Materials and Manufacturing Processes

ISSN: 1042-6914 (Print) 1532-2475 (Online) Journal homepage: http://www.tandfonline.com/loi/lmmp20

Electrode wear phenomenon and its

compensation in micro electrical discharge milling:
A review

Siddhartha Kar & Promod Kumar Patowari

To cite this article: Siddhartha Kar & Promod Kumar Patowari (2018): Electrode wear
phenomenon and its compensation in micro electrical discharge milling: A review, Materials and
Manufacturing Processes, DOI: 10.1080/10426914.2018.1453144

To link to this article: https://doi.org/10.1080/10426914.2018.1453144

Published online: 04 Apr 2018.

Submit your article to this journal

View related articles

View Crossmark data

Full Terms & Conditions of access and use can be found at

http://www.tandfonline.com/action/journalInformation?journalCode=lmmp20
MATERIALS AND MANUFACTURING PROCESSES
https://doi.org/10.1080/10426914.2018.1453144

none defined

Electrode wear phenomenon and its compensation in micro electrical

discharge milling: A review
Siddhartha Kar and Promod Kumar Patowari
Department of Mechanical Engineering, National Institute of Technology Silchar, Silchar, Assam, India

ABSTRACT ARTICLE HISTORY

Micro electrical discharge machining (µEDM) is playing a significant role in the world of miniaturization, Received 27 June 2017
especially in micro electro mechanical systems, biomedical devices, micro die/molds, etc. Micro electrical Accepted 4 January 2018
discharge milling (µED-milling) is a variant of µEDM used for producing complex 3D features with a KEYWORDS
simple shaped tool. The material removal mechanism of µEDM depends on electro-thermal energy Compensation; discharge;
between the tool electrode and workpiece. µEDM inherently being a non-contact machining process, EDM; electrical; machining;
leads to produce miniaturized features in hard to machine materials. Besides erosion of the workpiece micro; micromachining;
material, intrinsic feature of the process leads to tool wear (TW) and introduces dimensional inaccuracy in milling; tool; wear
the micro features. Thus, it is essential to know the factors influencing the TW, and thereby compensate
the TW to achieve dimensional stability of the machined features. The critical factors affecting the wear
phenomenon of a tool and various techniques applied to compensate TW in µED-milling along with
future trends of their application are presented. The key issues of µED-milling and challenges faced in
implementing a TW compensation technique are highlighted. The concept of intentional wear of tool
electrode and associated advantages in EDM is also demonstrated.

Introduction science and technology.[14,15] At present, miniaturization is

dominating the manufacturing sector with the growing
Electrical discharge machining (EDM) is a non-traditional
demand for micro electro mechanical systems (MEMS)[16]
machining process in which there is no contact between the
to manufacture micro components such as microprobe, micro-
tool and workpiece.[1] It is used for machining the materials
injection, micro mold/die, biomedical equipment, fuel nozzle,
having poor machinability with conventional machining
photo-mask, micro tool, surgery equipment, gripper.[17–20]
due to high hardness, brittleness, and fragile nature of the
This growing demand has led to the development of micro
workpiece material. The dimensional accuracy and shape
electrical discharge machining (µEDM) as an ace microma-
complexity are also the prime requirements for the selection
chining process to fabricate micro features.[21–23] The primary
of EDM process.[2,3] Precise machining can be carried out on
variation among macro EDM and µEDM is the energy density
electrically conductive and semi-conductive materials using
in the IEG which is less (<100 µJ) in the case of µEDM as com-
EDM process.[4,5] The process is free of mechanical stress due
pared to macro EDM.[24,25] Other than workpiece MR, the elec-
to its non-contact characteristics.[6] In EDM process, the
tric discharges occurring between tool and workpiece also leads
electrical energy converts to thermal energy in presence of a
to MR from tool electrode that influences the final shape of the
dielectric medium which is responsible for material removal
workpiece.[26] This tool wear (TW) leads to dimensional inac-
(MR) from tool electrode and workpiece electrode.[7–9]
curacy in EDM; which is otherwise a precise, stress-free
Consequently, the MR phenomenon of EDM is based on melt-
machining process.[24,27] Thus, the TW is critical in determin-
ing and vaporization of the electrodes.[10,11] During EDM, the
ing the dimensional precision of the machined component.[28]
tool and work surface at the minimum gap undergoes melting
TW being intrinsic characteristic of the process also leads to
and vaporization due to the attainment of high temperature by
deposition of tool materials over the workpiece. The deposition
the application of high voltage electric discharge.[12] The
method by EDM has been extensively explored by several
molten material solidifies rapidly when it comes in contact with
researchers by adjusting the machining parameters to maxi-
the cool dielectric fluid during the with-drawal of voltage while
mize TW. Endeavor is also made towards the fabrication of tool
machining. Spark initiates at the lowest inter-electrode gap
electrode for easier removal of material from the tool. The con-
(IEG) surmounting the breakdown strength of the dielectric.
cept of using powder metallurgical (P/M) electrode is highly
The contaminated dielectric is flushed away to stabilize the
successful in the deposition process.[29–31] The selective surface
discharging phenomenon.[13] The demand for micro parts is
modification has also been successfully performed with the use
increasing in the field of biomedicine, aerospace, energy,
of P/M electrode[32] by applying suitable masking. Recently
opto-electronics, biotechnology, etc. with the advancement of

CONTACT Promod Kumar Patowari [email protected] Patowari Department of Mechanical Engineering, National Institute of Technology Silchar,
Silchar, 788010 Assam, India.
Color versions of one or more of the figures in the article can be found online at www.tandfonline.com/lmmp.
© 2018 Taylor & Francis
2 S. KAR AND P. K. PATOWARI

researchers have successfully executed deposition of micro high aspect ratios.[49] It can manufacture micro features and
spiral structure on the workpiece by intentional TW.[33] intricate shapes with tolerances in micrometer range.[50] A
In µED-drilling and milling, the TW takes place in both µEDM machine tool has the capability to manufacture micro
frontal surface and the lateral surface.[34,35] TW can be holes, microelectrodes, complex 2D and 3D micro cavities.[51]
minimized to a certain extent by selecting suitable machining µEDM technologies can be classified into five diverse types[52]:
parameters, leading to higher workpiece removal rate and (a) die sinking µEDM, (b) micro electrical discharge drilling
lower tool removal rate. To achieve precise dimensions of the (µED-drilling), (c) micro electrical discharge grinding
micro features, compensation for the frontal TW as well as lat- (µEDG), (d) micro wire electrical discharge machining
eral TW is necessary. Frontal wear of tool can be compensated (µWEDM), (e) µED-milling. All these methods share same
by downward feeding of the tool, but lateral compensation of MR mechanism, but the scope of application and features
tool is a grueling task. Compensation of TW is vital in milling differ from each other.[53] Integrating all the methods will
EDM because the tool is fed in two directions (vertical and allow fabrication of complex microstructures with expanding
horizontal), while the operation is performed in successive thin scope of EDM application, flexibility, machining quality, and
layers.[36] Incorrect compensation of TW may lead to undercut, overcoming the limitations possessed by a single method.
overcut and consequently damage the tool and workpiece. Sev-
eral researchers have carried out computational, analytical,
Die sinking micro electrical discharge machining
mathematical, and experimental studies for compensation of
TW in µEDM. This paper discusses the various factors affecting Die sinking µEDM is the most crucial technology used in the
TW and presents the compensation techniques proposed by manufacturing of mold insert.[54] It is primarily used in the
several researchers to negate the effects of the same. It also production of replica tools for the large-scale production
performs an extensive discussion on how those techniques of micromechanical parts.[25] Electrode act as the positive
affect the dimensional stability of machined micro features by impression of the required shape whose final impression
micro electrical discharge milling (µED-milling). would resemble the negative geometry/image of the
electrode.[55,56] The principal challenge lies in the manufactur-
ing of the structured tool electrode and compensating the TW
Basic mechanism of micro electrical discharge
to achieve dimensional accuracy of machined cavity.[56]
machining
Manufacturing of such electrode is complex and
The MR principle of µEDM is similar to that of macro EDM expensive.[49,57] Machining is a way to produce a structured
which works on the thermoelectric energy between the work- electrode, but the size is limited to the available tools in the
piece and tool.[37,38] Both processes rely on a series of repeated market. Lithography, electroplating, and molding (LIGA)
discharges in a dielectric medium to provide heat energy to the and laser sintering are some of the most viable technologies
surface of the electrodes.[39,40] However, the critical differences that can be used in manufacturing of structured tool
between macro-EDM and µEDM are the plasma channel electrodes.[58,59] WEDM also provides an alternative process
diameter, electrode heating and viscous force of dielectric on for fabrication of tool but producing sculptured surface is very
electrode.[41] Unlike macro-EDM, in µEDM, plasma channel difficult.[54] Rotation of tool electrode is avoided in die sinking
width may be equal to the diameter of the tool. The width because rotation would nullify the sculpture shape and pro-
of the plasma channel expands with an increase in pulse duce a circular cavity. Relative wear can be more than 30%
duration. However, the expansion rate changes if the channel in die sinking µEDM which impels the use of high wear resist-
becomes wider than the diameter of tool electrode. The ant composite materials like tungsten-copper, cemented car-
µEDM process gets complicated by the effects ignored in the bide, etc.[25]
macro-EDM process, for example, electrode heating. In
micromachining, the machining dimensions range from l to
Micro electrical discharge drilling
999 µm.[42] Since µEDM uses miniaturized electrodes, it does
not have a significant mass to transfer heat from the site of Micro electrical discharge drilling is a process where a tool is
the discharge, which in turn restricts the quantity of energy fed along a single axis against a workpiece and material gets
supply to a single discharge. Resistance capacitance (RC)- removed due to the sparking between the electrodes in the
generator is capable of providing low pulse energy into the IEG. µED-drilling is one of the most reliable machining
IEG effectively.[43,44] Transistor type generator is not suitable methods used for drilling micro holes on difficult to machine
for µEDM due to its incapability in generating small pulse dur- materials.[60] Tool rotation increases material removal rate
ation with iso-duration discharge current.[45] Dielectric flush- (MRR) but leads to higher overcut due to eccentricity involved
ing is an important component in EDM process which helps in in a rotated tool. Ultrasonic vibration of workpiece also
removing debris from the machining zone.[46] In µEDM, the increases MRR significantly. Process parameters such as pulse
tool electrode is more sensitive to deflection due to pro- on time, pulse off time, capacitance, voltage, current, etc.
nounced effect of viscous force by dielectric flushing. µEDM applied during machining also play a vital role in influencing
is devoid of chatter and vibration problems owing to the the quantity of MR. The machining parameters have to be
absence of mechanical contact among workpiece and tool, thus selected such that electrode wear ratio (EWR) (ratio between
allowing machining of micro components without the appli- eroded volume from the tool and workpiece) is small. Frontal
cation of mechanical force.[47,48] The absence of process forces wear leads to under depth of the hole whereas lateral wear
(except viscous force by flushing) allows machining of very reduces the diameter of the hole and imparts taperness.
 MATERIALS AND MANUFACTURING PROCESSES 3

On one hand, lateral wear of tool hinders achieving the correct solid block as tool electrode. The working phenomenon is
diameter of the hole (undercut) while on the other hand, similar to the electrical discharge grinding (EDG). In this
rotation of tool leads to increase in overcut. However, rotation process, the workpiece is fed downwards with a rotary motion,
cannot be ignored as it increases MRR substantially by render- and the front edge of the wire acts as the site for electrical
ing better flushing. So, a tradeoff is to be considered between discharge.[54] The wire diameter typically ranges from 25 to
selecting the dimension of the tool and the process parameters 300 µm.[72] The wire is passed continuously during machining
of µEDM. Drilling of micro holes by µEDM is a very sensitive and due to this continuous supply of fresh wire, the TW gets
process. Any inaccuracy of the micro-holes drilled will lead to automatically compensated to a large extent.[73] The wire elec-
rejection. Drilling can be of two different types; through hole trode should have sufficient thermal and mechanical stability to
and blind hole. Drilling of through holes has no issues with withstand the high-temperature discharges.[25] The use of two
the frontal wear of tool, provided that sufficient amount of tool wire guides enables cutting operation between the guides
length is available. In case of blind holes, wear regularly ensuring higher repeatability and accuracy. Sheu[74] developed
decreases the length of the tool, subsequently leading to a a twin wire system capable of both rough and finish machining
smaller depth of hole than the electrode feed depth.[61] The to manufacture micro tools. The wire systems were separated
lateral TW causes taperness in the holes. Nowadays array of vertically by some distance, wherein rough and finish machin-
micro-holes is drilled on thin metal sheets and an array of ing were carried out by the transistor pulse generator and RC
micro tools is fabricated from the predrilled holes by the pulse generator respectively. Compared to the EDG process
reverse µEDM process.[62,63] The dimension of micro tools using block electrode, the performance of WEDG is better
depends on the size of predrilled holes. To achieve a precise size regarding the geometrical accuracy and precision of the
of micro holes, TW compensation techniques have to be machined structures. The effect of TW is negligible as the fresh
employed. Consequently, the µEDM process can also be used wire is passed continuously during machining whereas block
for producing features on the workpiece by predrilled hole in electrode directly affects the accuracy of the rod.[68,75]
the tool and connecting it to the negative terminal
(cathode).[64]
Micro electrical discharge milling
Development of µED-milling process facilitated to overcome
Micro electrical discharge grinding the multiple, complex-shaped tool requirement.[76–78]
This method utilizes a sacrificial block electrode to reduce the µED-milling can be defined as a contouring of a rotating solid
diameter of the tool. The tool rotates at a certain speed and is or tubular tool in EDM environment.[36,79,80] It gets performed
fed into a fixed/stationary block to produce the spark. This in successive layers wherein each layer is assigned with a
technique is used for fabricating micro tools. The in-situ fab- particular depth of cut.[81,82] The MR mechanism is same as
ricated micro tool eliminates tool run out error and clamping drilling but with feed in lateral direction. Tool feeding process
error as the tool is fabricated and used on the same spindle.[65] takes place in two stages:
Fleischer and Kotschenreuther[54] cited different obstacles of i. A rotated tool is fed vertically against the workpiece for a
using the block electrodes such as; the direct influence of wear specified depth of cut.
on the accuracy of the fabricated rod and debris concentration ii. The tool is fed horizontally in a direction at an angle with
gradient in the IEG leading to an uneven gap between the tool the axis of the tool.
and the block along the axis of the tool. These factors affect the Nowadays µED-milling is gaining the reputation for micro-
dimensional precision and accuracy of the micro tool. Rotating machining of 3D cavities, complex contours, microchannels,
sacrificial disk and guided running wire are the alternative etc.[80] In contrary to the die sinking process, milling EDM
sacrificial electrode techniques used to fabricate micro tool.[66] does not require customized shaped tool for producing 3D
The stationary block method provides smooth surface while cavity.[34,83] This property enhanced the use of µEDM in
being fast and simple, but imparts some taperness in the machining very intricate micro shapes with sharp corners in
tool.[67] Karthikeyan et al.[68] illustrated the several errors with very hard materials.[82,84] The key challenge of ED-milling is
their causes and remedial measures in sacrificial block method. to achieve a constant depth and width of cut for a fixed
They developed an empirical model to determine the diameter distance. However, wear of tool in EDM hinders such goal in
of the tool during machining with good accuracy. Qingfeng µED-milling inhibiting dimensional accuracy of the machined
et al.[69] developed a grinding method via electrical discharge microfeatures.[85] Compared to µED-drilling, the effect of TW
using two block electrodes (EDG-TBE) whose efficiency was is prominent in µED-milling because it contains horizontal
higher than block electrical discharge grinding. The cylindrical feeding of the tool along with drilling. The depth of cut for
and diametrical error was of the order 2 µm only, which justi- drilling and feeding velocity plays a substantial part in stabiliz-
fied the application of the process in fabricating micro tool. ing the µED-milling process. Lower depth of cut with lower
horizontal feeding speed is preferred. But the process efficiency
reduces due to the use of lower feed and depth of cut.[86] A
Micro wire electrical discharge machining
straightforward technique is to remove material in a layer by
The process requires an additional setup of wire unit for layer machining scheme. TW is compensated by regular feed-
performing the cutting and dressing of electrodes.[70] ing of the tool in the Z-axis at the end of each layer. Machining
Masuzawa et al.[71] developed wire electrical discharge grinding of thin layers ascertains wear to take place only on the bottom
(WEDG) method which uses moving wire instead of a disc or surface of the tool, thus avoiding wear on the lateral surface.
4 S. KAR AND P. K. PATOWARI

Precise assessment of wear is essential because an error in debris flushing, tool vibration and short circuiting.[89] The
assessment will have a compounding consequence in the suc- accumulation of debris in the IEG increases TW, which in turn
ceeding layers.[61] A significant error in the workpiece profile affects dimensional accuracy and precision.[19] Rotation of tool
is observed due to lateral wear, despite applying small layer at certain speed minimizes such undesirable vibration and
thickness. Figure 1 shows the key areas related to TW in improper flushing to a certain extent. These features with
µED-milling. All the topics indicated in the figure are discussed the additional capability to avoid short circuiting made the
in the subsequent sections. tool rotation an integral part of the process. Hence, tool
The µED-milling process, specifically used for machining rotation plays a decisive part in the final profile of the feature
complex 3D features, holds the advantage of using simple along with performance measures such as TW, MR, etc. The
cylindrical tool for the generation of complex profile over con- key issues affecting the µED-milling process are discussed in
ventional die sinking EDM.[87,88] This benefit is a supplement the following subsections.
to the original benefits of EDM process such as high aspect
ratio machining, machinability of hard materials, better surface
Bottom/frontal wear and lateral/corner/side wear
integrity, etc., aside from being economical and environmen-
tally friendly in nature.[89] Moreover, compared to micro die Bottom/frontal wear of tool electrode is a natural phenomenon
sinking EDM, µED-milling yields smooth and defect free sur- of any EDM variant. It decreases the length of electrode[96]
face in finishing and semi-finishing regime.[90] µED-milling affecting the depth of the microfeature (Fig. 3); so, sufficient
has also been successfully used for deburring operation.[91] length of the electrode should be provided to complete milling
The desired shape to be formed mainly depends on tool trajec- without interruption. The shape of tool preserves in case of
tory as in conventional µ-milling. Consequently, milling in occurrence of only bottom wear. Therefore, the electrode wear
µEDM can be accomplished only with the advent of servo-con- can be easily compensated by feeding it along its length.
trolled tool motion in the axes generated by computer numeri- Lateral/corner/side wear causes rounded shape of tool edge
cal control (CNC) system.[92,93] The integration of CNC system (Fig. 3) which leads to significant geometrical inaccuracies in
assists in the precise control of machining features. machined cavity.[96] Lateral wear increases in case of
peripheral milling.[97] Compensating such uneven TW and
generating precise microcavity is a grueling task.[98] As milling
Key issues in micro electrical discharge milling
is carried out in layer by layer strategy, the depth of a
The indispensable phenomenon of TW in a substantial particular layer should be controlled to eliminate corner wear.
amount and larger machining time gives the process a setback,
which however is less significant when considering its
Short circuiting
benefits.[94] Hence the process finds lot of stake in the
micro-machining domain for fabricating microdevices. The tool feeds towards the workpiece when the average gap
The discharge zones of a µED-milling process using a simple voltage (Vg) dominates the servo reference voltage (Vr).[99]
electrode following the principle of the layer by layer removal Short-circuit occurs when Vg is less than Vr; as a result, the
are shown in Fig. 2. Discharge takes place on both the end and electrode will retract from the workpiece to avoid further
side/lateral face of the tool.[95] The added discharge zone (side process instability. Compared to the face milling, the occur-
discharge) on the vertical wall (Fig. 2) along the tool side is a rence of short circuit is more frequent in case of peripheral
cause of concern contributing significantly to improper milling.[97] The short circuit causes instability in the spark

Figure 1. Key areas of tool wear in µED-milling. Note: µED-milling, micro electrical discharge milling; BSA, based on scanned area; CLU, combined linear uniform;
DCM, discharge counting method; FLC, fix length compensation; FRC, fixed reference compensation; HRVS, high resolution vision system; LCM, linear compensation
method; MES, multiple electrode strategy; SSM, servo scanning method; UWM, uniform wear method.
 MATERIALS AND MANUFACTURING PROCESSES 5

and short circuit is avoided, thus improving the overall

efficiency of the process.[104] Wei et al.[105] coined an interp-
olation method which works with variable period and step size
to avoid short circuit. This method improved the power supply
usage in µED-milling and increased machining efficiency
by 30%.

Machining gap
In µEDM, there exists a short gap between the tool electrode
and workpiece surface. Consequently, the machining gap sepa-
rates the produced profile from the tool by a certain length
which ranges few microns. The machining gap exists between
both the bottom and the lateral surfaces of the electrode and
the workpiece (Fig. 2). The machining gap alters with the
change in process parameters such as discharge energy (DE),
Figure 2. Two discharge zones of µED-milling. Note: µED-milling, micro tool rotation speed, etc. It is essential to take the machining
electrical discharge milling. gap into consideration for achieving precise dimension.
Compensation of TW can be more effective if corner wear is
gap and scattered discharges, which in turn leads non-uniform fully eliminated, thus preserving the original shape of the
TW. The non-uniform wear of tool results in overcut, corner tool.[96] The tool shape can be preserved by limiting the spark
effect, recast layer, and distorted edges in a cavity.[100] Short only at the bottom surface, wherein machining is employed
circuit pulse gets detected when the current increases while in each layer contiguously. Figure 4 illustrates the instances
the voltage remains zero, thus indicating a connection between for TW in µED-milling, where the condition layer depth
tool and workpiece. A powerful shock wave generates in the < machining gap induces bottom wear only (Fig. 4(a)),
gap due to the collapsing plasma channel, which is sufficient whereas the opposite condition results in both bottom as well
to deflect micro tools (diameter is less than 1 mm).[89] This as corner wear (Fig. 4(b)).
shock wave can vibrate the tool and make it touch the work-
piece surface resulting in short circuiting. In µED-milling, Factors influencing tool wear
machining efficiency increases with increase in tool rotation
speed, whereas continuous short-circuiting occurs without The critical factors contributing to TW in the µEDM process
employing rotation.[101] Spin stability imparted on a rotating are discussed.
tool can compensate the force due to the shock wave, thus
preventing short circuiting and enhancing normal discharge. Discharge energy
In order to prevent short circuit, it is important to maintain
a particular width of the IEG, especially when vibration and The maximum DE per pulse obtained from a RC-type pulse
deformation prone micro rod is used as a tool.[28] The excess- generator (ERC) can be expressed as[43]:
ive short circuit at higher feed rate increases the retraction 1
ERC ¼ CVg2 ð1Þ
movement of the tool electrode leading to an increase in 2
machining time.[102] A continuous and lengthy short circuit
where, C: capacitance; Vg: gap voltage.
may also cause breakdown of the machining process.[103]
Parameters should be set such that the gap width is maintained

Figure 4. Illustration of electrode wear in µED-milling: (a) only bottom wear

(d < machining gap), (b) both bottom wear and corner wear (d > machining
gap) where d is the depth of each layer. (Reproduced with permission from Nguyen
Figure 3. Front and corner wear. (Reproduced with permission from Sánchez et al.[96]). ©Elsevier. Reproduced by permission of Elsevier. Permission to reuse
et al.[35]). ©Springer. Reproduced by permission of Springer. Permission to reuse must be obtained from the rightsholder. Note: µED-milling, micro electrical
must be obtained from the rightsholder. discharge milling.
6 S. KAR AND P. K. PATOWARI

The determination of the breakdown limit at which the Type of dielectric fluid
current flows through the IEG is done by voltage while the
The selection of dielectric plays a vital role in the µEDM
capacitor deals with storing of energy until discharge
process due to the dependence of discharge on pyrolysis of a
initiates.[106] An increase in ERC leads to superior spark gap,
dielectric.[47] The dielectric fluid renders various functions
deep craters and facilitates MR. Higher ERC increases the
such as ionization, insulation, cooling, and expulsion of debris
EWR. But at very high capacitance, an abrupt increase in
particles from the IEG.[118] Hydrocarbon oil, deionized water,
MRR is observed in comparison to tool wear rate (TWR),
and gas (air, nitrogen, and oxygen) are the main dielectrics
which in turn leads to a decrease in EWR.[43] High voltage
reported in several research studies. Machining characteristics
increases the discharge distance and facilitates flushing of
vary according to the type of dielectric fluid owing to their
debris from the IEG.[107] Sometimes, during finishing µEDM
diversity in composition and cooling rate.[119] In µEDM, deio-
at very low gap voltage, the EWR increases due to the smaller
nized water yields higher machining speed and lower TW
gap between the tool and workpiece.[108] The DE per pulse in
compared to hydrocarbon oil.[120–122] Chung et al.[123]
a transistor-type generator (ET) can be expressed as[109]:
observed a decrease in 96% of TW in µED-milling with
Ton deionized water compared to kerosene. Apart from electrical
ET ¼ Vp Ip ð2Þ discharging, deionized water also helps in removing material
Ton þ Toff
by electrochemical dissolution. TW reduces significantly with
where, Vp: voltage of a single pulse; Ip: current of a single pulse; the decrease in resistivity of deionized water because more
Ton: pulse on-time; Toff: pulse off-time. oxidized material generates from the workpiece and adheres
The term TonTþT on
off
is also known as the duty cycle. to the tool making it non-conductive.[123] Further, electro-
V2 chemical dissolution of the workpiece also restricts TW. But
Equation (2) can be modified as Ep ¼ Rp TonTþTon
ð)V ¼ IRÞ.
off
electrolytic corrosion often decreases the precision of the
ET increases with the increase in gap voltage and decrease in
machined shape as observed by Song et al.[124] in µED-milling
resistance that leads to higher EWR. A significantly high
of WC-Co by WC-Co tool electrode (80 µm diameter). How-
resistance decreases ET and prevents spark, but leads to
ever, the problem of electrolytic corrosion has been subdued
discontinuous discharging and extended TW.[43] Enhancing
by the use of bipolar pulse power supply and water spray (a
the ET by increasing current results in a broader crater and
mixture of deionized water and compressed air). Kibria
excessive debris in the gap leading to secondary arcing
et al.[125] observed an increment in the TWR using deionized
between debris and tool electrode.[110] Thus, more material
water as a dielectric medium in comparison to kerosene.
erodes from tool electrode as compared to workpiece ensuing
Carbon particles from kerosene formed a protective layer over
in higher EWR at higher current.[109] EWR also increases with
the surface of tool leading to lower wear. Another variant of
an increment in the duty cycle. Minimum off time enhances
hydrocarbon oil named as EDM oil has been widely used as
DE, though an adequate off time is needed to sustain stable
a dielectric with a very low EWR (1.82%) at roughing
machining. In µEDM, rough and finish operations are typi-
condition.[126] Compressed air and nitrogen have been used
cally performed in higher and lower DE respectively. Lower
as dielectric media in µEDM for precision machining but with
DE creates smaller craters and peaks on the machined surface
less efficiency.[127] Air is also preferred in micro-deposition
resulting in finer surface.[111] Higher DE increases the dis-
(where EWR must be high) to negate the effects of carbon
charge gap resulting in high TW, whereas an opposite result
adhesion in tool electrode, and explosions resulting from the
is obtained with lower DE.[112]
oil evaporation decomposition.[33,128] While machining with
air as a dielectric medium, the concentration of oxygen in
the air has a beneficial effect on MR owing to the oxidation
Polarity of tool electrode material.[129] Elsewhere, compared to liquid
dielectric (water-based emulsion), air resulted in lower surface
In µEDM, the wear behavior of the tool electrode and material
roughness due to the traverse flow and low viscosity of air in
are highly influenced by the polarity. The electrons accelerate
EDM milling of Inconel 718.[130] The dielectric mist formed by
at a faster rate in the plasma channel towards the anode
combining air and kerosene has also been used successfully in
enabling higher MR at the anode compared to the cathode.
performing near dry ED-milling process.[131] Tao et al.[132]
Carbon generates in macro-EDM due to the use of hydro-
performed near dry ED-milling process utilizing deionized
carbon (HC) oil and longer pulse duration. The generated
water/kerosene in combination with air/oxygen/nitrogen/
carbon covers the anode and protects it from eroding, thus
helium and observed superior surface finish in case of
giving way for the use of positive tool electrode.[48] Unlike
nitrogen-water mixture. The utilization of deionized water,
macro EDM, deposition of the carbon layer is scarce in
air, and other gases as the dielectric medium should be encour-
µEDM due to the use of very short pulse.[113] On connecting
aged to minimize the environmental pollution caused by the
the tool electrode to the anode, the concentration of heat on
hydrocarbon oils and thrive towards green manufacturing.[133]
tool increases leading to higher TW.[114,115] Hence, the polarity
of the tool electrode is kept cathodic even at roughing
operations.[17] When the material is preferred to be removed
Dielectric flushing method, pressure, and flow rate
from tool electrode such as fabrication of tool, dressing,
deposition on a workpiece, etc., positive polarity of tool Flushing is a process of injecting fresh, filtered dielectric in the
electrode is preferable.[116,117] IEG. It plays a significant part in maintaining stable machining
 MATERIALS AND MANUFACTURING PROCESSES 7

with close tolerance and good surface quality. Inadequate powder particles generated higher EWR, owing to the
flushing results in arcing, high TW and increased production combined effect of a low MRR and high TWR by large
time. The use of stationary tool (without applying rotation) particles.[147,151]
often results in improper debris flushing and instability in
the spark zone.[134] The primary flushing methods are suction
Tool and workpiece materials
flushing, injection flushing, immersion flushing, and jet
flushing.[135,136] Suction and injection flushing are used in An ideal EDM tool electrode must remove the maximum
case of tubular tool electrodes and mainly employing air as a volume of material from the workpiece, with minimum self-
dielectric medium. TW in suction and injection flushing is erosion.[152] The major properties influencing the electrode
lower compared to jet flushing due to the lower gas volume, wear are thermal conductivity, thermal diffusivity, boiling
debris contamination, and dielectric temperature in the point, and melting point.[24] Tool electrode with high thermal
IEG.[135] Immersion flushing gives lowest EWR, but it is rarely conductivity, melting point, and boiling point exerts lower
used alone owing to its very low MRR and occurrence of arc TW.[134] Some preliminary tests are needed to be performed
and short circuit type pulses.[137] Jet flushing and immersion to acquire information on TW for a particular material-
flushing are used together to obtain higher MRR.[136] A signifi- parameter combination.[49] Many studies have been performed
cant decrease in TWR and improvement in MRR was observed with several combinations of tool electrode and workpiece to
in distributed flushing technique, wherein a rotating tool with get the best possible combination, which in turn yields
distributed holes was used as electrode.[138] Flushing pressure superior machining characteristics. The ability of µEDM
also affects the concentration of debris in the IEG and viscosity to process materials with high specific resistance such as
of the dielectric fluid.[139] Wear rate of material and tool ferrite and silicon made the process a major player in the
increases rapidly with increase in flushing pressure,[75,140] manufacturing of micro components.[153] High TW and
but too much pressure causes deflection of the tool in sporadic machining led to a decrease in MRR.[154] Tsai and
µEDM incurring inaccuracy in machining.[141] An increase Masuzawa[24] observed EWR in the order of electrode material
in flow rate leads to the introduction of fresher dielectric in to be Fe > Cu > Mo > W in micro-drilling of 100 µm thick
the spark zone causing adequate flushing away of debris. stainless steel 304 plate. Figure 5 shows the volumetric wear
MRR vary linearly with the mass flow rate of air and kerosene ratio of various electrode material-workpiece combination
mixture, whereas an opposite trend is observed in the case of concerning the melting point of electrodes. In micro-drilling
EWR.[142] In case of near dry ED-milling, the flow rate of of WC workpiece with different electrode materials, W
dielectric mist through discharge region must be prioritized exhibited minimum EWR followed by CuW and AgW owing
for maximizing MRR.[143] to the higher melting temperature of W.[108] In µED-milling of
Zirconium-based bulk metallic glass using W, Cu, and brass
microelectrode; Cu possessed lowest EWR at lower energy
Use of powder suspension in the dielectric
(0.9 µJ) whereas W possessed lowest EWR at higher energy
The suspended powder particles present in the dielectric act as (13.4 µJ).[155] Higher thermal conductivity was attributed to
a conductive medium and promote breakdown and increase Cu operating at lower energy (0.9 µJ) which transferred the
the IEG.[144–146] Different powders such as Al, Cu, SiC, heat away from the discharge location. In case of higher energy
MoS2, Ti, B4C, Al2O3, and graphite have been used with vari- (13.4 µJ), the high melting point of W was considered to be
ous combination of tool and workpiece to improve machining more significant than thermal conductivity for incurring low-
characteristics. The thermal and electrical conductivity of the est TW. Large amount of heat flux generated due to the higher
powder particles influences the performance of powder-mixed energy being unable to get transported away from discharge
µEDM significantly.[147] The increase in powder concentration location was credited for less significance of thermal conduc-
causes the frequent occurrence of the short circuit[144] result- tivity. The demand for WC electrode in µEDM has been rising
ing in early discharges[148] contributing towards decrease in due to its superior resistance to wear in high temperature.[156]
MRR and increase in TWR. Chow et al.[149] investigated the Chiou et al.[157] investigated the use of WC, WC coated Cu,
use of SiC powder in pure water and observed an increment and WC coated Ag as the tool electrodes for µED-milling of
in MRR and TWR with the use of SiC powder. In mixing high speed steel (HSS) alloy and observed lowest TW in case
Al, graphite, and Al2O3 with the dielectric to perform µEDM of WC tool. Kadirvel et al.[158] observed Cu exhibiting highest
sinking and milling operations; graphite and Al powder EWR followed by CuW, AgW, and W in micro hole drilling of
provided lowest EWR in sinking and milling operation EN-24 die steel. Lowest thermal conductivity and highest
respectively.[147] Formation of carbide layer in graphite tool melting temperature of W was attributed to minimum TW
hinders TW in sinking process whereas scanning movement among all the tool materials. Tool electrode size plays a vital
of milling allows fewer deposition of carbon particles causing role, as volumetric wear ratio increases with a decrease in the
more TW. Al powder provides higher spark gap thus reducing electrode diameter irrespective of any tool electrode material.[24]
the number of ineffective pulses resulting in lower EWR in Moreover, a gradual increase of the EWR with increasing aspect
both sinking and milling µEDM. Jahan et al.[150] observed a ratio was also reported.[156] Among the properties of the work-
decrease in EWR with an increase in the concentration of piece material, higher melting temperature and cohesion energy
graphite powder. However, powder starts settling in the spark cause higher TW.[159,160] The thermal and crystallographic ani-
gap when the concentration passes a certain limit (>0.2 g/L), sotropy of the workpiece and tool materials also plays a critical
leading to an increase in EWR. The increase in the size of role in material erosion mechanism of µEDM.[64,161] Research
8 S. KAR AND P. K. PATOWARI

magnetic field was greater than the ultrasonically vibrating

workpiece, but the cost associated with ultrasonic vibrator
setup was ten times larger than magnetic configuration. Flush-
ing away of debris from the IEG improved significantly with
the application of magnetic force along with centrifugal force
exerted by rotation of tool electrode.[176] The combination of
ultrasonic vibration of the workpiece and magnetic field was
not recommended because the benefit of one attachment
nullified the effect of other one and vice versa.[171] Tool
rotation generates a centrifugal force which assists in better
flushing of the eroded debris from the machining
gap.[118,177,178] The magnitude of centrifugal force increases at
high speed and drives the debris particles out of the machining
zone at higher speed, which in turn exposes a new area of the
workpiece to tool electrode, thus accelerating both MRR and
Figure 5. Volumetric wear ratio of various electrode materials (in order of the
melting point → small). (Reproduced with permission from Tsai and Masuzawa[24]). TWR.[179,180]
©Elsevier. Reproduced by permission of Elsevier. Permission to reuse must be
obtained from the rightsholder.
Tool wear compensation in micro electrical
had also been carried out in micromachining of electrically discharge milling
non-conductive and semi-conductive ceramic materials by Tool wear contributes more than 70% of the entire operation
adopting assisting electrode method, where an electrically cost, forcing to adopt TW compensation strategies which are
conducting material was applied to the surface of the ceramic inevitable.[135,181,182] TW needs to be adequately compensated
material to initiate spark.[162–166] to attain dimensionally accurate and precise micro features.
Execution of milling EDM in several thin layers leads to a
Tool geometry and other auxiliary attachments stable tool profile. Thus, the wear of tool can be corrected
by a movement along the tool axis as shown in Fig. 6.[183]
Compared to the conventional machining processes, EDM has Electrode wear compensation in conventional EDM milling
the advantage of utilizing entire surface of the tool electrode for can be based on off-line TW simulation before machining,
removing material.[54] Rods are preferable as a tool for µED- real-time wear sensing, and a combination of both.[34,36]
milling, as it is tough to provide a thin tube with a concentric Off-line wear simulation evaluates the TW based on the
hole in a solid rod of micro size (<1 mm).[167] The scanning volume of material to be removed with a given estimate of
process of milling further restricts the use of the tubular elec- the EWR.[34] Real-time wear sensing relies on effective
trode in milling EDM. The selection of the cross-sectional computation of discharges and estimation/assessment of the
shape of a tool influences the final dimensions of a machined TW per discharge in case of isoenergetic pulse generator. Sev-
cavity.[168] Sharp corners require the use of the polygonally eral researchers have sought different solutions to compensate
shaped electrode as cylindrical electrode produces round electrode wear in µED-milling. Many approaches have been
corners but sharp edges and tips worn out faster than rounded reported comprising electrode wear prediction, modeling,
ones.[168] The use of polygonal shape (rectangle, square, sensing, and compensation.[34,36,37,82,184,185] The electrode
triangle etc.) electrode with smaller side area compared to wear compensation techniques are grouped into offline and
round one fetched significant change in machining character- online types as discussed in subsequent subsections.
istics. Square electrode recorded minimum EWR (1%), whereas
triangular tool was able to suppress electrolytic corrosion
Off-line compensation
effectively.[122] The wear resistance of tool decreased with the
reduction in surface area, as less surface area was more This category of compensation techniques uses an already
susceptible to melting against discharges.[169,170] The machin- developed tool path movement based on certain logics. Among
ing performance concerning EWR gets highly reduced with these techniques, the linear compensation method (LCM)[34,84]
the aid of magnetic field and ultrasonic vibration in µEDM.[171] and the uniform wear method (UWM) had been widely imple-
They prevent the accumulation and generation of debris by mented in µED-milling.[82,168] Most of the newly developed
improved flushing and uniform dispersal of debris in the techniques are framed based on these concepts.
dielectric fluid.[172] With an increase in vibration frequency, a
decrease in the EWR was observed.[173] Elsewhere, an increase Linear compensation method
in MRR and decrease in frontal electrode wear was observed In LCM, a tool is continuously or incrementally fed along its
with an increase in the vibration frequency up to an optimal route to compensate for wear.[186,187] A constant ratio of the
value in µED-milling of Inconel 718.[174] Vibration can be electrode feed depth to the traveling distance is considered
incorporated in the tool, workpiece, and dielectric tank. Yeo (Fig. 7).[98] However, it is merely capable of generating 3D
et al.[175] observed 50% increase in MRR with no adverse effects micro features with straight sidewalls only,[34,36,82,84] and the-
on TWR by employing a magnetic field that produced Lorentz oretically, it is proved that LCM is not adequate to produce
force. Machining efficiency (high MRR and low TWR) of complicated 3D shapes by µEDM.[188] Vidya et al.[100]
 MATERIALS AND MANUFACTURING PROCESSES 9

account the machining gap existing on the lateral surface along

with bottom surface to achieve better profile accuracy.[189]
Moreover, the UWM can be incorporated with computer aided
design and computer aided manufacturing (CAD/CAM) to
manufacture complex 3D microcavity[92,190,191] Hung et al.[192]
utilized UWM with discharge depth of 50 µm to create a
uniform width of the flow channel. After preliminary exper-
imentation without compensation, they observed consumption
of 10 µm length for 1 mm length of tool. Without compen-
sation, the depth of the cavity regularly declined as shown in
Fig. 9(a). With the use of compensation, a uniform depth of
the profile was achieved along the entire slot as shown in
Fig. 9(b). Nguyen et al.[96] introduced the theory of the virtual
electrode with corner radius to overcome the errors of machin-
Figure 6. Combined movements in µED-milling. (Reproduced with permission ing gap, TW, and corner radius (in the case of inclined plane or
from Bissacco et al.[183]). ©Springer. Reproduced by permission of Springer.
Permission to reuse must be obtained from the rightsholder. Note: µED-milling,
curved surface) (Fig. 10). A superior dimensionally precise
micro electrical discharge milling. profile was accomplished by the virtual electrode concept.
The machining gap and TW were compensated during path
fabricated different types of 3D cavities like triangular, square, generation while the tip of the tool updated after machining
circular, channel, and cross-channel (square pillars) by µED- of each layer.
milling. The total passes needed for the generation of a cavity
were varied, wherein the depth of cut was fed intermittently.
After significant alteration in shape of an electrode, machining Multiple electrode strategy
was terminated for that specific electrode shape. This compensation technique is a basic approach proposed by
Reynaerts et al.[193] based on the use of multiple electrodes. It
gives superior repeatability and precision while decreasing the
Uniform wear method
risk associated in overcutting. Pham et al.[61] proposed a
This technique uses a layer by layer machining strategy with a
technique of multiple electrode strategy (MES) to machine a
round or rectangular cross-section of tool.[82] The TW is con-
cavity utilizing numerous milling paths. Every electrode
fined to the bottom of the tool, thus preserving the original
covered the entire cavity volume, while Z coordinate was reset
shape of the tool as depicted in Fig. 8. This phenomenon
at the point where the tool electrode first set up electrical
converts the 3D TW into a linear one during the process of
contact with the workpiece. The tool should be dressed to a
machining complex micro features by UWM.[82] In UWM,
certain length to bypass erosion with the undressed part.
the compensated length of TW for each layer is combined with
Fabrication of such electrode for multi-pass trajectory was a
the layer depth and applied in successive layers. To-and-fro
tedious task which had been explained by Karthikeyan et al.[68]
scanning path is followed to minimize inclination of the
Meeusen et al.[104] proposed a model which could be used to
machined surface. Overlapping tool path is pursued to mitigate
forecast the number of passes required. The proposed method
the effect of the marginally rounded corners of the tool on the
reduced the risk of overcutting the profiles, but machining
fabricated cavity. The interior portion and the boundary of the
rate was less due to the overlapping tool path. To improve
targeted area are machined consecutively to restore the original
the machining rate, Karthikeyan et al.[94] proposed a bulk
end shape of the tool. Layer depth < machining gap restricts
approach of µED-milling by multiple passes for fabrication of
the discharges only to the bottom of the tool as illustrated in
straight microchannels. A CAD algorithm was used to simulate
Fig. 4(a). On the contrary, layer dept > machining gap allows
the profile of the tool and the microchannel for each pass,
discharge to occur on both the bottom and lateral surface of
wherein a dressed tool was used for compensating the wear.
the tool as depicted in Fig. 4(b). It is essential to take into
The taperness of the channel decreased with an increase in

Figure 7. Effect of the LCM by µEDM. (Reproduced with permission from Yu Figure 8. Tool Wear in (a) conventional and (b) uniform wear method (UWM).
et al.[98]). ©IOP Publishing. Reproduced by permission of IOP Publishing. (Reproduced with permission from Narasimhan et al.[84]). ©Elsevier. Reproduced
Permission to reuse must be obtained from the rightsholder. Note: µED-milling, by permission of Elsevier. Permission to reuse must be obtained from the
micro electrical discharge milling; LCM, linear compensation method. rightsholder.
10 S. KAR AND P. K. PATOWARI

Figure 9. Comparison of electrode compensation experiment: (a) no electrode compensation and (b) electrode compensation. (Reproduced with permission from[192]).
©Elsevier. Reproduced by permission of Elsevier. Permission to reuse must be obtained from the rightsholder.

the number of passes, wherein the desired cavity was achieved Based on scanned area method
after the fourth pass. Later Shukla et al.[194] had successfully Even though the compensation points are linearly distributed
implemented a similar technique in fabricating T-type, straight along tool paths of the layer in CLU method,[98] EWR does
serpentine, and curved serpentine microchannels with different not exhibit a linear relationship due to the scanning tool path
channel radius (0.5–1.5 mm) and aspect ratios varying from overlap.[195] It necessitated the consideration of scanned area
0.5 to 1.5. to compensate TW at certain positions of the tool route.[196]
Li et al.[196] coined a TW compensation technique to
Combined linear uniform method accomplish constant EWR, where compensation positions were
Combined linear uniform (CLU) method is a combination of located based on scanned area (BSA) on the tool route of every
the UWM and the LCM process proposed by Yu et al.[98] layer as shown in Fig. 12. One of the primary benefits was the
The tool path design is based on UWM to guarantee unaltered decreased occurrence of abnormal discharges due to an even
shape of the tool tip after machining one layer. While allocation of electrode wear length in machining a layer.
machining each layer, the total compensated length of TW is Experimental results with BSA method indicated an increased
precisely divided into numerous sections covering the entire MRR and decreased TWR as compared to CLU method.
tool path. Improved MRR, EWR, and surface roughness were
observed in comparison to the UWM while machining a square Fix length compensation method
cavity with slanted surfaces.[98] Figure 11 represents the elec- Tool wear model proposed by Yu et al.[195] depicted the bot-
trode after machining with CLU method. The tip of the elec- tom surface of the machined groove to remain slant. In light
trode after machining remained flat which was analogous to of this perception, fix length compensation (FLC) method
UWM. Yu et al.[195] proposed a hypothetical model for for µEDM was introduced by Pei et al.[197] and Xu et al.[198]
surface profile generation considering the effect of TW and where compensation was applied after a fixed machining
found experimental results to be in close concurrence with length as shown in Fig. 13.[199] The model enhanced the
simulation results. Machining based on this model yielded an dimensional precision and shape exactness of the machined
accurate surface profile (within 1 µm for µEDM and 0.14 mm groove. The wear model concerning the FLC method with a
for macro-EDM)[84] with the limitation that width of the cut conical tool was derived, and the corresponding computation
should be constant. A constant width of the cut was achieved of compensation length was resolved by Pei et al.[199] The
by pocketing toolpath and assigning equal distance between bottom part of cylindrical tool gradually transformed into a
the paths.

Figure 10. Illustration of virtual electrode geometry: (a) without corner radius Figure 11. Electrode after machining (CLU). (Reproduced with permission from
(old model) and (b) with corner radius (new model). (Reproduced with permission Yu et al.[98]). ©IOP Science. Reproduced by permission of IOP Science. Permission
from Ref.[96]). ©Elsevier. Reproduced by permission of Elsevier. Permission to to reuse must be obtained from the rightsholder. Note: CLU, combined linear
reuse must be obtained from the rightsholder. uniform.
 MATERIALS AND MANUFACTURING PROCESSES 11

conical shape which directly affected the compensation

algorithm.[199] The angle of cone-shaped tool remained constant
following the formation of the cone angle. The deviation of layer
thickness and machined depth increased with the increment in
the latter. A two-dimensional geometrical simulation model
was developed by Zhang et al.[200] to anticipate the machined
profile of the workpiece and the tool for the better realization
of the cone-shaped tool. The model incisively predicted the work-
piece and tool profile for a layer thickness less than 85.5 µm in
the FLC strategy. However, the process failed to achieve the
desired level of consistency. Consistency was accomplished by
adopting double layers machining strategy, wherein, a concept
of the equivalent plane followed by a simplified triangle model
was introduced.[201] Experiment result for a depth of 86 µm
depicted the evenness of machined profile < 10 µm and error
of the compensation length < 2 µm. Zhang et al.[202] proposed Figure 13. Theory of fix length compensation. (Reproduced with permission from
Zhang et al.[200]). ©Elsevier. Reproduced by permission of Elsevier. Permission to
a large monolayer thickness milling method by modifying the reuse must be obtained from the rightsholder.
conventional FLC model and achieved higher machining
efficiency, precision, and quality of µED-milling as compared
to conventional UWM and layer by layer machining method. conventional positioning display indicator of µEDM machine
setup.[206] The accuracy of the process depends on pulse count-
ing and measurement of small volumes, which is very challeng-
On-line compensation ing. Discharge pulses in µEDM are not isoenergetic, and
This category of compensation techniques uses real time on limited signal processing speed of very short pulse duration
the machine assessment of electrode wear by collecting data (30 ns) hinders full discharge discrimination in µEDM.[207]
and maneuvers the tool movement along the desired path Aligiri et al.[99] estimated the MR phenomenon of µEDM
based on the data acquired to compensate for wear. This drilling in real time based on MR characteristics for a single
category of compensation techniques can avoid error caused discharge. However, the determination of a cavity volume
due to re-installment of workpiece and tool electrode.[203] was influenced by imprecision because individual discharges
were not illustrative of the original process.[207] Full discharge
Discharge counting method discrimination by assigning TW and MR values to each dis-
This type of TW control relies on counting the discharge charge is a difficult task. To overcome this difficulty, Bissacco
and evaluating the volume of material wear and TW per et al.[207] proposed a real-time TW compensation method using
discharge.[183,204] Liao et al.[205] classified pulses from an RC a statistical distribution of discharges rather than individual
power source into complex, transient short circuit, effective ones assuming that a steady machining would lead to a stable
arc, and normal types. A schematic diagram outlining the vari- discharge population. However, estimation errors of TW per
ous types of pulses is depicted in Fig. 14. Figure 15 shows the discharge will cause errors on the axial depth of the tool
bar chart of the acquired pulses from a µED-milling of stainless electrode.[208] The error associated with the estimation of TW
steel using tungsten tool of 300 µm diameter and feed rate of per discharge can be subdued by recurring measurement of
0.1 mm/min. At lower feed rate, a smaller number of complex the tool length while machining, besides counting the total
and effective arc pulses were observed with more than 60% number of discharges. For a particular energy level, MR per dis-
pulse contributing to normal type. On the other hand, a higher charge is decreased with the advancement of machining and sta-
feed rate contributed to a higher proportion of complex pulse bilized after an appropriate depth. A MATLAB simulation tool
and a lower proportion of normal pulse. Discharge counting was developed by Bissacco et al.[209] for accurate representation
method (DCM) yields dimensional accuracy compared to the of machined workpiece geometry. It could be utilized for defin-
ing tool trajectory, TW compensation and checking the progress
of the machining operation. Wang et al.[115] proposed a method
of counting pulse based on current peak identification to check
the impact of alternating current flow on the tool-workpiece
interaction in µED-milling. Figure 16 shows the microscopic
image of square machined cavities of depth ¼ 60 µm and exter-
nal length ¼ 1.5 mm with the corresponding depth profile of
each cavity. The pulse counting coupled with an accurate TW
compensation factor (the slope of Z-axis tool feed along its path
in the X–Y plane) generated depth error within �1 µm for an
aggregate depth of 60 µm. After determining the mean TW
per discharge, adaptive wear compensation (real-time pulse
Figure 12. Electrode wear compensation of BSA. (Reproduced with permission
from Li et al.[196]). ©Elsevier. Reproduced by permission of Elsevier. Permission to
counting) was conducted in-line, whereas off-line compensation
reuse must be obtained from the rightsholder. Note: BSA, based on scanned area. (by electrical touch) was performed in case of predicted depth
12 S. KAR AND P. K. PATOWARI

Figure 14. Schematic diagram of various waveforms (Reproduced with permission from Liao et al.[205]). ©IOP Science. Reproduced by permission of IOP Science.
Permission to reuse must be obtained from the rightsholder.

error exceeding �2 µm.[210] This method reduced cycle time to actuate the actuator. The machining performance roused to
18% while preserving the accuracy of machining.[211] 6.5 times using vibration frequency ¼ 5 kHz and amplitude ¼
2.7 µm, wherein the MRR attained 1.4 � 105 µm3/s. The depth
Servo scanning method errors were further addressed by the proposed algorithms such
Li et al.[212] proposed a 3D servo scanning EDM strategy in as S-curve accelerating algorithm (SCAA) and layer depth con-
which wear compensation was realized in real-time through strained algorithm (LDCA).[216] LDCA controls over-cutting
layer-by-layer examination of the discharge gap. The CAM sys- errors by monitoring tool-electrode feed at every scanning spot,
tem, TW compensation in real-time, and gap servo control and SCAA compensates errors at start and end of the paths.
were integrated into the machining system to keep consistent Figure 17 shows the profile of machined cavity without and
machining depth for each layer. The electrode travel was servo with the application of SCAA.[216] Taperness was observed at
controlled in the axial direction by comparing the feedback the start and end of the injected mold that did not consider
(voltage and current) state value with the discharge state value SCAA, whereas straight edge was seen at the start and end in
to keep a well-balanced discharge gap. Moreover, the inte- case of mold fabricated by considering SCAA. Depth errors
gration of CAD/CAM system aided in reliability of the system were within 2 µm, and the MRR reached 2.0 � 104 µm3/s using
in fabricating 3D microstructures.[213] Several functions such as a tool electrode of 80 µm diameter and a rotational speed of
model design, path planning and simulation, real time com- 1000 rpm. Tong et al.[217] proposed discrete methods of rough
pensation of TW, generation of NC code, post processing, and finish machining by SS-3D µEDM and achieved dimen-
and machine control were taken care by the CAD/CAM sys- sional accuracy of <5 µm and surface roughness of 0.38 µm.
tem. Tong et al.[214] designed a macro/micro dual feed spindle Moreover, the processing efficiency was improved by 2.4 times
by integrating a piezoelectric (PZT) actuator and an ultrasonic compared to the use of only finish machining. The contrast of
linear motor (ULM) to improve the machining accuracy and edge and corner of a rectangular cavity obtained by rough and
efficiency of SS 3D µEDM. The PZT actuator maintained finish machining is shown in Fig. 18, where higher roughness is
the suitable gap for discharge while the ULM enhanced the observed in the case of rough machining.[217] Finish machining
working range (100 mm) and resolution (100 nm). A micro- was executed by minimizing DE to achieve better dimensional
rectangle cavity ð960 � 660 mm2 Þ resulted in <2% depth error accuracy and surface topography.
and <1% XY dimensional error. In another case, a multi-
micro-triangle cavity (side length 700 µm) resulted in <0.7% High resolution vision system
repeatability error. Tong et al.[215] developed a method of Yan et al.[185] proposed a TW compensation method for
workpiece vibration-assisted SS 3D µEDM utilizing a PZT µEDM based on a vision system and achieved 40% reduction
actuator for improving the discharge ratio of the favorable in machining time in comparison to the UWM. For the
discharge gap. High-frequency sine wave voltage was used to straightforward measurement of TW, machining operation
was temporarily interrupted, wherein the tool electrode was
taken to a particular location where the developed vision
system operated appropriately. Very less time (4.5 s) was con-
sumed in this electrode wear sensing operation. SEM images of
microsquare cavities machined utilizing UWM, and the pro-
posed high resolution vision system (HRVS) compensation
method is shown in Fig. 19.[185] HRVS method took six layers
of machining to achieve a depth of 150 µm, whereas to achieve
same depth by UWM, the process took ten layers of machin-
ing. Image processing software of the vision system was uti-
lized to evaluate the corner wear and frontal wear.[218] The
proposed method conceded a relative error of 3% in compari-
son to the results of tool microscope. At a fixed feed rate, the
hole depth and groove depth were found to vary the length of
frontal wear linearly. Similarly, at fixed hole depth and groove
Figure 15. Bar chart of various pulse types with their contribution % in depth, an increase in the feed rate resulted in an increment of
µED-milling. (Reproduced with permission from Liao et al.[205]). ©IOP Science.
Reproduced by permission of IOP Science. Permission to reuse must be obtained the frontal wear length. Corner wear ratio (ratio between the
from the rightsholder. Note: µED-milling, micro electrical discharge milling. length of corner wear and diameter of the electrode) increased
 MATERIALS AND MANUFACTURING PROCESSES 13

Figure 16. (a) Optical microscope image of four machined cavities, and (b) the depth profile of each cavity. (Reproduced with permission from Wang et al.[115]).
© Elsevier. Reproduced by permission of Elsevier. Permission to reuse must be obtained from the rightsholder.

linearly with an increase in machining length. Moreover, an was fixed, and electrical contact was utilized to extract the
increase in machining depth also increased corner wear ratio. coordinate value. After machining one layer, the machining
Overlapping tool path could compensate corner wear, wherein coordinate was recorded, and dimension of the tool was
the two adjacent overlapping tool paths could be designed as per measured bringing the tool in contact with the preset fixed
the corner wear length as shown in Fig. 20.[218] The proposed point.[219] Hang et al.[188] successfully fabricated a micro hemi-
TW compensation and multi-cut process planning methods were sphere of 100 µm diameter in platinum, wherein longitudinal
effective in controlling X–Y geometrical error within 10 µm, TW was compensated by accumulating coordinates from
thereby depicting the efficiency of the approach. electrical contact of the tool with the machined cavity and a
preset reference point. Modica et al.[220] utilized a similar
Fixed reference compensation compensation technique in fabricating microchannels having
Wang and Dong[95] successfully fabricated a prototype of a a length of 13 or 5 mm, a width of an effective diameter (actual
micro compressor comprising of rotor and stator disks by a tool diameter + spark gap), and a nominal depth of 0.1 to
simple TW compensation strategy, in which a reference point 0.25 mm. Modica et al.[221] used ten control touches for

Figure 17. Start-and-end path comparisons between with S-curve accelerating algorithm (SCAA) and without it. (Reproduced with permission from Tong et al.[216]).
©Elsevier. Reproduced by permission of Elsevier. Permission to reuse must be obtained from the rightsholder.
14 S. KAR AND P. K. PATOWARI

Figure 18. Contrast of edge-and-corner accuracies and surface roughness (for an example of micro rectangular cavity) (a) Rough machining Sa ¼ 0.475 µm,
(b) finishing machining Sa ¼ 0.38 µm. (Reproduced with permission from Tong et al.[217]). ©Springer. Reproduced by permission of Springer. Permission to reuse must
be obtained from the rightsholder.

Figure 19. SEM photograph of a microsquare cavity (a) machined ten layers using the uniform wear method, (b) machined six layers using the proposed
compensation method. (Reproduced with permission from Yan et al.[185]). ©Springer. Reproduced by permission of Springer. Permission to reuse must be obtained
from the rightsholder. Note: SEM, scanning electron microscope.

machining 1 µm layer thickness of 5 mm linear channel, with a present on the workpiece (eventual oxidation and the presence
tool of 400 µm diameter. During the initial stage of machining, of debris in working area) and its orientation, thus hindering
the TW compensation was not optimized due to surface flaws stability and repeatability of erosion process. The TW compen-
sation factor converged from the 5th control touch and between
the 10th and 11th control touch the required machined layers
reduced from 5 to 3. A similar approach was adopted to com-
pensate TW in the fabrication of micro filter mold of 2.3 mm
diameter by µED-milling. The filter mold consisted of 76 pins
with a square section of 80 µm side and 0.15 mm height.[222]
The main limitation of reference based system is the capability
to estimate only electrode linear wear and its accuracy is depen-
dent on machine tool repeatability in z-axis.[223]

Challenges of implementing compensation

techniques
Implementation of a compensation technique meets several
challenges before being practicable. This section describes all
such issues that are to be dealt meticulously for proper
execution of a compensation technique.

Relative wear measurement issue

Figure 20. Design of track overlapping. (Reproduced with permission from Yan
et al.[218]). ©Springer. Reproduced by permission of Springer. Permission to reuse Most of the compensation techniques use EWR in some form
must be obtained from the rightsholder. or another. The accuracy and efficiency of a compensation
 MATERIALS AND MANUFACTURING PROCESSES 15

technique hugely depend on the accuracy in assessment measurement of EWR is a tedious task and has to be implemen-
of EWR. Underestimation will lead to undercut whereas ted very cautiously.
overestimation will lead to overcut. So, the determination of
correct EWR is of prime importance. EWR can be calculated
Process stability and reliability of prediction theory
by measuring weight, shape, length and total volume.[24]
Weight difference of tool electrode and workpiece is the most For stable µED-milling to occur, EWR should be minimized as
common technique used for calculating EWR. Both MRR and much as possible. TW depends on many factors which are
TWR can be calculated by measuring the weight of the tool already described in the section “Factors influencing tool
electrode and workpiece before and after machining as per wear.” µED-milling had been successfully applied over a range
the following equations: of traditional materials over a period. The available research
studies can help in selecting optimum machining parameters
MRR ¼
for those materials without any trial and error test. However,
Initial weight of workpiece Final weight of workpiece the introduction of new materials will serve a real test to the
Machining time capability of the existing methods and equipment. The
ð3Þ suitability of applying a particular compensation technique
Initial weight of tool Final weight of tool depends on the in-hand facilities available, especially the
TWR ¼ ð4Þ capability of the µEDM machine. So, compensation technique
Machining time
should be selected properly looking at the available facility and
Elsewhere, calculation of volumetric wear provides more data.
reliable estimation of EWR, wherein volume of the workpiece Every compensation technique is based on some prediction
and tool electrode is measured before and after experimen- such as wear ratio, material removed per discharge, TW per
tation as depicted in the following equations: discharge, etc. As µED-milling is a layer by layer machining
strategy,[183] any error of these values in a layer will have a
MRR ¼
cumulative effect on machining performance in the succeeding
Initial volume of workpiece Final volume of workpiece layers. The assumed variables have to be verified exhaustively
Machining time before being applied in actual machining.[225] So, before
ð5Þ conducting actual machining, it is better to check the
Initial volume of tool Final volume of tool reliability of the adopted compensation technique by rigorous
TWR ¼ ð6Þ trial machining.
Machining time
Mathematically EWR can be expressed as: Advantages of tool wear
MRR
EWR ¼ ð7Þ Tool wear can be minimized and compensated but cannot
TWR be ignored in any EDM process. The electrical discharge
Traditional estimation techniques are dependent on the machined workpiece undergoes constant melting and solidifi-
volumetric computation of eroded material from workpiece cation under the pulsating discharges of high temperature.[226]
and tool. Misjudgment and inaccuracy in measurement lead Plasma channel developed in the IEG consisting of material
to errors. Relative wear can be measured by weighing tool vapor from tool and workpiece and pyrolysis of the hydro-
electrode and workpiece before and after machining. But the carbon liquid alters the surface properties of the workpiece.[227]
accuracy of the final cavity is affected by the positioning and The surface of workpiece gets modified up to a particular
setup errors imparted due to the repeated dismantling of tool extent (depth) depending on the machining conditions.[228]
and workpiece.[144] Moreover, the measurement is highly The modified surface is often termed as recast layer or white
unreliable as the variation in weight approach often yields a layer which also consists the tool materials. In comparison to
negligible value due to the subtle volumetric removal in the parent material, the recast layer possesses superior surface
micromachining.[141] The length of TW and depth of the properties concerning hardness, wear resistance, abrasion
cavity can be determined by the electrical contact of both resistance, and corrosion resistance. These superior surface
electrodes. But the process leads to non-ignorable errors properties led the researchers to explore the concept of modi-
depending on the repositioning precision of machine fying workpiece surface by intentional transfer of tool material.
tools.[224] Zhang et al.[202] achieved a substantial accurate The concept of reverse polarity and the evolution of P/M
estimation of EWR by introducing a wear measurement compacted tool electrodes further enhanced the efficiency of
technique based on analyzing the material composition of workpiece surface modification. Gangadhar et al.[229] success-
debris and knowing the density of electrode and workpiece fully modified the surface of steel using electrolytic solid
material. Machine vision system coupled with image copper and bronze compact (Cu 90% and Sn 10%) tool
processing software has been highly used in the measurement material while machining at straight polarity and reverse
of relative wear, with a measurement error of both corner wear polarity respectively. The presence of tool materials and carbon
and front wear less than 3%.[185,218] With the aid of design diffusion was confirmed by X-ray diffraction (XRD) and elec-
software, a new wear measurement method had been coined tron spectroscopy for chemical analysis (ESCA). The thickness
by Karthikeyan et al.[141] and the error was found to be well of the soft layer, comprising of Cu and Sn, was prominent in
below 5%. From the above discussion, it can be inferred that case of reverse polarity. Along with the use of green compact,
16 S. KAR AND P. K. PATOWARI

sintering was also applied to the P/M tool electrodes to was observed to move along the outer diameter as helix shape
enhance the strength of the compact tool.[152,230–234] The rate conforming the trend of deposit growth. Peng et al.[128] suc-
of wear in case of the green compact tool was higher than cessfully deposited micro-cylinder of brass, steel, and tungsten
the sintered tool owing to poor thermal conductivity and loose on the surface of HSS by performing µEDM deposition in the
interparticle bonding, thus facilitating easy transport of air. The hardness of the deposit increased due to the grain
tool material to the workpiece surface.[235] Krishna and refinement taking place owing to the high cooling rate of solidi-
Patowari[236] successfully deposited W-Cu over the surface of fication. Peng et al.[33] developed a technique of angular depo-
mild steel by using green compact W-Cu tools achieving a sition with µEDM, wherein the tool electrode and workpiece
thickness of 737.16 µm of deposited layer. In a similar study, were set at an angle of 45°. Further, they also successfully
the deposited layer of W-Cu was found to be harder than deposited material against the gravity by fixing the tool on
the steel substrate by 5–6 times.[30] Mussada and Patowari[237] the worktable and moving the workpiece towards the tool.
observed the average grain size of the deposited layer to be The formation mechanism of spiral structures was credited to
ranging between 51.75 and 82.42 nm in depositing W-Cu the use of short pulse duration leading to the gasifying removal
over the surface of Aluminium by EDM process. A novel of tool electrode; and smaller DE contributing to the formation
method of enhancing the surface finish of the deposited of magnetic field force leading to the directional movement of
layer by performing stepwise machining, stepwise the deposited particles.[33] Micro-cylinders were formed at
deposition and machining were successfully performed by higher pulse duration leading to melting removal of the tool
Mussada and Patowari.[238] Chakraborty et al.[239] observed whose direction was not influenced by any external force.[33]
an increase in microhardness of the deposited layer by Wang et al.[242] developed a thermo-physical FEM simulation
1.5–3 times as compared to the Al-6351 substrate using green model of µEDM deposition and successfully deposited a brass
compact SiC-Cu tool and kerosene as the dielectric. Rahang micro-cylinder of diameter ¼ 200 µm and height ¼ 2 mm.
and Patowari[32] successfully implemented selective depo- Peng et al.[116] developed a method called micro-reversible
sition by intentional transfer of tool materials from selective EDM combining both µEDM deposition and selective removal
portions. Masking was applied on the workpiece surface of material using a single µEDM machine setup. Machining
to make specific areas electrically nonconductive. Prakash condition was switched from deposition to selective removal
et al.[240] successfully modified the surface of nickel sheets and vice versa by changing the processing parameters to suit
by µEDM with the use of Ti-6Al-4V tool electrode. Micro- each method. Figure 21 shows a steel cylinder of diameter
hardness of the machined surface varied from 161.61 to 200 µm and height 1455 µm deposited over HSS (by µEDM
338.25 HV, whereas the base metal possessed microhardness deposition) and drilled micro-holes of 80 µm (by µEDM drill-
of 132.25 HV. The increase in hardness was due to the depo- ing) in the radial direction. Figure 22 shows various micro-
sition of TiC on nickel sheet. From the above-cited works, it structures fabricated by the micro-reversible EDM method
can be inferred that TW in EDM process has been extensively where µED-milling was used as the selective removal process
exploited for modifying the surface properties of workpiece after deposition. Zilong et al.[243] designed an external mag-
material. netic field to improve the compression plasma discharge
Exploring the TW phenomenon, Wang et al.[241] deposited channel of µEDM deposition. The external magnetic field
micro three-dimensional spiral structure of brass with 200 µm influenced the discharge channel within the range of 100 to
external diameter and 110 µm wire diameter over the surface of 200 µm when the numbers of turns were increased to 20,
HSS. The movement of the deposited particles of the plasma owing to a very high magnetic induction intensity at the
channel was traced to be helix shape. The discharge position center of the discharge.

Figure 21. Selective removal of micro-EDM drilling: (a) steel cylinder with holes; (b) 80 µm micro-hole. (Reproduced with permission from Peng et al.[116]). ©Elsevier.
Reproduced by permission of Elsevier. Permission to reuse must be obtained from the rightsholder.
 MATERIALS AND MANUFACTURING PROCESSES 17

Hybridizing µED-milling of the pre-machined laser (0.1 and 1 mJ/pulse). With the use
of laser machining by high energy (1 mJ/pulse), machining
Hybridizing µED-milling process with other micromachining
time was successfully reduced to 50% of that of EDM. But,
techniques will enhance process capabilities, minimize weak-
an additional mechanical deburring process was needed to
nesses, and extend application areas over a wide spectrum of
eradicate the burrs developed on the edges due to higher
materials.[244] Further, hybridization eliminates the
energy. Further decrease in machining time (75%) was
shortcomings of the processes and benefits overall machining
observed with the use of variable depth for each layer machin-
by rendering benefits of all the processes.[245] Hybrid machin-
ing in µED-milling. However, the effect of TW on groove
ing process combining mechanical milling and EDM were
profile by increasing the depth of layer was not discussed.
reported in few studies.[246–248] Byiringiro et al.[246] used end
Nguyen et al.[251] observed an improvement in the dimen-
mill WC as the tool electrode in machining a steel alloy. Milling
sional accuracy and surface integrity by the simultaneous use
action occurred during the contact between both electrodes,
of µED-milling and micro electro chemical milling (µEC-
whereas EDM action occurred when a gap existed between
milling) processes. Surface finish was attained by promoting
the two. Li et al.[248] achieved higher efficiency (14.4 times)
electrochemical reaction using low machining speed whereas
with EDM-end milling process using WC end mill tool elec-
short voltage pulse was used for precise machining which
trode as compared to EDM while machining STD 11 alloy steel.
localizes dissolution zone while removing micron-thick layer
At lower DE microchipping occurred on rake and flank of the
by discharge crater. Materials diminished from the recast layer
cutting edge of the tool, but with the increase in DE, flank wear
in lower feed rate (10 µm/s) due to the generation of a smooth
became prominent due to the increase in melting area at higher
layer by the electrochemical reaction as depicted in Fig. 23(b),
DE.
23(d), and 23(f). Higher feed rate (50 µm/s) hindered electro-
Micro electrical discharge machining was also hybridized
chemical reaction without affecting the µEDMed surface as
with laser machining where the former provided good surface
shown in Fig. 23(a), 23(c), and 23(e). Zeng et al.[252] observed
quality while the latter enhanced machining rate.[249,250]
a decrease in surface roughness from 0.707 µm by µEDM to
Kim et al.[250] reported a hybrid micromachining technique
0.143 µm by µEC-milling. The simultaneous application of
comprising of nanosecond pulsed laser and µEDM, where
µEC-milling after µED-milling was able to remove micropores,
the laser was used for grooving (depth ¼ 75 µm and length ¼
burrs, craters, and recast layer completely, thus enhancing the
100 µm), and µED-milling was applied in layer by layer for fin-
mechanical property and surface quality of the workpiece.
ish machining. Micro grooves were fabricated with hybrid
Efforts can be laid in combining µEDM process with batch
machining (laser and µED-milling) at different energy values
fabrication methods such as imprinting, coining, embossing,
micro injection molding to increase the production rate of high
aspect-ratio microstructures and application of µEDM over a
wide range of materials.[253]

Research trends and future scope

The trend of the major research studies on TW compensation
techniques applied in µEDM milling from the past is indicated
in Fig. 24. In 1997, Kuo et al.[186] and Yuzawa et al.[187] intro-
duced linear compensation concept in machining a 9 � 9 mm2
square cavity by µED-milling. However, linear compensation
was able to machine only straight cavity and not suitable for
machining any complex 3D shape. In 1998, the theory of
UWM was conceptualized by Yu et al.[82] to machine compli-
cated 3D microcavities. This method was able to convert the
3D electrode wear to a linear one, maintaining the original
shape of the electrode. The main limitation of this approach
was higher machining time due to the lower layer thickness
applied in machining each layer. Pham et al.[61] implemented
MES in 2004 to machine a cavity employing several milling
routes, wherein each electrode covered the entire route. It gave
accurate micromachining but wasted time when a new elec-
trode followed the same route already eroded by its prede-
cessor. In 2005, Narasimhan et al.[84] implemented a hybrid
compensation strategy by joining LCM and UWM to get the
benefits of both the strategies. The surface profile of the
Figure 22. Selective removal of µED-milling: (a) brass square column; (b) partial machined cavity was within 1 µm. In 2007, servo scanning
of square column; (c) steel micro-cylinder; (d) partial of micro-cylinder. method (SSM) was coined by Li et al.[212] This method utilized
(Reproduced with permission from Peng et al.[116]). ©Elsevier. Reproduced by
permission of Elsevier. Permission to reuse must be obtained from the right- real-time information from the discharge gap to control the
sholder. Note: µED-milling, micro electrical discharge milling. electrode movement. The SSM was further modified over the
18 S. KAR AND P. K. PATOWARI

Figure 23. SEM micrographs of micro-slots and micro-features machined at different feed rates: (a, c, e) 50 µm/s and (b, d, f) 10 µm/s. (Reproduced with permission
from Nguyen et al.[251]). ©Elsevier. Reproduced by permission of Elsevier. Permission to reuse must be obtained from the rightsholder. Note: SEM, scanning electron
microscope.

years by many researchers by integrating several hardware images on the machine and achieved 40% reduction in
components and algorithms to achieve better machining machining time. Later in 2013, Bissacco et al.[209] combined
performance and reduce depth error.[214–217] In 2007, Wang discharge counting and in-situ measurement system and
et al.[95] developed a simple technique of online compensation obtained excellent compensation accuracy (within 1 µm).
based on electrical contact of the electrode to a reference point. Wang et al. implemented different hybrid compensation stra-
This data could accurately predict the TW and subsequently, tegies by combining DCM with fixed reference compensation
help in applying the required compensation. Several research- (FRC),[115] DCM with FRC and LCM,[210] and DCM with
ers had used this technique, as the process did not need any FRC, LCM, and HRVS[211] and obtained high dimensional
external source for functioning.[219–222] Jung et al.[204] devised and form accuracy with improvement in machining rate.
a TW compensation technique based on counting the effective In 2009, Pei et al.[197] introduced FLC technique, which
discharge pulses. The efficiency of the technique depended on accounted both bottom wear and side wear and achieved a
the accuracy of the data acquisition system designated to compensation accuracy of 1 µm.[200] However, the model
capture voltage and current signals. In 2009, Yan et al.[145] was able to predict profile of electrode and workpiece up to
developed a vision based system to calculate TW by analyzing 85.5 µm layer thickness. In 2010, Yu et al.[98] linked LCM

Figure 24. Distribution of collected research studies on compensation techniques used in µED-milling. Note: µED-milling, micro electrical discharge milling.
 MATERIALS AND MANUFACTURING PROCESSES 19

Table 1. Evolution of tool wear compensation techniques in µED-milling.

Year Author(s) Compensation technique Research achievements
1997 Kuo et al.[186] and LCM The final flatness of the cavity bottom within 2 µm
Yuzawa et al.[187
2000 Rajurkar et al.[92] UWM Tip shape of electrode unchanged
2004 Pham et al.[61] MES Better level of repeatability and accuracy for µED-milling
2005 Narasimhan et al.[84] LCM + UWM Accuracy of surface profile within 1 µm
2006 Hang et al.[188] FRC Achieved diameter of hemisphere bottom close to target diameter of 100 µm
2008 Jung et al.[204] DCM Geometrical error of <5 µm at turning positions; The cross-sectional profile
maintains a flatness
2008 Tong et al.[214] SSM (macro/micro-dual-feed spindle) The machined depth error controlled within 2%; X–Y dimensional error within
1%; MRR: 1.58 � 104 µm3/s; machining repeatability error <0.7%
2008 Tong et al.[215] SSM (vibration-assisted) Machining efficiency increased by 6.5 times at the assisting vibration frequency
of 5 kHz and amplitude of 2.7 µm; MRR: 1.4 � 105 µm3/s
[185]
2009 Yan et al. HRVS Machining time reduced by 40% compared to the UWM; relative measurement
error of 3% for tool wear
2010 Bissacco et al.[183] DCM Maximum resolution of 1 µm3 obtained; absolute variation of electrode wear
length within 1.5 µm at the same energy
[98]
2010 Yu et al. CLU, UWM MRRCLU > MRRUWM and EWRCLU <EWRUWM at layer thickness of 0.5, 0.75, and
1 µm
2011 Hung et al.[192] UWM Uniform depth of flow channel along its entire length
2011 Bissacco et al.[207] DCM (population Wear length error quite stable and always within 2 µm for a total wear length of
characterization + periodical 200 µm
measurement)
2011 Yan et al.[218] HRVS Improved machining accuracy and reduced machining; dimensional errors
controlled within 10 µm; Relative measurement errors less than 3%
[44]
2012 Sheu et al. UWM Electrode remained flat after semispherical machining
2012 Modica et al.[220] FRC MRR: 0.014–0.158 mm3/min; EWR: 3.1–4.4%
2012 Zhang et al.[202] FLC (monolayer) Machining time half of UWM; high machining precision
2013 Nguyen et al.[96] UWM (virtual electrode) Theoretical profile error of 0.011 µm for slanted section and 0.006 µm to 0.3 µm
for curved section; Measured average profile error of 1.55 µm for inclined
plane and 0.89 µm for curved section
2013 Li et al.[196] UWM, CLU, BSA MRRBSA > MRRCLU > MRRUWM at layer thickness of 0.5 µm and 0.75 µm;
MRRCLU > MRRUWM > MRRBSA at layer thickness of 1 µm; and
EWRBSA < EWRCLU < EWRUWM at layer thickness of 0.5, 0.75, and 1 µm
2013 Pei et al.[199] FLC The range of the bottom morphology within 8 µm
2013 Bissacco et al.[209] DCM (discharge population + on the Average depth error of 1 µm and diameter error between 2 and 3 µm (3% for a
machine measurement) step depth of 50 µm)
2014 Tong et al.[216] SSM (LDCA, SCAA) Improved machining accuracies of micro surfaces and edges; depth errors
controlled within 2 µm; horizontal dimension errors controlled <5 µm; MRR
reaches 2.0 � 104 µm3/s
2015 Zhang et al.[200] FLC Compensation accuracy of 1 µm
2016 Pei et al.[201] FLC (equivalent plane) Fluctuation range of the bottom profile within 4 µm; depth of the machined
surface ranged within 10 µm; error of the compensation length within 2 µm
2016 Tong et al.[217] SSM (on-machine process of rough- Dimensional accuracy <5 µm; processing efficiency improved by 2.4 times
and-finishing) compared to using only finishing processing
[222]
2016 Modica et al. FRC Average depth error of 0.5 µm for all features; MRR: 0.00014 mm3/min
2016 Wang et al.[115] DCM + FRC Measured depth error within �1 µm for a total depth of 60 µm
2016 Wang et al.[210] LCM + DCM + FRC High dimensional and form accuracy and reduction of >80% of the number of
the original off-line compensation operations
2017 Wang et al.[211] LCM + DCM + FRC + HRVS Saving of 18% cycle time with desired dimensional and form accuracy
µED-milling, micro electrical discharge milling; BSA, based on scanned area; CLU, combined linear uniform; DCM, discharge counting method; EWR, electrode wear
ratio; FLC, fix length compensation; FRC, fixed reference compensation; HRVS, high resolution vision system; LCM, linear compensation method; LDCA, layer depth
constrained algorithm; MES, multiple electrode strategy; MRR, material removal rate; SCAA, S-curve accelerating algorithm; SSM, servo scanning method; UWM,
uniform wear method.

and UWM together and named the technique as CLU method. techniques. After initial machining, the cavity was measured
The machining performance of CLU was better than UWM. with a confocal white-light sensor and reworked without
However, the volumetric ratio of MR and TW did not follow releasing the workpiece. The attained waviness of the surface
a linear correlation due to the linearly distributed compen- (0.96 µm), and maximum depth-deviation of <2 µm showed
sation points along tool paths. BSA compensation technique the effectiveness of the process. Some of the significant devel-
established by Li et al.[196] achieved constant EWR, wherein opments in TW compensation in µED-milling, starting from
the scanned area was utilized to determine the compensation its inception, have been summarized in Table 1.
points. This method helped in increasing machining efficiency The extensive literature survey infers that technological
while reducing EWR. In 2013, Nguyen et al.[96] conceptualized advancement aids in real-time sensing and compensation of
the virtual electrode (with corner radius) method to eradicate TW, which in turn helps in increasing the machining
the errors incorporated by the TW, machining gap and corner efficiency by saving time. The available literature does not
radius. The concept of virtual electrode led to more accurate suggest that a particular compensation technique is superior
profile as compared to UWM. Schulze et al.[49] developed an to others. Rather, they emphasize the significance of selecting
unconventional way of machining microcavity with less devi- the appropriate technique in µED-milling based on the avail-
ation in depth without the application of any compensation able facilities. Beside several advantages of µED-milling, it is
20 S. KAR AND P. K. PATOWARI

often deemed as a slow process. The small depth of cut (layer overcutting of the profile, which can be curtailed by MES
thickness) applied in each layer and time consumed in wear where each electrode covers the complete volume of the cavity.
measurement of tool and workpiece, ceases the opportunity TW can be compensated by discharge pulse counting and esti-
to minimize machining time. Machining time mainly depends mation of MR (tool and workpiece) per discharge. Pulse dis-
on the depth of cut and feed. Apart from electro-thermal crimination is a tedious task, and further investigations are
erosion, in certain rare cases,[112] µED-milling with a higher needed to find correlation amongst process parameters, pulse
depth of cut may also account for exfoliation and unpredict- type, and quality indexes. Effect of TW can be shortened by
able mechanical failure. Mechanical failure of the tool causes regulating the pulse duration and controlling the vertical tool
difficulty in the prediction of TW and complicates in adopting tip position. Such control can be incorporated to machining
or framing a TW compensation strategy. As most of the condition and tool path data for generating desired spark pro-
available studies only consider shorter depth of cut, there is file and pulse frequency.
a scope for research in investigating µED-milling with a higher High-resolution vision system facilitates the monitoring of
depth of cut and establishing a TW compensation technique tool dimension and incorporation of the outcome into
that will also compensate for any mechanical failure associated compensation algorithms directly. Integration of CAD/CAM
with higher depth of cut. assists in making 3D profiles, slicing of the layers, and
generating optimal tool path. Development of in-house
CAM system for 3D µED-milling is still in growing stage
Conclusion
and needs further research. Preventing short circuit in µED-
Many researchers have worked on various TW compensation milling is a daunting task which requires more research to
techniques associated with the µED-milling process. The improve the productivity of the machining process.
capability of µED-milling to fabricate 3D cavities with a simple Wear compensation methods are established on numerical
cylindrical tool makes µEDM technology indispensable. The models of evaluation of certain parameters. However, their
factors affecting TW in the µEDM domain and the transition accuracy for µED-milling demands more verification. Feasi-
by which TW in EDM is converted into a beneficial process is bility study of using higher depth of cut in µED-milling and
presented. This paper reviews the research trends in TW com- a suitable compensation technique to deal with the possible
pensation techniques and their effects on the characteristics of mechanical failure is still unexplored. The scope of conven-
tool and cavity profile in µED-milling of simple and complex tional milling tool as EDM tool electrode is yet to be explored
profiles. The challenges faced during implementation of completely, where mechanical milling and µED-milling can
compensation technique is also discussed briefly. Irrespective complement each other. However, the tool will wear due to
of the chosen compensation strategy, fabrication of 3D cavities both mechanical failure and electrical discharges, thus making
requires each µED-milling path to be specially designed to wear compensation a laborious task. Soft computational tech-
optimize MR. The inception and development of several com- niques (such as genetic algorithm, fuzzy logic, artificial neural
pensation algorithms aids in more precise compensation of network, etc.) can be used to make the compensation algor-
TW in µED-milling. Hybridization of µED-milling with other ithm more robust and dynamic. Electro-thermal simulation
manufacturing processes is discussed based on the available of workpiece and tool electrode wear can provide a database
literature. for TW compensation, which will reduce unnecessary time
Several EDM factors such as DE, polarity, and non-EDM and cost involved in trial and error machining. As TW in
factors such as dielectric medium, flushing, tool and workpiece µED-milling is indispensable, much more research is needed
material, and tool geometry (discussed in section “factors to formulate new hybrid compensation methods which will
influencing tool wear”) of µEDM must be handled cautiously produce quality machined surface of precise dimension with
to minimize the TW and increase machining efficiency. higher machining efficiency.
There are various methods suggested by many researchers
for compensation of TW, of which LCM, UWM, CLU, BSA, References
DCM, SSM, etc. are prominent. LCM is beneficial for machin-
ing 3D cavities with a straight edge, where the tool feeds in [1] Ji, R.; Liu, Y.; Zhang, Y.; Wang, F.; Cai, B.; Dong, X. Machining
small increment along the tool path. UWM permits original Performance Optimization in End ED Milling and Mechanical
Grinding Compound Process. Mater. Manuf. Processes 2012, 27(2),
electrode shape to be preserved while machining 3D micro 221–228. DOI: 10.1080/10426914.2011.568569.
features. Improved MRR, EWR, and surface finish are [2] Moses, M. D.; Jahan, M. P. Micro-EDM Machinability of Difficult-
achieved with CLU method, which is a combination of LCM to-Cut Ti-6Al-4V Against Soft Brass. Int. J. Adv. Manuf. Technol.
and UWM. Further, in comparison to CLU method, BSA 2015, 81(5–8), 1345–1361. DOI: 10.1007/s00170-015-7306-9.
method records an increment in MRR and a reduction in [3] Jahan, M. P.; Rahman, M.; Wong, Y. S. Study of the Diffusion
of Carbon, its Sources, and Effect on Finishing Micro-EDM
TWR by achieving a constant EWR. In FLC method, compen- Performance of Cemented Carbide. J. Mater. Eng. Perform. 2012,
sation is applied after machining a fixed length. It possesses 21(8), 1655–1668. DOI: 10.1007/s11665-011-0083-1.
the capability to generate slot with uniform depth and conic [4] Puertas, I.; Luis, C. J. A Study on the Machining Parameters
cross sections. But the bottom of cylindrical electrode forms Optimisation of Electrical Discharge Machining. J. Mater. Process.
a conical shape which directly influences the compensation Technol. 2003, 143–144, 521–526. DOI: 10.1016/S0924-0136(03)
00392-3.
algorithm. Longitudinal wear of tool can be compensated by [5] Abdul Rani, A. M.; Mahamat, A. Z.; Ab Adzis, A. H. Novel Nano
keeping a fixed reference of electrical contact in between layer Copper-Tungsten-Based EDM Electrode. In Engineering
by layer machining. One of the significant concern is Applications of Nanotechnology, Topics in Mining, Metallurgy and
 MATERIALS AND MANUFACTURING PROCESSES 21

Materials Engineering; Korada, V., Hisham, B., Hamid, N., Eds.; [23] Hourmand, M.; Sarhan, A. A. D.; Sayuti, M. Micro-Electrode
Springer: Cham, 2017; pp 193–224. DOI: 10.1007/978-3-319-29761-3_8. Fabrication Processes for Micro-EDM Drilling and Milling:
[6] Goyal, R.; Sngh, S.; Kumar, H. Performance Evaluation of A State-of-the-Art Review. Int. J. Adv. Manuf. Technol. 2017,
Cryogenically Assisted Electric Discharge Machining (CEDM) 91(1–4), 1023–1056. DOI: 10.1007/s00170-016-9671-4.
Process. Mater. Manuf. Processes 2017, 33(4), 1–11. DOI: [24] Tsai, Y. Y.; Masuzawa, T. An Index to Evaluate the Wear Resist-
10.1080/10426914.2017.1317789. ance of the Electrode in Micro-EDM. J. Mater. Process. Technol.
[7] Gülcan, O.; Uslan, İ.; Usta, Y.; Çoğun, C. Performance and Surface 2004, 149(1–3), 304–309. DOI: 10.1016/j.jmatprotec.2004.02.043.
Alloying Characteristics of Cu–Cr and Cu–Mo Powder Metal Tool [25] Uhlmann, E.; Piltz, S.; Doll, U. Machining of Micro/Miniature
Electrodes in Electrical Discharge Machining. Mach. Sci. Technol. Dies and Moulds by Electrical Discharge Machining—Recent
2016, 20(4), 523–546. DOI: 10.1080/10910344.2016.1191031. Development. J. Mater. Process. Technol. 2005, 167(2–3), 488–493.
[8] Kumar, P.; Singh, P. K.; Kumar, D.; Prakash, V.; Hussain, M.; DOI: 10.1016/j.jmatprotec.2005.06.013.
Das, A. K. A Novel Application of Micro-EDM Process for the [26] Surleraux, A.; Pernot, J. P.; Bigot, S. A Comparative Study Between
Generation of Nickel Nanoparticles with Different Shapes. Mater. NURBS Surfaces and Voxels to Simulate the Wear Phenomenon in
Manuf. Processes 2017, 32(5), 564–572. DOI: 10.1080/10426914. Micro-EDM. Comput. Aided Des. Appl. 2016, 13(6), 792–798. DOI:
2016.1244832. 10.1080/16864360.2016.1168222.
[9] Dang, X. P. Constrained Multi-Objective Optimization of EDM [27] Gao, S.; Huang, H. Recent Advances in Micro- and Nano-
Process Parameters Using Kriging Model and Particle Swarm Machining Technologies. Frontiers of Mechanical Engineering
Algorithm. Mater. Manuf. Processes 2017, 33(4), 1–8. DOI: 2016, 12(1), 18–32. DOI: 10.1007/s11465-017-0410-9.
10.1080/10426914.2017.1292037. [28] De Lacalle, L. N. L.; Lamikiz, A.; Salgado, M. A.; Herranz, S.;
[10] Meena, V. K.; Azad, M. S. Grey Relational Analysis of Micro-EDM Rivero, A. Process Planning for Reliable High-Speed Machining
Machining of Ti-6Al-4V Alloy. Mater. Manuf. Processes 2012, of Moulds. Int. J. Prod. Res. 2002, 40(12), 2789–2809. DOI:
27(9), 973–977. DOI: 10.1080/10426914.2011.610080. 10.1080/00207540210140068.
[11] Gil, R.; Sanchez, J. A.; Plaza, S.; Ortega, N.; Izquierdo, B.; Pombo, I. [29] Chakraborty, S.; Kar, S.; Dey, V.; Ghosh, S. K. The Phenomenon of
Modeling Recast Layer and Surface Finish in the Manufacturing of Surface Modification by Electro-Discharge Coating Process: A
High-Aspect Ratio Micro-Tools Using the Inverse Slab Electrical Review. Surf. Rev. Lett. 2017, 25(1), 1830003. DOI: 10.1142/
Discharge Milling Process. Proc. Inst. Mech. Eng. Part B J. Eng. S0218625x18300034.
Manuf. 2014, 228(4), 553–562. DOI: 10.1177/0954405413502024. [30] Krishna, M. E.; Patowari, P. K. Parametric Study of Electric
[12] Modica, F.; Marrocco, V.; Fassi, I. Micro-Electro-Discharge Discharge Coating Using Powder Metallurgical Green Compact
Machining (Micro-EDM). In Micro-Manufacturing Technologies Electrodes. Mater. Manuf. Processes 2014, 29(9), 1131–1138.
and Their Applications; Fassi, I., Shipley, D., Eds.; Springer Tracts DOI: 10.1080/10426914.2014.930887.
in Mechanical Engineering, Springer: Cham, 2017; pp 149–173. [31] Patowari, P. K.; Saha, P.; Mishra, P. K. An Experimental Investi-
DOI: 10.1007/978-3-319-39651-4_6. gation of Surface Modification of C-40 Steel Using W–Cu Powder
[13] Ekmekci, B.; Güngör, E. Comparative Study on the Wear Metallurgy Sintered Compact Tools in EDM. Int. J. Adv. Manuf.
Resistance of Electrical Discharge-Machined Surfaces. Mach. Sci. Technol. 2015, 80(1–4), 343–360. DOI: 10.1007/s00170-015-7004-7.
Technol. 2017, 21(4), 1–19. DOI: 10.1080/10910344.2017.1336180. [32] Rahang, M.; Patowari, P. K. Parametric Optimization for Selective
[14] Lu, X.; Jia, Z.; Wang, H.; Si, L.; Liu, Y.; Wu, W. Tool Wear Surface Modification in EDM Using Taguchi Analysis. Mater.
Appearance and Failure Mechanism of Coated Carbide Tools in Manuf. Processes 2016, 31(4), 422–431. DOI: 10.1080/10426914.
Micro-Milling of Inconel 718 Super Alloy. Ind. Lubr. Tribol. 2015.1037921.
2016, 68(2), 267–277. DOI: 10.1108/ILT-07-2015-0114. [33] Peng, Z. Micro Electrical Discharge Machining Deposition in Air
[15] Modica, F.; Ferraris, E.; Trotta, G.; Fassi, I.; Reynaerts, D. for Fabrication of Micro Spiral Structures. Chin. J. Mech. Eng.
Fabrication of micro-Nozzles via μ-EDM Process. AIP Conf. Proc. 2010, 23(2), 154–160. DOI: 10.3901/CJME.2010.02.154.
2011, 1315(1), 1261–1266. DOI: 10.1063/1.3552356. [34] Bleys, P.; Kruth, J. P.; Lauwers, B. Sensing and Compensation
[16] Huang, S. H.; Huang, F. Y.; Yan, B. H. Fracture Strength Analysis of Tool Wear in Milling EDM. J. Mater. Process. Technol. 2004;
of Micro WC-Shaft Manufactured by Micro-Electro-Discharge 149(1–3), 139–146. DOI: 10.1016/j.jmatprotec.2003.11.042.
Machining. Int. J. Adv. Manuf. Technol. 2004, 26(1–2), 68–77. [35] Sánchez, J. A.; Cabanes, I.; López de Lacalle, L. N.; Lamikiz, A.
DOI: 10.1007/s00170-003-1974-6. Development of Optimum Electrodischarge Machining
[17] Uhlmann, E.; Roehner, M. Investigations on Reduction of Tool Technology for Advanced Ceramics. Int. J. Adv. Manuf. Technol.
Electrode Wear in Micro-EDM using Novel Electrode Materials. 2001, 18(12), 897–905. DOI: 10.1007/PL00003958.
CIRP J. Manuf. Sci. Technol. 2008, 1(2), 92–96. DOI: 10.1016/j. [36] Bleys, P.; Kruth, J. P.; Lauwers, B.; Zryd, A.; Delpretti, R.; Tricarico, C.
cirpj.2008.09.011. Real-Time Tool Wear Compensation in Milling EDM. CIRP Ann.—
[18] Surace, R.; Bellantone, V.; Trotta, G.; Basile, V.; Modica, F.; Fassi, I. Manuf. Technol. 2002, 51(1), 157–160. DOI: 10.1016/S0007-8506(07)
Design and Fabrication of a Polymeric Microfilter for Medical 61489-9.
Applications. J. Micro Nano-Manuf. 2015, 4(1), 11006. DOI: [37] Luis, C. J.; Puertas, I.; Villa, G. Material Removal Rate and Electrode
10.1115/1.4032035. Wear Study on the EDM of Silicon Carbide. J. Mater. Process. Technol.
[19] Leo Kumar, S. P.; Jerald, J.; Kumanan, S.; Prabakaran, R. A Review 2005, 164–165, 889–896. DOI: 10.1016/j.jmatprotec.2005.02.045.
on Current Research Aspects in Tool-Based Micromachining [38] Ji, R. J.; Liu, Y. H.; Zhang, Y. Z.; Wang, F.; Cai, B. P.; Li, H.
Processes. Mater. Manuf. Processes 2014, 29(11–12), 1291–1337. Compound Machining of Silicon Carbide Ceramics by High Speed
DOI: 10.1080/10426914.2014.952037. end Electrical Discharge Milling and Mechanical Grinding. Chin.
[20] Anand, R. S.; Patra, K. Modeling and Simulation of Mechanical Sci. Bull. 2012, 57(4), 421–434. DOI: 10.1007/s11434-011-4822-3.
Micro-Machining—A Review. Mach. Sci. Technol. 2014, 18(3), [39] Liang, S.; Zhao, W.; Xi, X. Design of a Real-Time NURBS
323–347. DOI: 10.1080/10910344.2014.925377. Interpolator with Constant Segment Length for Milling EDM.
[21] Tristo, G.; Bissacco, G.; Lebar, A.; Valentinčič, J. Real Time Power Int. J. Adv. Manuf. Technol. 2013, 67(1–4), 427–440. DOI: 10.1007/
Consumption Monitoring for Energy Efficiency Analysis in s00170-012-4495-3.
Micro EDM Milling. Int. J. Adv. Manuf. Technol. 2015, 78(9–12), [40] Ji, R.; Liu, Y.; Zhang, Y.; Dong, X.; Chen, Z.; Cai, B. Experimental
1511–1521. DOI: 10.1007/s00170-014-6725-3. Research on Machining Characteristics of SiC Ceramic with End
[22] Xu, B.; Wu, X.; Ma, J.; Liang, X.; Lei, J.; Wu, B.; Ruan, S.; Wang, Z. Electric Discharge Milling. J. Mech. Sci. Technol. 2011, 25(6),
Micro-Electrical Discharge Machining of 3D Micro-Molds from 1535–1542. DOI: 10.1007/s12206-011-0327-x.
Pd 40 Cu 30 P 20 Ni 10 Metallic Glass by Using Laminated 3D [41] Katz, Z.; Tibbles, C. J. Analysis of Micro-Scale EDM Process. Int. J.
Micro-Electrodes. J. Micromech. Microeng. 2016, 26(3), 35004. Adv. Manuf. Technol. 2004, 25(9–10), 923–928. DOI: 10.1007/
DOI: 10.1088/0960-1317/26/3/035004. s00170-003-2007-1.
22 S. KAR AND P. K. PATOWARI

[42] Masuzawa, T.; Tönshoff, H. K. Three-Dimensional Micromachining [61] Pham, D. T.; Dimov, S. S.; Bigot, S.; Ivanov, A.; Popov, K.
by Machine Tools. CIRP Ann. Manuf. Technol. 1997, 46(2), Micro-EDM—Recent Developments and Research Issues. J. Mater.
621–628. DOI: 10.1016/S0007-8506(07)60882-8. Process. Technol. 2004, 149(1–3), 50–57. DOI: 10.1016/j.
[43] Jahan, M. P.; Wong, Y. S.; Rahman, M. A Study on the Quality jmatprotec.2004.02.008.
Micro-Hole Machining of Tungsten Carbide by Micro-EDM [62] Mujumdar, S. S.; Mastud, S. A.; Singh, R. K.; Joshi, S. S. Experi-
Process Using Transistor and RC-Type Pulse Generator. J. Mater. mental Characterization of the Reverse Micro-Electrodischarge
Process. Technol. 2009, 209(4), 1706–1716. DOI: 10.1016/j. Machining Process for Fabrication of High-Aspect-Ratio Micro-
jmatprotec.2008.04.029. Rod Arrays. Proc. Inst. Mech. Eng. Part B J. Eng. Manuf. 2010,
[44] Sheu, D. Y.; Cheng, C. C. Micro Three-Dimensional Cavities Tools 224(5), 777–794. DOI: 10.1243/09544054JEM1745.
Fabrication on PCD by µ-EDM Scanning Process. Mater. Manuf. [63] Singh, A. K.; Patowari, P. K.; Deshpande, N. V. Effect of Tool Wear
Processes 2012, 28(1), 42–47. DOI: 10.1080/10426914.2012.718468. on Microrods Fabrication Using Reverse μEDM. Mater. Manuf.
[45] Han, F.; Wachi, S.; Kunieda, M. Improvement of Machining Processes 2017, 32(3), 1–8. DOI: 10.1080/10426914.2016.1198015.
Characteristics of Micro-EDM Using Transistor Type Isopulse [64] Bajpai, V.; Mahambare, P.; Singh, R. K. Effect of Thermal and
Generator and Servo Feed Control. Prec. Eng. 2004, 28(4), Material Anisotropy of Pyrolytic Carbon in Vibration-Assisted
378–385. DOI: 10.1016/j.precisioneng.2003.11.005. Micro-EDM Process. Mater. Manuf. Processes 2016, 31(14):
[46] Singh, N. K.; Pandey, P. M.; Singh, K. K. Experimental Investiga- 1879–1888. DOI: 10.1080/10426914.2015.1127937.
tions into the Performance of EDM Using Argon Gas-Assisted [65] Oliaei, S. N. B.; Özdemir, C.; Karpat, Y. On-Machine Fabrication of
Perforated Electrodes. Mater. Manuf. Processes 2017, 32(9), PCD and WC Micro End Mills Using Micro Electro Discharge
940–951. DOI: 10.1080/10426914.2016.1221079. Machining. Int. J. Mechatr. Manuf. Syst. 2014, 7(4/5/6), 246.
[47] Kadirvel, A.; Hariharan, P.; Gowri, S. A Review on Various DOI: 10.1504/IJMMS.2014.067166.
Research Trends in Micro-EDM. Int. J. Mechatr. Manuf. Syst. [66] Asad, A. B. M. A.; Masaki, T.; Rahman, M.; Lim, H. S.; Wong, Y. S.
2012, 5(5/6), 361–384. Tool-Based Micro-Machining. J. Mater. Process. Technol. 2007,
[48] Kunieda, M.; Lauwers, B.; Rajurkar, K. P.; Schumacher, B. M. 192–193, 204–211. DOI: 10.1016/j.jmatprotec.2007.04.038.
Advancing EDM through Fundamental Insight into the Process. [67] Rahman, M.; Lim, H. S.; Neo, K. S.; Senthil Kumar, A.; Wong, Y. S.;
CIRP Ann. Manuf. Technol. 2005, 54(2), 64–87. DOI: 10.1016/ Li, X. P. Tool-Based Nanofinishing and Micromachining. J. Mater.
S0007-8506(07)60020-1. Process. Technol. 2007, 185(1–3), 2–16. DOI: 10.1016/j.jmatprotec.
[49] Schulze, V.; Weber, P.; Ruhs, C. Increase of Process Reliability in 2006.03.121.
the Micro-Machining Processes EDM-Milling and Laser Ablation [68] Karthikeyan, G.; Ramkumar, J.; Dhamodaran, S. Block EDG: Issues
Using On-Machine Sensors. J. Mater. Process. Technol. 2012, and Applicability in Multiple Pass µED-Milling. Mach. Sci. Tech-
212(3), 625–632. DOI: 10.1016/j.jmatprotec.2011.09.014. nol. 2014, 18(1), 120–136. DOI: 10.1080/10910344.2014.863650.
[50] Tiwary, A. P.; Sinha, A.; Pradhan, B. B.; Bhattacharyya, B. Review [69] Qingfeng, Y.; Xingqiao, W.; Ping, W.; Zhiqiang, Q.; Lin, Z.;
on Micro Electrical Discharge Machining. Int. J. Theor. Appl. Res. Yongbin, Z. Fabrication of Micro Rod Electrode by Electrical Dis-
Mech. Eng. 2013, 2(2), 141–148. charge Grinding Using Two Block Electrodes. J. Mater. Process.
[51] Zhang, L. X.; Ji, F.; Zhang, Y. B.; Tang, X. H.; He, J. G. Micro- Technol. 2016, 234, 143–149. DOI: 10.1016/j.jmatprotec.2016.03.023.
Electrical Discharge Machining Machine Tool and its Control [70] Fleischer, J.; Deuchert, M.; Ruhs, C.; Kühlewein, C.; Halvadjiysky,
Technology. Proc. Inst. Mech. Eng. Part B J. Eng. Manuf. 2011, G.; Schmidt, C. Design and Manufacturing of Micro Milling Tools.
225(9), 1725–1731. DOI: 10.1177/2041297510394081. Microsyst. Technol. 2008, 14(9–11), 1771–1775. DOI: 10.1007/
[52] Brousseau, E. B.; Dimov, S. S.; Pham, D. T. Some Recent Advances in s00542-008-0652-x.
Multi-Material Micro- and Nano-Manufacturing. Int. J. Adv. Manuf. [71] Masuzawa, T.; Fujino, M.; Kobayashi, K.; Suzuki, T.; Kinoshita, N.
Technol. 2010, 47(1–4), 161–180. DOI: 10.1007/s00170-009-2214-5. Wire Electro-Discharge Grinding for Micro-Machining. CIRP Ann.
[53] Wang, C.; Chu, X.; Liu, G.; Zhu, K.; Hong, Y.; Chi, G. The Design Manuf. Technol. 1985, 34(1), 431–434. DOI: 10.1016/S0007-8506
of Integrated Route in Micro-EDM. Mater. Manuf. Processes 2013, (07)61805-8.
28(12), 1348–1355. DOI: 10.1080/10426914.2013.832301. [72] Reynaerts, D.; Heeren, P. H.; Brussel, H. V. Microstructuring of
[54] Fleischer, J.; Kotschenreuther, J. The Manufacturing of Micro Molds Silicon by Electro-Discharge Machining (EDM)—Part I: Theory.
by Conventional and Energy-Assisted Processes. Int. J. Adv. Manuf. Sens. Actuators A Phys. 1997, 60(1–3), 212–218. DOI: 10.1016/
Technol. 2007, 33(1), 75–85. DOI: 10.1007/s00170-006-0596-1. S0924-4247(97)80293-2.
[55] Reynaerts, D.; Meeusen, W.; Van Brussel, H. Machining of Three- [73] Qian, J.; Wang, J.; Ferraris, E.; Reynaerts, D. A Holistic Approach
Dimensional Microstructures in Silicon by Electro-Discharge for Zero-Defect Micro-EDM Milling. 2013 IEEE International
Machining. Sens. Actuators A Phys. 1998, 67(1–3), 159–165. DOI: Symposium on Assembly and Manufacturing (ISAM 2013), Xi’an,
10.1016/S0924-4247(97)01724-X. China, July 30–Aug 2, 2013; pp 226–229. DOI: 10.1109/ISAM.2013.
[56] Bigot, S.; Surleraux, A.; Bissacco, G.; Valentinčič, J. A New 6643533.
Modelling Framework for Die-Sinking Micro EDM. Proceedings [74] Sheu, D. Y. High-Speed Micro Electrode Tool Fabrication by a
of the 9th International Conference on Multi-Material Micro Twin-Wire EDM System. J. Micromech. Microeng. 2008, 18(10),
Manufacture, Vienna, Austria, Oct 9–11, 2012; pp 51–55. DOI: 105014. DOI: 10.1088/0960-1317/18/10/105014.
10.3850/978-981-07-3353-7_309. [75] Jahan, M. P. Micro-electrical Discharge Machining. In Nontradi-
[57] Schulze, V.; Weber, P.; Ruhs, C.; Kienzler, A. Limits and Challenges of tional Machining Processes: Research Advances, Nontraditional
Manufacturing Micro Moulds. Int. J. Nanomanuf. 2010, 6(1/2/3/4), Machining Processes; Davim, J., Ed.; Springer: London, 2013;
176–189. DOI: 10.1504/IJNM.2010.034782. pp 111–151. DOI: 10.1007/978-1-4471-5179-1_4.
[58] Bley, P. The LIGA Process for Fabrication of Three-Dimensional [76] Kaneko, T.; Tsuchiya, M. Three-Dimensionally Controlled EDM
Microscale Structures. Interdisc. Sci. Rev. 2013, 18(3), 267–272. Using a Cylindrical Electrode (5th Report)—Research on Contour
DOI: 10.1179/isr.1993.18.3.267. Machining of Inclined Plane and Cylindrical Surface. J. Jpn. Soc.
[59] Jain, P. K.; Pandey, P..M; Rao, P. V. M. Experimental Investigations Electr. Mach. Eng. 1985, 18(36), 1–16. DOI: 10.2526/jseme.18.36_1.
for Improving Part Strength in Selective Laser Sintering. Virtual [77] Kaneko, T.; Tsuchiya, M. Three-Dimensional Numerically
Phys. Prototyping 2008, 3(3), 177–188. DOI: 10.1080/17452750802 Controlled Contouring by Electric Discharge Machining with Com-
065893. pensation for the Deformation of Cylindrical Tool Electrodes. Prec.
[60] Li, Y.; Hou, W.; Xu, J.; Yu, H. A Comparative Investigation of Drill- Eng. 1988, 10(3), 157–163. DOI: 10.1016/0141-6359(88)90035-9.
ing and Milling Micro Holes Using Micro-EDM. IEEE International [78] Saito, K.; Kishinami, T.; Konno, H.; Sato, M.; Takeyama, H.
Conference on Manipulation, Manufacturing and Measurement on Development of Numerical Contouring Control Electric Discharge
the Nanoscale (3M-NANO), Chongqing, China, July 18–22, 2017; Machining (NCC-EDM). CIRP Ann. Manuf. Technol. 1986, 35(1),
pp 212–216. DOI: 10.1109/3M-NANO.2016.7824956. 117–120. DOI: 10.1016/S0007-8506(07)61851-4.
 MATERIALS AND MANUFACTURING PROCESSES 23

[79] Ji, R.; Liu, Y.; Zhang, Y.; Cai, B.; Li, X. High-Speed End Electric Dis- [98] Yu, H. L.; Luan, J. J.; Li, J. Z.; Zhang, Y. S.; Yu, Z. Y.; Guo, D. M. A
charge Milling of Silicon Carbide Ceramics. Mater. Manuf. Processes New Electrode Wear Compensation Method for Improving
2011, 26(8), 1050–1058. DOI: 10.1080/10426914.2010.529590. Performance in 3D Micro EDM Milling. J. Micromech. Microeng.
[80] Huang, H.; Bai, J.; Lu, Z.; Guo, Y. Electrode Wear Prediction in 2010, 20(5), 55011. DOI: 10.1088/0960-1317/20/5/055011.
Milling Electrical Discharge Machining Based on Radial Basis [99] Aligiri, E.; Yeo, S. H.; Tan, P. C. A New Tool Wear Compensation
Function Neural Network. J. Shanghai Jiaotong Univ. (Sci.) 2009, Method Based on Real-Time Estimation of Material Removal
14(6), 736–741. DOI: 10.1007/s12204-009-0736-5. Volume in Micro-EDM. J. Mater. Process. Technol. 2010, 210(15),
[81] Bleys, P.; Kruth, J. P. Machining Complex Shapes by Numerically 2292–2303. DOI: 10.1016/j.jmatprotec.2010.08.024.
Controlled EDM. Int. J. Electr. Mach. 2001, 6, 61–69. [100] Vidya, S.; Barman, S.; Chebolu, A.; Das, A. K. Effects of Different
[82] Yu, Z. Y.; Masuzawa, T.; Fujino, M. Micro-EDM for Three- Cavity Geometries on Machining Performance in Micro-Electrical
Dimensional Cavities—Development of Uniform Wear Method. Discharge Milling. J. Micro Nano-Manuf. 2015, 3(1), 11007. DOI:
CIRP Ann. Manuf. Technol. 1998, 47(1), 169–172. DOI: 10.1016/ 10.1115/1.4029275.
S0007-8506(07)62810-8. [101] Karthikeyan, G.; Ramkumar, J.; Aravindan, S. Performance analysis
[83] Nakagawa, T.; Yuzawa, T.; Sampei, M.; Hirata, A. Improvement in of µED-Milling Process Using Various Statistical Techniques. Int. J.
Machining Speed with Working Gap Control in EDM Milling. Prec. Mach. Mach. Mater. 2012, 11(2), 183–203. DOI: 10.1504/IJMMM.
Eng. 2017, 47, 303–310. DOI: 10.1016/j.precisioneng.2016.09.004. 2012.045984.
[84] Narasimhan, J.; Yu, Z.; Rajurkar, K. P. Tool Wear Compensation [102] Yeo, S. H.; Aligiri, E.; Tan, P. C.; Zarepour, H. A New Pulse
and Path Generation in Micro and Macro EDM. J. Manuf. Discriminating System for Micro-EDM. Mater. Manuf. Processes
Processes 2005, 7(1), 75–82. DOI: 10.1016/S1526-6125(05)70084-0. 2009, 24(12), 1297–1305. DOI: 10.1080/10426910903130164.
[85] Ali, M. Y.; Rahman, M. A.; Zunairi, S. N. Z.; Banu, A. Dimensional [103] Zhang, M.; Zhang, Q.; Dou, L.; Zhu, G.; Dong, C. An Independent
Accuracy of Micro-Electro Discharge Milling. IOP Conf. Ser. Discharge Status Detection Method and its Application in EAM
Mater. Sci. Eng. 2017, 184(1), 12034. DOI: 10.1088/1757-899X/ mIlling. Int. J. Adv. Manuf. Technol. 2016, 87(1–4), 909–918.
184/1/012034. DOI: 10.1007/s00170-016-8537-0.
[86] Cheng, X.; Wang, Z.; Kobayashi, S.; Nakamoto, K.; Yamazaki, K. [104] Meeusen, W.; Reynaerts, D.; Brussel, H. V. CAD Tool for the
Development of a Computer Assistant Programming System for Design and Manufacturing of Freeform Micro-EDM Electrodes.
Micro/Nano Milling Tool Fabrication by Multi-Axis Wire EDM. Proceedings of SPIE Vol. 4755, Cannes-Mandelieu, France,
Int. J. Comput. Integr. Manuf. 2009, 22(9), 847–856. DOI: 2002 (Courtois, B., Karam, J. M., Markus, K. W., Michel, B.,
10.1080/09511920902866096. Mukherjee, T., Walker, J. A., Eds.: Design, Test, Integration, and
[87] Zhu, G.; Zhang, Q.; Wang, H.; Wang, K.; Zhang, M. Machining Packaging of MEMS/MOEMS, 2002; 105–113. DOI: 10.1117/
Behaviors of Short Electrical Arc Milling with High Frequency 12.462800).
and High Voltage Pulses. Int. J. Adv. Manuf. Technol. 2017, [105] Wei, L.; Zhang, L.; Liu, W.; Jia, Z.; Li, A. A New Interpolation
90(1–4), 1067–1074. DOI: 10.1007/s00170-016-9399-1. Method of Variable Period and Step Size in Micro-EDM Milling
[88] Wang, F.; Liu, Y.; Shen, Y.; Ji, R.; Tang, Z.; Zhang, Y. Machining Based on Square Constraint. Int. J. Adv. Manuf. Technol. 2012,
Performance of Inconel 718 Using High Current Density 63(5–8), 621–629. DOI: 10.1007/s00170-012-3950-5.
Electrical Discharge Milling. Mater. Manuf. Processes 2013, [106] Kuriachen, B.; Mathew, J. Experimental Investigations into the
28(10), 1147–1152. DOI: 10.1080/10426914.2013.822985. Effects of Microelectric-Discharge Milling Process Parameters on
[89] Karthikeyan, G.; Garg, A. K.; Ramkumar, J.; Dhamodaran, S. A Processing Ti–6Al–4V. Mater. Manuf. Processes 2015, 30(8),
Microscopic Investigation of Machining Behavior in µED-Milling 983–990. DOI: 10.1080/10426914.2014.984206.
Process. J. Manuf. Processes 2012, 14(3), 297–306. DOI: 10.1016/ [107] Shen, Y.; Liu, Y.; Dong, H. Parameters Optimization for Sustain-
j.jmapro.2012.01.003. able Machining of Ti6Al4V Using a Novel High-Speed Dry Electri-
[90] Jahan, M. P.; Wong, Y. S.; Rahman, M. A Comparative Study on cal Discharge Milling. Int. J. Adv. Manuf. Technol. 2017,
the Performance of Sinking and Milling Micro-EDM for Nanofin- 90(9–12), 2733–2740. DOI: 10.1007/s00170-016-9600-6.
ishing of Tungsten Carbide. Int. J. Nanomanuf. 2010, 6(1/2/3/4), [108] Jahan, M. P.; Wong, Y. S.; Rahman, M. A Study on the Fine-Finish
190–206. DOI: 10.1504/IJNM.2010.034783. Die-Sinking Micro-EDM of Tungsten Carbide Using Different
[91] Jeong, Y. H.; Yoo B. H.; Lee, H. U.; Min, B. K.; Cho, D. W.; Lee, S. Electrode Materials. J. Mater. Process. Technol. 2009, 209(8),
J. Deburring Microfeatures Using Micro-EDM. J. Mater. Process. 3956–3967. DOI: 10.1016/j.jmatprotec.2008.09.015.
Technol. 2009, 209(14), 5399–5406. DOI: 10.1016/j.jmatprotec. [109] Son, S.; Lim, H.; Kumar, A. S.; Rahman, M. Influences of Pulsed
2009.04.021. Power Condition on the Machining Properties in Micro EDM. J.
[92] Rajurkar, K. P.; Yu, Z. Y. 3D Micro-EDM Using CAD/CAM. CIRP Mater. Process. Technol. 2007, 190(1), 73–76. DOI: 10.1016/j.
Ann. Manuf. Technol. 2000, 49(1), 127–130. DOI: 10.1016/S0007- jmatprotec.2007.03.108.
8506(07)62911-4. [110] Jahan, M. P.; Wong, Y. S.; Rahman, M. A Comparative
[93] Ding, S.; Jiang, R. Tool Path Generation for 4-Axis Contour Experimental Investigation of Deep-Hole Micro-EDM Drilling
EDM Rough Machining. Int. J. Mach. Tools Manuf. 2004, 44(14), Capability for Cemented Carbide (WC-Co) Against Austenitic
1493–1502. DOI: 10.1016/j.ijmachtools.2004.05.010. Stainless Steel (SUS 304). Int. J. Adv. Manuf. Technol. 2010,
[94] Karthikeyan, G.; Sambhav, K.; Ramkumar, J.; Dhamodaran, S. 46(9–12), 1145–1160. DOI: 10.1007/s00170-009-2167-8.
Simulation and Experimental Realization of µ-Channels Using a [111] Feng, W.; Chu, X.; Hong, Y.; Zhang, L. Studies on the Surface of
µED-Milling Process. Proc. Inst. Mech. Eng. Part B J. Eng. Manuf. High-Performance Alloys Machined by Micro-EDM. Mater. Manuf.
2011, 225(12), 2206–2219. DOI: 10.1177/0954405411403359. Processes 2017, 33(6), 1–10. DOI: 10.1080/10426914.2017.1364758.
[95] Wang, Z.; Dong, Y. Micro-EDM Milling of Micro Compressor [112] Sundaram, M. M.; Liu, Y.; Rajurkar, K. P.; Zhao, F. Study of
Prototype. First International Conference on Integration and Sudden Tool Failure in Micro Electro Discharge Milling. Int. J.
Commercialization of Micro and Nanosystems, Parts A and B, Manuf. Res. 2013, 8(2), 121–134. DOI: 10.1504/IJMR.2013.053283.
ASME, Sanya, Hainan, China, Jan 10–13, 2007; pp 1243–1247. [113] Nguyen, M. D.; Rahman, M.; Wong, Y. S. An Experimental Study
DOI: 10.1115/MNC2007-21124. on Micro-EDM in Low-Resistivity Deionized Water Using
[96] Nguyen, M. D.; Wong, Y. S.; Rahman, M. Profile Error Compen- Short Voltage Pulses. Int. J. Adv. Manuf. Technol. 2012, 58(5–8),
sation in High Precision 3D Micro-EDM Milling. Prec. Eng. 533–544. DOI: 10.1007/s00170-011-3397-0.
2013, 37(2), 399–407. DOI: 10.1016/j.precisioneng.2012.11.002. [114] Pradhan, B. B.; Bhattacharyya, B. Improvement in Microhole
[97] Heo, S.; Jeong, Y. H.; Min, B. K.; Lee, S. J. Virtual EDM Simulator: Machining Accuracy by Polarity Changing Technique for Micro-
Three-Dimensional Geometric simulation of Micro-EDM electrode Discharge Machining on Ti–6Al–4V. Proc. Inst. Mech.
Milling Processes. Int. J. Mach. Tools Manuf. 2009, 49(12–13), Eng. Part B J. Eng. Manuf. 2008, 222(2), 163–173. DOI: 10.1243/
1029–1034. DOI: 10.1016/j.ijmachtools.2009.07.005. 09544054JEM959.
24 S. KAR AND P. K. PATOWARI

[115] Wang, J.; Yang, F.; Qian, J.; Reynaerts, D. Study of Alternating [134] Pilligrin, J. C.; Asokan, P.; Jerald, J.; Kanagaraj, G. Effects of
Current Flow in Micro-EDM Through Real-Time Pulse Counting. Electrode Materials on Performance Measures of Electrical
J. Mater. Process. Technol. 2016, 231, 179–188. DOI: 10.1016/j. Discharge Micro-Machining. Materials and Manufacturing Pro-
jmatprotec.2015.12.010. cesses 2017, 33(6), 606–615. DOI: 10.1080/10426914.2017.1364757.
[116] Peng, Z.; Wang, Z.; Dong, Y.; Chen, H. Development of a [135] Ozgedik, A.; Cogun, C. An Experimental Investigation of Tool
Reversible Machining Method for Fabrication of Microstructures Wear in Electric Discharge Machining. Int. J. Adv. Manuf. Technol.
by Using Micro-EDM. J. Mater. Process. Technol. 2010, 210(1), 2006, 27(5–6), 488–500. DOI: 10.1007/s00170-004-2220-6.
129–136. DOI: 10.1016/j.jmatprotec.2009.08.002. [136] Meena, V. K.; Azad, M. S.; Mitra, S. Effect of Flushing Condition
[117] Singh, A. K.; Patowari, P. K.; Deshpande, N. V. Experimental on Deep Hole Micro-EDM Drilling. Int. J. Mach. Mach. Mater.
Analysis of Reverse Micro-EDM for Machining Microtool. Mater. 2012, 12(4), 308–320. DOI: 10.1504/IJMMM.2012.050429.
Manuf. Processes 2016, 31(4), 530–540. DOI: 10.1080/10426914. [137] Cogun, C.; Savsar, M. Statistical Modelling of Properties of
2015.1070426. Discharge Pulses in Electric Discharge Machining. Int. J. Mach. Tools
[118] Mullya, S.; Karthikeyan, G. Dielectric Flow Observation at Manuf. 1990, 30(3), 467–474. DOI: 10.1016/0890-6955(90)90189-P.
Inter-Electrode Gap in Micro-Electro-Discharge-Milling Process. [138] Wang, F.; Peng, Z. An Experimental Research on a Kind of
Proc. Inst. Mech. Eng., Part B: J. Eng. Manuf. 2016, 1–11. DOI: Distributed-Flushing ED Milling. J. Mech. Sci. Technol. 2017,
10.1177/0954405416662082. 31(2), 845–850. DOI: 10.1007/s12206-017-0136-y.
[119] Chen, S. L.; Yan, B. H.; Huang, F. Y. Influence of Kerosene and [139] Lin, M. Y.; Tsao, C. C.; Hsu, C. Y.; Chiou, A. H.; Huang, P. C.;
Distilled Water as Dielectrics on the Electric Discharge Machining Lin, Y. C. Optimization of Micro Milling Electrical Discharge
Characteristics of Ti–6A1–4V. J. Mater. Process. Technol. 1999, Machining of Inconel 718 by Grey-Taguchi Method. Trans. Non-
87(1–3), 107–111. DOI: 10.1016/S0924-0136(98)00340-9. ferrous Metals Soc. China 2013, 23(3), 661–666. DOI: 10.1016/
[120] Kagaya, K.; Oishi, Y.; Yada, K. Micro-Electrodischarge Machining S1003-6326(13)62513-3.
Using Water as a Working Fluid-I: Micro-Hole Drilling. Prec. Eng. [140] Dhakar, K.; Dvivedi, A. Experimental Investigation on Near-dry
1986, 8(3), 157–162. DOI: 10.1016/0141-6359(86)90034-6. Electric Discharge Machining. 5th International & 26th All India
[121] Yu, Z. Y.; Rajurkar, K. P.; Shen, H. High Aspect Ratio and Complex Manufacturing Technology, Design and Research Conference
Shaped Blind Micro Holes by Micro EDM. CIRP Ann. Manuf. (AIMTDR 2014), IIT Guwahati, Assam, India, Dec 12–14, 2014;
Technol. 2002, 51(1), 359–362. DOI: 10.1016/S0007-8506(07)61536-4. pp 1–6.
[122] Song, K. Y.; Chung, D. K.; Park, M. S.; Chu, C. N. Micro Electrical [141] Karthikeyan, G.; Ramkumar, J.; Dhamodaran, S.; Aravindan, S.
Discharge Drilling of Tungsten Carbide using Deionized Water. J. Micro Electric Discharge Milling Process Performance: An
Micromech. Microeng. 2009, 19(4), 45006. DOI: 10.1088/0960- Experimental Investigation. Int. J. Mach. Tools Manuf. 2010,
1317/19/4/045006. 50(8), 718–727. DOI: 10.1016/j.ijmachtools.2010.04.007.
[123] Chung, D. K.; Kim, B. H.; Chu, C. N. Micro Electrical Discharge [142] Fujiki, M.; Ni, J.; Shih, A. J. Investigation of the Effects of Electrode
Milling Using Deionized Water as a Dielectric Fluid. J. Micromech. Orientation and Fluid Flow Rate in Near-Dry EDM Milling. Int.
Microeng. 2007, 17(5), 867–874. DOI: 10.1088/0960-1317/17/5/004. J. Mach. Tools Manuf. 2009, 49(10), 749–758. DOI: 10.1016/j.
[124] Song, K. Y.; Chung, D. K.; Park, M. S.; Chu, C. N. Micro Electrical ijmachtools.2009.05.003.
Discharge Milling of WC-Co Using a Deionized Water Spray and [143] Fujiki, M.; Shih, A. J. Tool Path Planning for Near-Dry EDM
a Bipolar Pulse. J. Micromech. Microeng. 2010, 20(4), 45022. DOI: Milling With Lead Angle on Curved Surfaces. J. Manuf. Sci. Eng.
10.1088/0960-1317/20/4/045022. 2011, 133(5), 51005. DOI: 10.1063/1.4004865.
[125] Kibria, G.; Sarkar, B. R.; Pradhan, B. B.; Bhattacharyya, B. [144] Kuriachen, B.; Mathew, J. Effect of Powder Mixed Dielectric on
Comparative Study of Different Dielectrics for Micro-EDM Perfor- Material Removal and Surface Modification in Microelectric
mance During Microhole Machining of Ti-6Al-4V Alloy. Int. J. Discharge Machining of Ti-6Al-4V. Mater. Manuf. Processes
Adv. Manuf. Technol. 2010, 48(5–8), 557–570. DOI: 10.1007/ 2016, 31(4), 439–446. DOI: 10.1080/10426914.2015.1004705.
s00170-009-2298-y. [145] Cyril, J.; Paravasu, A.; Jerald, J.; Sumit, K.; Kanagaraj, G.
[126] Liu, K.; Lauwers, B.; Reynaerts, D. Process Capabilities of Experimental Investigation on Performance of Additive Mixed
Micro-EDM and its Applications. Int. J. Adv. Manuf. Technol. Dielectric During Micro-Electric Discharge Drilling on 316L
2010, 47(1–4), 11–19. DOI: 10.1007/s00170-009-2056-1. Stainless Steel. Mater. Manuf. Processes 2017, 32(6), 638–644.
[127] Paul, G.; Roy, S.; Sarkar, S.; Hanumaiah, N.; Mitra, S. Investigations DOI: 10.1080/10426914.2016.1221107.
on Influence of Process Variables on Crater Dimensions in Micro- [146] Patel, S.; Thesiya, D.; Rajurkar, A. Aluminium Powder Mixed
EDM of γ-Titanium Aluminide Alloy in Dry and Oil Dielectric Rotary Electric Discharge Machining (PMEDM) on Inconel 718.
Media. Int. J. Adv. Manuf. Technol. 2012, 65(5–8), 1009–1017. Aust. J. Mech. Eng. 2017, 16(1), 1–10. DOI: 10.1080/14484846.
DOI: 10.1007/s00170-012-4235-8. 2017.1294230.
[128] Peng, Z. L.; Wang, Z. L.; Jin, B. D. Micro-Forming Process and [147] Jahan, M. P.; Rahman, M.; Wong, Y. S. Modelling and
Microstructure of Deposit by Using Micro EDM Deposition in Experimental Investigation on the Effect of Nanopowder-Mixed
Air. Key Eng. Mater. 2008, 375–376, 153–157. DOI: 10.4028/ Dielectric in Micro-Electrodischarge Machining of Tungsten
www.scientific.net/KEM.375-376.153. Carbide. Proc. Inst. Mech. Eng. Part B J. Eng. Manuf. 2010,
[129] Kunieda, M.; Yoshida, M.; Taniguchi, N. Electrical Discharge 224(11), 1725–1739. DOI: 10.1243/09544054JEM1878.
Machining in Gas. CIRP Ann. Manuf. Technol. 1997, 46(1), [148] Kansal, H. K.; Singh, S.; Kumar, P. Technology and Research
143–146. DOI: 10.1016/S0007-8506(07)60794-X. Developments in Powder Mixed Electric Discharge Machining
[130] Shen, Y.; Liu, Y.; Dong, H. Surface Integrity of Inconel 718 in (PMEDM). J. Mater. Process. Technol. 2007, 184(1–3), 32–41.
High-Speed Electrical Discharge Machining Milling Using Air DOI: 10.1016/j.jmatprotec.2006.10.046.
Dielectric. Int. J. Adv. Manuf. Technol. 2017, 90(1–4), 691–698. [149] Chow, H. M.; Yang, L. D.; Lin, C. T.; Chen, Y. F. The Use of SiC
DOI: 10.1007/s00170-016-9332-7. Powder in Water as Dielectric for Micro-Slit EDM Machining. J.
[131] Jia, Y.; Kim, B. S.; Hu, D. J.; Ni, J. Experimental Investigations into Mater. Process. Technol. 2008, 195(1–3), 160–170. DOI: 10.1016/j.
Near-Dry Milling EDM of Satellite Alloys. Int. J. Mach. Mach. jmatprotec.2007.04.130.
Mater. 2010, 7(1/2), 96–111. DOI: 10.1504/IJMMM.2010.029848. [150] Jahan, M. P.; Rahman, M.; Wong, Y. S. Study on the Nano-Powder-
[132] Tao, J.; Shih, A. J.; Ni, J. Experimental Study of the Dry and Near- Mixed Sinking and Milling Micro-EDM of WC-Co. Int. J. Adv.
Dry Electrical Discharge Milling Processes. J. Manuf. Sci. Eng. Manuf. Technol. 2011, 53(1–4), 167–180. DOI: 10.1007/s00170-
2008, 130(1), 11002. DOI: 10.1115/1.2784276. 010-2826-9.
[133] Singh, N. K.; Pandey, P. M.; Singh, K. K.; Sharma, M. K. Steps [151] Tzeng, Y. F.; Lee, C. Y. Effects of Powder Characteristics on
Towards Green Manufacturing Through EDM Process: A Review. Electrodischarge Machining Efficiency. Int. J. Adv. Manuf. Technol.
Cogent Eng. 2016, 3(1), 1–13. DOI: 10.1080/23311916.2016.1272662. 2001, 17(8), 586–592. DOI: 10.1007/s001700170142.
 MATERIALS AND MANUFACTURING PROCESSES 25

[152] Samuel, M. P.; Philip, P. K. Power Metallurgy Tool Electrodes for [170] Teimouri, R.; Baseri, H. Experimental Study of Rotary Magnetic
Electrical Discharge Machining. Int. J. Mach. Tools Manuf. 1997, Field-Assisted Dry EDM with Ultrasonic Vibration of Workpiece.
37(11), 1625–1633. DOI: 10.1016/S0890-6955(97)00006-0. Int. J. Adv. Manuf. Technol. 2013, 67(5–8), 1371–1384. DOI:
[153] Gowri, S.; Kumar, P. R.; Vijayaraj, R.; Balan, A. S. S. Micromachin- 10.1007/s00170-012-4573-6.
ing: Technology for the Future. Int. J. Mater. Struct. Integr. 2007, 1 [171] Jafferson, J. M.; Hariharan, P.; Ram Kumar, J. Effects of Ultrasonic
(1/2/3), 161–179. DOI: 10.1504/IJMSI.2007.013870. Vibration and Magnetic Field in Micro-EDM Milling of
[154] Kadirvel, A.; Hariharan, P.; Gowri, S. Experimental Investigation Nonmagnetic Material. Mater. Manuf. Processes 2014, 29(3),
on the Electrode Specific Performance in Micro-EDM of Die-Steel. 357–363. DOI: 10.1080/10426914.2013.872268.
Mater. Manuf. Processes 2013, 28(4), 390–396. DOI: 10.1080/ [172] Khatri, B. C.; Rathod, P.; Valaki, J. B. Ultrasonic Vibration-Assisted
10426914.2013.763959. Electric Discharge Machining: A Research Review. Proc. Inst. Mech.
[155] Yeo, S. H.; Tan, P. C.; Aligiri, E.; Tor, S. B.; Loh, N. H. Processing Eng. Part B J. Eng. Manuf. 2015, 230(2), 319–330. DOI: 10.1177/
of Zirconium-Based Bulk Metallic Glass (BMG) Using Micro 0954405415573061.
Electrical Discharge Machining (Micro-EDM). Mater. Manuf. Pro- [173] Jahan, M. P.; Saleh, T.; Rahman, M.; Wong, Y. S. Study of Micro-
cesses 2009, 24(12), 1242–1248. DOI: 10.1080/10426910903129661. EDM of Tungsten Carbide with Workpiece Vibration. Adv. Mater.
[156] Ali, M. Y.; Hamad, M. H.; Karim, A. I. Form Characterization of Res. 2011, 265, 1056–1061. DOI: 10.4028/www.scientific.net/
Microhole Produced by Microelectrical Discharge Drilling. Mater. AMR.264-265.1056.
Manuf. Processes 2009, 24(6), 683–687. DOI: 10.1080/ [174] Unune, D. R.; Mali, H. S. Experimental Investigation on Low-
10426910902769343. Frequency Vibration Assisted Micro-WEDM of Inconel 718.
[157] Chiou, A. H.; Tsao, C. C.; Hsu, C. Y. A Study of the Machining Mater. Manuf. Processes 2017, 1–10. DOI: 10.1016/j.jestch.
Characteristics of Micro EDM Milling and its Improvement by 2016.06.010.
Electrode Coating. Int. J. Adv. Manuf. Technol. 2015, 78(9–12), [175] Yeo, S. H.; Murali, M.; Cheah, H. T. Magnetic Field Assisted Micro
1857–1864. DOI: 10.1007/s00170-014-6778-3. Electro-Discharge Machining. J. Micromech. Microeng. 2004,
[158] Kadirvel, A.; Hariharan, P.; Mudhukrishnan, M. A Study on 14(11), 1526–1529. DOI: 10.1088/0960-1317/14/11/013.
the Die-Sinking Micro-Electrical Discharge Machining of EN-24 [176] Manivannan, R.; Kumar, M. P. Improving the Machining
Die Steel Using Various Electrode Materials. Adv. Mater. Res. Performance Characteristics of the µEDM Drilling Process by the
2014, 984–985, 73–82. DOI: 10.4028/www.scientific.net/ Online Cryogenic Cooling Approach. Mater. Manuf. Processes
AMR.984-985.73. 2017, 1–7. DOI: 10.1080/10426914.2017.1303145.
[159] Jeswani, M. L. Dimensional Analysis of Tool Wear in Electrical [177] Singh, N. K.; Pandey, P. M.; Singh, K. K. EDM with an Air-Assisted
Discharge Machining. Wear 1979, 55(1), 153–161. DOI: 10.1016/ Multi-Hole Rotating Tool. Mater. Manuf. Processes 2016, 31(14),
0043-1648(79)90187-X. 1872–1878. DOI: 10.1080/10426914.2015.1127954.
[160] Lee, S. H.; Li, X. P. Study of the Effect of Machining Parameters on [178] Jafferson, J. M.; Hariharan, P.; Ram Kumar, J. Effect of Non-
the Machining Characteristics in Electrical Discharge Machining Electrical Parameters in μED Milling: An Experimental
of Tungsten Carbide. J. Mater. Process. Technol. 2001, 115(3), Investigation. Int. J. Adv. Manuf. Technol. 2016, 85(9–12),
344–358. DOI: 10.1016/S0924-0136(01)00992-X. 2037–2047. DOI: 10.1007/s00170-015-7933-1.
[161] Liu, Q.; Zhang, Q.; Zhang, M.; Zhang, J. Effects of Crystallographic [179] Teimouri, R.; Baseri, H. Study of Tool Wear and Overcut in EDM
Anisotropy on Micro EDM Process. Mater. Manuf. Processes 2014, Process with Rotary Tool and Magnetic Field. Adv. Tribol. 2012,
30(8), 961–967. DOI: 10.1080/10426914.2014.962660. 2012, 1–8. DOI: 10.1155/2012/895918.
[162] Liu, Y. H.; Ji, R. J.; Li, X. P.; Yu, L. L.; Zhang, H. F. Electric [180] Perveen, A.; Jahan, M. P. An Experimental Study on the Effect of
Discharge Milling of Insulating Ceramics. Proc. Inst. Mech. Eng. Operating Parameters during the Micro-Electro-Discharge
Part B J. Eng. Manuf. 2008, 222(2), 361–366. DOI: 10.1243/ Machining of Ni Based Alloy. Int. J. Chem. Mol. Nucl. Mater.
09544054JEM970. Metall. Eng. 2016, 10(11), 1306–1312.
[163] Schubert, A.; Zeidler, H.; Hahn, M.; Hackert-Oschätzchen, M.; [181] Srivastava, V.; Pandey, P. M. Performance Evaluation of Electrical
Schneider, J. Micro-EDM Milling of Electrically Nonconducting Discharge Machining (EDM) Process Using Cryogenically Cooled
Zirconia Ceramics. Procedia CIRP 2013, 6, 297–302. DOI: Electrode. Mater. Manuf. Processes 2012, 27(6), 683–688. DOI:
10.1016/j.procir.2013.03.026. 10.1080/10426914.2011.602790.
[164] Banu, A.; Ali, M. Y.; Rahman, M. A. Micro-Electro Discharge [182] Li, L.; Hao, J.; Deng, Y.; Wang, H. Study of dry EDM Milling
Machining of Non-Conductive Zirconia Ceramic: Investigation Integrated with Electrode Wear Compensation and Finishing.
of MRR and Recast Layer Hardness. Int. J. Adv. Manuf. Technol. Mater. Manuf. Processes 2013, 28(4), 403–407. DOI: 10.1080/
2014, 75(1–4), 257–267. DOI: 10.1007/s00170-014-6124-9. 10426914.2013.763969.
[165] Schubert, A.; Zeidler, H.; Kühn, R.; Hackert-Oschätzchen, M. [183] Bissacco, G.; Valentincic, J.; Hansen, H. N.; Wiwe, B. D. Towards
Microelectrical Discharge Machining : A Suitable Process for the Effective Tool Wear Control in Micro-EDM Milling. Int. J.
Machining Ceramics. J. Ceram. 2015, 2015, 1–9. DOI: 10.1155/ Adv. Manuf. Technol. 2010, 47(1), 3–9. DOI: 10.1007/s00170-
2015/470801. 009-2057-0.
[166] Zeller, F.; Hösel, T.; Müller, C.; Reinecke, H. Microstructuring [184] Pham, D. T.; Ivanov, A.; Bigot, S.; Popov, K.; Dimov, S. A Study Of
of Non-Conductive Silicon Carbide by Electrical Discharge Micro-Electro Discharge Machining Electrode Wear. Proc. Inst.
Machining. Microsyst. Technol. 2014, 20(10–11), 1875–1880. Mech. Eng. Part C J. Mech. Eng. Sci. 2007, 221(5), 605–612. DOI:
DOI: 10.1007/s00542-013-1965-y. 10.1243/0954406JMES413.
[167] Richard, J.; Demellayer, R. Micro-EDM-Milling Development of [185] Yan, M. T.; Huang, K. Y.; Lo, C. Y. A Study on Electrode Wear
New Machining Technology for Micro-Machining. Procedia CIRP Sensing and Compensation in Micro-EDM Using Machine Vision
2013, 6, 292–296. DOI: 10.1016/j.procir.2013.03.023. System. Int. J. Adv. Manuf. Technol. 2009, 42(11–12), 1065–1073.
[168] Masuzawa, T.; Fujino, M. 3D Micro-EDM with Simple Shape DOI: 10.1007/s00170-008-1674-3.
Electrode Part 1: Machining of Cavities with Sharp Corners and [186] Kuo, C.; Chen, S.; Wu, Y.; Yan, T.; Masuzawa, T. Study on 3D
Electrode Wear Compensation. Proceedings KORUS 2000. The micro EDM. Proceedings of Annual Assembly of Japan Society
4th Korea-Russia International Symposium on Science and of Electrical Machining Engineers, 1997; pp 111–114.
Technology, IEEE, June 27–July 1, 2000; pp 102–105. DOI: [187] Yuzawa, T.; Magara, T.; Imai, Y.; Sato, T. Micro EDM by Thin Rod
10.1109/KORUS.2000.866067. Electrode. Proceedings of Annual Assembly of Japan Society of
[169] Plaza, S.; Sanchez, J. A.; Perez, E.; Gil, R.; Izquierdo, B.; Ortega, N.; Electrical Machining Engineers, 1997; pp 65–66.
Pombo, I. Experimental Study on Micro EDM-Drilling of Ti6Al4V [188] Hang, G.; Cao, G.; Wang, Z.; Tang, J.; Wang, Z.; Zhao, W.
Using Helical Electrode. Prec. Eng. 2014, 38(4), 821–827. DOI: Micro-EDM Milling of Micro Platinum Hemisphere. 1st IEEE
10.1016/j.precisioneng.2014.04.010. International Conference on Nano Micro Engineered and
26 S. KAR AND P. K. PATOWARI

Molecular Systems (1st IEEE-NEMS), Jan 18–21, 2006; pp 579–584. Process. J. Micromech. Microeng. 2008, 18(3), 35009. DOI:
DOI: 10.1109/NEMS.2006.334849. 10.1088/0960-1317/18/3/035009.
[189] Nguyen, M. D.; Rahman, M.; Wong, Y. S. Development of a [206] Mahardika, M.; Prihandana, G. S.; Mitsui, K. Precision Machining
Postprocessing Approach for Three-Dimensional Micro-Electrical by Discharge Pulse Counting Methods in Micro EDM Processes. J.
Discharge Machining Milling and Application in Simultaneous Mech. Sci. Technol. 2012, 26(11), 3597–3603. DOI: 10.1007/s12206-
Micro-Electrical Discharge/Electrochemical Milling. Proc. Inst. 012-0852-2.
Mech. Eng. Part B J. Eng. Manuf. 2014, 228(1), 62–73. DOI: [207] Bissacco, G.; Hansen, H. N.; Tristo, G.; Valentincic, J. Feasibility of
10.1177/0954405413486462. Wear Compensation in Micro EDM Milling Based on Discharge
[190] Dimov, S.; Pham, D. T.; Ivanov, A.; Popov, K. Tool-Path Counting and Discharge Population Characterization. CIRP
Generation System for Micro-Electro. Proc. Inst. Mech. Eng. Part Ann. Manuf. Technol. 2011, 60(1), 231–234. DOI: 10.1016/j.
B J. Eng. Manuf. 2003, 217(11), 1633–1637. DOI: 10.1243/ cirp.2011.03.064.
095440503771910014. [208] Puthumana, G.; Bissacco, G.; Hansen, H. N. Modeling of the Effect
[191] Zhao, W.; Yang, Y.; Wang, Z.; Zhang, Y. A CAD/CAM System for of Tool Wear Per Discharge Estimation Error on the Depth of
Micro-ED-Milling of Small 3D Freeform Cavity. J. Mater. Process. Machined Cavities in Micro-EDM Milling. Int. J. Adv. Manuf.
Technol. 2004, 149(1–3), 573–578. DOI: 10.1016/j. Technol. 2017, 92(9–12), 3253–3264. DOI: 10.1007/s00170-017-
jmatprotec.2004.02.021. 0371-5.
[192] Hung, J. C.; Yang, T. C.; Li, K. C. Studies on the Fabrication of [209] Bissacco, G.; Tristo, G.; Hansen, H. N.; Valentincic, J.
Metallic Bipolar Plates—Using Micro Electrical Discharge Machin- Reliability of Electrode Wear Compensation Based on Material
ing Milling. J. Power Sour. 2011, 196(4), 2070–2074. DOI: 10.1016/ Removal Per Discharge in Micro EDM Milling. CIRP Ann.
j.jpowsour.2010.10.001. Manuf. Technol. 2013, 62(1), 179–182. DOI: 10.1016/j.cirp.
[193] Reynaerts, D.; Brussel, H.; Meeusen, W. A Review on Micro- 2013.03.033.
Electro Discharge Machining of Metal and Silicon. Proceedings [210] Wang, J.; Qian, J.; Ferraris, E.; Reynaerts, D. Precision Micro-EDM
of the 1st International Conference for Precision Engineering Milling of 3D Cavities by Incorporating In-situ Pulse Monitoring.
and Nanotechnology, 1999; pp 24–29. Procedia CIRP 2016, 42, 656–661. DOI: 10.1016/j.procir.2016.
[194] Shukla, V.; Akhtar, S. N.; Subbu, S. K.; Ramkumar, J. Fabrication of 02.297.
Complex Micro Channels by Micro Electric Discharge Milling [211] Wang, J.; Qian, J.; Ferraris, E.; Reynaerts, D. In-Situ Process
(µ-ED Milling). Volume 2B: Advanced Manufacturing, ASME, Monitoring and Adaptive Control for Precision Micro-EDM
San Diego, California, USA, Nov 15–21, 2013; p V02BT02A072. Cavity Milling. Prec. Eng. 2017, 47, 261–275. DOI: 10.1016/j.
DOI: 10.1115/IMECE2013-64031. precisioneng.2016.09.001.
[195] Yu, Z. Y.; Kozak, J.; Rajurkar, K. P. Modelling and Simulation of [212] Li, Y.; Tong, H; Cui, J.; Wang, Y. Servo Scanning EDM for 3D
Micro EDM Process. CIRP Ann. Manuf. Technol. 2003, 52(1), Micro Structures. First International Conference on Integration
143–146. DOI: 10.1016/S0007-8506(07)60551-4. and Commercialization of Micro and Nanosystems, Parts A and
[196] Li, J. Z.; Xiao, L.; Wang, H.; Yu, H. L.; Yu, Z. Y. Tool Wear B, ASME, Sanya, Hainan, China, Jan 10–13, 2007; pp 1369–1374.
Compensation in 3D Micro EDM Based on the Scanned Area. DOI: 10.1115/MNC2007-21262.
Prec. Eng. 2013, 37(3), 753–757. DOI: 10.1016/j.precisioneng. [213] Tong, H.; Cui, J.; Li, Y.; Wang, Y. CAD/CAM Integration System of
2013.02.008. 3D Micro EDM. Proceedings of the International Conference on
[197] Pei, J.; Deng, R.; Hu, D. Bottom Surface Profile of Single Slot and Integration and Commercialization of Micro and Nanosystems,
Fix-length Compensation Method in Micro-EDM Process. J. Parts A and B, ASME, Sanya, Hainan, China, Jan 10–13, 2007;
Shanghai Jiaotong Univ. 2009, 34(1), 42–46. pp 1383–1387. DOI: 10.1115/MNC2007-21271.
[198] Xu, J.; Li, J.; Pei, J.; Hu, D. The Fix-length Compensation Method [214] Tong, H.; Li, Y.; Wang, Y.; Yu, D. Servo Scanning 3D Micro-EDM
in Single-Layer Multi-channel Machining Micro-EDM. Electro- Based on Macro/Micro-Dual-Feed Spindle. Int. J. Mach. Tools
mach. Mould 2009, 3(3), 15–19. Manuf. 2008, 48(7–8), 858–869. DOI: 10.1016/j.ijmachtools.2007.
[199] Pei, J.; Zheng, B.; He, L.; Jin, F. Arithmetic and Experimental 11.008.
Study of Fix-Length Compensation Based on Conical Bottom [215] Tong, H.; Wang, Y.; Li, Y. Vibration-Assisted Servo Scanning
Shape of Electrode in Micro-EDM. Volume 2A: Advanced 3D Micro EDM. J. Micromech. Microeng. 2008, 18(2), 25011.
Manufacturing, ASME, San Diego, California, USA, Nov 15–21, DOI: 10.1088/0960-1317/18/2/025011.
2013; p V02AT02A020. DOI: 10.1115/IMECE2013-62458. [216] Tong, H.; Zhang, L.; Li, Y. Algorithms and Machining Experiments
[200] Zhang, L.; Du, J.; Zhuang, X.; Wang, Z.; Pei, J. Geometric to Reduce Depth Errors in Servo Scanning 3D Micro EDM. Prec.
Prediction of Conic Tool in Micro-EDM Milling with Fix-Length Eng. 2014, 38(3), 538–547. DOI: 10.1016/j.precisioneng.
Compensation Using Simulation. Int. J. Mach. Tools Manuf. 2014.02.002.
2015, 89, 86–94. DOI: 10.1016/j.ijmachtools.2014.11.007. [217] Tong, H.; Li, Y.; Zhang, L. On-Machine Process of Rough-and-
[201] Pei, J.; Zhou, Z.; Zhang, L.; Zhuang, X.; Wu, S.; Zhu, Y.; Qian, J. Finishing Servo Scanning EDM for 3D Micro Cavities. Int. J.
Research on the Equivalent Plane Machining with Fix-length Adv. Manuf. Technol. 2016, 82(5–8), 1007–1015. DOI: 10.1007/
Compensation Method in Micro-EDM. Procedia CIRP 2016, 42, s00170-015-7416-4.
644–649. DOI: 10.1016/j.procir.2016.02.295. [218] Yan, M. T.; Lin, S. S. Process Planning and Electrode Wear
[202] Zhang, L.; Jia, Z.; Liu, W.; Wei, L. A Study of Electrode Compen- Compensation for 3D Micro-EDM. Int. J. Adv. Manuf. Technol.
sation Model Improvement in Micro-Electrical Discharge Machin- 2011, 53(1–4), 209–219. DOI: 10.1007/s00170-010-2827-8.
ing Milling Based on Large Monolayer Thickness. Proc. Inst. Mech. [219] Modica, F.; Marrocco, V.; Copani, G.; Fassi, I. Sustainable
Eng. Part B J. Eng. Manuf. 2012, 226(5), 789–802. DOI: 10.1177/ Micro-Manufacturing of Micro-Components via Micro Electrical
0954405411433097. Discharge Machining. Sustainability 2011, 3(12), 2456–2469.
[203] Wang, S. M.; Yu, H. J.; Lee, C. Y.; Chiu, H. S. Study of On-Machine DOI: 10.3390/su3122456.
Error Identification and Compensation Methods for Micro [220] Modica, F.; Marrocco, V.; Moore, P.; Fassi, I.; Wiens, G. Al-Mg
Machine Tools. Meas. Sci. Technol. 2016, 27(8), 84001. DOI: Micro-Features Using Micro-EDM Milling. Volume 5: 6th
10.1088/0957-0233/27/8/084001. International Conference on Micro- and Nanosystems; 17th
[204] Jung, J. W.; Jeong, Y. H.; Min, B. K.; Lee, S. J. Model-Based Pulse Design for Manufacturing and the Life Cycle Conference, ASME,
Frequency Control for Micro-EDM Milling Using Real-Time Chicago, Illinois, USA, Aug 12–15, 2012; pp 161–167. DOI:
Discharge Pulse Monitoring. J. Manuf. Sci. Eng. 2008, 130(3), 10.1115/DETC2012-70975.
31106. DOI: 10.1115/1.2917305. [221] Modica, F.; Guadagno, G.; Marrocco, V.; Fassi, I. Evaluation of
[205] Liao, Y. S.; Chang, T. Y.; Chuang, T. J. An On-Line Monitoring Micro-EDM Milling Performance Using Pulse Discrimination.
System for a Micro Electrical Discharge Machining (Micro-EDM) Volume 4: 19th Design for Manufacturing and the Life Cycle
 MATERIALS AND MANUFACTURING PROCESSES 27

Conference; 8th International Conference on Micro- and Nanosys- [238] Mussada, E. K.; Patowari, P. K. Post Processing of the Layer
tems, ASME, Buffalo, New York, USA, Aug 17–20, 2014; 1–8. DOI: Deposited by Electric Discharge Coating. Mater. Manuf. Pro-
10.1115/DETC2014-34373. cesses 2017, 32(4), 442–449. DOI: 10.1080/10426914.2016.
[222] Modica, F.; Basile, V.; Marrocco, V.; Fassi, I. A New Process 1198021.
Combining Micro-Electro-Discharge-Machining Milling and [239] Chakraborty, S.; Kar, S.; Dey, V.; Ghosh, S. K. Optimization
Sinking for Fast Fabrication of Microchannels with Draft Angle. J. and Surface Modification of Al-6351 Alloy Using SiC–Cu Green
Micro Nano-Manuf. 2016, 4(2), 24501. DOI: 10.1115/1.4032324. Compact Electrode by Electro Discharge Coating Process.
[223] Bissacco, G.; Tristo, G.; Valentinčič, J. Assessment of Electrode Surf. Rev. Lett. 2017, 24(1), 1750007. DOI: 10.1142/S0218625x
Wear Measurement in Micro EDM Milling. Proceedings of the 1750007X.
7th International Conference on Multi-Material Micro Manufac- [240] Prakash, V.; Shubham, Singh, P. K.; Das, A. K.; Chattopadhyaya, S.;
ture, Research Publishing, 2011; pp 155–158 (Bertrand, F., Khan- Mandal, A.; Dixit, A. R. Surface alloying of miniature components
Malek, C., Dimov, S., Eds.). DOI: 10.3850/978-981-08-6555-9. by micro-electrical discharge process. Materials and Manufacturing
[224] Liu, W.; Jia, Z.; Zou, S.; Zheng, X. A New Measurement Method Processes 2017. DOI: 10.1080/10426914.2017.1364755.
of Relative Volume Wear Ratio Based on Discharge Debris [241] Wang, Z.; Cui, J.; Jin, B. Study on Micro Electrical Discharge
Composition Analysis in Micro-EDM. Adv. Mech. Eng. 2014, Deposition in Air. International Conference on Mechatronics
2014, 1–11. DOI: 10.1155/2014/479609. and Automation (ICMA 2007), IEEE, Harbin, China, Aug 5–8,
[225] Modica, F.; Marrocco, V.; Trotta, G.; Fassi, I. Micro Electro 2007; pp 63–68. DOI: 10.1109/ICMA.2007.4303517.
Discharge Milling of Freeform Micro-Features with High Aspect [242] Wang, Y.; Xie, B.; Wang, Z.; Peng, Z. Micro EDM Deposition in
Ratio. Volume 7: 5th International Conference on Micro- and Air by Single Discharge Thermo Simulation. Trans. Nonferrous
Nanosystems; 8th International Conference on Design and Design Metals Soc. China 2011, 21(Supplement 2), s450–s455. DOI:
Education; 21st Reliability, Stress Analysis, and Failure Prevention 10.1016/S1003-6326(11)61623-3.
Conference, ASME, Washington, DC, USA, Aug 28–31, 2011; [243] Zilong, P.; Yonghong, L.; Yinan, L.; Yiyao, Z.; Liping, W. Design of
pp 441–446. DOI: 10.1115/DETC2011-48331. a Magnetic Field Generator for Compression Plasma Discharge
[226] Toren, M.; Zvirin, Y.; Winograd, Y. Melting and Evaporation Channel of Micro EDM Deposition. Int. J. Control Autom. 2014,
Phenomena During Electrical Erosion. J. Heat Transfer 1975, 7(6), 339–350. DOI: 10.14257/ijca.2014.7.6.31.
97(4), 576–581. DOI: 10.1115/1.3450433. [244] Unune, D. R.; Mali, H. S. Current Status and Applications of
[227] Kumar, S.; Singh, R.; Singh, T. P.; Sethi, B. L. Surface Modification Hybrid Micro-Machining Processes: A Review. Proc. Inst. Mech.
by Electrical Discharge Machining: A Review. J. Mater. Process. Technol. Eng. Part B: J. Eng. Manuf. 2015, 229(10), 1681–1693. DOI:
2009, 209(8), 3675–3687. DOI: 10.1016/j.jmatprotec.2008.09.032. 10.1177/0954405414546141.
[228] Kruth, I. P.; Stevens, I.; Froyen, I.; Lauwers, I. Study of the White [245] Rashid, M. A.; Rahman, M.; Kumar, A. S. A Study on Compound
Layer of a Surface Machined by Die-Sinking Electro-Discharge Micromachining Using Laser and Electric Discharge Machining
Machining. CIRP Ann. Manuf. Technol. 1995, 44(1), 169–172. (EDM). Adv. Mater. Process. Technol. 2016, 2(2), 258–265. DOI:
DOI: 10.1016/S0007-8506(07)62299-9. 10.1080/2374068X.2016.1164531.
[229] Gangadhar, A.; Shunmugam, M. S.; Philip, P. K. Surface Modification [246] Byiringiro, J. B.; Kim, M. Y.; Ko, T. J. Process Modeling of Hybrid
in Electrodischarge Processing with a Powder Compact Tool Elec- Machining System Consisted of Electro Discharge Machining
trode. Wear 1991, 143(1), 45–55. DOI: 10.1016/0043-1648(91)90084-8. and End Milling. Int. J. Adv. Manuf. Technol. 2012, 61(9–12),
[230] Mohri, N.; Saito, N.; Tsunekawa, Y.; Kinoshita, N. Metal Surface 1247–1254. DOI: 10.1007/s00170-012-4089-0.
Modification by Electrical Discharge Machining with Composite [247] Kim, M. Y.; Li, C. P.; Kim, J. H.; Ko, T. J. Machining Characteristics
Electrode. CIRP Ann. Manuf. Technol. 1993, 42(1), 219–222. of the Hybrid Machining System Comprising of EDM and End
DOI: 10.1016/S0007-8506(07)62429-9. Milling. J. Korean Soc. Manuf. Process Eng. 2016, 15(3), 86–92.
[231] Tsunekawa, Y.; Okumiya, M.; Mohri, N. Surface Modification of DOI: 10.14775/ksmpe.2016.15.3.086.
Aluminum by Electrical Discharge Alloying. Mater. Sci. Eng. A [248] Li, C. P.; Kim, M. Y.; Islam, M. M.; Ko, T. J. Mechanism Analysis of
1994, 174(2), 193–198. DOI: 10.1016/0921-5093(94)91088-X. Hybrid Machining Process Comprising EDM and End Milling.
[232] Samuel, M. P.; Philip, P. K. Properties of Compacted, Pre-Sintered J. Mater. Process. Technol. 2016, 237, 309–319. DOI: 10.1016/j.
and Fully Sintered Electrodes Produced by Powder Metallurgy for jmatprotec.2016.06.022.
Electrical Discharge Machining. Indian J. Eng. Mater. Sci. 1996, [249] Al-Ahmari, A. M. A.; Rasheed, M. S.; Mohammed, M. K.; Saleh, T.
3(6), 229–233. A Hybrid Machining Process Combining Micro-EDM and Laser
[233] Moro, T.; Goto, A.; Mohri, N.; Saito, N.; Matsukawa, K.; Miyake, Beam Machining of Nickel-Titanium-Based Shape Memory Alloy.
H. Surface Modification Process by Electrical Discharge Machining Mater. Manuf. Processes 2015, 31(4), 447–455. DOI: 10.1080/
with TiC Semi-sintered Electrode. J. Jpn. Soc. Prec. Eng. 2001, 10426914.2015.1019102.
67(1), 114–119. DOI: 10.2493/jjspe.67.114. [250] Kim, S.; Kim, B. H.; Chung, D. K.; Shin, H. S.; Chu, C. N. Hybrid
[234] Pantelis, D. I.; Vaxevanidis, N. M.; Houndri, A. E.; Dumas, P.; Micromachining Using a Nanosecond Pulsed Laser and Micro
Jeandin, M. Investigation into Application of Electrodischarge EDM. J. Micromech. Microeng. 2010, 20(1), 15037. DOI: 10.1088/
Machining as Steel Surface Modification Technique. Surf. Eng. 0960-1317/20/1/015037.
1998, 14(1), 55–61. DOI: 10.1179/sur.1998.14.1.55. [251] Nguyen, M. D.; Rahman, M.; Wong, Y. S. Enhanced Surface
[235] Patowari, P. K.; Mishra, U. K.; Saha, P.; Mishra, P. K. Surface Integrity and Dimensional Accuracy by Simultaneous Micro-ED/
Integrity of C-40 Steel Processed with WC-Cu Powder Metallurgy EC Milling. CIRP Ann. Manuf. Technol. 2012, 61(1), 191–194.
Green Compact Tools in EDM. Mater. Manuf. Processes 2011, 26 DOI: 10.1016/j.cirp.2012.03.011.
(5), 668–676. DOI: 10.1080/10426914.2010.512652. [252] Zeng, Z.; Wang, Y.; Wang, Z.; Shan, D.; He, X. A Study of
[236] Krishna, M. E.; Patowari, P. K. Parametric Optimisation of Electric Micro-EDM and Micro-ECM Combined Milling for 3D Metallic
Discharge Coating Process with Powder Metallurgy Tools Using Micro-Structures. Prec. Eng. 2012, 36(3), 500–509. DOI: 10.1016/
Taguchi Analysis. Surf. Eng. 2013, 29(9), 703–711. DOI: 10.1179/ j.precisioneng.2012.01.005.
1743294413Y.0000000207. [253] Dimov, S.; Brousseau, E.; Minev, R.; Bigot, S. Micro- and Nano-
[237] Mussada, E. K.; Patowari, P. K. Characterisation of Layer Deposited Manufacturing: Challenges and Opportunities. Proc. Inst. Mech.
by Electric Discharge Coating Process. Surf. Eng. 2015, 31(10), Eng. Part C J. Mech. Eng. Sci. 2011, 226(1), 3–15. DOI: 10.1177/
796–802. DOI: 10.1179/1743294415Y.0000000048. 0954406211422972.