Solutions Manual For Physics of Semiconductor Devices 4th Edition by Sze
Solutions Manual For Physics of Semiconductor Devices 4th Edition by Sze
Physics of
Semiconductor Devices
Fourth Edition
S. M. Sze
Yiming Li
Kwok K. Ng
National Chiao Tung University
Wiley-Interscience
Hoboken, Chichester, Brisbane, Toronto, Singapore
Contents
Chapter 1 Physics and Properties of Semiconductors—A Review.................................................... 3
Chapter 6 MOSFETs............................................................................................................................. 36
Chapter 14 Sensors................................................................................................................................ 73
1 PHYSICS AND PROPERTIES OF SEMICONDUCTORS—A REVIEW
1. (a) A unit cell contains 1/8 of a sphere at each corner of the eight corners, 1/2 of a sphere at each of the 6 faces, and 4 spheres
1 1 1 1 1
inside the cell → a total of --- × 8 + --- × 6 + 4 = 8 spheres. The diagonal distance between ( 0, 0, 0 ) and --- a, --- a, --- a
8 2 4 4 4
2 2 2
is d = a--- + a--- + a--- = a--- 3 .
4 4 4 4
d a
The radius of the hard sphere is --- = --- 3 .
2 8
3
4π a
8 ------ --- 3
3 8 π 3
∴ Max fraction = ---------------------------------- = ---------- = 34% .
a3 16
a a a a a a
3. V = a ⋅ b × c = ---, 0, --- ⋅ ---, ---, 0 × 0, ---, ---
2 2 2 2 2 2
a a a a
--- 0 0 --- --- --- 3
2 , 2, 2 2 2
a a a
2 2 a
= a---, 0, a--- ⋅ = a
---, 0, a
--- ⋅ -----, – -----, ----- = ----
-
2 2 a--- a--- a--- a 2 2 4 4 4 4
0 0 ---
2 2 2 2
2 a
4. (a) 1 a 2 2a
d = --- --- + ---------- a
2 2 2
2a 2 + a 2 = 3a
3
= ------- a
4
a
1 1 1 2a
(b) Intercept at 2a, 3a and 4a; reciprocal: ---, ---, --- . The plane is (643).
2 3 4
3
PHYSICS OF SEMICONDUCTOR DEVICES
(b × c) ⋅ (c × a) × (a × b) ( 2π ) 3
(b) Volume in reciprocal lattice = ( 2π ) 3 ------------------------------------------------------------- = -------------
( a ⋅ b × c )3 VC
a(z + x) × a(x + y)
--- ---
b × c = 2π 2 2 4π (y – x + z) 4π ( y – x + z )
a ∗ = 2π ------------------
- --------------------------------------------------------------------------------------- = ------ ⋅ ---------------------------------------------- = ------ ⋅ -------------------------
a⋅b×c a(y + z) ⋅ a(z + x) × a(x + y) a (y + z) ⋅ (y – x + z) a (1 + 1)
--- --- ---
2 2 2
4π 1 4π
= ------ --- ( y + z – x ) → ------ (one of the vectors for bcc)
6. a 2 a
Similarly, for b∗ and c∗. ∴ Reciprocal of fcc is bcc.
k2 k2
7. ∴ E = ----x- + ----y- = constant = C
ml mt
k2
Let kx = 0, ∴ ----y- = C
mt
k2 k y2 /m t m∗ k2 5 2
Let ky = 0, ∴ ----x- = C ∴ ------------
- = 1 ∴ ------l = ----x2- = --- = 25
ml k x2 /m l mt ky 1
9. For a three dimensional structure such as a bulk semiconductor, to calculate the electron and hole concentrations in the con-
duction and valence bands, respectively. We need to know the density of states, that is, the number of allowed energy states
per unit energy per unit volume (i.e., in the unit of number of states/eV/cm3).
When electrons move back and forth along the x-direction in a semiconductor material, the movements can be described by
standing-wave oscillations. The wavelength λ of a standing wave is related to the length of the semiconductor L by
L/λ = n x , (1)
where nx is an integer. The wavelength can be expressed by de Broglie hypothesis
λ = h/k n , (2)
where h is the Planck's constant and kx is the momentum in the x-direction. Substituting Eq. 2 into Eq. 1 gives
Lk n = hn x . (3)
4
1 PHYSICS AND PROPERTIES OF SEMICONDUCTORS—A REVIEW
The derivation of the two-dimensional density of states is almost the same. We calculate the number of k-states enclosed
within an annulus of radius k to k + dk instead. The area between two concentric circles is 2πkdk and the number of energy
states contained in the area is 2(2πkdk)/h2. The two-dimensional density of states is then given by
4πkdk m
- = 4π -----n- dE
N ( E )dE = --------------- (8)
h
2 2
h
and
m
N ( E ) = 4π -----2n- (9)
h
Finally, the derivation of the one-dimensional density of states is calculated within a line. The wavelength λ of a standing
wave is related to the length L of semiconductor by
L
---------- = n x . (10)
λ⁄2
The incremental momentum dkx required for a unity increase in nx is
2Ldk x = h . (11)
dkx in momentum space for a line with unit length is h/2 and the number of energy states contained in the line is 2dk/(h/2).
The one-dimensional density of states is
2dk 2m
N ( E )dE = ---------- = 2 ---------n- 1
--- dE (12)
h⁄2 E h
and
2m 1
N ( E ) = 2 ---------n- --- . (13)
E h
5
PHYSICS OF SEMICONDUCTOR DEVICES
∞ ∞
– ( E – E )/kT
10. ( E – E C )N ( E )F ( E ) dE ( E – E C ) ( E – E C ) 1/2 e F dE
0 0
KE = -------------------------------------------------------------
- = -------------------------------------------------------------------------------------------
∞ ∞ – ( E – E F )/kT
N ( E )F ( E ) dE ( E – E C ) 1/2 e dE
0 0 E – E C = y, dy = dE
∞ ∞
5 3 1
y 3/2 e – y/kT dy kT z 3/2 e – z dz kT Γ --- kT --- --- π
2 2 2
0
= ------------------------------------ 0
- = --------------------- = -------------------------------- = 3
= ----------------------------------- --- kT
∞ ∞ 2
3 1
y 1/2 e – y/kT dy z 1/2 e – z dz Γ --- --- π
0 y/kT = z 0
2 2
11.
ND
N D+ = ----------------------------------------------
- (14)
E F – E D
1 + 2 exp -------------------
kT
At 77K,
3/2
77
N C = N C ---------
19 18
= 2.8 ×10 ( 0.13 ) = 3.64 ×10 cm –3 (15)
300
77 = 0.006648 eV
kT = 0.0259 -------- (16)
300-
NC ×10
18
- = 0.006648 ln 3.64
E C – E F = kT ln --------------- -----------------------
- (Let N D = 10 16 )
ND ( T )
+
10 16
= 0.00648 ln ( 364 ) = 0.0392 eV (17)
From Fig. 10 in textbook, we know that for phosphorous in Si, EC − ED ≈ 0.045 eV.
Thus, from Eq. 14, we have
10 16 10 16
N D+ = --------------------------------------------------------------------- = -----------------------------------------
1 + 2 exp ( +0.87 )
1 + 2 exp –----------------------------------------
0.0392 + 0.045
0.006648 10×1015 10×1015
10 16 15
= ------------------- = 1.73 ×10 cm –3 ( < 10 16 cm –3 )
1 + 4.78
N D+ (cal) = N D+ (selected)
We select a new N D+ value, repeat the process and eventually obtain N D+
6
1 PHYSICS AND PROPERTIES OF SEMICONDUCTORS—A REVIEW
0.044 eV
1010 9.65×109 = ni 9.65×109 cm–3
109 0 0.1 0.2 0.3 EC
EV EF ≈ 0.26 eV
1 1 10 2
13. n no = --- [ N D – N A + ( N D – N A ) 2 + 4n i2 ] = --- [ 2 × 10 10 + ( 2 ×10 ) + 4 ( 9.3 × 10 19 ) ]
2 2
= 2.3885 × 10 10 cm –3
kT N 2.8 × 10 19
∴E C – E F = ------ ln ------C- = 0.0259 ln --------------------------- = 0.540 eV
q n 2.39 × 10 10
14. (a) NA > NAu, EF near EV , therefore EA level is neutral and ED level is positive. Therefore the state of charge of gold level
is positive.
(b) No effect.
15. N ∝ exp(–Ed/2kT)
10 15 –ED ED –ED ED
- = exp -----------
--------- - = exp ---------------
- + ----------- - + ------------------
-
10 14 2kT 1 2kT 2 0.1027 0.00479
2.3
54.8E D = 2.3, E D = ---------- = 0.041 eV . From Fig. 10 in the textbook, we know that the atom is Sb.
54.8
N
16. E C – E F = kT ln ------C- = 0.0259 ln ( 10 3 ) = 0.1787 eV
N D
From Fig. 10 in the textbook, E C – E D = 0.045 eV .
E F – E D = 0.045 – 0.1787 eV = – 0.1337 ; thus,
N D0 E F – E D 0.1337 2
------+- = g exp ------------------
- = 2 exp – ---------------- = 2 exp ( – 5.16 ) = ------------- = 0.0114 = 1.14% .
ND kT 0.0259 175.1
7
PHYSICS OF SEMICONDUCTOR DEVICES
n2
17. (a) σ = q ( μ n n + μ p p ) = q μ p bn + ----i-
n
dσ ni
------ = 0 q μ p b – q μ p n 2i n – 2 = 0 ∴n = -------
dn b
1
-----------------------------------------
bn
q μ p ------- + bn i
i
ρm b b+1
------ = --------------------------------------------- = ------------
ρi 1
------------------------------- 2 b
q μp ni ( b + 1 )
ρm
When b = 3, ------ = 1.15
ρi
1 1
- = 3.59 ×105 Ω-cm
ρ i = ------------------------------- = ------------------------------------------------------------------------------------
q μp ni ( b + 1 ) – 19
1.6 ×10 × 450 × 9.65 ×10 ( 3 + 1 )
9
(b) p po = N A ( Zn ) + N A′ ( C ) – N D ( S )
15 15
= 5 ×10 + 10 17 – 10 17 = 5 ×10 cm – 3
6 2 12
( 2.25 ×10 ) 5 ×10
n po = ----------------------------
15
- = ---------------- = 10 – 3 cm – 3 ≈ 0
15
5 ×10 5 ×10
17
μ p = μ p ( N A + N A′ + N D ) = μ p ( 2.05 ×10 ) = 220 cm 2 /V-s
μn = 4000 cm2/V-s
1 1
ρ = ----------------- = -------------------------------------------------------------
- = 5.68 Ω-cm
q μ p p p0 – 19
1.6 ×10 × 220 × 5 ×10
15
8
1 PHYSICS AND PROPERTIES OF SEMICONDUCTORS—A REVIEW
20. τ ∝ E S = –1 S/cm
5 5 35
τ 2 = a 2 ( kT ) +2 Γ --- + 1 Γ --- = ------
2 2 4 /
/
5 2 25
5
τ 2 = a ( kT ) +1 Γ --- + 1 Γ --- = ------
2 2 4
τ 2 35/4 7
γ = ---------2- = ----------- = --- = 1.4
τ 25/4 5
–1 1.4
γ - = -----------------------------------------
R H = γ ------
15
∴ n = --------- = 7 ×10 cm – 3
qn RH q 1250 × 1.6 ×10
– 19
R 1250
μ H = R H σ = ------H = ------------ = 1250 cm2/V-s
ρ 1
2n i E t – E i
1 + --------------------- cosh --------------- -
n no + p no kT 2
21. τr = - = 2 τ ro = ------------------
----------------------------------------------------------------------
v th σ o N t v th σ o N t
9
2 × 9.65 ×10
∴ ------------------------------- cosh x = 1 cosh x ≅ 1
4
∴ --- e x = 5.18 ×10
10 15 2
x = ln(1.036×105) ≈ 5×2.3 = 11.5
Et – Ei
---------------
- = ± 11.5 Et – Ei = 0.297 eV
kT
σ v th ( 0 – n i2 )N t σ v th n i N t
22. p, n < ni ∴ U = -------------------------------------------- = --------------------
-
0 + 0 + ni ( e + e ) 0 0 2
N 2 - 2
------t- = -------------- = -------------------------------------------------------------
- = 0.103 s
U σ v th n i – 16
2 ×10 × 10 7 × 9.65 ×10
9
– σ v th N t n i
23. U = -------------------------------------
E t – E i
2 cosh --------------- -
kT
Emission time = No. of center/generate rate
E t – E i
2 cosh ---------------
-
Nt kT 2×1
∴ τ = ----- = ------------------------------------- ∴ τ = -------------------------------------------------------------
- = 0.103 s
U σ v th n i – 16
2 ×10 × 10 7 × 9.65 ×10
9
σ v th N t n 0 σ v th N t n 0
24. U = --------------------------------------------------------- = ---------------------------------------
n E t – E i n
2 1 + -----i cosh --------------- 2 1 + -----i cosh 5
n0 kT - n0
9
PHYSICS OF SEMICONDUCTOR DEVICES
9
9.65 ×10
2 1 + ---------------------- × 74.2
Nt 10 13
- = 1.07 ×10–4 = 0.1 ms
τ = no. of center/recombination rate = --------------------------------------- = --------------------------------------------------------
σ v th N t n 0 –
2 ×10 × 10 × 10
16 7 13
---------------------------------------
ni
2 1 + ----- cosh 5
n0
α 12
25. ν opt = 2 ------f = 2 × 7.63 ×10 Hz
m1
α 12
ν BZ = 2 ------f = 2 × 7.63 ×10 Hz
m1
– 34 12
6.62 ×10 × 2 × 7.63 ×10 J –3
h ν BZ = --------------------------------------------------------------------------
– 19
= 44.6 ×10 eV = 44.6 meV
1.6 ×10 C
–6 –6 –6 –4
26. ( 5.995 ×10 – 4.5 ×10 ) ( 500°C – 27°C ) = ( 1.495 ×10 ) ( 473 ) = 7 ×10 = 0.07%
2 2
28. According to infinite potential well, the ground-state energy is E = h /8mL . Therefore, the ground-state energies of elec-
2 2 2 2
tron and hole are h /8m e L and h /8m h L , respectively. The bandgap of the quantum well is
2 2
h h
E g + --------------2- + ---------------2-
8m e L 8m h L
As the result, the bandgap of the quantum well can be tuned by the size of quantum well L, where the bandgap increases as
the decreasing L.
E F – E i ψ /V th
n = n i exp ----------------
- = ni e (19)
kT
and
E i – E F – ψ /V th
p = n i exp ----------------
- = ni e . (20)
kT
Substituting Eq. (1.26) and (1.27) into Eq. (1.25),
ψ /V th – ψ /V th
d ψ
2 q ( ni e – ni e + NA – ND ) qn ψ /V – ψ /V th NA – ND
---------2 = ------------------------------------------------------------------------------- = -------i e th – e + -------------------- . (21)
dx ε s ε s
ni
10
1 PHYSICS AND PROPERTIES OF SEMICONDUCTORS—A REVIEW
30. 2D:
2 2
d ψ d ψ q ( n – p + NA – ND )
Poisson equation: --------2- + ---------2 = ----------------------------------------------
dx dy εs
The electron current-continuity equation:
2 2 2 2
– μ n ∂n ∂ψ – μ n n ∂ ψ + D n ∂ n – μ n ∂n ∂ψ – μ n n ∂ ψ + D n ∂ n = R ( n, p )
∂x∂x ∂x
2
∂x
2 ∂y∂y ∂y
2
∂y
2
N ( x – μ p Et ) 2 t
32. Δp = p n – p no = ------------------- - – ----
exp – ---------------------------
4πD p t 4D p t τp
N t
At max, Δp = ------------------- exp – ----
4πD p t τ p
100 – 25 75 75
τ p = --------------------- = -------- = ------------- = 46.5 μs
ln ( 10/2 ) ln 5 1.607
N ( x – μ p Et ) 2 t
33. p – p n = ------------------- exp – ---------------------------- – ----
4 π Dp t 4D p t τp
( x – μ p Et ) 2 1
At half max exp – ---------------------------- = --- ∴ ( x – μ p Et ) 2 = 4D p t ln 2
4D p t 2
11
PHYSICS OF SEMICONDUCTOR DEVICES
p n – p no ∂2 pn
34. – ------------------- + D p ----------
- = 0
τp ∂x 2
p J (W) 1
α 0 = --------------
- = -----------------------
Jp ( 0 ) W
cosh ------
L P
–6 –2
L = DP τP = 5.18 × 50 ×10 = 1.6 ×10 cm
1 1
∴ α 0 = --------------------------------------- = --------------------------- = 0.954 = 95.4%
5 ×10 – 3 cosh ( 0.31 )
cosh -------------------- -
1.6 ×10–2
6 2
( 2.25 ×10 )
35. p no = ----------------------------
15
- = 10 – 3 cm –3
5 ×10
No. of electron-hole pairs τ p G = 10 –7 × 10 17 = 10 10 cm –3
–3
F = S p [ p n ( 0 ) – p no ] , L p = 1.93 ×10 cm
τp Sp e 0 10 – 7 × 10 5
p n ( 0 ) = p no + τ p G 1 – --------------------- - = 10 10 × 0.165 = 1.65 ×109 cm – 3
- = 0 + 10 10 1 – -------------------------------------------------------
Lp + τp Sp 1.93 ×10 + 10 × 10
–3 – 7 5
9 14
F = 10 5 ( 1.65 ×10 – 0 ) = 1.65 ×10 cm –2 s –1
36. Under the steady-state condition, the recombination rate at the surface and in the bulk is equal, that is
Δp n ,bulk Δp n ,surface
------------------- = ----------------------- .
τ p, bulk τ p, surface
The excess minority carrier concentration at the surface is given by
10 –7
Δp n ,surface = 10 14 × ---------
- = 10 13 cm – 3 .
10 –6
The generation rate can be determined from the steady-state conditions in the bulk
10 14
G = ---------
- = 10 20 cm – 3 s – 1 .
10 –6
The boundary conditions are:
Δp(x = ∞) = 1014 cm–3
and Δp(x = 0) = 1013 cm–3
– x/L P
Hence Δp ( x ) = 10 14 ( 1 – 0.9e ) cm–3, where L P = 10 × 10 –6 = 31.6 μm .
12