DIAMOND SERIES

The Diamond series atmospheric robots represent a significant

engineering advancement in the design and reliability of wafer
handling equipment.

Benefiting from technologically superior components, the robots

utilize ultra low inertia, high-response brushless servomotors
coupled with zero-backlash Harmonic Drive® gears to achieve
greatly enhanced dexterity and precision.

The innovative, all-in-one, class 1 clean room compatible design

incorporates the motion controller, servo amplifiers, and power
supply within the robot’s industry standard footprint.

High-strength structural members enable top, bottom or side

mount configurations without compromising the system rigidity.

A 32-bit, real-time kernel delivers accurate motion profiling

along smooth continuous trajectories, while the distributed
control architecture allows a seamless integration with linear
tracks, pre-aligners, and other sub-components.

Networkable RS-485 and Ethernet interfaces complement the

standard RS-232 and teach pendant connections. Powerful
native wafer handling and scripting languages facilitate rapid
software development for embedding the robots into an OEM
application environment. Comprehensive emulation of legacy
robot “macro” commands offers a drop-in compatibility with a
wide variety of existing semiconductor tools.

F E AT U R E S
Excellent structural rigidity
Modular and highly customizable design
Arm length from 10.50” and 14.40”.
Vertical travel up to 7”
Fully integrated motion controller, servo amplifiers and
power supply
High response brushless motors and precise zero-backlash
Harmonic Drive® gears
Optional absolute encoders eliminating the initial homing
procedure
Handling radial and in-line equipment placement
Seamless integration with prealigner, linear track and other
peripheral components
Standard RS-232 interface and Ethernet (Telnet) interfaces
to the host computer
Advance 32-bit real-time motion control kernel
Powerful wafer handling firmware
Comprehensive software tools and utilities
Software emulation for legacy robot macro commands
Optional teach pendant terminal
General purpose digital inputs and outputs for custom use
Class 1 clean-room environment compatibility
Reliability – MTBF > 60000 hours, (MCBF > 10,000,000 cycles)
 DIAMOND SERIES

Axis Motion range Maximum velocity Maximum acceleration Axis Repeatability

> 360° 5.25 [133]
T 360 °/s 1500 °/s² ±0.01°
(typical +/-230°) 5.25 [133]
4x4-40UNC-2B
From ±10.5” Up to 35 inch/s on BC 1.39"[35mm]
R Up to ±14.4” (depending on arm 300 inch/s² ±0.001” (0.025mm)
(depending on arm) size) 10.00 [254]

Z 7” 18 inch/s 44 inch/s² ±0.001” (0.025mm)

R1.12 [R28]

2X 0.118[3] holes for pin M3

on BC .984[25]

ZERO REFERENCE POINT

7.00 [178]TRAVEL

2.48 [63]
Wafer Size 7.91 [201]

2”(50mm) to 12”(300mm)
.59 [15] .91 [23]
FOR Z AXIS 7" TRAVEL
Payload TOP HARD STOP 7.9"[201mm] BOTTOM HARD STOP .91[23mm]
RECOMENDED LOW LIMIT .984[25mm]
RECOMENDED TOP LIMIT 7.8[198mm]
2.2 lbs(1.0 kg)
HIGHT

Encoders
Incremental, 10000 pulse/rev

POWER CONNECTOR
Motor type NOTES:
Brushless, low inertia high 1. MINIMUM TABLE HOLE DIAMETER Ø8.2"
HEIGHT
SIGNAL CONNECTORS PANEL
Z AXIS TRAVEL
responce 2. RECOMENDED TABLE HOLE SIZE Ø8.6"
3. MAX.TABLE HOLE DIAMETER-FLANGE DEPENDANT 18"[457mm] 7"[178mm]

Weight
STANDARD ARM CONFIGURATIONS
40.7 lbs(18.5 kg) for 7” vert.
travel, and 5.25”x5.25” arm 5.25 [133]
4x4-40UNC-2B
7.20 [183] 7.20 [183]
2X 0.118[3] holes for
pin M3 on BC Ø.984[Ø25]
5.25 [133]
on BC 1.39"[35mm] 4X4-40UNC-2B
R1.12 [R29]
on BC Ø1.39[Ø35.32]
Operating 4x6-32UNC-2B
temperatures 2X 0.118[3] holes for on BC Ø2[Ø50.8]
R1.28 [R33]
pin M3 on BC Ø.984[Ø125]
50°F-104°F (10°C to 40°C)
1.07 [27]
1.06 [27]

2-LINKS ARM 5.25"x5.25" 2-LINKS ARM 7.20"x7.20"

Facility requirements 1.33 [34] 1.33 [34]

Voltage range FLANGE CONFIGURATIONS

100-120AVC, 200-240VAC FOR SCREWS 6 X 1/4-20UNC-2B

on BC Ø9"[Ø229mm]
FOR SCREWS 6 X 1/4-20UNC-2B
on BC Ø10.38"[Ø264mm]
Vacuum supply
11.8”Hg(-5.8psi) / 0.1CFM 10" FLANGE (STANDARD) 11.3" FLANGE
10.00 [254]

11.30 [287]

airflow

Made in USA by Milara, Inc. (www.milara.net) • Designed by Logosol, Inc. (www.logosolinc.com)

Contact: Milara, Inc. 4 Marc Road Medway MA, 02053 USA Ph: (508) 533-5322 [email protected]