Thin-Walled Structures 145 (2019) 106382

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Thin-Walled Structures
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Free and forced vibrations of atomic force microscope piezoelectric T

cantilevers considering tip-sample nonlinear interactions
Masoud Ahmadi∗, Reza Ansari∗∗, Mansour Darvizeh
Department of Mechanical Engineering, University of Guilan, Rasht, Iran

A R T I C LE I N FO A B S T R A C T

Keywords: The aim of this article is to investigate the vibrational behavior of rectangular and V-shaped atomic force mi-
Piezoelectric microcantilever croscopy (AFM) microcantilevers with an extended piezoelectric layer using the finite element method (FEM).
Tip-sample interaction Firstly, the results of 3D FEM simulation are compared to the experimental and analytical ones to assess the
AFM accuracy of the method. Then, the free and forced vibrations of rectangular and V-shape piezoelectric micro-
Resonance frequency
cantilevers in the absence and presence of nonlinear interactions between the microcantilever tip and the surface
Nonlinear vibration
sample are studied. A nonlinear spring is used in the finite element modeling to simulate the nonlinear at-
3D finite element analysis
traction-repulsion interactions between the tip and the sample. The amplitude of the AFM microcantilever is
considered to be comparably small, hence the geometric nonlinearity of the microcantilever is insignificant. In
the free vibration part, the resonance frequencies and mode shapes are obtained. In the forced vibration cases, an
AC voltage with the resonance frequencies obtained in the free vibration analysis is applied to the piezoelectric
layer to operate the microcantilever. The resonance amplitude of the tip of AFM microcantilever is derived
accordingly. All simulations are performed for two cases; the first one is a fixed microcantilever at the end and
free to move and rotate, and the second one is a microcantilever whose rotational degree of freedom and lateral
displacement is tied up with applying a symmetric constraint. So, an important study parameter in this work is
the effect of torsional modes on the vibrational behavior of AFM piezoelectric microcantilevers.

1. Introduction package. They also validated their numerical study through experi-
mentation. Sun et al. [8] presented an analytical method to evaluate the
Atomic force microscopy (AFM) is an important scanning probe nonlinear vibration behavior of single and double tapered cantilever
microscopy to measure the physical properties with a high degree of beams. By using Rayleigh-Ritz method, they derived the admissible
accuracy. Numerous uses of AFM in different applications like bio- lateral displacement function satisfying the geometric boundary con-
chemistry, sensors, materials science and nanotechnology applications ditions of a tapered cantilever beam. The mathematical modeling of a
(imaging of polymers, nanostructures or other materials) and physics rotating tapered Timoshenko beam with preset and pre-twist angles is
and biophysics applications (measuring forces between the AFM tip and developed by Yang et al. [9]. They used the Euler angle descriptions to
the sample surface) have attracted the attention of researchers [1–4]. obtain the partial differential equations. Ghayesh and Farajpour [10]
The dynamic force microscopy contains two noncontact and tapping investigated the nonlinear forced dynamic response of shear deform-
modes. In tapping mode, the cantilever uses a piezoelectric patch able functionally graded (SDFG) microscale beams with viscoelastic
mounted on the top to oscillate it at near to its resonance frequency. properties for the first time. Oskouie et al. [11] investigated the non-
Tapping mode can be operated in both air and liquid environments. The linear vibration behaviors of viscoelastic Euler–Bernoulli nanobeams
forces cause the amplitude to change as the tip gets close to the surface using the fractional calculus and the Gurtin–Murdoch theory. Dabbagh
[5]. De Rosa et al. [6] studied the free vibration of elastically restrained et al. [12] present the analytical and numerical solutions for vibration
cantilever tapered beams with concentrated viscous damping and mass. behaviors of a hybrid nanocomposite beam on the basis of a new re-
Sahoo et al. [7] investigated the static and the free vibration behavior of fined higher-order shear deformable beam theory.
laminated woven glass/epoxy composite plate using two different On the basis of previous studies, the mechanical behaviors of mi-
higher-order kinematic theories and the commercial finite element crostructures are usually size-dependent. Therefore, the non-classical

∗
Corresponding author. P.O. Box 3756, Rasht, Iran.
∗∗
Corresponding author.
E-mail addresses: [email protected] (M. Ahmadi), [email protected] (R. Ansari).

https://doi.org/10.1016/j.tws.2019.106382
Received 23 February 2019; Received in revised form 7 August 2019; Accepted 27 August 2019
0263-8231/ © 2019 Elsevier Ltd. All rights reserved.
M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

continuum mechanics theories are usually used to simulate the me- was studied by Sadeghi and Zohoor [30] by using the Timoshenko beam
chanical behaviors of such structures. Bekir and Civalek [13] in- theory. Ansari et al. [31] developed a nonlocal geometrically nonlinear
troduced a new size-dependent beam model based on hyperbolic shear beam model for magneto-electro-thermo-elastic nanobeams subjected
deformation beam and modified strain gradient theory. They compared to external electric voltage, external magnetic potential and uniform
the results of their model with the results of other beam theories. Ansari temperature rise.
et al. [14] applied the modified strain gradient elasticity theory to the The most dominant nonlinear forces between tip and sample are the
classical Euler-Bernoulli beam theory to establish a non-classical beam van der Waals force and contact force. In non-contact mode, only van
model and investigated the resonant frequency and flexural sensitivity der Waals force is considered. While in a tapping mode, both forces are
of AFM microcantilevers. Their model captures the size-dependent be- considered. The interaction force between the tip of piezoelectric mi-
havior of microcantilevers. Shenas et al. [15] investigated the free vi- crocantilever and sample is a nonlinear force that includes attraction
bration problem of variable section functionally graded (FG) mi- and repulsion forces [32]. A large number of studies have done on this
crobeams carrying microparticles under thermal environment. They nonlinear interaction force [33–35]. The interaction forces result in the
used the modified strain gradient theory together with the Timoshenko response of the AFM cantilever at the drive frequency and its higher
beam theory in order to take into account the size effect in microscale harmonics [36]. Christov [37] has made vast researches concerning
beams. Ansari et al. [16] investigated the free vibrations of piezo- interaction forces, while Grass [38] worked on DLVO theory. Using
electric Timoshenko nanobeams in the vicinity of the post-buckling piezoelectric thin film actuator on AFM microcantilever to improve its
domain based on the nonlocal elasticity theory. They conducted nu- performance, have better sensing and faster scanning in compare to
merical results to study the effects of nonlocal parameter, temperature laser system AFM [39–42]. The piezoelectric microcantilever has wide
rise and external electric voltage on the size-dependent behavior of applications in sensing, scanning and force microscopy [43–45]. Li-
nanobeams with various boundary conditions. Considering the small brescu and Na [46] studied the vibrational feedback control of thin-
scale effect, the buckling, post-buckling and the linear free vibration of walled cantilever beams via the implementation of the piezoelectric
magneto-electro-thermo-elastic (METE) nanoplates was studied by actuation and the effect of the tapering on the closed/open-loop ei-
Ansari and Gholami [17,18]. Based on the modified coupled stress genfrequencies. Singh et al. [47–49] carried out the numerical analysis
theory, the resonant frequencies and sensitivities of the first two modes of nonlinear vibrations of rectangular and spherical laminated compo-
of AFM microcantilevers were investigated by Kahrobaiyan et al. [19]. site shell panels embedded with piezoelectric layer. Dutta et al. [50]
They derived size-dependent closed-form solutions for the resonant studied the flexural behavior of the laminated composite plates in-
frequency and sensitivity, then investigated the effect of the ratio of the tegrated with piezoelectric and magnetostrictive. They used the higher-
beam thickness to the internal material length scale parameter. The order shear deformation kinematics in conjunction with finite element
large-amplitude vibrations of axially functionally graded (AFG) mi- steps to develop the mathematical model of the laminated composite
crocantilevers was investigated by Ghayesh [20]. Hamilton's principle plates. Kachapi et al. [51] investigated nonlinear dynamics and stability
was employed for the development of the question of motion and a analysis of a piezoelectric nanoresonator (PENR) based on cylindrical
frequency/base-displacement based on continuation method was nano-shells using the Gurtin–Murdoch surface/interface theory. Qiu
adopted for the numerical studies. Farokhi and Ghayesh [21] derived et al. [52] presented both theoretical analysis and experimental results
the nonlinear formulations for the modified couple stress theory in an of active vibration suppression of a flexible piezoelectric cantilever
orthogonal curvilinear coordinate system. They performed numerical plate bonded with a gyroscope sensor. Mahmoodi and Jalili [53] study
solutions for spherical shells, and the linear natural frequencies were the nonlinear vibrations of AFM microcantilever, they derived the
analyzed. Their results indicate that as the radius of curvature is de- nonlinear equations of motion of a non-homogenous piezoelectrically
creased the small-scale effects on the natural frequencies become actuated microcantilever. Also, it can be mentioned that Salehi-Khojin
weakened. Yang et al. [22] developed a dynamic Timoshenko beam et al. [54] examined three types of MC with extensive piezoelectric
model based on the new nonlocal strain gradient theory and slip layer, piecewise piezoelectric and a piece of piezoelectric on the free
boundary theory to study the wave propagation behaviors of fluid-filled end. The use of higher harmonic vibrations of AFM would provide
carbon nanotubes (CNTs) at the nanoscale. Moreover, it should be useful information [55,56]. Ahmadi et al. [57] performed FSI simula-
noted that depending on the geometry, the small-scale effect may not be tions to study the vibrational behavior of an AFM piezoelectric micro-
considerable. cantilever in various environments. Korayem et al. [58] investigated
The vibrational characteristics of tapered beams with continuously the vibration suppression of an AFM Euler-Bernoulli micro-beam with a
varying rectangular cross section were studied by Zhou and Cheung piezoelectric layer and showed that viscoelasticity of beam reduce vi-
[23]. Banerjee and Jackson [24] investigate free vibration character- brations and provide uniform time-domain responses without beatings.
istics of a rotating tapered Rayleigh beam by extending the dynamic Killgore et al. [56] studied the vibration behavior of commercially AFM
stiffness method for free vibration analysis. A nonlinear model was cantilevers and show that the U-shape of the cantilever results in sev-
performed by Mohri et al. [25] in large torsion context according to eral vibrational modes that do not exist in rectangular cantilevers.
new kinematics that accounts for large torsion, flexural-torsional cou- However, there was no included piezoelectric layer in their studied
pling and the existence of tapering terms in bending and torsion. By cantilevers and they represented the tip-sample interaction by linear
using Euler–Bernoulli theory, Korayem and Nahavandi [26] in- springs. Using higher modes in AFM has advantages like the increase of
vestigated the force vibrational performance of tapering-shaped canti- the quality factor, which leads to a reduction in measurement errors.
levers. They conducted the modal analysis method to solve the motion Higher vibrational modes can interact with one another, introducing
equation. Moreover, they used the mode shape function for the two new challenges for quantitative analysis of results from dynamic AFM
tapering-shaped sections of the first and the second kind of Bessel experiments. In order to improve the sensitivity of MCs including the
functions. Chalah et al. [27] considered the expression describing a ones used in AFM applications, some researchers have developed MCs
cross area linear variation for a tapered beam vibrating axially. Putman for high frequencies and showed that higher modes exhibit better
et al. [28] extracted experimental diagrams in liquid and also pro- sensitivity [59].
ceeded to dynamic analysis in tapping mode, using a silicon cantilever. In this work, the linear vibrational behavior of rectangular and V-
Furthermore, Banerjee and Williams [29] applied the Euler–Bernoulli shaped AFM microcantilevers with an extended piezoelectric layer on
theory and Bessel functions to obtain explicit expressions for the exact their top is investigated considering the nonlinear tip-sample interac-
static stiffness for axial, torsional and flexural deformations of an axi- tion. To this aim, a 3D FEM is used. The free and forced vibrations of
ally loaded tapered beam. The resonant frequency of the flexural vi- rectangular and V-shape piezoelectric microcantilevers in the absence
bration for a taper-shaped atomic force microscope (AFM) cantilever and presence of nonlinear interaction between the tip and the surface

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Fig. 1. Schematic of the (a) rectangular and (b) v-shaped piezoelectric microcantilever geometries.

sample are studied. Through a Python language script in the ABAQUS follows
software, a nonlinear spring is used in order to simulate the nonlinear
∂ψ ∂ψ
attraction-repulsion interactions between tip and sample. For the free Ex = − , Ey = 0, Ez = − ,
∂x ∂z (4)
vibration analysis, the resonance frequencies and mode shapes are
presented. In the forced vibration analysis, an AC voltage is applied to where ψ denotes the electric potential. It should be noted that when the
the piezoelectric layer to operate the microcantilever. Two states are length of cantilever through the axial axis is too larger than the trans-
considered: the microcantilever is held fixed at the end and free to verse direction, one can ignore the electric flux in the x-direction. By
move and rotate in the first one, and the rotational degree of freedom considering the lack of electric charges, one can write the electrostatic
and lateral displacement of the microcantilever is tied up with applying equation as
a symmetric constraint in the second state.
∂Dx ∂Dz
+ = 0.
∂x ∂z (5)
2. Modeling of the AFM piezoelectric MC
Now, by considering the Euler-Bernoulli beam theory and ne-
2.1. Equation of motion of the piezoelectric MC glecting the effect of Dx , one can obtain the electric potential function
as follow
Herein, a mathematical model for V-shaped AFM piezoelectric
e˜ h2 ⎞ ∂2w 2z
cantilever depicted in Fig. 1b is provided. To this end, the Euler-Ber- ψ = −⎛ 31 ⎞ ⎛z 2 −
⎜ ⎟⎜
2
+ ⎛1 + ⎟ ⎞ v,
2˜
s
⎝ 33 ⎠ ⎝ 4 ⎠ ∂x ⎝ h⎠ (6)
noulli beam theory and Hamilton's principle are used to obtain the
governing equation of motion. The classical coupled constitutive ex- where w = w (t , x ) is the transverse displacement and v stands for the
pressions for piezoelectric structures for the plane-stress state can be electric voltage. Also, on the basis of Eq. (1), one can express
expressed as follows
∂ 2w e˜ 2 ∂2w 2˜e v
c˜11 c˜12 0 0 0 ⎤ εxx σxx = c˜11 εxx − e˜31 Ex = −c˜11 z − z 31 2 + 31 .
σ
⎧ σxx ⎫ ⎡ ⎧ ⎫ ⎡ 0 0 e˜31 ⎤ ∂x 2 s˜33 ∂x h (7)
⎢ c˜ c˜ 0 0 0 ⎥ εyy E
⎪ ⎪
⎪ ⎪ ⎢ 0 0 e˜32 ⎥ ⎧ x ⎫
⎪ ⎪yy 12 22
σxy = ⎢ 0 0 c˜66 0 0 ⎥ γxy − ⎢ 0 0 0 ⎥ Ey , Moreover, one can obtain the piezoelectric load according to the
⎨ σxz ⎬ ⎢ ⎥⎨γ ⎬ ⎢ ⎥⎨ ⎬ following relation
⎪ ⎪ ⎢ 0 0 0 c˜55 0 ⎥ ⎪ xz ⎪ ⎢ e˜15 0 0 ⎥ ⎩ Ez ⎭
σ ⎢ ⎥ ⎪ γ ⎪
⎩ ⎭ ⎣ 0 0 0 0 c˜44 ⎦ ⎩ yz ⎭ ⎢ ⎣ 0 e˜24 0 ⎥
yz
⎦ (1) h
2

ε N= ∫ bσxx dz = 2be˜31 v.
⎧ xx ⎫ h
⎧ Dx ⎫ ⎡ 0 0 0 e˜15 0 ⎤ ⎪ εyy ⎪ ⎡ s˜11 0 0 ⎤ ⎧ Ex ⎫ 2 (8)
⎪ ⎪
Dy = ⎢ 0 0 0 0 e˜24 ⎥ γxy + ⎢ 0 s˜22 0 ⎥ Ey , To achieve the covering equation of motion via Hamilton's prin-
⎨ ⎬ ⎢ ⎨γ ⎬ ⎢ ⎥⎨ ⎬
⎩ Dz ⎭ ⎣ e˜31 e˜32 0 0 0⎥ ⎦ ⎪ xz ⎪ ⎣ 0 0 s˜33 ⎦ ⎩ Ez ⎭ ciple, the potential energy, kinetic energy and work due to the external
⎪ γyz ⎪ (2)
⎩ ⎭ loads should be obtained. The potential energy of the considered system
where Di and Ei stand for the elements of electric displacement vector can be calculated as follows
and electric field vector, respectively; σij and εij are the stress and stress 3 L3 2 L3
2 e˜312 ⎛ ∂2w ⎞2 e˜31 v ∂2w ⎤
components, respectively and the reduced elastic, piezoelectric and ΠS = ∑ ∫ ⎡⎢ 1 c˜11i Ii ⎛ ∂ w2 ⎞ ⎤⎥ dx + ∫ ⎡⎢ 1 I2
⎜ ⎟ ⎜ ⎟ −J 2 dx
i=1 0 ⎣2 ⎝ ∂x ⎠ ⎦ ⎣2
2
s˜332 ⎝ ∂x ⎠ h2 ∂x 2 ⎥⎦
dielectric coefficients, respectively shown by c̃ij , eij and s̃ij are defined as 0
L1 2 2

c˜11 = c11 −
2
c13
, c˜12 = c12 −
c13 c 23
, c˜22 = c22 −
2
c23
, c˜44 = c44, c˜55 = c55 + ∫ ⎡⎢ 12 c˜11 I3 ⎛ ∂∂xw2 ⎞ ⎤⎥ dx,
3
⎜ ⎟

c33 c33 c33

L3 ⎣ ⎝ ⎠⎦ (9)
, c˜66 = c66,
c13 e33 c 23 e33 where J denotes the first integral of surface associated with the pie-
e˜31 = e31 − , e˜32 = e32 − , e˜15 = e15, e˜24 = e24 ,
c33 c33 zoelectric layer. Ii signifies the second moment of the surface corre-
2
s˜11 = s11, s˜22 = s22, s˜33 = s33 +
e33
. sponding to each section. Also, the external work due to the interaction
c33
force between the AFM microcantilever tip and the sample surface can
(3) be expressed as follows
In the above equation, the parameters cij , eij and sij are the elastic, L1
piezoelectric and dielectric constants, respectively. For the piezoelectric Πext = Fw (t , L1) = ∫ Fw (t, x ) δ (x − L1) dx,
cantilever, the electric flux appeared in Eq. (1) can be obtained as 0 (10)

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

where δ is Kronecker delta. Furthermore, the kinetic energy is obtained Table 1

as follows Geometrical and physical properties of the rectangular and v-shaped piezo-
3 L3 L1
electric microcantilevers.
2 2
ΠT = ∑ ∫ ⎡⎢ 1 ρi Ai ⎛ ∂w ⎞ ⎤⎥ dx + ∫ ⎡⎢ 1 ρ3 A3 ⎛ ∂w ⎞ ⎤⎥ dx Rectangular MC geometry V-shaped MC geometry
i=1 0 ⎣2 ⎝ ∂t ⎠ ⎦ L3 ⎣2 ⎝ ∂t ⎠ ⎦
2 Symbol Value Symbol Value
1 ∂w (t , L1) ⎞2 1 1 ∂2w (t , L1) ⎞
+ (ρp AW2) ⎛ + ⎛ ρp AW23 ⎞ ⎛⎜ ⎟ .
2 ⎝ ∂t ⎠ 2 ⎝3 ⎠ ⎝ ∂x ∂t ⎠ (11) L1 375 μm L1 500 μm
W1 250 μm W1 125 μm
Now, by applying Hamilton's principle, one can achieve the gov- L2 125 μm W2 57 μm
erning equation of motion as follows W2 55 μm L3 300 μm
L3 330 μm W3 65 μm
∂ 4w ∂ 2w W3 130 μm b 352 μm
DT + IT 2 = FT ,
∂x 4 ∂t (12) tb 4 μm tb 4 μm
tp 4 μm tp 4 μm
where DT , IT and FT are the total coefficients including the coefficients
Di , Ii and Fi corresponding to each section of the considered system.
Table 2
2.2. FE simulation details HOPG sample-tip property [61].
property Value
Fig. 1 shows schematics of the rectangular and v-shaped AFM pie-
zoelectric microcantilevers instances of the present work with an ex- Hamaker constant 2.96 × 10−19 J
tended piezoelectric layer tied to its top surface. In this work, according Effective elastic modulus 10.2 GPa
to the considered geometry, the classical continuum mechanics theories Intermolecular distance 0.38 nm
Tip radius 20 nm
have been employed. The amplitude of the AFM microcantilever is
considered to be comparably small, hence the geometric nonlinearity of
the microcantilever is insignificant. In the present study, the geometric microcantilever is free to move at all degrees of freedoms. So, the
nonlinearity was ignored and accordingly, the linear vibrational beha- natural frequencies of the rectangular and v-shaped piezoelectric mi-
vior was studied. However, due to a change in the distance of the mi- crocantilevers obtained and the mode shapes illustrated. Then, by ap-
crocantilever tip and the surface sample, the van der Waals energy plying an AC electrical potential to the piezoelectric layer with the
terms and consequently the interaction force change [60]. The FE si- resonance frequencies obtained in free vibration analysis, the forced
mulations in this study are performed using ABAQUS package along vibration analysis of the AFM microcantilevers done and the frequency
with Python scripting. A frequency solver and a dynamic implicit are responses derived.
employed in the free and forced vibration studies, respectively. The
connection between microcantilever tip and the surface sample is made
2.2.1. Interaction between tip and sample
using a nonlinear spring via a Python language script implemented
To simulate the interaction force between AFM microcantilever tip
inside ABAQUS/CAE. A 20-node quadratic brick, reduced integration
and the sample surface, two types of attraction and repulsion force
element (C3D20R) and 20-node quadratic piezoelectric brick, reduced
considered, van der Waals and DMT contact Forces. The attraction and
integration element (C3D20RE) are used for meshing the beam part and
repulsion non-linear defined as [61]:
the piezoelectric part of the 3D FE geometries of microcantilevers, re-
spectively. The 3-dimensional finite element models of the rectangular HR
⎧− 6u2
δ>u
and v-shaped piezoelectric microcantilevers showed in Fig. 2. Geome- F= 3
trical properties of the rectangular and v-shaped AFM piezoelectric ⎨− HR
+
4 ∗
E R (δ − u) 2 δ≥u
⎩ 6δ2 3 (13)
microcantilever are listed in Table 1, where tb and tp respectively are
beam section thickness and piezoelectric layer thickness. The beam where H, u, R, δ and E* respectively are Hamaker constant, tip dis-
section and piezoelectric layer are made from silicon material with placement, tip radius, intermolecular distance and effective elastic
Young's modulus of 105 GPa and ZnO material with Young's modulus of modulus between the microcantilever tip and the sample, calculated
104 GPa respectively. The density of silicon and ZnO considered as from the AFM microcantilever and sample Young's modulus. Here,
2330 kg/m3 and 6390 kg/m3 respectively. Free and forced vibration Highly Oriented Pyrolytic Graphite (HOPG) is considered as the sample
analyses are done with the fixing end of the piezoelectric micro- and Table 2 Show the properties of the sample for simulation of tip-
cantilever instances in all degree of freedoms (clamped-free). Also, two sample nonlinear forces [61]. So, for modeling the interaction forces in
different states are considered for the analyses; the first state is applying the finite element simulation, the nonlinear force-displacement inter-
a symmetric constraint that only leads to the bending motion of pie- actions curve was numerically estimated with many points using a
zoelectric microcantilever in the vertical direction (no horizontal dis- nonlinear spring. The vibration analysis investigated near the sample
placement or torsion motion). In the second state, the AFM surface in the presence of the nonlinear interaction and far from the

Fig. 2. 3D view of (a) Rectangular and (b) V-shaped FEM models.

4
M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Table 3
First three resonance frequencies of present work in comparison with experiment [54] and MCS method.
FEM Experiment [54] Error (%) MCS [62] Error (%)

First natural frequency 51.07 KHz 52.3 KHz 2.35 52.26 KHz 2.28
Second natural frequency 199.72 KHz 203.0 KHz 1.62 203.33 KHz 1.78
Third natural frequency 384.18 KHz 382.5 KHz 0.44 395.42 KHz 2.84

Fig. 3. Comparison between experiment [54] and present FEM mode shapes of piezoelectric MC at (a) first, (b) second and (c) third resonance frequencies.

5
M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Fig. 4. Free vibration mode shapes of the rectangular AFM piezoelectric microcantilever.

6
M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Fig. 5. Free vibration mode shapes of the v-shaped AFM piezoelectric microcantilever.

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Table 4 sample surface without the interaction forces.

The first 10 natural frequencies (kHz) of the rectangular and v-shaped AFM
piezoelectric microcantilever with symmetric constraint.
2.2.2. Model validation
Mode Far from the sample surface Near the sample surface First, the three resonance frequencies obtained herein are tabulated
in Table 3 and compared to those of other works. The first resonance
Rectangular V-shaped Rectangular V-shaped
amplitude with V = 1.5 v piezoelectric excitation is also obtained as
1 51.1 46.0 79.2 87.9 3.78 μm. This value has 0.8% error in comparison with the experi-
2 199.7 176.4 328.6 287.6 mental data [53], and 0% error in comparison with that of the modified
3 384.2 429.3 555.5 499.7
couple stress theory [62]. Fig. 3 show the piezoelectric MC's first three
4 863.1 822.8 904.6 884.7
5 1330.5 1298.8 1388.0 1326.7 mode shapes from the finite element simulation in compare with the
6 1895.6 1969.5 1924.7 1995.1 results obtained in experimental work [54]. So, the results of the finite
7 2628.0 2621.9 2642.7 2637.1 element model in this study for free and forced vibration are in
8 3561.3 3093.8 3570.2 3093.8 agreement with the other researcher's results.
9 3958.0 3574.9 3958.0 3587.4
10 4531.6 4400.1 4549.7 4410.7
3. Results and discussion

Table 5 3.1. Free vibration

The first 20 natural frequencies (kHz) of the rectangular and v-shaped AFM
piezoelectric microcantilever without constraint. Ten mode shapes of free vibrations of the rectangular piezoelectric
Mode Far from the sample surface Near the sample surface microcantilever, for the cases of far and near the sample surface, so
with and without the symmetric constraint, are illustrated in Fig. 4. It is
Rectangular V-shaped Rectangular V-shaped
observed that the first and second mode shapes of the MC far from the
1 49.7 39.4 74.8 75.4 surface of the sample for symmetric constraint and without constraint
2 176.2 140.4 188.4 140.5 are similar. Also, the third mode shape of the MC with the symmetric
3 188.4 151.0 314.4 253.6 constraint is similar to the fourth mode shape of the MC without con-
4 354.8 332.5 507.0 332.6
straint, for far from sample surface state, but because of the different
5 568.1 351.8 568.1 409.3
6 780.7 481.1 813.3 502.0
degree of freedom for the motion of the MC, the other mode shapes are
7 824.8 584.6 843.0 584.9 in different motions. Torsion motion and lateral displacement are ob-
8 976.2 651.7 976.2 651.8 vious in MC without constraint comparing with MC with symmetric
9 1058.9 708.0 1078.3 766.4 constraint. Free vibration mode shapes of the MC near the sample
10 1102.7 1024.6 1102.7 1052.0
surface affect the mode shapes because of the tip-sample interactions.
11 1154.5 1051.8 1154.5 1053.8
12 1237.1 1197.8 1290.4 1207.9 The mode shapes for the MC near the sample is more different in the tip
13 1513.6 1289.8 1515.0 1290.2 zone of microcantilever comparing with the mode shapes far from the
14 1535.6 1336.0 1535.7 1336.0 sample surface. Also, it is observed that the mode shapes differ between
15 1621.3 1543.8 1621.3 1555.6 the vibration with and without the tip-sample interaction state is more
16 1702.7 1575.0 1720.9 1575.2
17 1818.8 1696.9 1818.9 1710.5
evident in low mode shapes. It is clearer for the symmetric constraint
18 2284.0 1930.5 2284.2 1931.1 state, as it was shown, the first three modes shapes have more differ-
19 2322.3 2068.7 2322.3 2085.9 ence, but other modes are so similar. Also, Fig. 5 illustrate first ten
20 2342.8 2234.6 2356.3 2235.1 mode shapes of v-shaped MC for far and near the sample surface, so
with and without the symmetric constraint. The effect of torsion motion

Fig. 6. The frequency response of the MCs with symmetric constraint for vertical motion of A (a) Far from the sample surface (b) Near the sample surface.

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Fig. 7. The frequency response of the MCs without constraint and far from the sample surface (a) vertical motion of A (b) vertical motion of B (c) horizontal motion of
A (d) horizontal motion of B.

is more prominent on the free vibration of V-shaped MC because the MC without constraint and for two far and near the sample surface
difference between the cases of with and without constraint is started in states. Like what observed for microcantilever with symmetric con-
the second mode, while for rectangular MC it is observed from the third straint, the natural frequencies of the MCs near the sample surfaces are
mode on. It is also observed that the mode shapes of the V-shaped MC bigger than the natural frequency far from the samples and the in-
have been less affected by tip-sample forces in compare with the rec- creased resonance frequency is more in lower modes. For instance, the
tangular MC. The first ten natural frequencies of the rectangular pie- first, 10th and 20th natural frequencies of V-shaped MC increased by
zoelectric MC and V-shaped piezoelectric MC illustrated with sym- about 91%, 2.7% and 0% respectively. Moreover, the V-shaped MC
metric constraint in Table 4 for far and near the sample surface. It is almost has the same behavior and also have a smaller frequency com-
observed that the natural frequencies of the MCs near the sample sur- paring with rectangular MC except for the first mode of near the sample
faces are bigger than natural frequency far from the samples. The in- surface.
creased resonance frequency is more in lower modes. For example, the
first and tenth natural frequencies of rectangular MC increased by 56% 3.2. Forced vibration
and 0.4% respectively, and also has no difference was observed in the
9th mode for the rectangular and 8th mode for V-shaped micro- Fig. 6 presents the frequency response of the rectangular and v-
cantilever. The V-shaped MC almost have the same behavior and also shaped microcantilevers with symmetric constraint, far and near the
have a smaller frequency in compare with rectangular MC except for sample. The amplitude presents the vertical displacement of point A
several modes. Also, Table 5 shows the first twenty resonance fre- that showed in Fig. 2. The frequency response of the MCs far from the
quencies of the rectangular piezoelectric MC and v-shaped piezoelectric sample surface illustrated in Fig. 7 and Fig. 8 respectively, for without

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Fig. 8. The frequency response of the MCs without constraint and near the sample surface (a) vertical motion of A (b) vertical motion of B (c) horizontal motion of A
(d) horizontal motion of B.

constraint and symmetric constraint states. Also, the amplitudes pre- higher modes for rectangular microcantilever without constraint, there
sented the vertical and horizontal displacement of the A and B points are several leaps up in amplitudes.
showed in Fig. 2. The amplitude of the first 10 resonance frequencies of
the rectangular and v-shaped piezoelectric MCs, with and without
symmetric constraint for far from the sample surface illustrated in 4. Conclusion
Table 6 and near the surface of the sample illustrated in Table 7. The
amplitudes presented vertical and horizontal displacement of the A and In this work, the free and forced vibration behaviors of rectangular
B points. As illustrated in the graphs and tables, the results of forced and v-shaped piezoelectric microcantilevers were studied using FEM.
vibration show that the vertical displacements of MCs without con- The influences of the nonlinear interaction forces between tip and
straint are bigger than MCs with symmetric constraint. The vertical sample surface on the natural frequencies and frequency response of
displacements for rectangular microcantilever are bigger than hor- MCs were investigated. Also, the analysis was done for two states, the
izontal displacements except for a few cases. Horizontal displacements first state is MC with the symmetric constraint with no torsion or lateral
for V-shaped microcantilever are bigger than rectangular MC, and it motion, and the MC is free to move in all directions in the second one.
means that the V-shaped MC is more flexible in lateral movement of its Validation studies revealed that the present FEM can predict the vi-
modes. Also, it can be mentioned that the amplitudes of MCs far from brational behaviors of MCs with good accuracy. It was generally con-
the sample surface are bigger than MCs near the sample surface. Also, in cluded that the high mode shapes of the microcantilever far from the
sample surface for symmetric constraint and without constraint are

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M. Ahmadi, et al. Thin-Walled Structures 145 (2019) 106382

Table 6
The amplitude of the first 10 resonance frequencies of the rectangular and v-shaped AFM piezoelectric MCs far from the sample surface (μm for Vertical and nm for
Horizontal).
Mode Rectangular V-shaped

Without constraint Symmetric constraint Without constraint Symmetric constraint

A A B A A B

V V H V H V V H V H

1 1.6359 0.5016 0.0000 0.3075 0.0030 4.3217 4.5942 0.1642 1.9671 4.7852
2 1.2498 0.8598 0.0000 0.0315 0.0047 1.2933 0.0011 0.0000 0.0002 0.0010
3 0.9742 0.0005 0.0000 0.0000 0.0035 2.2656 1.4766 0.0008 0.2395 0.2038
4 0.5563 0.1507 0.0000 0.0993 0.0260 0.3528 0.0004 0.2003 0.0002 0.0035
5 0.1028 0.0000 0.0007 0.0000 0.0210 1.2284 1.9928 0.0002 0.0047 18.897
6 0.4664 2.9416 0.0079 2.4132 0.0091 0.6825 0.2401 108.26 0.3281 8.2172
7 0.0954 0.9792 0.0171 3.9853 0.0185 0.3681 0.0000 66.283 0.0001 0.0128
8 0.1582 0.0000 0.1113 0.0005 0.0501 0.0591 0.0000 0.0015 0.0006 0.0087
9 0.0822 2.9341 0.3386 3.1446 0.0259 1.1649 1.2756 66.167 0.4034 7.9552
10 0.3959 0.0001 0.2101 0.0019 0.0236 0.3441 1.0615 0.0614 0.0800 9.6240

Table 7
The amplitude of the first 10 resonance frequencies of the rectangular and v-shaped AFM piezoelectric MCs near the sample surface (μm for Vertical and nm for
Horizontal).
Mode Rectangular V-shaped

Without constraint Symmetric constraint Without constraint Symmetric constraint

A A B A A B

V V H V H V V H V H

1 0.0995 0.0511 0.0000 0.3299 0.4210 0.3682 0.2844 0.0038 0.9543 2.1485
2 0.4527 0.0000 0.0000 0.0000 0.0000 1.4649 0.0000 0.0049 0.0002 0.0009
3 0.0981 0.1458 0.0000 0.1918 0.8087 1.5668 1.2671 0.0143 0.0694 6.6142
4 0.6710 0.6267 0.0002 0.2022 4.3109 1.1864 0.0000 0.0376 0.0003 0.0042
5 0.0136 0.0000 0.0000 0.0000 0.0002 1.3131 0.8355 0.0399 0.1951 13.804
6 0.5137 2.5901 0.0044 0.0000 184.989 0.7568 0.3603 0.0285 0.4120 8.7321
7 0.1059 0.1732 0.0015 6.4778 0.9836 0.3720 0.0000 0.0122 0.0001 0.0084
8 0.1614 0.0000 0.0664 0.1082 0.0009 0.0622 0.0000 0.0541 0.0007 0.0096
9 0.0849 2.7390 0.4190 0.0003 82.9978 1.1925 1.6192 0.0041 0.3790 10.096
10 0.3837 0.0003 0.3260 3.2543 0.0997 0.3411 0.8829 0.2054 0.0814 6.8779

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