Piezoelectric Sensors

Content

 Introduction
 Why do we use Piezo Sensors
 Classifications
 Manufacturing Process of Piezoelectric Sensors
 Piezoceramic Element Parameters
 Creation of Piezoelectric Materials
 Operational Limits of Piezoelectric Materials
 Actual Operation of Piezoelectric Materials
 Issues with Piezoelectric Materials
 Numerical
 Few Piezoelectric Sensors and Actuators Applications
 Introduction
Piezoelectricity is the ability of some materials to generate an electric charge in response to
applied mechanical stress. Discovered by French Physicists Pierre and Jacques Curie
in 1880.
The piezoelectric effect is revesible:
 direct piezoelectric effect: charge separation due to stress
 Inverse piezoelectric effect: occurens of stress and strain when electric field is
applied A simple molecular model

Applied external stress:

Without any external stress: Poles inside material are
-Internal structure is
Centers of charges coincide mutually cancelled
deformed separation of
charges are reciprocally cancelled Charge occurs on surface
charge centers dipols are
electrical neutral unit cell polarization of material
generated
 Introduction
Direct Effect of Piezoelectricity
 a mechanical stress on a material produces an electrical polarization
Inverse Effect of Piezoelectricity
 an applied electric field in a material produces dimensional changes and stresses within
a material.
In general, direct piezoelectricity and inverse piezoelectricity are both referred to as
piezoelectric effects. The first practical application for piezoelectric devices was sonar during
the World War I (directed against German submarines).
Origin of Phenomena of Piezoelectric Effect

The microscopic origin of piezoelectricity is the

displacement of ionic charges within a crystal. Asymmetric lattice structures will
Symmetric (centrosymmetric) lattice structure create an electric potential
does not produce piezoelectricity when deformed. when deformed
 Introduction

The Direct Effect The Inverse Piezoelectric Effect

 Introduction
when the crystal is mechanically strained, or
when the crystal is deformed by the
application of an external stress, electric
charges appear on certain of the crystal
surfaces; and when the direction of the strain
reverses, the polarity of the electric charge is
reversed. This is called the direct
piezoelectric effect, and the crystals that
exhibit it are classed as piezoelectric
crystals.

Inversely, when a piezoelectric crystal is placed in

an electric field, or when charges are applied by
external means to its faces, the crystal exhibits
strain, i.e. the dimensions of the crystal change.
When the direction of the applied electric field
is reversed, the direction of the resulting strain is
reversed. This is called the Inverse piezoelectric
effect.
 Introduction
The direction in which tension or compression
develops polarization parallel to the strain is
called the piezoelectric axis. In quartz, this axis is
knows as the "X-axis", and in poled ceramic
materials such as PZT the piezoelectric axis is
referred to as the "Z-axis". From different
combinations of the direction of the applied
field and orientation of the crystal it is possible
to produce various stresses and strains in the
 Si is not Piezoeletric crystal. For example, an electric field applied
- Cubic, has a centre of symmetry perpendicular to the piezoelectric axis will
- Covalent bond (Not ionic) produce elongation along the axis. If, however,
 Crystals with centre of symmetry does the electric field is applied parallel to the
not have piezoelectric effect piezoelectric axis, a shear motion is induced.
 Necessary Conditions
- Ionic or partly ionic bonds
- Lack a centre of symmetry
 Strain shifts the relative positions of the
positive and negative charges, giving rise
to a net electric dipole.
 Inversely, electric field starin.
 Introduction
Above a critical temperature, the Curie point, each polycrystal materials exhibits a simple cubic
symmetry with no dipole moment.
 At temperatures below the Curie point, however, each polycrystal has tetragonal or
rhombohedral symmetry and a dipole moment
Adjoining dipoles form regions of local alignment called domains.
The alignment gives a net dipole moment to the domain, and thus a net polarization
The direction of polarization among neighboring domains is random, however, so the ceramic
element has no overall polarization.
 The direction of polarization (3 axis) is established during the poling process by a strong
electrical field applied between two electrodes.
 For actuator applications the piezo properties along the poling axis are most essential (largest
deflection).
 They vary with temperature, pressure, electric field, form factor, mechanical and electrical
boundary conditions etc.
 Introduction
Piezoelectric effects are strongly dependent on the crystal
orientation w.r.t. the strain/electric field.
In most cases, one particular orientation exhibits the strongest
piezoelectric effect.
The direction of positive polarization is customarily parallel
with the z axis (i.e. the Poling axis is parallel to the z-axis)
The standard piezoelectric notation used is such that the x, y
and z axes correspond to subscripts 1, 2, and 3, respectively.
Therefore, if the electric field is applied parallel with the
z-axis it is applied in ‘direction 3’.
The resulting strain generated due to an electric field in
direction 3, is parallel with the x-axis (direction 1).
Inversely, if a strain is applied in direction 1, the
generated electric field will occur parallel to direction 3.

Out of the 32 crystal classes, 21 are non-centrosymmetric

(not having a centre of symmetry), and of these, 20 crystal
classes exhibit piezoelectric effect. Out of these 20 crystal
classes, 10 crystal classes contain a unique polar axis in the
unstrained condition and these are termed as polar crystal
classes.
The word is derived from the Greek word piezien, which means to squeeze or press.
 Introduction
In addition to piezoelectric charges resulting from stress, crystals from such classes can develop
an electric charge when these are uniformly heated owing to change in magnitude of the dipole
with temperature. This dipole effect is called pyro-electricity and is accompanied by a
piezoelectric effect not present in the other piezoelectric classes.

Some natural occurring piezoelectric crystals that are widely used are Quartz, Rochelle Salt and
Tourmaline. Quartz crystals are used in the control of the frequency of oscillators and in the
production of very selective filters. Rochelle salt (Potassium sodium tartrate) is used in most of
low-frequency transducer applications and Tourmaline is used for measuring hydrostatic
pressures. Ammonium Dihydrogen Phosphate (ADP) is another piezoelectric material which is
widely used as a transducing element of underwater transducers and hydrophones.
Barium Titanate (BaTiO3) is one of the piezoelectric ceramic which is widely used. The Lead
Zirconate Titanate (PZT) is another piezoelectric ceramic which offers much higher operating
temperature, stronger piezoelectric effects and a much larger variety of characteristics.
Polyvinylidene Fluoride (PVDF) is an expensive piezoceramic which is non-reactive and pure
thermoplastic fluoropolymer.
 Introduction
Some piezoelectric materials
Naturally occuring:
-Quarz, Cane sugar, Collagen, Topaz,
DNA, Rochelle salt, Wood

Man-made crystals
-Gallium orthophosphate (GaPO4), a
quartz analogic crystal, Langasite
(La3Ga5SiO14), a quartz analogic crystal

Man-made ceramics
Barium titanate(BaTiO3)-Barium titanate
was the first petzoelectric ceramic
discovered, Lead zirconate titanate
(Pb[ZrxTi1−x]O3 0<x<1)—more
commonly known as, PZT, lead zirconate
titanate is the most common piezoelectric ceramic
PVDF (Poly vinylidene fluoride) in use today, Lithium niobate (LiNbO3)
PTF (Polymer thick film)

Thin Film : ZnO, AlO

 Introduction
Some piezoelectric materials
 Introduction
Piezoelectric materials possess the important property of linear coupling between mechanical
and electrical fields, which renders them useful as transducers, actuators, sensors and filters etc.
in many areas of science and technology such as electronics, mechanical engineering,
navigation, piezoelectric power supplies, medical ultrasonic imaging applications and other
modern industrial fields.
Thick-film piezoelectric materials have been explored for use as on-chip acoustic transducers,
pumps, accelerometers and microphones and mainly as actuators and sensors in the aerospace
and marine industries.
Piezoelectric materials act as very important functional components in sonar projectors, fluid
monitors, pulse generators and surface acoustic wave devices.
 Introduction
Applications

Sensor
-Microphones, Pick-ups
-Pressure sensor
-Force sensor
-Strain gauge
Actuators
-Loudspeaker
-Piezoelectric motors
-Nanopositioning in AFM,
STM
-Acuosto-optic modulators
-Valves
High voltage and powersource
-Cigarette lighter
-Energy harvesting
-AC voltage multiplier
 Introduction
Applications
Piezo speaker (PZT) Piezoeletric energy scavenging in shoe (PVDF)

Piezoelectric rotary motor

Introduction
 Why do we use Piezo Sensors

Small size
Light weight
Wide dynamic range
Wide temperature range
Broad frequency range
Ultra low noise
Simple signal conditioning
Cost effective test implementation

The IEPE platform is a two-wire

technology where Pin A is
positive, and Pin B is negative.
The power and signal for the
accelerometer or Piezo velocity Piezoelectric materials can be divided into polar
sensor is found on the positive wire (which possess a net dipole moment) and non
(Pin A), and the circuit common is polar piezoelectric materials (whose dipolar
located on the negative wire (Pin
moments summed in different directions give a
B).
null total moment).
 Creation of Piezoelectric Materials
In order to create a ‘net’ piezoelectric effect, the material must be:
(a) a pure crystal (difficult to realize in most cases)
(b) the crystal domains must be brought into alignment

Poling: is a method aligning the crystal domains of piezoelectric materials.

During Poling, the material is exposed to a very strong electric field, and is simultaneously baked
at an elevated temperature, which causes the domains to become aligned in the desired
orientation. This alignment (also known as polarization) is sensitive, and a material can become
depolarized if it is subjected to extreme mechanical stress, electric fields or temperatures.
Operational Limits of Piezoelectric Materials
During normal operation, a piezoelectric material is either strained (to create an electric
potential) or is subjected to an electric potential (to create a strain).
However, care must be taken to operate the material within the parameters specified by the
manufacturer.
Electrical depolarization can occur if a piezoelectric material is subjected to extreme electric
fields (or voltages) which will cause it to lose (or significantly degrade) its piezoelectric effects.
Mechanical depolarization can occur if a material is excessively strained to the point where the
crystal domains are significantly disturbed.
Thermal depolarization can occur if a material subjected to temperatures beyond the ‘Curie
point’ of the material. A safe operational temperature is about half the Curie point temp.
 Actual Operation of Piezoelectric Materials

Consider operation with the ‘direct piezoelectric effect’. If a material is strained, a charge will
build up on opposite faces of the crystal.
Piezoelectric crystal like a ‘capacitor’ that generates charge on the upper and lower surfaces
when you strain it, as shown in the diagram.
Piezoelectric ceramics tend to be very good insulators (i.e. poor conductors), so the charge will
tend to remain on the upper and lower surfaces.
Continuing on with our ‘capacitor analogy’…It is well known that there will be some finite
amount of electric leakage of charge from one surface to another. (i.e. even capacitors will
eventually loose their charge).
More importantly, if we try to do work with the developed potential (+V), buy connecting it
to a load, current will flow todo the work. Therefore, the accumulated charge will drain, and the
developed potential will drop.
 Issues with Piezoelectric Materials

Curie temperature
temperature above which the piezoelectric property will be lost.
Material purity
the piezoelectric constant is sensitive to the composition of the material and can be
damaged by defects.
Frequency response
most materials have sufficient leakage and cannot “hold” a DC force. The DC
response is therefore not superior but can be improved by materials
deposition/preparation conditions.
Bulk vs thin film
bulk materials are easy to form but can not integrate with MEMS or IC easily. Thin
film materials are not as thick and overall displacement is limited.
Manufacturing Process of Piezoelectric Sensors
 Classifications
Piezoelectric sensors can be divided into two large classes depending on their basic physical
effects.
1. Sensors in the first class use a straight-line piezoeffect. They are used for measuring linear
and vibrating accelerations, dynamic and quasistatic pressure and efforts, as well as
parameters of sound and ultrasonic fields, etc.
2. A second but no less extensive class of sensors concerns the so-called resonant
piezotransducers which use the return piezoeffect. They are resonant sensors from
piezoelectric resonators, and they can also produce straight-line piezoeffects. (These are
resonant piezoelectric transformer sensors.) In addition, other physical effects can be used,
e.g., tensosensitivity, acoustosensitivity, thermosensitivity, etc., allow utilization for
measurement of static and/or dynamic pressure and efforts, linear and vibrating
accelerations, concentration of gas substances, viscosity, inclination corners, etc.

The largest class of piezoceramic sensors can be classified as follows:

1. Sensors on applied materials:

– Monocrystal materials (quartz, niobium lithium, etc.)
– Polycrystalline materials (piezoceramic)
2. By fluctuations:
– On the linear size
– On the radial
– On curving
 Classifications
– On torsion (rotation?)
– On the shift (shear modes)
– On surface acoustic waves
– On a combined configuration
3. By the physical effects:
– Thermosensitivity device used for measuring or maintaining
– Tensosensitivity orientation and angular velocity
– Acoustosensitivity
– Gyrosensitivity
– Contact (using contact rigidity and the actual contact area, etc.)
– Domain dissipative, etc.
4. By destination:
– For measurement of dynamic pressure and efforts
– For measurement of linear accelerations
– For measurement of vibration parameters
– For measurement of static pressure and efforts
– For measurement of blow parameters
– For measurement of sound pressure
– For humidity measurement
– For viscosity measurement
– For hydroacoustics
– For temperature measurement
 Introduction
Mathematical modeling

Piezoelectricity is the combination of:

The materials electrical behavior:
And Hook’s law:
D: electric displacement, ε: permittivity, E: electric field strength, S: strain, s: compliance, T:
stress

The coupled strain-voltage equation:

Inverse piezoelectric effect piezoelectric
coefficient
direct piezoelectric effect

D = eo E + P Where, D: Electric displacement,

eo: permittivity of free space
E: electric field strength,
P: Polarization (Function of strain)

Electrostatic Energy Density : We = ½ D. E.

We is a function of strain since P is a function of strain,

dWe/de  Stress  Actuation force

 Introduction

Piezoelectric transducers

Piezoelectric transducers contain crystals or structures which electrosize under the

influence of mechanical pressure (a “straight-line piezoeffect”) and deformed structures in
an electric field called “return piezoeffect.”.
Piezoelectric transducers are used for measuring mechanical parameters (effort, pressure,
acceleration, weight, angular speed, moments, deformations, etc.), thermal sizes (temperature,
expense, vacuum, electric parameters, etc.) and for structure control, gas concentration,
humidity, and micro weights.
 Introduction
The direct effect of piezoelectricity can be described by the general equation:

The direct effect of piezoelectricity can be simplified down to the following equation, in the
absence of an external electric field (i.e. E=0).

The inverse effect of piezoelectricity can be described by the general equation:

 Introduction
The inverse effect of piezoelectricity can be simplified to the following expression, if there is
no additional mechanical stress present (i.e. T=0). Where strain is related the electric field by:

The units of the piezoelectric constant, dij, are the units of electric displacement over the unit
of the stress. Therefore:

Therefore the piezoelectric constant is a good way to measure the intensity of the piezoelectric
effect, since we can think of it in terms of Columbs generated, per Newton applied.

d33 = Induced polarization in direction 3 per unit stress applied in direction 3

d31 = Induced polarization in direction 3 per unit stress applied in direction 1
P
d33 = Perpendicular to direction in which ceramic in polarized 3
d31 = Parallel to direction in which ceramic in polarized
2
1
 Introduction

The basic properties in PCM for Sensors

 High values of dielectric permeability (constant, permittivity)

 Presence of spontaneous polarization in separate areas (domains)
 Presence of hysteresis loops in dependences, e.g., polarization-electric fields and
deformation-electric fields
 Growth of dielectric permeability (constant, permittivity) when temperatures rise
 Presence of Curie temperature point without curve dependence of dielectric permeability
(constant, permittivity) temperatures above ferroelectric properties.
Introduction

(i.e. T (Stress)=0)
 Numerical 1
Lead titanate: d=-44pC/N; eT=600 eo; g=-8(mV/m)/(N/m2); We are looking for the Voltage
(open circuit) due to a force of 1000 N applied to a cube with a 1 cm side.
Introduction
 Numerical 2
Lead titanate: d=-44pC/N; eT=600 eo; g=-8(mV/m)/(N/m2); The strain due to an applied
voltage V=1kV (no mechanical load) to a cube with a 1 cm side.
 Numerical 3
A piezoelectric crystal having a thickness of 2 mm and a voltage sensitivity of 0.02 V-m/N is
subjected to a pressure of 20 *103 Pa. What is the output voltage?
 Introduction
Maximum Applicable Forces
 PZT ceramic material can withstand pressures up to 250 MPa (250 x 106 N/m2) without breaking.

Stiffness
Actuator stiffness is an important parameter for calculating force generation, resonant
frequency, full-system behavior, etc. The stiffness of a solid body depends on Young’s modulus
of the material. Stiffness is normally expressed in terms of the spring constant kT, which
describes the deformation of the body in response to an external force.
When an external force is applied to poled piezoceramics, the dimensional change depends
on the stiffness of the ceramic material and the change of the remnant strain (caused by the
polarization change). The equation LN = F/kT is only valid for small forces and small-signal
conditions. For larger forces, an additional term, describing the influence of the polarization
changes, must be superimposed on the stiffness (kT).
Force Generation
In most applications, piezo actuators are used to produce displacement. If used in a restraint,
they can be used to generate forces, e.g. for stamping. Force generation is always coupled
with a reduction in displacement. The maximum force (blocked force) a piezo actuator can
generate depends on its stiffness and maximum displacement. At maximum force generation,
displacement drops to zero.
 Introduction
Maximum force that can be generated in an infinitely rigid restraint (infinite spring constant).

Where:
L0 = max. nominal displacement without external force or restraint [m]
kT = piezo actuator stiffness [N/m]

In actual applications the spring constant of the load can be larger or smaller than the piezo
spring constant. The force generated by the piezo actuator is:

Effective force a piezo actuator can generate in a yielding restraint

Where:

L0 = max. nominal displacement without external force or restraint [m]

kT = piezo actuator stiffness [N/m]
kS = stiffness of external spring [N/m]
 Numerical 4
What is the force generation of a piezo actuator with nominal displacement of 30 µm and
stiffness of 200 N/µm?
 Piezoceramic Element Parameters
Electromechanical Communication Coefficient

Electromechanical Coupling Factor (k)

The terms, electromechanical coupling factor, energy transmission coefficient, and efficiency
are sometimes confused. All are related to the conversion rate between electrical energy and
mechanical energy, but their definitions are different.
(a) The electromechanical coupling factor k
k2 = (Stored mechanical energy / Input electrical energy)
or
k2 = (Stored electrical energy / Input mechanical energy)
The piezoelectric constant is a good way to measure the intensity of the piezoelectric effect.
 Piezoceramic Element Parameters

d33 = Perpendicular to direction in which ceramic in polarized

d31 = Parallel to direction in which ceramic in polarized
 Piezoceramic Element Parameters

Uin, device input voltage, Uout, device exit voltage (resonant frequency), C0, test piece static electric
capacity. It reflects the energy consumed by piezoelectric materials to overcome its
internal mechanical frictions during resonance.
Piezoceramic Element Parameters
Piezoceramic Element Parameters
Piezoceramic Element Parameters
 Piezoceramic Element Parameters

N :Frequency Constant, d :Piezoelectric Distortion Constant, g :Voltage Output Constant

k :Electromechanical Coupling Coefficient ,YE :Young's Modulus, eT :Dielectric Constant
 Piezoceramic Element Parameters
The resonance and antiresonance frequencies are associated with the frequencies of minimum
and maximum impedance for a particular resonance phenomenon, respectively.

In an electrical circuit representing

the piezo element, the frequency at
which the impedance of the circuit
is at a minimum is the series
resonant frequency, fs. Conversely,
the parallel resonant frequency, fp,
in the equivalent circuit occurs
when impedance in the circuit is
Equivalent Circuit for Piezoelectric Ceramic Transducer theoretically infinite (assuming
In this equivalent circuit, the serial resonant frequency fs, mechanical losses are ignored). This
and parallel resonant frequency fp are given by the following is also known as the anti-resonant
equations : frequency, fa.
When damping effects are small, the resonant frequency
of the system is approximately equal to its natural
frequency.

Where:
f0 = resonant frequency (without load) (Hz)
kT = piezo stiffness (N/m)
meff = effective mass (kg)
Piezoceramic Element Parameters
The resonant frequency of a piezo motor or
actuator depends on its material composition,
shape, and volume. For example, a thicker
piezo element will have a lower resonant
frequency than a thinner element of the same
shape. In addition, attaching a load to a piezo
motor or actuator reduces its resonant
frequency – the higher the load, the more the
resonant frequency is reduced. In
manufacturer specifications, the resonant
frequency given for a piezo actuator assumes
that it is unloaded and one end is fixed or
attached to a mass that is significantly larger
than the actuator.

Where:
f0‘ = resonant frequency with added mass (Hz)
m´eff = meff + additional mass (kg)
Piezoceramic Element Parameters

E. Quantity M. Quantity
Charge Displacement
Voltage Force
Current Velocity
Capacitance Compliance
(Electricity co-efficient)
Inductance Mass
Impedance Damping
 Numerical 5
A piezo actuator is to be used in a nano imprint application. At rest (zero position) the distance
between the piezo actuator tip and the material is 30 µm (given by mechanical system
tolerances). A force of 500 N is required to emboss the material. Can a 60 µm actuator with a
stiffness of 100 N/µm be used?
 Numerical 6
A patch of ZnO thin film is located near the base of a cantilever beam, as shown in the
diagram below. The ZnO film is vertically sandwiched between two conducting films. The
length of the entire beam is l. It consists of two segments: A and B. Segment A is
overlapped with the piezoelectric material while segment B is not. The length of segments A
and B are lA and lB, respectively. If the device is used as a force sensor, find the relationship
between applied force F and the induced voltage.

the distance from the beam's neutral axis to the point of interest along the height of
the cross-section
 Application of Piezoelectric Sensors
Using piezoelectric materials, piezoelectric transducers can be used in a variety of applications,
including:
In microphones, the sound pressure is converted into an electric signal and this signal is
ultimately amplified to produce a louder sound.
Automobile seat belts lock in response to a rapid deceleration is also done using a piezoelectric
material.
It is also used in medical diagnostics.
(Stethoscopes - because of their high sensitivity and robustness piezo sensors are often used within
stethoscopes. Anaesthesia Effectiveness - piezo sensors are used to measure the effectiveness of
anaesthesia as they measure the response of muscles to electrical stimulation. Sleep Studies - piezo sensors
are used to measure the movements of patients during sleep studies. They can be attached to various parts
of the body and will give a reading even if the smallest movement is detected. Pacemakers - Piezo sensors
are used within pacemakers to detect the level of physical activity meaning the pacemaker can be adjusted
where needed. )
It is used in electric lighter used in kitchens. The pressure made on piezoelectric sensor creates
an electric signal which ultimately causes the flash to fire up.
They are used for studying high-speed shock waves and blast waves.
Used infertility treatment.
It is also used in restaurants or airports where when a person steps near the door and the door
opens automatically. In this, the concept used is when a person is near the door pressure is
exerted person weight on the sensors due to which the electric effect is produced and the door
opens automatically.
 Piezoelectric Actuators
A piezo actuator converts an electrical signal into a precisely controlled physical displacement,
to finely adjust precision machining tools, lenses, or mirrors.
Piezo Actuators: Multilayer/Stack, Bending/Stripe.
There are two different types of piezo actuators / multilayers. The first is a stack actuator.
A stack actuator is constructed in one of two ways: discrete stacking or co-firing depending on
the user’s requirements.
The other type of piezo actuator is a stripe actuator or bending actuator, in which thin layers of
piezoelectric ceramics are bonded together; the thin layers allow the actuator to bend with a
greater deflection but a lower blocking force than a stack actuator.
 Pressure Sensors The piezoelectric pressure sensors means they can be
used in a wide range of industrial and aerospace
applications where they’ll be exposed to high
The very basic applications of piezoelectric ceramics temperatures and pressures.
is a gas igniter. The very high voltage generated in a
piezoelectric ceramic under applied mechanical stress
can cause sparking and ignite the gas. There are two
means to apply the mechanical force, either by a
rapid, pulsed application or by a more gradual,
continuous increase.
When a force is applied to a piezoelectric material, an
electric charge is generated across the faces of the
crystal. This can be measured as a voltage
proportional to the pressure.

Acceleration Sensors
Piezoelectric ceramics can be employed as
stress sensors and acceleration sensors, because
of the direct piezoelectric effect.
By combining an appropriate number of
quartz crystal plates (extensional and shear
types), the multilayer device can detect three-
dimensional stresses.
The converse effect - the stress dependence of
the permittivity - is also used in stress sensors.
 Ultrasonic Transducers
 The sound source is made from piezoelectric ceramics as well as magnetostrictive materials.
In particular, hard piezoelectric materials with a high QM are preferable. A liquid medium is
usually used for sound energy transfer. Ultrasonic washers, ultrasonic microphones for short-
distance remote control and underwater detection, such as sonar and fish finding, and
nondestructive testing are typical applications. Ultrasonic scanning detectors are useful in
medical electronics for clinical applications ranging from diagnosis to therapy and surgery.
One of the most important applications is based on ultrasonic echo field. Ultrasonic
transducers convert electrical energy into mechanical form when generating an acoustic pulse
and convert mechanical energy into an electrical signal when detecting its echo. The transmitted
waves propagate into a body and echoes are generated which travel back to be received by the
same transducer.
ultrasound is one of the safest diagnostic imaging
techniques. It does not use ionizing radiation like x-rays
and thus is routinely used for fetal and obstetrical imaging.
The transducer is mainly composed of matching,
piezoelectric material and backing layers. Piezoelectric
The purpose of the matching layer is to try to
materials are used to generate and detect ultrasound. A
maximize transmission of ultrasound from the
large dielectric constant is necessary to enable a good PZT to the patient. Recall that when there is a
electrical impedance match to the system, especially with tiny large difference in impedance between two
piezoelectric sizes. media, most sound wil be reflected and little will
be transmitted at the interface.
The backing material is located behind the piezoelectric element to prevent excessive vibration. Reducing excessive vibration
will cause the element to generate ultrasonic waves with a shorter pulse length, improving axial resolution in images.
 Piezoelectric actuators
Piezoelectric devices have become key components in smart actuator systems such as
precision positioners, miniature ultrasonic motors and adaptive mechanical dampers.
 Piezoelectric actuators are forming a new field between electronic and structural ceramics.
Application fields are classified into three categories: positioners, motors and vibration
suppressors.
 The manufacturing precision of optical instruments such as lasers and cameras, and the
positioning accuracy for fabricating semiconductor chips, which must be adjusted using solid-
state actuators, are generally on the order of 0.1 μm.
 Regarding conventional electromagnetic motors, tiny motors smaller than 1 cm3 are often
required in office or factory automation equipment and are rather difficult to produce with
sufficient energy efficiency. Ultrasonic motors whose efficiency is insensitive to size are
considered superior in the mini-motor area.
Vibration suppression in space structures and military vehicles using piezoelectric actuators is
another promising field of application.
A piezoelectric actuator behaves in the reverse manner of
the piezoelectric sensor. It is the one in which the electric
effect will cause the material to deform i.e. stretch or bend.
That means in a piezoelectric sensor, when force is applied
to stretch or bend it, an electric potential is generated and
in opposite when on a piezoelectric actuator, an electric
potential is applied it is deformed i.e. stretched or bend.
 Piezoelectric actuators
Piezo Printheads - Rod type

Piezo Printheads - Chip type

 Piezoelectric actuators
d31 Bending Actuators
 Application of Piezoelectric Actuators
Industrial Applications

Diesel Fuel Injectors — In the last decade, regulations on emissions from diesel engines have
become increasingly stringent. In order to meet these stringent demands for compliance and
performance, engine manufacturers have resorted to using precisely timed and metered
injections of fuel during the combustion process. As incredible as this may sound, a single fuel
injector may switch fuel flow with pressures exceeding 26,000 psi (1800 bar) on and off several
times in rapid succession during a single power stroke. Such precise control of high-pressure
fluid is made possible by using piezoelectric actuators controlling small valves within fuel
injectors.

Fast Response Solenoids — Some processes require quick and precise mechanical actuation
that is difficult, if not impossible, to achieve with electromagnetic solenoids. While speed may
not always be a concern, power consumption or compactness of size is a top priority. In such
cases, piezoelectric actuators are often able to fill the niche as they provide fast response and low
power consumption in small packages, compared to electromagnetic solenoids.

Optical Adjustment — Some optics need to be adjusted or modulated with a wide frequency
response and with a minimum number of moving parts. Piezoelectric actuators are often
employed in such applications where they provide fast and accurate control over a long service
life.
 Application of Piezoelectric Actuators
Ultrasonic Cleaning — Piezoelectric actuators are also used for ultrasonic cleaning applications.
To perform ultrasonic cleaning, objects are immersed in a solvent (water, alcohol, acetone, etc.). A
piezoelectric transducer then agitates the solvent.

Ultrasonic Welding — Many plastics can be joined together using a process known as ultrasonic
welding. This type of process requires ultrasonic waves to be transmitted to a focused area where
they can cause pieces of plastic to fuse together. Frequently, piezoelectric actuators are used to
accomplish this task.

Piezoelectric Motors — One advantage of using piezoelectric materials is that their

characteristics are precise and predictable. Thus, expansion and contraction of a piezoelectric
actuator can be precisely controlled as long as the supply voltage is controlled. Some motor
designs take advantage of this fact by using piezoelectric elements to move a rotor or linear
element in precise increments. Precision on the order of nanometers can be achieved with some
piezo motor designs. Piezo motors work at a wide range of frequencies but typically work best in
a low frequency range.

Stack Actuators — Multiple piezoelectric elements may be stacked to multiply the displacement
achieved for a given voltage. These types of devices are known as stack actuators, and they are
employed in a variety of specialty applications. These actuators find their uses in proportioning
valves, electrical relays, optical modulation, vibration dampening, and other applications requiring
fast or precise control of movement. relays.
 Application of Piezoelectric Actuators
Stripe Actuators — Two strips of piezoelectric material may be sandwiched together in a
configuration that is similar to a bimetallic strip. In this configuration, the electric input causes
one strip to expand while the other strip simultaneously contracts, causing a deflection.

Piezoelectric Relays — Piezoelectric elements may be implemented to actuate

electromechanical relays or switches. For these applications, either stripe actuators or stack
actuators may be used to open and close electrical contacts. Such devices are maintenance-free
and last through many cycles without noticeable wear. As an additional benefit, using
piezoelectric actuators to operate electrical contacts enables fast and precise control in small
packages that are either difficult or impossible to achieve with electromagnetic relays.
 Application of Piezoelectric Actuators
Medical Applications

Ultrasound Imaging — Piezoelectric transducers are often used in medical ultrasound

equipment. Advances in equipment over the decades have enabled improved monitoring of
pregnancies and facilitated minimally invasive surgical procedures.

Ultrasonic Procedures — Some non-invasive medical procedures rely on the use of focused
ultrasonic waves to break up kidney stones or destroy malignant tissue. Additionally, the advent of
the harmonic scalpel has enabled surgeons to simultaneously incise and coagulate tissue during a
surgical procedure without the need for cauterization. This leads to less tissue damage, less blood
loss, and faster healing times.
 Application of Piezoelectric Actuators
Consumer Electronics

Piezoelectric Printers — Generally speaking, there are two main types of printers that use
piezoelectric actuators:
– a dot-matrix printer — In a piezoelectric dot matrix printer, piezoelectric actuators in the printer
head move needle-like pins that “poke” through a strip of ink tape (similar to a typewriter) against
a piece of paper in various patterns to form characters. For most applications, the use of dot-
matrix printers has been superseded by other technologies. However, a dot-matrix printer is the
only printer technology capable of generating duplicate and triplicate carbon-copy printouts.
– inkjet printer — In a piezoelectric inkjet printer, piezoelectric actuators in the printer head act on
small diaphragms or otherwise change the geometry of an inkwell so that ink droplets are forced
out of an orifice onto paper. This is one of the dominant technologies in the printer market to
date.

Piezoelectric Speakers — Piezoelectric speakers are featured in virtually every application that
needs to efficiently produce sound from a small electronic gadget. These types of speakers are
usually inexpensive and require little power to produce relatively large sound volumes. Thus,
piezoelectric speakers are often found in devices such as the following:
– Cell phones, Ear buds, Sound-producing toys, Musical greeting cards, Musical balloons
 Application of Piezoelectric Actuators
Piezoelectric Buzzers — Piezoelectric buzzers are similar to piezoelectric speakers, but they are
usually designed with lower fidelity to produce a louder volume over a narrower frequency range.
Buzzers are used in a seemingly endless array of electronic devices, including:
- Alarms, medical devices, alarm clock, Fire alarms, exercise equipment, microwave
oven, computer motherboards

Piezoelectric Humidifiers — Many cool mist humidifiers use a piezoelectric transducer to

transmit ultrasonic sound energy into a pool of water. The ultrasonic vibrations cause fine water
droplets to break away and atomize from the surface of the pool where they become entrained in
an air stream and enter the desired space.

Electronic Toothbrushes — Linear piezoelectric actuators are implemented to vibrate the

bristles in some electronic toothbrushes.