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ch00 class schedule

Uploaded by

s1116035
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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半導體製程技術導論

INTRODUCTION TO SEMICONDUCTOR
MANUFACTURING TECHNOLOGY
賴芳儀 （Fang-I Lai
Office: 70716, Phone:7516
Email: [email protected]

Course Information
 Time: 102~104, Class room: R70110
 Grading:
 Midterm 25%
 Finalexam 25%
 Paper study and paper report 15%
 Group presentation 25%
 1 questions or comments 5%
 Attendance 5%
 Attendance in Midterm, Oral presentation
and Final exam is compulsory.
2

1
Class Schedule
Month Date Week
Feb 13 一 Class introduction. Chapter 0, Chapter 1 and Chapter 2
20 二
27 三 Holiday
Mar 6 四
13 五

20 六

27 七

Apr 3 八 Holiday
10 九 Midterm
17 十

24 十一

1 十二

May 8 十三

15 十四

22 十五 Final exam

29 十六 Group presentation

Jun 5 十七 Group presentation

12 十八 Group presentation, deadline of paper report upload

Course objective

介紹半導體製程技術，使同學了解光電元
件，以及積體電路晶片製造過程。
Introduce semiconductor process
technology for students understanding the
manufacture process of optoelectronic
device and integrated circuit chip.

2
Syllabus
1 導論 Introduction
積體電路生產簡介 Introduction to IC
2
processes
3 半導體基礎 Semiconductor Basics
4 晶圓製造 Wafer Manufacturing
5 加溫製程 Thermal Process
6 微影技術 Photolighography
7 離子佈植 Ion Implantation
8 蝕刻 Etch
化學氣相沉積與介電質薄膜
9
CVD and Dielectric thin Film
10 金屬化製程 Metallization

Syllabus

 Textbook / Reference
NO 指定類別 語言別 書刊名

1 指定用書 英文 Introduction to semiconductor technology


2 指定用書 中文 semiconductor manufacturing technology

 課堂講義學（handout）-portal

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