Mems & Nems Lab Manual
Mems & Nems Lab Manual
DEPARTMENTOFELECTRICAL&ELECTRONICSENGINEERING
List of Laboratory experiments:
INDEX
Marks
Page
S.NO DATE NAMEOFEXPERIMENT INITIAL
No
SOFTWARE REQUIRED:
2. MATALAB
THEORY:
A simplified electrical circuit diagram of a piezoresistive sensor with current excitation is shown
in Figure. The resistance of a conductor is proportional to its length so stretching increases the
resistance. As the conductor is stretched, its cross-sectional area is reduced, which also increases
the resistance. The inherent resistivity of some materials increases when it is stressed.
As mentioned above, there are usually four piezo resistors in the sensing diaphragm in order
to construct a full Wheatstone bridge circuit. The piezo resistors are grouped in pairs: the
variation tendency of resistance is same within the pair and is inverse between pairs. Thus, the
settled directions of the piezo resistors should be carefully determined, concerning the stress
distribution of diaphragm. Taking the flat square diaphragm for instance, the common positions
for piezo resistors are shown in Figure:1Firstly, all piezo resistors can be located at the edge of
diaphragm, and two work as the transverse unit to sense the stress along their length, and the
other two work as the longitudinal unit to sense the stress along their width. The transverse and
longitudinal units will be stimulated by the stress with different positive/negative states, and they
will produce a resistance variation with a different tendency. Then, the scheme in Figure 1
(b)sets two piezo resistors at the center while setting the other two at the edge of the sensing
diaphragm. The edge ones sense the tensile stress, and the two central ones sense the
compressive resistance, and the resistance variation is also in accord with the requirement from
the Wheatstone bridge. Generally, the former configuration is more popular in the development
of pressure sensors, but the latter is also favorable in some special-shaped diaphragms. As for the
location of edge piezo resistors, some researchers have claimed that it is helpful in improving
sensitivity to extend them beyond the diaphragm to the chip frame. For most piezoresistive
pressure sensors, the sensing diaphragm works under the bottom-fixed constraint shown
in Figure 2a. Different from the simplified edge-clamped constraint (Figure 2b), the mechanical
stress will distribute beyond the diaphragm’s edge, and it will generate a high-stress region
within a certain area in the chip frame (Figure 2c). However, it is not a simple task to calculate
the actual area for this region, making this method unpopular in the development of pressure
sensors.
Figure 1. The common positions for piezo resistors in a square diaphragm: (a) all at the edge and (b) two at the edge
and the other two at the center.
Figure 2. The working state of a diaphragm: (a) bottom fixed, (b) simplified edge clamped, and (c) the stress under
different working states.
Instructions to run the simulator
Simulator contains 6 steps
Introduction
Configuration
Connection
Characterization
Calibration
Fault Detection
Procedure to run the simulator's 6 steps:
1. Introduction
Select the application.
Read the theory and start the test.
Attempt all the questions from the test and submit the test.
Click Next level.
2. Configuration
Select P/I converter type and do necessary calculation to configure it.
After Successful configuration click Next Level.
3. Connection
According to selected P/I converter type, Select the require components from symbol library to
do the connections.
Click check connection button.
After successful connection click Next Level button.
4. Characterization
Take multiple readings to check output of P/I converter.
Plot the graph for the same readings.
Click Next Level
5. Calibration
Calculate zero error, span error, linearity and Average Percentage Accuracy.
Calibrate the P/I converter.
Remove zero error
Remove span error.
Try to get the linearity.
Click Next Level
6. Fault Detection
SIMULATION DIAGRAM:
RESULT:
EXPNO:2 SIMULATION OF A TYPICAL PIEZOELECTRIC ACTUATOR
AIM:
To simulate atypical piezoelectric actuator by using MATLAB simulink
SOFTWARE REQUIRED:
2. MATALAB
THEORY
Objective:
Prerequisite
See how well the heart is working. In an emergency situation, the pulse rate can help to
check whether the heart is pumping enough blood or not.
Find the cause of symptoms, such as an irregular or rapid heartbeat (palpitations),
dizziness, fainting, chest pain, or shortness of breath.
Check for blood flow after an injury or when a blood vessel is blocked.
Check on medicines or diseases that cause a slow heart rate. The doctors may ask to
check the pulse every day for heart patients or persons undergoing medical treatments
with certain medicines that can slower the heart rate.
Check general health and fitness level. Checking the pulse rate at rest, during exercise, or
immediately after vigorous exercise can give important information about overall fitness
level.
Measurement:
There are two approaches to developing a probe for pulse measurement. The first is
transmittance, the second is reflectance. The difference is in the way the elements within the
probe are positioned. A transmittance probe has a LED on one side and a photodiode (light
detector) on the other. The tissue to be imaged (commonly a finger or an ear) is inserted between
the two.
A reflectance probe has the LED and the photodiode on the same side. It must be placed over a
point with underlying bone. Light is emitted by the LED, passes through tissue and blood
vessels, reflects off bone, passes through the tissues again, and is then detected. A significant
amount of light will reflect off the skin in the reflectance setup, and, unlike in the transmittance
setup, this light will be detected. Thus, reflectance probes have a high offset and a lower signal-
to-noise ratio than the transmittance probes. Reflectance setups also require a significantly
greater amount of light. Thus, either more LEDs or more photodiodes need to be used.
Transmittance probes are commonly placed on a finger or ear and are very convenient to attach
and remove. Reflectance probes can be placed on the forehead or the sternum. Their advantage is
that, regardless of the patient's size (infants to very large adults); the attachment site is always
similar. Both, the transmittance and the reflectance probes are used clinically, though the
transmittance probe is more common due to the simplicity of signal analysis and convenience of
attachment.
Photoplethysmography:
The device used to measure the amount of blood in part of the body using light is commonly
known as photo-plethysmograph. It measures the variation in amount of light passing through
your finger caused by the pulsatile nature of blood flow. A light source is placed on one side of
the finger, and a light sensitive transducer like LDR (Cadmium Sulfide (CdS) cell) or a photo
diode or a phototransistor, on the other side. By monitoring variations in the output of the
transducer an indication of blood flow in the finger is obtained. A simple block diagram of one
such system is shown here.
A typical Pulse Oximeter uses the basic principle of a pair of small LEDs operating at two
different wavelengths; one red LED with a wavelength of 660nm, the other, an infrared LED
with a wavelength of 910nm. The LEDs are designed to be placed opposite a photodiode that
detects the light from the LEDs. As the amount of blood in the capillaries depends on the actual
blood pressure, which varies around the heart the heart pulse cycle, the heart rate can also be
measured. The two wavelengths are chosen for the reason that deoxygenated hemoglobin has a
higher absorption at around 660nm and at 910m oxygenated hemoglobin has the higher
absorption. The oxygenated hemoglobin allows red light to transmit through and absorbs more
infrared light while the deoxygenated hemoglobin allows infrared to transmit through and
absorbs more red light. Usually, a finger is placed between the source (LEDs) and the receiver
(photodiode) acting as a translucent site with good blood flow. The photodiode produces current
linearly proportional to the intensity of light striking it. A photodiode cannot distinguish between
red and infrared light, but to accommodate this, the microprocessor system alternately turns each
LED on and off. The pulse oximeter repeatedly samples the photodiode output while the red
LED is on, while the infrared LED is on and while both are off. By sampling with both LED's
off, the pulse oximeter is able to subtract any ambient light that is present.
Design Considerations:
1. Motion Artifacts:
The motion artifact is a major problem that is observed due to the patient's muscle movement.
This induces false pulses that are similar to actual pulses. The false pulses when processed can
produce incorrect results. This problem is particularly significant in patients that do not remain
still during monitoring, and mainly in active infants. To reduce these artifacts digital signal
processing is performed and the pulse average values over several seconds are taken, before they
are displayed.
2. Optical interference:
All pulse monitors are affected by bright external light sources. In order to achieve accurate
measurements, potential sources of optical interference must be controlled. Optical interference
occurs when bright light from an external source (ambient light) reaches the photodiode directly
- without passing through the finger. Proper care is to be taken to avoid this.
3. Effect of temperature:
Temperature affects the peak wavelength, spectral line-width, and output power of LEDs. In an
LED based white light source, this can result in change in the color coordinates, color
temperature, color rendering index, luminous efficiency. Efficiency of the source will change as
the season (hot summer, cold winter) or even time of the day changes (warm day cold night). It is
experimentally proved that the effect of shifts in wavelength of the LEDs on pulse monitor
accuracy is negligible as the temperature increases from 0°C to 50°C.
Advantages:
Fast operation
Easy to use
Accurate readings
Non-invasive method of measurement
Reliable
Limitations:
This instrument is used to measure number of pulses per minute. It cannot check for amount of
blood flow i.e. sufficient or insufficient. Also, it cannot give the account of hemoglobin present
in blood.
Level 1: Calibration of the probe
1. Select the patient age by using drop down menu. The reading will be indicated on the
display.
2. Click on 'Show range in this age group'. Compare the display reading with this range.
3. Find out the patient status (Healthy/ Unhealthy)
4. Repeat steps 2and 3 for various age groups.
5. Now level 3 tab will be activated. Click on this tab to enter in level 3.
Aim: To study effect of Stray light and effect of misalignment on Biosensor Performance
AIM:
To simulate atypical piezoelectric actuator by using MATLAB simulink
SOFTWARE REQUIRED:
2. MATALAB
THEORY:
1. Introduction
Micro DC motor has the advantages of small volume, high efficiency, high torque, convenient
control and low cost. It has been widely used in the fields of consumption, office, computer,
home appliance, medical treatment and industrial control. Although China's micro-motor
production started late, the basic micro-motor manufacturing technology has been mastered, and
there are more than a thousand micro-motor production enterprises in Zhejiang, Fujian,
Guangdong and other coastal areas. In order to regulate the quality of micro-motor products, the
National Micro-Motor Standardization Technical Committee has revised a series of relevant
national standards for the quality of micro-motor. Likewise, in order to ensure the quality of
manufactured products, enterprises have to conduct100% testing of the products in the
production line. However, due to the lack of effective automated detection methods for testing,
the current micro-motor product testing is through artificial methods.
The manual detection method cannot be guaranteed because of the experience, emotion
and state of the testing operator. So, the effectiveness of the testing cannot be guaranteed.
Therefore, it is necessary to find an on-line automatic detection method of micro-DC motor for
the assurance of product quality. There are lots of research in Motor health diagnosis and fault
detection at home and abroad, but the research mainly focuses on large motors, AC induction
motor and brushless DC motor. The literature of the fault detection and diagnosis of Micro-DC
motor is less common. In order to detect the quality of micro-DC motor, paper uses two motors
with the same type, to do the same motor, a generator composed of electric power drag system,
given a different drive voltage conditions, measuring speed, power voltage, armature current
parameters, to determine the five indicators reflect the motor consistency model for motor
performance testing. According to the time-frequency characteristics of the armature current, a
fault diagnosis model of micro-DC motor based on fault multi-feature quantity is proposed,
which is used to diagnose the fault of micro-DC motor. The above method can realize the
diagnosis of typical faults under certain conditions, but because the model used for the diagnosis
cannot fully reflect the electromechanical characteristics of the micro-DC motor, the diagnosis
cannot be of universal significance. With the modern signal processing technology widely used
in fault diagnosis, it should also be fully applied to micro-DC motor fault diagnosis, but because
the micro-DC motor mathematical model cannot be resolved, most scholars can only numerical
methods and computer simulation methods, such as the establishment of micro-DC motor model
and its parameters are estimated, the use of model parameters and micro-DC motor
electromechanical characteristics of the corresponding relationship between the micro-DC motor
characteristics (armature inductance, coil resistance, induced electromotive force, mechanical
rotation Inertia and friction coefficient, etc.),
According to the characteristics of the characteristics of the trend can be identified on the
fault and then its fault diagnosis and diagnosis, but the motor modeling of the literature mostly
for large motors or brushless motors, micro-DC motor modeling research rarely reported. The
modeling of DC motor is studied based on Simulink, but the simulation only simulates the no-
load situation and lacks versatility. Here, the state equation of micro-DC motor is established
according to the electrical and mechanical energy transfer relation. By introducing the
electromagnetic torque and mechanical torque equation, the simulation problem of DC micro-
motor under load condition is solved, and the simulation model based on MATLAB/ Simulink is
established. Through this model can be a good motor and a variety of
fault motor simulation analysis.
2. Dynamic model of micro-DC motor
Fig.1 for the micro-DC motor electrical, mechanical model, In Fig.1, u 、r 、i、m L 、e
respectively represents drive voltage, armature coil resistance, armature current, coil inductance
and back electromotive force, represent the magnetic flux generated by the armature current、0
T 、1 T respectively represent electromagnetic torque, no-load torque and load torque; J
、respectively represent the moment of inertia and angular velocity.
Figure 1. Electricity, machine characteristics model of micro-DC motor
According to the principle of motor mechanics, the electromagnetic torque generated by the
magnetic flux should be equal to the mechanical torque of the motor drive shaft. Therefore, the
electrical and mechanical characteristics of Fig. 1 can be expressed by the dynamic equation [9],
Simulation model:
Result:
EXP NO: 5 SIMULATION OF TYPICAL PIEZOELECTRIC ACTUATOR
AIM:
THEORY:
Hybrid actuator consisting of a DC motor plus lead screw in series with a piezoelectric stack.
The DC motor and lead screw combination supports large displacements (tens of millimeters),
but is dynamically slow when tracking the reference demand x_ref. Conversely the piezoelectric
stack only supports a maximum displacement of +-0.1mm, but has a very fast dynamic response.
By combining the two actuator technologies, a large stroke actuator with precision control
Results. An example application is antenna control when tracking a satellite - large amplitude
motion with time constants measured in a few seconds is required to move between satellites,
whereas fine control is required to track a given non-geostationary satellite.
PROCEDURE:
3. And Open the libraries that contain the blocks you will need. These usually will include
the sources, sinks, math and continuous function block and possibly other.
4. Drag the needed blocks from the library folders to that new untitled Simulink window.
You must give it a name using the Save As menu command under the File menu heading.
5. Arrange these blocks in orderly way corresponding by Matlab Model Shown in Block
diagram.
BLOCK DIAGRAM:
OUTPUT:
AIM:
THEORY:
Micromotors are very small particles (measured in microns) that can move themselves. The term is
often used interchangeably with "nanomotor" despite the implicit size difference. These
micromotors actually propel themselves in a specific direction autonomously when placed in a
chemical solution. There are many different micromotor types operating under a host of
mechanisms. Easily the most important examples are biological motors such as bacteria and any
other self-propelled cells. Synthetically, researchers have exploited oxidation-reduction reactions
to produce chemical gradients, local fluid flows, or streams of bubbles that then propel these micro
motors through chemical media. Different stimuli, both external (light, magnetism and internal (fuel
concentration, material composition, particle asymmetry) can be used to control the behavior of
these micro motors.
PROCEDURE:
3. And Open the libraries that contain the blocks you will need. These usually will include
the sources, sinks, math and continuous function block and possibly other.
4. Drag the needed blocks from the library folders to that new untitled Simulink window. You
must give it a name using the Save As menu command under the File menu heading. The
5. Arrange these blocks in orderly way corresponding by Matlab Model Shown in Block diagram.
BLOCK DIAGRAM:
OUTPUT:
MOTOR CURRENT
MOTOR SPEED (rpm)
RESULT:
EXP NO: 7 SIMULATION OF FETAL HEART BEAT SIGNAL
AIM:
THEORY:
The fetus heart beat signal is faster than that of its mother, with rates ranging from 120 to 160
beats per minute. The amplitude of the fetal electrocardiogram is also much weaker than that
of the maternal cardiogram. The fetal heart beat signal eliminates the maternal heart beat
signal from the fetal electrocardiogram signal. The canceller needs a reference signal
generated from a maternal electrocardiogram to perform the task. The measured fetal
electrocardiogram signal from the abdomen is usually dominated from the chest cavity and
converges reasonably after few seconds.
PROCEDURE:
3. And Open the libraries that contain the blocks you will need. These usually will
include the sources, sinks, math and continuous function block and possibly other.
4. Drag the needed blocks from the library folders to that new untitled Simulink window.
You must give it a name using the Save As menu command under the File menu
5. Arrange these blocks in orderly way corresponding by Mat lab Model Shown in Block
diagram.
PROGRAM:
x1 = 3.5*ecg(2700).';
y1 = sgolayfilt(repmat(x1,69,1),0,21);
Hmhb = dsp.SignalSource(y1,'SamplesPerFrame',100,...
'SignalEndAction','Cyclic repetition');
x2 = 0.25*ecg(1725).';
y2 = sgolayfilt(repmat(x2,108,1),0,17);
Hfhb = dsp.SignalSource(y2,'SamplesPerFrame',100,...
'SignalEndAction','Cyclic repetition');
mnoise = 0.02*randn(size(y1));
Hmn = dsp.SignalSource(mnoise,'SamplesPerFrame',100);
Hts = dsp.TimeScope('SampleRate',4000,'YLimits',[-
4,4],'TimeSpan',2.5);
for k = 1:length(y1)/Hmhb.SamplesPerFrame
x = step(Hmhb) + step(Hmn);
step(Hts,x);
end
Wopt = [0 1.0 -0.5 -0.8 1.0 -0.1 0.2 -0.3 0.6 0.1];
Hd = dsp.FIRFilter('Numerator',Wopt);
fnoise = 0.02*randn(size(y2));
Hfn = dsp.SignalSource(fnoise,'SamplesPerFrame',100);
release(Hts);
for k = 1:length(y2)/Hfhb.SamplesPerFrame
d = step(Hd,step(Hmhb)) + step(Hfhb) + step(Hfn);
step(Hts,d);
end
Hlms = dsp.LMSFilter('Length',15,'StepSize',0.00007);
release(Hts); release(Hmn); release(Hfn); reset(Hd);
Hts.YLimits = [-0.5,0.5];
for k = 1:length(y2)/Hfhb.SamplesPerFrame
mhb = step(Hmhb);
d = step(Hd,mhb) + step(Hfhb) + step(Hfn);
x = mhb + step(Hmn);
[~,e] = step(Hlms,x,d);
step(Hts,e);
end
OUTPUT:
RESULT: