MANUFACTURING

PROCESSES II

MANUFACTURING OF MICRO ELECTROMECHANIC

SYSTEMS, LITHOGRAPHYC METHODS, ADDITIVE
MANUFACTURING
A gyroscope sensor used for automotive applications that combined mechanical
and electronic systems. Perhaps the most widespread use of MEMS devices is
in sensors of all kinds.
Source: Courtesy of Motorola Corporation.
 Bulk Micromachining

Schematic illustration of bulk micromachining. (1) Diffuse dopant in desired

pattern. (2) Deposit and pattern masking film. (3) Orientation-dependent etching
(ODE) leaves behind a freestanding structure.

Source: Courtesy of K.R. Williams, Agilent Laboratories.

 Surface Micromachining

Schematic illustration of the steps in surface micromachining: (a) deposition

of a phosphosilicate glass (PSG) spacer layer; (b) etching of spacer layer;
(c) deposition of polysilicon; (d) etching of polysilicon; (e) selective wet
etching of PSG, leaving the silicon and deposited polysilicon unaffected.
Microlamp

A microlamp produced from a combination of bulk and surface micromachining

technologies.
Source: Courtesy of K.R. Williams, Agilent Technologies.
 Stiction After Wet Etching

Stiction after wet etching: (1) unreleased beam; (2) unreleased beam
before drying; (3) released beam pulled to the surface by capillary forces
during drying.
Source: After B. Bhushan.
 Example: Surface Micromachining of a Hinge

(a) (b)
(a) SEM image of a deployed micromirror.
(b) Detail of the micromirror hinge.
Source: Manufacturing,
Courtesy ofEngineering
Sandia &National
Technology, Fifth Edition, by Serope Kalpakjian and Steven R. Schmid.
Laboratories.
ISBN 0-13-148965-8. © 2006 Pearson Education, Inc., Upper Saddle River, NJ. All rights reserved.
 Ex: Hinge Manufacture

Schematic illustration of the steps required to manufacture a hinge.

(a) Deposition of a phosphosilicate glass (PSG) layer and polysilicon
layer. (b) Deposition of a second spacer layer. (c) Selective etching of
the PSG. (d) Deposition of polysilicon to form a staple for the hinge.
(e) After selective wet etching of the PSG, the hinge can rotate.
Digital Pixel Technology

The Texas Instruments

digital pixel technology
device. (a) Exploded view of
a single digital micromirror
device. (b) View of two
adjacent pixels. (c) Images
of DMD arrays with some
mirrors removed for clarity;
each micromirror measures
approximately 17 µm (670
µin.) on a side. (d) A typical
digital pixel technology
device used for digital
projection systems, high
definition televisions, and
other image display systems.
The device shown contains
1,310,720 micromirrors and
measures less than 50 mm
(2 in.) per side.
Source: Courtesy of Texas
Instruments Corporation.
 Digital Pixel Technology Device Manufacture

Ceramic flat-package construction

used for the DMD device.
Manufacturing sequence for the Texas
Instruments DMD device.
 SCREAM

The SCREAM process. Source: After N. Maluf.

 SIMPLE

Schematic illustration of silicon micromachining by single-step

plasma etching (SIMPLE) process.
 Diffusion Bonding
and DRIE
(a) Schematic illustration of
silicon-diffusion bonding
combined with deep
reactive-ion etching to
produce large, suspended
cantilevers. (b) A microfluid-
flow device manufactured
by DRIE etching two
separate wafers, then
aligning and silicon-diffusion
bonding them together.
Afterward, a Pyrex layer
(not shown) is anodically
bonded over the top to
provide a window to
observe fluid flow.
 Thermal Inkjet Printer

Sequence of operation of a thermal inkjet printer.

(a) Resistive heating element is turned on, rapidly vaporizing ink and forming a bubble.
(b) Within five microseconds, the bubble has expanded and displaced liquid ink from the
nozzle.
(c) Surface tension breaks the ink stream into a bubble, which is discharged at high
velocity. The heating element is turned off at this time, so that the bubble collapses as
heat is transferred to the surrounding ink.
(d) Within 24 microseconds, an ink droplet (and undesirable satellite droplets) are
ejected, and surface tension of the ink draws more liquid from the reservoir.
Source: From Tseng, F-G, "Microdroplet Generators," in The MEMS Handbook, M. Gad-el-hak, (ed.), CRC Press, 2002.
 Manufacture of Thermal Inkjet Printer Heads

The manufacturing sequence for producing thermal inkjet printer heads.

Source: From Tseng, F-G, "Microdroplet Generators," in The MEMS Handbook, M. Gad-el-hak, (ed.), CRC Press, 2002.
 LIGA
The LIGA
(lithography,
electrodeposition
and molding)
technique.
(a) Primary
production of a
metal final
product or mold
insert.
(b) Use of the
primary part for
secondary
operations, or
replication.
Source: IMM Institute für
Mikrotechnik.
 Electroformed Structures

(a) (b)

(a) Electroformed, 200 µm tall nickel structures; (b) Detail of 5 µm wide

nickel lines and spaces.
Source: After Todd Christenson, MEMS Handbook, CRC Press, 2002.
Micromold Manufacturing
Example:
Rare Earth Magnets

Fabrication process
used to produce rare-
earth magnets for
microsensors.

Source: T. Christenson,
Sandia National
Laboratories.
 Example: Rare Earth Magnets (cont.)

SEM images of Nd2Fe14B permanent magnets. Powder particle size ranges from 1 to 5
µm, and the binder is a methylene-chloride resistant epoxy. Mild distortion is present in
the image due to magnetic perturbation of the imaging electrons. Maximum energy
products of 9 MGOe have been obtained with this process.

Source: T. Christenson, Sandia National Laboratories.

 Wafer-Scale Diffusion Bonding

(a) Multilevel MEMS fabrication through wafer-scale diffusion bonding.

(b) A suspended ring structure for measurement of tensile strain,
formed by two-layer wafer-scale diffusion bonding.
Source: After T. Christenson, Sandia National Laboratories.
 HEXSIL

Illustration of the
HEXagonal
honeycomb structure,
SILicon
micromachining and
thin-film deposition, or
HEXSIL process.
 HEXSIL Example: Microtweezers

(a) (b)

(a) SEM image of micro-scale tweezers used in microassembly and

microsurgery applications.
(b) Detailed view of gripper.

Source: Courtesy of MEMS Precision Instruments (memspi.com).

 Instant-Masking

The instant masking process: (a) bare substrate; (b) during deposition, with
the substrate and instant mask in contact; (c) the resulting pattern deposit.

Source: After A. Cohen, MEMGen Corporation.

Case Study:
Airbag Accelerometer

Photograph of Analog Devices’

ADXL-50 accelerometer with a
surface micromachined capacitive
sensor (center), on-chip
excitation, self-test and signal
Schematic illustration of a micro- conditioning circuitry. The entire
acceleration sensor. chip measures 0.500 by 0.625
Source: After N. Maluf. mm.
Source: From R.A. Core, et al., Solid State
Technol., pp. 39-47, October 1993
Accelerometer Manufacture

Preparation of IC chip for

polysilicon. (a) Sensor area
post-BPSG planarization
and moat mask. (b) Blanket
deposition of thin oxide and
thin nitride layer. (c) Bumps
and anchors made in LTO
spacer layer.

Source: From Core, R.A., et al., Solid

State Technol., pp. 39-47, October 1993.
 Accelerometer
Manufacture (cont.)

Polysilicon deposition and IC

metallization. (a) Cross-
sectional view after polysilicon
deposition, implant, anneal
and patterning. (b) Sensor
area after removal of
dielectrics from circuit area,
contact mask, and Platinum
Silicide. (c) Metallization
scheme and plasma oxide
passivation and patterning.

Source: From R.A. Core, et al., Solid State

Technol., pp. 39-47, October 1993.
 Accelerometer
Manufacture (conc.)

Pre-release preparation
and release. (a) Post-
plasma nitride passivation
and patterning. (b) Photo-
resist protection of the IC.
(c) Freestanding, released,
polysilicon beam.

Source: From Core, R.A., et al., Solid

State Technol., pp. 39-47, October
1993.
General Characteristics of Lithography Techniques

Comparison of lithography techniques

Spinning of Organic Coating on Wafer
 Techniques of Pattern Transfer

Schematic illustration of (a) wafer stepper technique to pattern

transfer and (b) step-and-scan technique.
 Pattern Transfer by Photolithography

Pattern transfer by photolithography. Note that the mask in Step 3

can be a positive or negative image of the pattern.
 SCALPEL Process

Schematic illustration of the SCALPEL process.

 Moore’s Law

Illustration of Moore’s law.

Source: After M. Madou.
 Parts Made by Rapid-Prototyping

(c)
(a)

(b)

Examples of parts made by rapid-prototyping processes: (a) selection of

parts from fused-deposition modeling; (b) stereolithography model of
cellular phone; and (c) selection of parts form three-dimensional printing.

Source: Courtesy of Stratasys, Inc., (b) and (c) Courtesy of 3D Systems, Inc.
 3D Printing Products

(a)

Complex geometries
(b)

Customized applications
PROBLEMS MANUFACTURING WITH CNC…

(a)

(b)

WHAT ABOUT 3D PRINTING?

Flow chart of additive manufacturing
Additive Manufacturing
 ADDITIVE MANUFACTURING

Additive Manufacturing is a transformative approach to industrial

production that enables the creation of lighter, stronger parts and systems.

Additive manufacturing uses data computer-aided-design (CAD) software

or 3D object scanners to direct hardware to deposit material, layer upon
layer, in precise geometric shapes. As its name implies, additive
manufacturing adds material to create an object. By contrast, when you
create an object by traditional means, it is often necessary to remove
material through milling, machining, carving, shaping or other means. Now,
AM can bring digital flexibility and efficiency to manufacturing operations.

It is possible to use many different materials to create 3D-printed objects.

Additive manufacturing fabricates jet engine parts from advanced metal
alloys.
 ADDITIVE MANUFACTURING
WEIGHT SAVING TECHNOLOGY

There are in fact a number of different sub-types of additive

manufacturing including 3D printing, but also rapid prototyping and direct
digital manufacturing (DDM). Recent advances in this technology have
seen its use become far more widespread and it offers exciting
possibilities for future development.
 ADDITIVE MANUFACTURING

The term “additive manufacturing” references technologies that grow three-

dimensional objects one superfine layer at a time. Each successive layer
bonds to the preceding layer of melted or partially melted material. It is
possible to use different substances for layering material, including metal
powder, thermoplastics, ceramics, composites, glass and even edibles like
chocolate.
 ADDITIVE MANUFACTURING

Objects are digitally defined by computer-aided-design (CAD) software that

is used to create «.stl» files that essentially "slice" the object into ultra-thin
layers. This information guides the path of a nozzle or print head as it
precisely deposits material upon the preceding layer. Or, a laser or electron
beam selectively melts or partially melts in a bed of powdered material. As
materials cool or are cured, they fuse together to form a three-dimensional
object.
 ADDITIVE MANUFACTURING
TIME SAVING TECHNOLOGY

Additive manufacturing is ideal for getting prototypes made quickly.

Parts are manufactured directly from a 3D CAD file, which eliminates
the cost and lengthy process of having fixtures or dies created. Plus,
changes can be made mid-stream with virtually no interruption in the
process.
 ADDITIVE MANUFACTURING
Definition, Technologies & Terms Used
The technology can seem confusing with seemingly similar processes using different terms.

3D printing

3D printing is a phrase coined by the media and is often used to refer to all types of additive
manufacturing. However, strictly speaking 3D printing is defined as “…fabrication of objects through
the deposition of a material using a print head, nozzle or other printer technology”. This differs slightly
from additive manufacturing which was defined by the industry as “…… making objects from 3D data,
usually layer upon layer…”. In practice the phrases 3D printing and additive manufacturing may be
used interchangeably by some sources so it’s important to understand the process which is actually
being discussed.

Rapid prototyping

Rapid prototyping is another phrase often bandied around, but is increasingly being replaced by
additive manufacturing. This is because the use of the word “prototype” can be misleading. As well as
creating a test design, rapid prototyping can also create functional components, plus moulds. Different
materials are compatible with additive manufacturing and the process which is used is in part
determined by what’s being used.

Selective Laser Sintering (SLS)

Selective Laser Sintering (SLS), Direct Metal Laser Sintering (DMLS) and Selective Laser Melting
(SLM) are three of the most common techniques.
 ADDITIVE MANUFACTURING
Growth areas and market potential

Many industrial applications for Additive Manufacturing have been

developed over the last five years or so. Industries such as aerospace,
automotive and medical are embracing the advantages of AM and
implementing the technology successfully.

Whether as a replacement for existing production methods on economic

grounds, or because of the ability to produce components that have up
until now been impossible, it is clear that AM will certainly have an
impact on the future of manufacturing.
 ADDITIVE MANUFACTURING
Growth areas and market potential

Growth areas and market potential in Additive Manufacturing

The global value of AM products and services (all materials) is expected to
grow considerably (Source Wohlers Report 2013)
 ADDITIVE MANUFACTURING
Growth areas and market potential

Global share in terms of the number of metal powder Additive

Manufacturing machines introduced (Source Wohlers Report 2012)
Potential Application Areas of AM
 ADDITIVE MANUFACTURING
INDUSTRIAL APPLICATIONS

Aerospace
AM excels at producing parts with weight-saving, complex geometric designs.
Therefore, it is often the perfect solution for creating light, strong aerospace parts.

Automotive
Various parts can be produced by additive manufacturing (rear wing replacement
took about 10 days to produce instead of five weeks). In the auto industry, AM's
rapid prototyping potential garners serious interest as production parts are
appearing.
 ADDITIVE MANUFACTURING
INDUSTRIAL APPLICATIONS

Healthcare
Additive manufacturing technology can create custom, on-demand 3D printed
surgical implants for patients suffering from bone cancer. In general, healthcare
applications for additive manufacturing are expanding, particularly as the safety and
efficacy of AM-built medical devices is established. The fabrication of one-of-a-kind
synthetic organs also shows promise.

Product Development
As the potential for AM's design flexibility is realized, once impossible design
concepts are now being successfully re-imagined. Additive manufacturing
unleashes the creative potential of designers who can now operate free of the
constraints under which they once labored.
 Advantages of AM

• Flexibility in part geometry and design

• Rapid iterations in design improvements
• Removal of tool requirements
• Green manufacturing
• Minimum material waste
• Possibility of customized design
 Disadvantages of AM

• Cost of finishing and post-process

• High initial investment cost
• Low production speed (long manufacturing times)
• High cost of materials
• Difficulties in accessibility of some materials (especially powders)
Materials in AM

• POLYMERS
• METALS
• CERAMICS
• COMPOSITES
General Classification of Additive
Manufacturing Processes
 Liquid-based AM
A- STEREOLITHOGRAPHY (SLA)

The stereolithography apparatus consists of (1) a platform that can be moved vertically inside a vessel containing
the photosensitive polymer, and (2) a laser whose beam can be controlled in the x-y direction. At the start of the
process, the platform is positioned vertically near the surface of the liquid photopolymer, and a laser beam is
directed through a curing path that comprises an area corresponding to the base (bottom layer) of the part.
 Stereolithography

Schematic illustration of the stereolithography process.

 Computational
steps in producing
a stereolithography
file

(a) Three-dimensional
description of each part.
(b) The part is divided into
slices (only one in 10 is
shown).
(c) Support material is
planned.
(d) A set of tool directions is
determined to
manufacture each slice.
Also shown is the
extruder path at section
A-A from (c) for a fused-
deposition-modeling
operation.
 Liquid-based AM
B- DIRECT LIGHT PROJECTOR (DLP)

DLP 3D also uses liquid ultraviolet curable photopolymer

resin

DLP exposes and solidifies one layer at a time on the

surface of the resin

The Z-axis moves by one layer

Application area: Non functional prototypes, medical models, casting patterns, architecture patterns
 Solid-based AM

A- Filament (Fused Deposition Modelling-FDM)

B- Powder (Selective Laser Sintering/Melting-SLS/SLM)

C- Sheet Stocks (Laminated Object Manufacturing)

 Solid-based AM

A- FUSED DEPOSITION MODELLING (FDM)

In this process, a plastic or wax material is
extruded through a nozzle that traces the part´s
cross sectional geometry layer by layer.
Commonly, wax, elastomers and a number of
thermoplastics are used as the build material.

Such as Acrylonitrate Butadiene Styrene (ABS),

Polycarbonate (PC), polysulphone (PPSF).

Layer thickness = 0.05–0.75 mm.

Typical maximum dimensions of part = 600 mm ×

600 mm × 500 mm

Application area: Functional prototypes, e.g. for

experimental testing, wind tunnels, etc. Product
concept models. Patterns and cores for casting
processes. Rapid tooling. Medical models
 Fused-Deposition-Modeling

(a) Schematic illustration of the fused-deposition-modeling process. (b) The FDM 5000, a
fused-deposition-modeling machine.

Source: Courtesy of Stratysis, Inc.

 Support Materials and Structures in Parts

(a) A part with a protruding section which requires support

material.
(b) Common support structures used in rapid-prototyping
machines.

Source: P. F. Jacobs, Rapid Prototyping & Manufacturing: Fundamentals of Stereolithography.

Society of Manufacturing Engineers, 1992.
 Solid-based AM

FDM products

https://www.livescience.com/39810-fused-deposition-modeling.html
 Solid-based AM
B- SELECTIVE LASER SINTERING (SLS)

It uses a moving laser beam to trace and selectively sinter powdered polymer and/or metal composite materials. The powder
is kept at elevated temperature. Unlike SLA, special support structures are not required because the excess powder in each
layer as a support.

Powder form of heat-fusible thermoplastics (including glass filled), elastomers and wax. Powdered metals with binder, e.g.
stainless steel, tools and alloy steels, titanium, tungsten, copper alloy, aluminum and nickel super alloys.

Layer thickness = 0.075–0.15 mm, depending on material used.

Typical maximum dimensions of part = 450 mm × 375 mm × 325 mm.

Application areas: Biomedical (implants), final functional components in low to moderate volumes, e.g. impellers, fuel
nozzles for aerospace.
 ADDITIVE MANUFACTURING
Selective Laser Melting (SLM)
Direct Metal Laser Sintering (DMLS)

SLS (Selective Laser Melting) and DMLS (Direct Metal Laser Sintering)
are effectively the same process, merging the particles in the material,
without achieving a full melt. SLS is used to describe the sintering
process when applied to non-metal materials, with DMLS used for metal.

SLM is slightly different because it involves a full melt with the metal
heated and then cooled to fully consolidate. Although very similar, this
full melting process means that the results won’t be porous, unlike with
DMLS.
 ADDITIVE MANUFACTURING
Selective Laser Melting (SLM)

Schematic diagram of the Selective Laser Melting (SLM) powder-bed

process (Source VDI 3404)
 ADDITIVE MANUFACTURING
Metal powders – the raw materials

Metal powders – the raw materials

The variety of materials available for metal AM systems is

continuously expanding. Common materials used are stainless
steels, aluminium, nickel, cobalt-chrome and titanium alloys, with a
number of machine manufacturers offering their own materials.
RAW MATERIALS
ALUMINIUM ALLOYS
COBALT BASED ALLOYS
TOOL STEELS
STAINLESS STEEL
NICKEL BASED ALLOYS
TITANIUM ALLOYS
COPPER ALLOYS
PRECISIOUS ALLOYS (GOLD, SILVER)
 Selective-Laser-Sintering

Schematic illustration of the selective-laser-sintering process.

Source: After C. Deckard and P. F. McClure.

Solid-based AM

SLM products
Solid-based AM

https://www.electrooptics.com/feature/design-freedom-last

Porous cranial implant (Courtesy of Arcam), customized acetabular cup (Courtesy of Arcam) and hip
stem (FABIO Project) (Delgado, 2010).
 Solid-based AM

C- Laminated Object Manufacturing (LOM)

Laminated-object manufacturing produces a solid physical model by stacking layers of sheet stock that are each cut
to an outline corresponding to the cross sectional shape of a CAD model that has been sliced into layers. The layers
are bonded one on top of the previous one before cutting. After cutting, the excess material in the layer remains in
place to support the part during building. Starting material in LOM can be virtually any material in sheet stock form,
such as paper, plastic, cellulose, metals, or fiber-reinforced materials. Stock thickness is 0.05 to 0.50 mm.
 Laminated-Object-Manufacturing

(a) Schematic illustration of the laminated-object-manufacturing process.

(b) Crankshaft-part examples made by LOM.

Source: (a) Courtesy of Helsis, Inc. (b) After L. Wood.

 Three-Dimensional-Printing

Schematic illustration of the three-dimensional-printing process.

Source: After E. Sachs and M. Cima.

 Three-Dimensional-Printing to Produce Metal Parts

Three-dimensional-printing using (a) part-build, (b) sinter, and (c) infiltration

steps to produce metal parts. (d) An example of a bronze-infiltrated stainless-
steel part produced through three-dimensional printing.

Source: Courtesy of ProMetal.

 NOTES

THE COURSE AIMS TO GIVE INFORMATION ABOUT VARIOUS

MANUFACTURING METHODS, POSSIBLE DEFECTS &
TROUBLESHOOTINGS, AND CALCULATIONS REGARDING
PROCESS PARAMETERS AND COSTS.

THE STUDENTS MUST KNOW THAT THERE WILL NOT BE A

SUCCESS IF THEY DO NOT WORK HARD.

THE FIRST STEP IS GIVEN BY THE COURSE, THE NEXT IS

YOURS.

THE REFERENCES WILL BE VALUABLE SOURCES.