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242 EE436 Syllabus

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34 views3 pages

242 EE436 Syllabus

Uploaded by

faisalmfqahtani1212
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS

DEPARTMENT OF ELECTRICAL ENGINEERING – TERM 242


EE436 - INTRODUCTION TO MICRO AND NANOELECTRONICS
Syllabus
Instructor: Dr. Jhonathan Prieto Rojas (Assistant Professor, Electrical Engineering Dept.)

OFFICE PHONE OFFICE HOURS E-MAIL


UT 10 – 11AM, W 12-1PM or
59-1069 8867 [email protected]
MS TEAMs or by Appointment

1. Course Description:
Introduction to microfabrication techniques (photolithography, etching, deposition, thermal
processes, etc.). CMOS manufacturing from old to current technologies, including challenges and
future developments. Introduction to Micro-Electro-Mechanical Systems (MEMS),
Nanotechnology and Nanomaterials. Innovative technologies (Flexible/Stretchable electronics,
Energy Micro- and Nano-harvesters).
Prerequisites: EE 203 or EE 234 or EE 236
2. Textbooks:
Slides and reading material will be provided.
2.1. Other useful references and material:
• J. D. Plummer, P. B. Griffin, Integrated Circuit Fabrication: Science and Technology, Cambridge
University Press, 2022.
• M. J. Madou, Fundamentals of Microfabrication and Nanotechnology, 3rd Edition, CRC Press,
2011.
• Sami Franssila, Introduction to Microfabrication, Second Edition, John Wiley & Sons, Ltd., 2010.
• J. D. Cressler, Silicon Earth: Introduction to Microelectronics and Nanotechnology, 2nd Edition,
CRC Press, 2015.

3. Course Objective:
This course provides the engineering and science foundation in the field of micro- and
nanotechnologies. By incorporating a combination of college level basic sciences (physics and
chemistry), the student will gain a strong understanding of current, advanced, small-scale technologies
and their great impact in our daily life.

3.1 Specific Objectives:


1. To help students to apply basic concepts of physics and chemistry.
2. To familiarize students with the basic micro- and nano-manufacturing techniques involved
in diverse technologies, including CMOS, MEMS, and the cleanroom environment.
3. To enable students to experience demonstrations of the infrastructure, materials and devices
involved in Micro- and Nanotechnologies.
4. To guide students to investigate current and emerging technologies in the field of Micro- and
Nanotechnology and produce a literature review in one of these subjects.
4. Weekly Class Schedule & Topics:

Week Topics Specific Topics


Course overview, fundamental of semiconductor materials, review
1 of MOSFET structure and operation. Overview of Quantum
Mechanics.
Fundamentals of Silicon wafer production and thermal processes (Oxidation, Doping,
2
materials, devices Annealing)
and Photolithography, cleanroom environment and other patterning
3
microfabrication methods (3D printing, Laser cutters, soft lithography, etc.).
techniques Etching & Deposition. (physical and chemical methods)
4

Main characterization techniques. (SEM, TEM, AFM, XRD, etc.)


5

Fundamentals of MOSFET manufacturing. (From sand to transistors


6
Fabrication of and ICs)
MOSFET/CMOS Scaling and Moore’s law, past and current challenges of CMOS
7
technology. (HK-Metal gate, FinFET devices, Novel architectures)
Midterm Exam: Date and time to be announced
Basic mechanical concepts. Micro Electromechanical Systems
8
(MEMS) fundamentals and manufacturing.
Micro- Surface micromachining and main applications (Accelerometer,
9
Electromechanical Electro-Thermal Actuator, etc.), PolyMUMPs.
Systems (MEMS) Bulk micromachining and main applications (Pressure sensor, Lab-
10 on-Chip, etc.). Micro-electromechanical switches operation and
fabrication.
Nanotechnology Introduction, properties of nanomaterials, synthesis, Top-Down vs.
11
Principles, Bottom-Up approaches.
Materials and Low dimensional materials (2D, 1D, 0D) synthesis & applications.
12
Applications
13 Wearable electronics I (Flexible electronics)
Wearable electronics II (Stretetchable electronics), Micro/Nano
14 Emerging
Energy Harvesting I (Thermoelectric Generators)
Technologies
Micro/Nano Energy Harvesting II (Microbial Fuel Cells)
15
[Final report submission and Final presentations]

5. Grading:
Homework (5) – 12%
Quizzes (5) – 18%
Attendance – 3%
Project Report – 7%
Project Presentation – 10%
Midterm Exam (Week#8, TBD) – 20%
Final Exam (TBD) – 30%
5.1 HW and Quizzes:
• A homework set will be posted each two to three weeks.
• Late submission of HWs will not be accepted.
• There will be a quiz each two to three weeks.
• Additional quizzes might be given whenever needed.

5.2 Project:
A project will be assigned after the 3rd quarter of the semester. The project report and presentation
will be in groups of two and will consist of reviewing a specific and relevant subject. The
presentations will be evaluated during the last week of classes.

5.3 Attendance:
• A student is allowed a maximum of nine unexcused absences before he deserves a DN grade.
• The first two unexcused absences will be counted but will not be penalized.
• Starting from the 3rd absence, the student will be penalized by -0.5 points for each unexcused
absence.
• To avoid the penalty, only official excuses will be accepted. Excuses for absences must be
presented to the instructor within one week after the return to class.
• Attendance will be taken at the start of class. If a student enters the classroom while
attendance is being taken, the student will be marked “Present”. Otherwise, the student will
be marked “Late”. THREE lates are considered one absence. However, if the student is more
than 10 minutes late, he will be allowed to attend, but will be marked “Absent”. It is the
student’s responsibility to notify the instructor at the end of the class session to be marked
“late” in the attendance sheet.

6. Mobile Phones in the Classroom Policy:


Using mobile phones inside the class is not allowed. The penalty for using the mobile phone inside
the class is -1 deduction.

7. Generative AI Tools Policy:


In this course, every element of class assignments must be fully prepared by the
student. The use of generative AI tools for any part of your work is not allowed and will
be treated as plagiarism – unless it is permitted and announced by the instructor.

Note: The information contained in this course syllabus may be subject to change with reasonable
advance notice.

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