient pumping and
to eliminate excessive pump wear
• Rotary pumps mounted on forward facing pull-out slides for easy inspection of oil levels and easy access and
changing of oil
• All vacuum components located in the main housing of the instrument to reduce noise in the laboratory and eliminate
the requirement for extra floor or bench space
• Turbomolecular pumps feature maintenance-free ceramic bearings. First turbopump is positioned immediately behind
the ion mirror and skimmer cone for maximum pumping efficiency and removal of unwanted neutrals and particles
• Pneumatic vacuum isolation gate between the first and second vacuum stages. Gate automatically closes in the event
of a power failure
Quadrupole • Precision-machined, stainless steel, round rods manufactured to micrometre tolerances and locked into ceramic
mounts for a near-perfect hyperbolic field. Stainless steel construction permits determination of Hg without high
memory. Patented3 curved entrance rods provide a double off-axis design and low background signals
• Easy access to mass analyzer and detector for cleaning or detector replacement. All voltages are fully interlocked and
under PC control
• Solid-state air-cooled power supply
• Built-in, on board multi-channel scaler provides up to 40 channels per mass
• Range of 3 to 256 amu with ‘zero blast’ protection. Resolution adjustable from 0.5 to 1.2 amu
• Mass calibration stability: 0.05 amu per day
• Quadrupole RF frequency: 3.0 MHz
• Scan speed: 2000 amu/s
• Quadrupole settling time: <400 µs
• Minimum dwell time: 200 µs
Detector • All-digital ETP AF250 Discrete Dynode Electron Multiplier (DDEM) as standard provides nine decades of linear dynamic
range in an all-pulse-counting detector. No complex, time-consuming analog-to-digital cross calibrations
• Measuring dynodes mounted off-axis for reduced background
Performance Sensitivity (810/820 -MS, hot plasma high sensitivity mode, Mc/s/mg/L)
The performance data 9Be >50
is typical unless 115In >1000
otherwise noted. 232Th >300
Precision (10 replicates, 20 minutes) <3%
Oxide ions CeO+/Ce+ <3%
Doubly charged ions Ba++/Ba+ <3%
Background at 5 amu <10
Sensitivity (810/820-MS, hot plasma normal sensitivity mode, Mc/s/mg/L)
9Be >5
115In >50
232Th >20
Precision (10 replicates, 20 minutes) <3%
Long term stability
(10 µg/L multi-element standard aspirated for 4 hours) <4%
Oxides CeO+/Ce+ <1% (<2% for CRI)
Doubly charged ions Ba++/Ba+ <3%
Background (at 5 amu) <5 c/s
Abundance sensitivity 10-6 low, 10-7 high on 23Na
Isotope ratio precision <0.1%
CRI interference reduction 1 µg/L As readback in 1% HCl 1 µg/L ± 0.1 µg/L
Instrument Hardware continued
Typical detection limits, 7Li <1 51V <0.2* 71Ga <0.2 111Cd <0.2 153Eu <0.2 195Pt <0.3 290Bi <0.3
hot plasma (ng/L) 9Be
* CRI mode <0.5* 52Cr <0.6* 75As <0.6* 115In <0.1 157Gd <0.3 197Au <0.4
24Mg <0.5 55Mn <0.4* 78Se <2* 121Sb <0.1 159Tb <0.09 202Hg <1
27Al <0.8* 56Fe <2* 89Y <0.2 130Rh <0.1 163Dy <0.2 205Tl <1
40Ca <3* 59Co <0.2 90Zr <0.4 138Ba <0.2 165Ho <0.06 208-206Pb <0.3
45Sc <0.8 60Ni <2 98Mo <0.4 139La <0.4 175Lu <0.05 232Th <0.05
47Ti <3 65Cu <2 101Ru <0.4 140Ce <0.5 180Pd <0.4 238U <0.06

Instrument Software
Easy-to-use, web-integrated design. Features wizards that guide users through method and sequence development,
and method templates for rapid development of commonly used methods.
Features include: • Quantitate analytes on any possible combination of isotopes
• Fully editable interference correction equations
• A range of internal standard assignment options
• Multiple condition sets allowing different element suites to be determined under different conditions with a single
sample measurement, including CRI modes, hot plasma, cool plasma, etc.
• Calibration routines for multi-element external calibration, method of standard additions, and isotope ratios
• Automatic method optimization
• Automatic monitoring and adjustment of nominated elements/isotopes in real time for optimal rinse out
• High speed Time Resolved Signal (TRS) capability for interfacing to chromatographic (such as HPLC) and other
separation techniques
• Seamless LC-ICP-MS integration using Varian Galaxie™ chromatographic software
• Fully editable sample label list of up to 1000 samples for analysis per worksheet
• Autosampler rack and tube positions can be edited for true random access sampling
• Calibrations can be programmed at a user specified rate either amongst the sample tubes or from centralized
calibration tubes (rate driven)
• Sequence options include full control of reporting actions at the end of the run, exporting of results at the end
of the run, emailing of results, calibration, recalibration and resloping error actions, and saving mass scans during
the analysis
• Fully automated instrument initialization (start-up) routine, including instrument stabilization time, plasma X/Y
position adjustment, mass calibration, and quadrupole resolution
• Simultaneous real-time graphical display of signal as full mass scan, segments of mass scan, and signal response vs
time for multiple isotopes or ratios
• Post-run retrospective data editing
• Wide variety of reporting and exporting options
• Comprehensive set of instrument diagnostics and performance tests
• Comprehensive help system

Accessories
Autosamplers • SPS3 high-throughput autosampler, with fast X, Z, theta arm movement
• Capacity for up to three sample racks and two standard racks
Racks may be exchanged during analysis
• Fully compatible with optional online diluter
• Compatible with a wide range of commercially available, autoclavable, laboratory racks
• Optional precision syringe auto-diluter for SPS3, performs automatic online over-range dilution and automatic
Diluter
off-line sample and calibration solution preparation using optional software
Automatic online dilution • Online dilution is selectable on a per-isotope basis
• Serial dilution of samples until user selected analytes are inrange
• Choose to dilute with blank or from separate diluent vessel. Dilute on internal standard error option and automatic
correction of internal standard factors to account for dilution
Intelligent off-line solution • Optional RoboPrep™ software utility allows off-line dilution and preparation of samples and standards
preparation
• Provides customization of rack configurations to allow dilution of samples directly in digester racks
• Includes capabilities for preparation of multi-element calibration standards, sample spiking, and standard additions
Varian 810-MS and 820-MS
Accessories continued
Productivity Pack • Optional four-port Switching Valve System (SVS) immediately rinses the sample introduction system while the next
sample is being introduced to the instrument
• Reduces carryover, increases sample throughput, and decreases cost per analysis
Integrated speciation • Seamless LC-ICP-MS integration using Varian Galaxie™ chromatographic software
(LC-ICP-MS)
• Real-time display of time resolved chromatographic signals
• Full control of LC injections, pumps, autosamplers and 810/820-MS data acquisition
Clean Room Pack • Includes o-ring free, inert sample introduction system, platinum-tipped cones, and additional exhaust outlet panel
• Removes all exhaust air from the instrument, maintaining the integrity of the highly sensitive clean room
environment
• Allows analysis of aggressive samples and acids, such as hydrofluoric acid
Vapor generation • Modular continuous flow vapor generator for the determination of Hg, As, Se, Sb, Te, Bi, and Sn at ng/L and pg/L levels
• Compatible with SPS3 autosampler
AGM-1 • Adds oxygen to the plasma to eliminate carbon deposition on the injector tube and sampler cone when analyzing
organic solvents
Microconcentric nebulizer • Compatible with a range of microconcentric nebulizers for sample volume limited applications
Laser ablation • Fully compatible with a range of laser ablation accessories

ICP-MS Installation Requirements

For details of Varian ICP-MS installation requirements refer to the pre-installation manual,
Varian publication number 8510206700.

Varian Customer Support Policies

Warranty 12 months, though this may vary by location. One-year warranty on DDEM detector with pro-rata warranty
on replacements.
Hardware support period Five (5) years from date of last unit manufacture. After this time, parts and supplies will be provided if available.
Software support Software upgrades to fix nonconformances or safety issues will be issued free of charge.
Software upgrades for additional functionality will require a fee. Availability of TeleDiagnosticTM remote diagnostic
support may vary according to location.
Online user group All Varian ICP-MS users can join our free email user group, MassNet, which has access to Varian ICP-MS users and
Varian support staff worldwide.

Further Details
For further details on the following:
• PC configurations
• GLP, 21 CFR Part 11, and Validation functionality
• Accessory specifications and application information
• Part numbers and other ordering information
• Varian ICP-MS spectrometers are manufactured according to a quality system certified to ISO-9001
Please consult your Varian, Inc. office or supplier, or our Web site at www.varianinc.com.
1. US Patent 6,614,021 B1
2. US Patent 5,194,731
3. US Patent 6,762,407 B2
Other patents pending.

Varian, Inc.
www.varianinc.com
North America: 800.926.3000, 925.939.2400
Europe The Netherlands: 31.118.67.1000
Asia Pacific Australia: 613.9560.7133
Latin America Brazil: 11.3845.0444
Other sales offices and dealers throughout the world—
check our Web site.

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SI-0184 10/05 Printed in Australia