Customized Systems Nanostrcutures and Surface Analysis and Surface Science

and Solutions Thin Film Deposition Preparation Components Applications

Sample Stage
Control for FE-LEEM P90

SPECS Surface Nano Analysis GmbH

Voltastrasse 5
13355 Berlin
Germany
Tel.: +49 30 46 78 24-0
Fax: +49 30 46 42 08-3
Email: [email protected]
Web: http://www.specs.com ISO 9001 Certificate

Innovation in Surface Spectroscopy and Microscopy Systems

SPECS User Manual
SPECS Sample Stage—User Manual Version 1.0

May 21, 2013

©2013. All rights reserved. No part of this manual may be reproduced without the prior permission of SPECS GmbH. Other
product and company names mentioned in this document may be the trademarks or registered trademarks of their respective
owners and are used for identification purposes only.

SPECS order number reference: 78000393

 Table of Contents
Chapter 1 LEEM Sample Stage 1
1.1 Overview of the Vacuum Component 1
1.2 Overview of the Controller 2
1.3 SSC-5 2
1.4 Safety 3
1.5 Guidelines for Use 4

Chapter 2 Installation 5

Chapter 3 Normal Operation 7

3.1 Changing the Sample Stage Position 8
3.1.1 Setting the Z Position 8
3.1.2 Tilting the Sample Stage 8
3.1.3 Setting the X–Y Position 8
3.2 Changing the Step Size 9
3.2.1 Setting Zero Position 9
3.3 Setting the Motor Mode 10

Chapter 4 Editing the Configuration 11

4.1 Restore Original Configuration 11
4.2 Sensor Options Menu 11
4.3 Sample Stage Controller Configuration 12

Chapter 5 Maintenance 15
5.1 Opening the Analysis Chamber 15
5.2 Removing the Sapphire Tube 17
5.3 Dismounting the Sample Stage 18

Index 19

Sample Stage 1.0 May 21, 2013 iii

 Chapter 1 LEEM Sample Stage

Chapter 1
LEEM Sample Stage
The FE-LEEM P90 sample stage is equipped with high precision linear positioners that can position the sample with high
precision. It is able to move the sample in X,Y,Z directions as well as tilting the sample without moving the center point.

Stepper motors move the sample stage. These are controlled using the SmarAct Control Unit and SSC-5. This manual
describes the installation and use of these items to position the sample stage.

The following topics are covered in this chapter:

■ A view of the mechanical sample stage fitted to the vacuum chamber.
■ A brief overview of the Control Unit.
■ Features and operating modes in the SSC-5.
■ Safety notices.
■ Additional guidelines for secure and reliable operation.

SmarAct supply a manual for the Control Unit and SSC-5. This is included in the delivery and provides additional tech-
nical information about the equipment.

1.1 Overview of the Vacuum Component

The sample holder fits into the sample stage, which allows precise movement in three dimensions. It can also tilt the
sample (changing the orientation of the X–Y plane) about the center of the sample.

The photograph below shows the sample stage as viewed from the sample chamber. There are a total of eight motors
arranged around the stage. For more details about these motors, please see "Normal Operation" on page 7.

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 Chapter 1 LEEM Sample Stage

Figure 1: Sample stage vacuum component

1.2 Overview of the Controller

The Control Unit performs the following actions:
■ drives the positioners
■ processes the sensor data from the integrated position sensors
■ performs closed-loop position control
■ processes commands from the operation controls

The figure below shows the connectors on the Control Unit.

Figure 2: SmarAct Control Unit

1.3 SSC-5
The SSC-5 gives direct control of the sample stage positioning system. The device is pre-configured so that it is ready for
use without further changes.

Figure 3 shows the features on the SSC-5.

2 May 21, 2013 Sample Stage 1.0

 Chapter 1 LEEM Sample Stage

Figure 3: Features of SSC-5

There are essentially two operational modes:

■ Normal operation. You use the controls to move the motors in the sample stage. This mode is described in "Normal
Operation" on page 7.
■ Menu mode. This is for configuration purposes and is described in "Editing the Configuration" on page 11.

1.4 Safety
Please note the following warnings and safety instructions carefully when using the product.

Danger—High Voltages Present!

Output connectors with dangerous signals are labeled with this symbol. Sensor modules connected to
these connectors also have pins with a high voltage.
The MCS controller described in this manual is capable of generating high output currents at high
voltages. They may cause serious or even lethal injury if used improperly.
Never touch any part that might be connected to an output with a high voltage.
Do not connect products from other manufacturers to the output connectors.

Caution!
The MCS controller must be installed horizontally with 3 cm air circulation area behind the ventilator.
Insufficient air flow can cause overheating, which can result in a limited functionality of the controller.

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 Chapter 1 LEEM Sample Stage

Caution!
The system is NOT hot-pluggable. Always make sure to power down the device before connecting or dis-
connecting any plugs!

Note: You can safely remove or attach the USB cable during operation. On removing the USB cable, all positioners will
be stopped immediately as a safety precaution.

1.5 Guidelines for Use

The positioning system is a precision device and caution should be used when handling a positioner or manipulator.
■ Do not apply high torques or forces to the slides with respect to the guides. A manipulation system should be held
at the base plate during transportation.
■ Neither the sensor head nor the scale should be touched as this can affect its operation or cause damage. Finger-
prints can be removed by wiping carefully with cotton buds soaked in isopropanol.
■ The positioners consist of steel parts that can rust if touched with bare hands. Gloves should be worn when hand-
ling positioners or manipulators. As an additional protection, outer surfaces can be lubricated with white oil if the
positioners are not applied in vacuum conditions.
■ The cables are attached directly at the positioners and special care should be taken not to damage the cables.
Repairing a cable is very difficult and expensive.

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 Chapter 2 Installation

Chapter 2
Installation
The sample chamber has two DN40CF feedthroughs, each with three electrical feedthroughs, as shown in Figure 4.
These are labeled A and B. All cables are labeled for easy connection.

Figure 4: Sample stage electrical feedthroughs

Figure 5 shows the connection scheme for the sample stage and controllers. Please note the following points for
the connections:
■ Before starting, make sure that the power is off (0).

Sample Stage 1.0 May 21, 2013 5

 Chapter 2 Installation

■ Power up the controller by switching the power on (1).

Note: There is an RS-232 connector for computer control. If you are using computer control with your own programs, use
a normal (not crossed) RS-232 cable for the connection.

Figure 5: Electrical connections

6 May 21, 2013 Sample Stage 1.0

 Chapter 3 Normal Operation

Chapter 3
Normal Operation
The FE-LEEM P90 sample stage is fitted with eight motors to achieve sample movement. The positions of the motors
are shown in the drawing below.
■ There are four piezo motors that set the Z position and the tilt. There is an angle of 90º between the motors.
■ There are four piezo motors that set the X–Y position. Again, there is an angle of 90º between the motors; the axis
is rotated by 45º compared to the X and Y axes. Thus all four motors are in operation when moving in the X or Y dir-
ections. This arrangement distributes the weight of the sample stage over the motors.

Figure 6: Sample stage

Sample Stage 1.0 May 21, 2013 7

 Chapter 3 Normal Operation

Normal operation mode for the on the SSC-5 controller allows you to change motor position and thereby move the
sample. This chapter also describes common actions such as changing the step size for movement, zeroing the motor
position and setting the correct motor mode.

3.1 Changing the Sample Stage Position

For axis control, the motors are formed into groups. You can cycle through the groups on the SSC-5:
■ Press the Group Up or Group Down buttons on the SSC-5. The display will show the different groups. The first entry
on each line shows [letter][number]. The letter is for the axis (T = tilt), while the number is the group number.

The following sections describe the groups and their corresponding axes.

3.1.1 Setting the Z Position

The four Z piezo motors can move the sample back and forth. The positive Z direction is toward the objective lens.

To change the Z position:

■ Rotate the right dial on the controller.

Z1 -7 50µm
----

Z1 -11 50µm
Z1 7 50µm
Z1 -3 50µm
Figure 7: Group 1—Z position

3.1.2 Tilting the Sample Stage

The tilting feature is designed so that the center of the sample retains its position during the tilt. Therefore, you do not
need to make any adjustments to the X, Y, Z positions or alter the beam parameters.

Tilting is achieved by moving opposite motors in different directions.

T2 -5 100µm
----

T2 8 100µm
t2 -7 100µm
t2 1 100µm
Figure 8: Group 2—Tilt settings

The left and center dials on the SSC-5 control tilting.

3.1.3 Setting the X–Y Position

Group three contains the settings for the X and Y positions of the sample stage. This moves the sample stage in the
plane of the sample surface.

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 Chapter 3 Normal Operation

X3 197 ,590 100µm

----
X3 -81 100µm
Y3 ,
197 590 100µm
Y3 -81 100µm
Figure 9: Group 3—X,Y positions

To set the X position:

■ Rotate the left dial on the controller.

To set the Y position:

■ Rotate the center dial on the controller.

3.2 Changing the Step Size

One click of the control wheel will move the selected axis by the distance given by the step size. You can change this set-
ting in order to change the speed or precision of movement.

Step size

197 ,590 100µm

----

-81 100µm
,
197 590 100µm
-81 100µm
Figure 10: Display of step size

To change the step size:

1. Press the control dial corresponding to the axis. A cursor will appear next to the step size to show which set-
tings you will change.
2. Turn the control dial until you reach the desired step size.
3. Press the control dial again to accept the change and return to the normal control mode.

3.2.1 Setting Zero Position

Zeroing the position moves the X and Y settings to a reference position and then sets the X and Y values to zero. It is
recommended that you perform this as a first step when moving the sample stage. The position is reproducible, allow-
ing you to compare the position to previous settings.

Note: This procedure actually uses Menu Mode, described in the following chapter. However, it is a relatively common
operation, and so is included with the other normal operating procedures.

SENSOR OPTIONS
-
0.Exit>
.1.Zero All
>
-

2.Zero Channel -
>
Figure 11: Zeroing the motor positions

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 Chapter 3 Normal Operation

To move to the reference position and zero the settings:

1. Press Menu. The menu items will be shown in the screen.
2. Turn either the left or right dial to select the Zero All option.
3. Press the dial down to activate the option.

3.3 Setting the Motor Mode

By default, the motor operates in closed-loop mode, as indicated by a "μm" symbol next to the step size in the display.
This is the only suitable mode for operating the sample stage motors.

If the "μm" symbols is not shown, you can restore it for correct operation:
1. Press and hold the Mode Adjust button. Cursors will be shown next to the step size setting.
2. Turn one of the dials until the "μm" symbol returns next to the corresponding step size value.
3. Release the Mode Adjust button.

X3 203 ,545 100µm

X3 -50 100µm
Y3 ,
203 545>.Spd11
--

Y3 .Spd11
-50>
Figure 12: Changing the motor mode back to μm

10 May 21, 2013 Sample Stage 1.0

 Chapter 4 Editing the Configuration

Chapter 4
Editing the Configuration
It is possible to change the configuration of the SSC-5. However, the settings on delivery are optimized for the specific
task of controlling the sample stage. As such, it is strongly recommended that you do not change the settings. The
instructions in this section explain some of the more important settings and how to restore settings.

Note: The SmarAct manual contains more details about changing the configuration.

4.1 Restore Original Configuration

To restore the configuration of the SSC-5 to its original (delivery) status:
1. Press Menu.
2. Turn one of the dials until the cursor is next to Load Configuration.
3. Press the dial to select the option. The unit is returned to its original settings.

4.2 Sensor Options Menu

The Sensor Options menu allows you to execute special commands and select options that relate to position sensors
that are integrated into your positioners. The table below lists the available entries in this menu:

Menu item Description

Zero All Set all positioners to their current position as their zero position.
Zero Channel Instead of zeroing all channels, this entry will enter a sub menu where you can select one or
more specific channels to zero.
Find Ref. All Move all positioners to move to their reference marks. You may specify a special sequence that
defines in which order the positioners move to their marks.
Find Ref. Ch Enters a sub menu where you can select one or more specific channels to move to their reference
marks. Find Ref. should be deactivated for all motors except the X and Y motors (i.e. channels 1
and 4).

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 Chapter 4 Editing the Configuration

Menu item Description

Configure Refs To configure the sequence in which positioners move to their reference marks when issuing the
“Find Ref. All” command you would normally use the Channel Settings menu for each channel.
The “Configure Refs” sub menu allows you to configure all channels within one menu.
Calibrate All Calibrates sensors for all channels.
Calibrate Ch Enters a sub menu where you can select one or more specific channels to calibrate. This is only
necessary when motors have been replaced.
CL Hold Time Sets the Closed-Loop Hold Time parameter. This is typically 2s. Longer times
Mode Specifies the sensor mode. The available modes are Disabled, Enabled and Powersave.
Table 1: Sensor Options menu

4.3 Sample Stage Controller Configuration

The tables below show the correct settings for the controller. If it needs to be reconfigured, you can enter these settings
in the Configuration menu.

Note: In order to change these settings, you need to leave User Mode in the Control Unit. For further instructions, please
refer to the SmarAct Modular Control System User Manual.

Group 1

Group menu Channel menu Channel Settings Sensor Settings

Channel 1 à Symbol: Z
Port: 2/6
Settings à Knob: 1
Joystick: Y1
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 2 à Symbol: Z
Port: 3/6
Settings à Knob: 1
Joystick: Y1
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 3 à Symbol: Z
Port: 5/6
Settings à Knob: 1
Joystick: Y1
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 4 à Symbol: X
Port: 6/6
Settings à Knob: 1
Joystick: Y1
Sensor Settings à Ref. Order: none
Sensor Type: S

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 Chapter 4 Editing the Configuration

Group 2

Group menu Channel menu Channel Settings Sensor Settings

Channel 1 à Symbol: T
Port: 2/6
Settings à Knob: 1
Knob Invert: no
Joystick: X1
Joy Invert: no
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 2 à Symbol: T
Port: 5/6
Settings à Knob: 1
Knob Invert: yes
Joystick: X1
Joy Invert: yes
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 3 à Symbol: T
Port: 3/6
Settings à Knob: 2
Knob Invert: no
Joystick: Y1
Joy Invert: no
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 4 à Symbol: T
Port: 6/6
Settings à Knob: 2
Knob Invert: yes
Joystick: Y1
Joy Invert: yes
Sensor Settings à Ref. Order: none
Sensor Type: S

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 Chapter 4 Editing the Configuration

Group 3

Group menu Channel menu Channel Settings Sensor Settings

Channel 1 à Symbol: X
Port: 1/6
Settings à Knob: 1
Knob Invert: no
Joystick: X1
Joy Invert: no
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 2 à Symbol: X
Port: 4/6
Settings à Knob: 1
Knob Invert: no
Joystick: X1
Joy Invert: no
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 3 à Symbol: Y
Port: 1/6
Settings à Knob: 2
Knob Invert: no
Joystick: Y1
Joy Invert: no
Sensor Settings à Ref. Order: none
Sensor Type: S
Channel 4 à Symbol: Y
Port: 4/6
Settings à Knob: 2
Knob Invert: yes
Joystick: Y1
Joy Invert: yes
Sensor Settings à Ref. Order: none
Sensor Type: S

14 May 21, 2013 Sample Stage 1.0

 Chapter 5 Maintenance

Chapter 5
Maintenance
This chapter covers the following maintenance topics:
■ Removing the sapphire tube for cleaning.
■ Removing the sample stage from the chamber, e.g. for replacing or repairing motors.

In order to perform these tasks, you need to vent and open the analysis chamber. This procedure is also described.

Caution!
Do not perform any of the procedures in this chapter without contacting SPECS first.
It is possible to damage the equipment or lose the calibration—in such cases, the guarantee is voided.

5.1 Opening the Analysis Chamber

In order to work on the sample stage, you need to open the analysis chamber. The following procedure describes how to
do this safely. If you need any further advice about working on the chamber, please contact SPECS support.

To open the analysis chamber:

1. Confirm that the high voltage is switched off.
2. Switch off the following instruments:
■ LPU-V18
■ EBH 100L
■ LPU-Sample
■ Sample stage controller
3. Close the following valves:
■ GV Transfer
■ GV Sample
4. Open the following valves:
■ GV Transfer

Sample Stage 1.0 May 21, 2013 15

 Chapter 5 Maintenance

■ GV Loadlock
5. Switch off the following:
■ IGP Transfer
■ IGP Sample
■ TSP Sample
■ PG Sample
■ TP Sample
6. Switch off TP Loadlock. This will vent the chamber.
7. Remove all connectors from the top side of the analysis chamber. Unscrew the HV connector and remove each
pin individually.

You may be able to perform your tasks by removing the DN100CF viewport on the chamber and working through the
opening. However, you may need to remove the top flange.

Note: The gasket for the top flange is a special part only available from SPECS.

When removing the top flange, observe the following points:

■ Remove the bolts on the top flange.
■ Carefully lift the flange from the chamber using the handle.
■ While lifting, make sure the cables inside the chamber are not stretched while lifting. If necessary, unplug the con-
nectors inside the chamber (remember to use gloves!).
■ Do not rest the flange on the gasket or the sealing surface while removing it.
■ When the flange is vertical, push the rod in the mounting (marked "2" in the photograph) to prevent the flange
from tipping.

Figure 13: Removing the top flange from the analysis chamber

Use a new gasket when fitting the flange. This is a special gasket, available from SPECS. To tighten the gasket:

16 May 21, 2013 Sample Stage 1.0

 Chapter 5 Maintenance

1. Lightly tighten the bolts crosswise on the flange.

2. Go around the flange a few times, tightening all bolts until you reach a torque of 30 Nm.

5.2 Removing the Sapphire Tube

The sample, which is biased at 15 kV during operation, is isolated from ground by a sapphire tube. Accumulation of
material on this tube may build up a conducting film over time. If this occurs, you need to remove the sapphire tube and
clean or replace it.

The cleaning method depends on the type of contamination and there are no "guaranteed" procedures. Experience has
shown that immersing the tube in a dilute acid (e.g. nitric acid) can successfully clean the tube.

You can remove the sapphire tube without dismounting the sample stage from the chamber:
1. Make sure that all power supplies are switched off and the cables are removed from the analysis chamber.
2. Disconnect the cables from the feedthroughs inside the chamber.
3. Remove the four bolts on the mounting plate highlighted in the figure below.

Figure 14: Removing the sapphire tube

4. Carefully pull the sample holder socket away from the sample stage and remove it from the chamber.
5. Loosen the screw that clamps the mounting plate to the sapphire tube and slide the mounting plate away.

Figure 15: Sapphire tube clamp

Sample Stage 1.0 May 21, 2013 17

 Chapter 5 Maintenance

You can now clean or replace the sappire tube.

Fitting the sapphire tube back into the chamber is the reverse of the above procedure. Do not overtighten the
clamping screw.

5.3 Dismounting the Sample Stage

It is seldom necessary to dismount the sample stage. Generally, this only needs to be performed if a motor is faulty. It is
not possible to replace a motor with the sample stage in-situ.

To dismount the sample stage:

1. Disconnect all connectors from the vacuum side of the feedthroughs.
2. While supporting the sample stage, remove the four screws (3 mm Allen key) highlighted in the pictures below
(blue circle).

Caution!
Do not remove the screws marked with a red cross (on the brown part)! These secure the sample stage
to the objective lens. It can be difficult to realign the sample stage if it is removed from the objective.

Figure 16: Dismounting the sample stage

3. Remove the sample stage from the chamber, being careful not to get the cables tangled.

18 May 21, 2013 Sample Stage 1.0

 Index Sensor Mode 12
A
Sensor Options 9, 11
Analysis Chamber 5, 15 Set Mode 10
SSC-5 2, 8, 12
C Step Size 9
Cleaning 17 T
Closed-Loop 10
Configuration 11 Tilt 8
Control Unit 2
X
G
X–Y Movement 8
Group 2
Guidelines 4 Z

I Z Movement 8
Zero Positions 9, 11
Installation 5

Menu Mode 3, 9
Motors 7, 18
Moving 8

Piezo 7

Reference Channel 11
RS-232 2, 6

Safety 3
Sample Stage
Connectors 5
Dismounting 18
Sapphire Tube 17

Sample Stage 1.0 May 21, 2013 19