Surface Texture and Contour

Integrated Measuring Instruments

Series
ACCTee / TiMS
 SUR FCOM
Works for you
We have prepared a lineup that answers to you needs in terms
of surface texture and contour measuring instruments
We have prepared a lineup that answers to you needs in terms of surface texture
and contour measuring instruments
Choose one that best fits to your purpose.
It's a measuring machine that finds out correlation with the material, process,
function, and performance as well as optimum management by precisely capturing
the minutely changing surface profile (the range between several nanometer and
several tenth micrometer) in 2-D and 3-D image data and through quantitative
measurement..

New concept software ACCTee

World first
Adopting a linear motor driving unit in the surface roughness measurement
machine and the contour profile measurement machine

Hybrid
Equipped with a wide-range roughness contour
integrated detector

Eco-product
Adoption of new design for space-saving feature

Highly accurate roughness contour analysis

The high performance roughness detector provides the
maximum 500,000 magnification
The contour detector (analog) surpasses digital devices
in terms of accuracy

2
Measuring

Surface roughness measurement

The feel of the surface of physical objects is often expressed as “smooth” or “rough” however, there are minute convexes
and concaves on the surface. The surface roughness means the parameter expressing the degree of such minute convexes
and concaves.
Difference of surface
The purpose of the surface roughness
measurement is to help the improvement of
product quality control and cost management.
Following are the typical items that affect the Example of “smooth” surface Example of “rough” surface
function and performance of machines.

Basic structure of the surface roughness measurement machine

Required function Pertinent work Example of evaluation Measurement stand column

parameter
Air resistance Valve cock Ra, Rq, Sm, Rpk Crossing at right angle
against geometrical
Z axis elements
Wear-out Cam and bearing Rp and Tp load curve Driving unit
X axis Measurement
Lubricity Honing surface Rv and Tp load curve Amplification
Mounting surface Probe
Noise and vibration Gear and ball screw Rz, Pt, and power graph instruction unit

Sharpness Cold rolled steel Ra, Wca, Pc

sheet and plate
Adhesiveness Painting groundwork Rzjis, Rz Stylus tip geometry Probe (pickup)
LVDT (analogue)
Appearance and luster Plating surface and
pattern surface Ra, Rq, Wca, Wcm θ
Measuring force: 0.75mN
Optical performance Lens and prism Ra, Rq r tip (For 2µm of the stylus radius)
Strength against Crank shaft Pt, Rv, Rvk θ= 60°(or 90°
)
fatigue failure
r tip = 2μm Measuring object Jig/adjustment stand
Touch Knurl and pear Rz, Pc, and power graph (or 5,10μm) Measurement stand
skin surface
Electric resistance Relay and connector Ra, Hsc, Tp, Mr1

Contour profile measurement

The contour profile means the profile (sectional contour) traced along the ridge line of the appearance and figure of an entire
physical object.

The contour profile measurement machine is used for making a dimension measurement evaluation by tracing a surface (marked by
stylus) and enlarging the profile.
The machine is useful for measuring such objects as: the convexes and concaves which are difficult to be measured or inspected by
projector; inner profile of a hole; and tiny objects which is difficult to apply a stylus by 3-D coordinate measuring machine.

Measurement analysis of contour profile Basic structure of the contour profile measurement machine
Normally equipped with arc correction and
tip radius correction functions Column
Crossing at right angle Driving unit
Profile of tiny part against geometrical Glass scale
elements Garantee straightness
Z axis
Measurement direction accuracy
X axis
Amplification
instruction unit
The display of the profile
is enlarged by the same
aspect ratio for analysis Stylus tip geometry Contour detector
LVDT (analogue) or
θ scale (digital)
Measuring force: 10-30mN
r tip
θ= 24°
rtip = 25μm Measuring object Jig/adjustment stand
Measurement stand

3
 Surface Texture and Contour Integrated Measuring Instruments

Highest Accuracy, Highest Speed and

Highest Resolution in the World
– Thoroughly pursuing the limits of
surface characteristics analysis –
Highly Stable Optical Path Laser Interferometer (Patented)
● This measuring machine adopts an optical fiber-based laser
interferometer, one of Tokyo Seimitsu's constituent technologies,
and incorporates a newly developed highly stable optical path laser
interferometer having a resolution of 0.31 nm.
● This system features a dynamic range to resolution ratio of
42,000,000:1, which means that contour shapes over a wide range
and minute hidden surface shapes can be evaluated by a single trace.

<Sensor Structure>
Optical fiber
He-Ne laser

X-axis scale counter

Laser interferometer counter

Interference
Stylus Reference light light Photocell
Measurement light Controller

Bearing
Workpiece

● World Highest Resolution of 0.3nm Automatic Measurement Over a Wide Range

A highly stable optical path He-Ne laser interferometer is used in the ● Wide measuring range of 200 mm (horizontal direction) and 13 mm
sensor to achieve high resolution over a wide range. (vertical direction)
● Linear Motor Drive ● Motorized tilting unit capable of tilting to 45° also available. *1
Linear motor drive ensures high accuracy and high-speed movement. ● Teaching/playback function allows processes from measurement
Also, low vibration ensures more stable measurement at high magnifications. through printing to be automated.

● Roughness and Contour Analyzed in a Single

Measurement
Measurement efficiency improved and high accuracy maintained at
the same time.
● Large size maintains accuracy
● CNC table can be added for full automatic operation
● All the function of the S3000A
Workpiece angle is detected after workpiece tracing, and the drive
unit's auto leveling feature returns the workpiece and drive unit to level.

● TiMS & ACCTee double support

It enables to select from two measurement analysis programs,
TiMS system that is time-proven by lot of users or new development ACCTee system.
TiMS system has high operability and abundant functions for variegated workpieces.
ACCTee is the latest system that advocates new measurement style
with a new concept as next generation of TiMS.

*1 Drive unit tilting device is included as standard

on the SURFCOM 5000DX-T/SD-T Type.

4
■ External View

SURFCOM 5000DX SURFCOM 5000SD

587 1000

1110
1870

1810

1070∼1370
700
890 1224 824 1074 □800

DX Type can be configured with a front windproof cover and an external * Anti-vibration table, system rack and printer are options for the SD Type.
monitor.

Model SURFCOM 5000DX/SD

Z-axis (vertical) 13mm/50mm arm, 26mm/100mm arm
Measuring range
X-axis (horizontal) 200mm
Z-axis indication accuracy (vertical) ±0.2+IHI/1000μm (±0.206μm/H±6mm) H: Measuring height
Resolution 0.31nm/50mm arm
Accuracy
X-axis indication accuracy (horizontal) ±0.2+L/1000μm (±0.4μm：L200mm) L: Measuring length
Resolution 0.54nm
Straightness accuracy 0.05+3L/10000μm (0.11μm：L200mm) L: Measuring length
Z-axis (vertical) Highly stable optical path type laser interferometer
Sensing method
X-axis (horizontal) Optical diffraction scale
Column up/down speed (Z-axis) To 200mm/s
Drive speed Drive unit measuring speed (X-axis) 0.03 to 3mm/s (during texture measurement), 0.03 to 20 mm/s (during contour measurement)
Drive unit movement speed (X-axis) 0.02 to 60mm/s
Drive unit tilt ±45° (option)
Stylus Replaceable
Measuring Force 0.75mN
Sensor unit Stylus radius 2μmR standard accessory (50mm arm)
Stylus material Diamond
Functions Retract function
Power Requirements Single-phase AC100V ±10%, 50/60 Hz
Dimensions and Air Sourse Supply Pressure; 0.4MPa or more, Air Consumption Volume Max: 8ℓ/min
weight Installation dimensions* 2000 (W) ×1000 (D) ×2000 (H)
Weight-* 700kg

*Dimensions and weight are for the DX Type.

5
 Integrated analysis software ACCTee

Measurement and analysis software for surface roughness measurement machine

Roughness

● ACCTee roughness measurement analysis system

ACCTee
ACCTee has changed the roughness
measurement style with its new concept All in the Document !
the measurement can be executed on a
document basis, providing preeminent
workability and comfortable work
environment.�As the setting can be Distinguished TOKYO SEIMITSU
proceeded under the guidance of various operation by ACCRETECH
setting wizards, anyone can perform the document screen INTEGRATED
measurement tasks easily and efficiently. MEASURING
ACC Tee is equipped with a SYSTEM
Windows style user interface
to which anyone can access

● Various setting wizards easily. High operability is

achieved with the friendly
and intuitive icons that assist
・Measurement AI
a series operation from the
The parameters and analysis condition
appropriate for the roughness standard and measurement to the printing of analysis result.
evaluation purpose can be specified.
・Detector Calibration
The sensitivity calibration is executed by Document basis data batch processing
selecting any of the following three options: depth
As an integrated measurement
specimen; magnification calibration unit; and
system, ACCTee can
reference specimen. The time for calibration can
be notified in a message according to the time for comprehensively manage the
replacing the probe, measurement frequencies, roughness and contour data in
and lapsed days. inspection result sheet or file.
・Checking tip of stylus
The tip of the stylus gets wears and chips
more and more as it is used for measurement
continuously. A regular check is necessary to
maintain accurate measurement. Detector calibration wizard

● Automatic judgment under 16% rule (JIS2001 standard) International Support

The 16% rule and the max rule are ACCTee can be used overseas
standardized for the tolerance criteria of and supports several languages
the roughness evaluation parameters. The including Japanese, English,
criteria for the 16% rule and the max rule German, French, Italian, Spanish,
are as follows: 16% rule - if the number of
sections that exceed the tolerance is below Chinese, and Korean. (consult
16% of the measurement values of multiple us before taking out to overseas
standard length (sections), it is assumed countries)
to meet the criteria; max rule - if all the
measurement values of multiple standard
length (all sections) do not exceed the Support multiple languages
tolerance, it is assumed to meet the criteria.

Specification ACCTee roughness measurement and analysis program

Support roughness standard Conforming to JIS2001, and JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME2002/1995 – CNOMO
Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, RΔa, RΔq, Rλa, Rλq
Parameter TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, A1, A2, VO, K, tp, Rmr, tp2, Rmr2, Rσc, AVH, Hmax, Hmin,
AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR, etc
Parameter judgment The judgment result can be displayed by standard, average value, the maximum value, minimum value, and 16% rule
Profile Curve, Roughness Curve, Filtered Waiveness Curve, Roll. Circ. Waiveness, Rolling Circle Waiveness Curve
Evaluation curve
ISO13565-1(DIN4776) Roughness Curve, Roughness Motif Curve, Waiveness Motif Curve, and Upper Envelope Curve
Bearing area curve, power graph, ADC graph, ISO13565-2 Bearing area curve, peak height distribution graph/list, auto correlation graph
Surface characteristic display
wear-out amount analysis (two arbitrary curves), and overlapping analyses (ten curves or less)
Form remove Least square straight line correction, n-dimension polynomial (n=2-9) correction, both ends correction, least square circle correction,
(tilt correction) least square oval correction, spline correction, robust (spline) correction (arbitrary or beginning or latter half of the setting range can be specified for all the options)
Gaushian phase compensating filter, phase uncompensation type 2RC filters, phase compensation type 2RC filters,
Filter type spline filter, and robustness (spline)
Cut-off wavelength (λc)：0.008、0.025、0.08、0.25、0.8、2.5、8、25、50mm（9 levels）、arbitrary（from 0.001mm）
Filter Cutoff ratio (λs)：1/30、1/100、1/300、1/1000、arbitrary（from 1/10）
Cut-off wavelength (λs)：0.08、0.25、0.8、2.5、8、25、80µm（7 levels）、arbitrary（from 0.05）
Can be selected from depth specimen (JIS standard), magnification calibration unit, and reference specimen.
Stylus calibration
Maximum 20 units of stylus calibration information can be registered (dead line for the calibration time can be specified)
Number of data points Maximum 300,000 points
Magnification display: Lengthwise Arbitrary value (unit:0.01), automatic and 50 - 10,000k times
Magnification display: Sidewise Arbitrary value (unit:0.01), automatic and 1 - 1,000k times

6
 Measurment and analysis software for contour measurment machine

Contour
Establish new All meaurement
measurment style and analysis can
be done on the ● ACCTee contour profile measurement analysis system
by new concept
document ACCTee has changed the contour
profile measurement style with its new
concept - the measurement can be
executed on a document basis, providing
preeminent workability and comfortable
Self diagnostic susyem work environment. As the setting of each
function from measurement to analysis
In preparation for emergency, the self-diagnosis function is always can be proceeded with the operability easy
working. As the support function for handling errors, the message for operators, anyone can perform the
indicating the troubled locations such as failures and errors of the measurement tasks easily and efficiently.
measurement machine is displayed, so that the operator smoothly can
take appropriate actions in order to settle down the problem as soon as
possible.
● Batch stylus calibration wizard
The calibration for the R tip
correction (acquiring radius
values of each 10 degrees)
and the circular arc error Profile when new
correction (misalignment of
X value) can be executed
automatically at a time by the
masterball measurement and
the step height measurement
of the masterball calibration
Profile after wear
Error message display unit. The procedure of the
calibration is proceeded
under the guidance of the
wizard. *Patent Tip R correction
Calibration wizard
The troubled location is indicated by a picture
● AI function (automatic element judgment) Workpiece

International Support
height

The points, straight lines,

and circles of the basic
ACCTee always can call up the elements are automatically X-direction deviation Probe arm support
Help whenever the ACCTee distinguished just by selecting Circle Correction Calculation
is on. ACCTee introduces on- the specified area of the
line manual system so that an measurement data.
appropriate help message can be
displayed by clicking the soft key
of the help. The help message ● Calculation result preview function
also can be retrieved by the index
or by keywords. (patent pending)
When the area for the calculation is entered, the
Help display preview of the calculation result and the dimension
lines are displayed immediately which can be used
for the confirmation before finalizing the result. Calculation result preview state

Specification ACCTee contour profile measurement machine and analysis program

Automatic distinction of elements including points, straight lines,
AI function and circles Automatically distinguish the combination executable of calculation between two elements
(point - point, point - straight line, point - circle, point - oval, straight line - straight line, circle - straight line, circle - circle, straight line - oval, circle - oval, oval - oval)
Point (cross point, mid-point, contact point, peak, valley), Line (perpendicular, median, contact line, parallel line, bisector, virtual line),
Circle (partial circle, oval, contact circle, virtual circle), Pitch (pitch between line cross, pitch between circle centers),
Distance, Curve length, Angle, Inter angle(cmplm. angle, suppl. angle), Coord. Diff (X coord. difference, Z coord. difference, dliff. angle, radius difference), Polar coord difference,
Step difference (average step, max. step, min. step),
Arithmetic processing
Area calculation (addition, subtraction, multiplication, division, power operation, surplus, absolute value, square root), Statistics (average, max., min., std. dev., total sum),
Over-pin calculation, Dimension line display function, Calculation result design value collation, mirror inverse, smoothing, form combining (whole composition, partial composition),
Calculation point repeat function, Work trace function, Peak/valley function, CNC function,
Nominal collation, Best fit (parallel move, rotary move), Nominal value preparation function
Data file I/O Input of point sequence, text, CSV, IGES, DXF data and ASCII data of Calypso Curve
Coordinate control Origin, setting each axis, parallel move, and rotary move
Calculation support function Infinite cursor, cursor form vertical/horizontal switch, one point micro motion, setting or error band
Batch automatic calibration and manual calibration by the masterball calibration unit
Stylus calibration
Maximum 20 units of stylus calibration information can be registered (the deadline of the calibration time can be specified)
Measure pitch 0.01~1000 µm
Number of data points Maximum 300,000 points
Magnification display: Lengthwise Arbitrary value (unit:0.01), automatic and 0.01 - 10,000,000 times
Magnification display: Sidewise Arbitrary value (unit:0.01), automatic and 0.01 - 10,000,000 times

7
 TiMS Integrated Measuring System Softwere

TiMS Evolution
Continually improving analysis versatility and expanding analysis scope

Surface roughness measurement and analysis program

■ AI functions allow measuring even by

novices (patented)
A preliminary measuring mode selects measuring
conditions automatically and a lesson mode provides the
operator with guidance on operating procedures, making
it easy for just about anyone to perform operations.
A customize function can be used to configure the
screen with only the icons that are needed, greatly
enhancing its ease of use.
■ Functions that meet the needs of the user
Standard functions included with the system include step
and surface measuring that facilitates evaluation of
printed circuit board film thickness, an overlap function
Measuring Screen Analysis Screen
that makes it possible to compare wear evaluation, and
more.

■ Versatile measured data analysis (patented)

Once data is captured, the measuring reference (line,
front half, latter half, round surface, both end, spline) can
be changed for reanalysis. The standard also can be
changed for reanalysis as many times as desired.
■ Fully automated measuring maximizes Superimposition

efficiency
Teaching functions include column down, drive unit, and
a tilt device operation Intergrated Measuring Sy
which fully automates everything from measuring to
inspection report generation.
Lesson Mode

■ 16% Rule Automatic Pass/Fail Judgment (Complies with JIS2001)

The 16% rule and max rule are standards for the
permissible error of roughness evaluation parameters.
These rules can be configured on the roughness
analysis window. According to the 16% rule,16% or
less of measured values for multiple reference lengths
are allowed to be greater than the tolerance value. ● Easy to operate
According to the max rule, the measured value shall An AI function, customize function, auto
not be greater than the specified tolerance value. measuring range expansion function,
and much more serve to realize the
ACCRETECH concept of building
■ Roughness Peak & Valley Function (Option) measuring systems that can be used by
As the probe traces the surface of the workpiece, the computer detects the highest point and anyone. (Patented)
lowest point, and informs the operator of their positions. Y-direction detection is supported
through the use of a CNC table.
TiMS：TiMS is short for “TOKYO
SEIMITSU Integrated Measuring
Measuring System.” It is an advanced system
Range
that provides unrestricted access
t o d a t a p r o d u c e d b y To k y o
Seimitsu measuring machines.
TiMS is currently being used by a
Maximum point of the Column moves from maximum large number of satisfied
specified sampling range point to measuring range maximum
customers over the world.
Setup Screen is detected and moved value and the distance is measured

Model TiMS Roughness Analysis Software

Standards Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO
Ra, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, RΔa, RΔq, Rλa, Rλq, TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk
Parameters
Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rбc, AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR
Section profile curve, roughness curve, filtered waviness curve, filtered center line waviness curve, rolling circle waviness
Evaluation curves curve, rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve,
envelope waviness curve
Surface Characteristics graphs Bearing area curve, power graph, amplitude distribution (ADF) curve
Tilt correction Linear correction, round surface correction, first half linear correction, latter half linear correction, both end linear
Filtering Gaussian phase compensation filter, Standard 2RC filter, phase compensation 2RC filter
Cut-off values 0.008, 0.025, 0.08, 0.25, 0.8, 2.5, 8, 25, 50mm(9 steps), Arbitrary(0.001�50mm range)
Number of data points Max. 32,000 points(without λs filter), max. 300,000 points(with λs filter)
Vertical 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K, 500K, 1000K, 2000K times
Display
Horizontal 0.1, 1, 2.5, 10, 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K times
8
 Contour profile measurement and analysis program

The screen layout can be customized to make the simplest

configuration possible to create an environment that balances
function and ease of operation for a variety of different
workpiece conditions and operator skills.
The screen has been laid out for the wider screens that will
be used in the future. For contour measuring in particular,
functions that support measuring itself are laid out for easy
operation of the software.

Measuring Screen Analysis Screen

■ Workpiece Trace
A pre-measuring coordinate trace can be performed to check the measuring surface in cases
when there is a partition between the start point and end point, when ascertaining the measuring
limit points while measuring right up to a valley, etc., or when visual inspection is difficult (as with
the inside of a hole). The start point and end point and be specified on the screen to define the
measuring range, which eliminates measuring error.

■ Dimension Line Automatic

ystem TiMS Software Output Function Pre-selecting the dimension
lines of the required elements will display the
dimension lines along with the calculation.
After calculation, dimension lines can be added,
moved or deleted as required.

■ Cursor Profile Discrimination

(Patent pending)
The operator can superimpose a freely created
cursor range on contour data for calculation. This
means that a calculation which used to require
● High efficiency measuring
two clicks now can be performed with a single
A collection of powerful tools support
drag operation.
high efficiency measuring, including
teaching / playback for full automatic
■ Calculation Result Preview (Patent Pending)
measuring, multitasking for parallel
When auto calculation is turned off, calculation results and dimension lines
processing and high-speed alignment,
appear in the preview screen as soon as the cursor is superimposed, so that
and much more.
calculation results can be previewed before they are finalized.
When calculation range expansion is enabled, preview can be used to check
the condition of the calculation range expansion, which helps to prevent
● Each program can be easily calculation and operation errors before the face.
linked to an icon.
Appropriate windows are provided for ■ Allowable Element Calculation Icon Guidance
each piece of hardware, and hardware This function provides a visual display of elements that can
can be selected simply by clicking the be calculated when performing a new calculation from any
applicable icon. multiple elements whose calculations are already complete.
The system is designed and Even when selecting calculation between complex
engineered to maximize performance elements, this function enables intuitive selection in
and efficiency. accordance with the objective of the calculation.

Model TiMS Contour Measurement Software

Standards Complies with JIS2001, JIS1994, JIS1982, ISO1997, ISO1984, DIN1990, ASME1995, CNOMO
Point, line, circle, partial circle, ellipse, max. point/min. point, distance, coordinate difference, polar coordinate difference,
orthogonal/polar coordinate difference display, intersecting elements (point-line, line-line, circle-line, circle-circle, line-ellipse), symmetric
elements (point-point, point-circle, point-ellipse, line-line, circle-circle, circle-ellipse, ellipseellipse), surface calculation, over-pin calculation,
Caculations
dimension line display function, calculation result/nominal value collation, mirror reversal, profile synthesis function, macro function,
automatic element discrimination, calculation point repeat function, workpiece trace function, peak and valley function, auto operation log/
playback function [profile nominal value collation, best fit, design value generation, IGES/DXF conversion]
Coordinate control Zero point setting, X-axis setting, parallel movement, rotary movement
Measure pitch 0.0001 1mm
Number of data points Max. 100,000 points
Display Magnification 0.01 10,000,000 times (arbitrary and automatic)(lengthwise and sidewise)

9
 Option

■ Replaceable Styluses for S5000DX/SD

Applicable Models ■S5000DX/SD

Measuring Application Model Outer Appearance Specifications Remarks

（3）
･ Standard length
2μmR, 60˚conical diamond,
･ For roughness and
General purpose DM48505 13 10 ø1.2 ø2.7 0.75mN
contour measurement
46
57.6
LH＝50 LV＝－14.35
1.1

ø5 ･ Standard length
General purpose 2μmR, 60˚conical diamond,
･ Standard accessory
DM48507 15 ø1.2
0.75mN
highly rigid stylus 10
･ For roughness and
46 LH＝50 LV＝－15.5
2 58.5 contour measurement
ø5

500μmR, ruby ball, ･ 2x length

Highly rigid stylus 21
ø2

DM48508 16 0.75mN ･ Standard accessory

for contours
2 96 LH＝100 LV＝－21.5 ･ For contour measurement only
108.5

ø5

ø2 500μmR, ruby ball,

Highly rigid stylus ･ 2.5x length
DM48509 20 3.2mN
for contours ･ For contour measurement only
121
LH＝125 LV＝－25.5
2
133.5

ø10
8 ø5
2μmR, 60˚conical diamond. ･ Standard length
Up/down DM48510 0.75mN ･ For roughness and
measuring stylus 8
ø1.2
LH＝50 LV＝－13.5 contour measurement
46
2 58.5

ø5 ･ Standard length
2μmR, 60˚conical diamond,
Right angle stylus ･ Offset: 13.5mm
DM48511 13.5 14 ø1.2 0.75mN
9 ･ For roughness and
46 LH＝50 LV＝－14.5
2 58.5
contour measurement
･ Standard length
ø2.7 2μmR, 60˚conical diamond,
Small hole stylus
ø1.2
･ Probe height: 2mm
DM48513 2 0.75mN
1 15
46 ･ For roughness and
57.6 LH＝50 LV＝－5.025
fine contour measurement
･ Standard length
ø0.6
ø2.7 2μmR, 60˚conical diamond,
･ Probe height: 1mm
Extra small hole stylus DM48514 1 0.75mN
0.5 7 46 ･ For roughness and
57.6 LH＝50 LV＝－4.625
fine contour measurement
ø5 ･ Standard length
2μmR, 60˚conical diamond,
･ Probe height: 25mm
Deep hole stylus DM48515 ø1.4 0.75mN
25 ･ For roughness and
46 LH＝50 LV＝－30.5
2 58.5 fine contour measurement

（3）
5μmR, 30˚conical diamond, ･ Standard length
Stylus for DM48588 13 10 ø1.2 ø2.7 0.75mN ･ For roughness and
fine contours
46
57.6 LH＝50 LV＝－14.35 fine contour measurement
1.1

Standard Inventory Parts

10 285
■ Adjustment Devices
Applicable Models ■S5000DX/SD

Orthogonal Axis Adjustment (mm) Swivel Adjustment Tilt Adjustment Table Size Allowable Load
Name Model Outer Appearance Remarks
X Y Z Fine Coarse Fine Coarse (mm) (kg) (net wt.)

50 50 8° 360° φ150 15 Min. reading increment: 10μm

Adjustment stand E-AT-S01D
（6）

Leveling ±1.5° 80×110 15

E-AT-S02A
adjustment stand （3）

2 ±2.5 ±2° 80×58 3 For E-RM-S75A

Adjustment stand E-AT-S03A*
（0.9）

Adjustment stand E-AT-S04A ±8 ±3° 80×125 15

（8）

Adjustment stand E-AT-S05A*2 ±3 ±1° 120×58 3 For E-RM-S76A

（1.4）

Adjustment stand E-AT-S36A*2 ±3 ±1° 200×120 5 For E-RM-S77A

（4.5）

X-direction
400 150×150 20
movement E-AT-S08A
adjustment stand （25）

3D fine 55 55 28 75×40 1 Straightness; 0.03mm

E-AT-S10A
adjustment stand （3.4）

1-axis precision 50 125×150 20 Straightness: 3μm

E-AT-S11B
fine adjustment stand （4.9） Min. reading value: 10μm

Swivel fine ±5° 360° φ90 3 Min. reading value: 5’

E-AT-S12A
rotation stand （0.58）

10
Coarse
1-axis ultra precision 60×60 10 Straightness: 3μm

（ ）
movement:
E-AT-S13B 10μm
fine adjustment stand Fine （0.7） Min. reading value: 0.5μm
movement:
0.5μm

E-AT-S64B ±20° 60×120 10 Min. reading value: 5’

Tilting stand
（1）

360° ±90° φ110 3 X/Y-direction adjustment

Universal stand E-WJ-S03A
（2.5）

11
 Option

■ Holders

V Holder Chucking Vice Clamp Flat Surface Allowable Load

Name Model Outer Appearance Remarks
(mm) (mm) (mm) (mm) (mm) (kg) (net wt.)

ID: 59 5
Consult us when
Double-side open vice E-WJ-S01B OD: 38 to （0.8）
combining with the tilt stand.
105

φ1～150 Provided with

V-stand set E-WJ-S02A
（1.5） workpiece clamper

φ12～150 Two pieces used just for

V-stand holder set E-WJ-S04A
（3） T-groove clamp.

φ4～10
Compact stand E-WJ-S05A
（0.4）

E-WJ-S06A 150×150
Load plate
angle plate （1）

Static electricity 80×130 Holding strength: 0.2kg

E-WJ-S11A
holding plate angle plate （1.3） Ideal for paper, aluminum, and film

OD: φ2～75
Scroll chuck E-WJ-R01C
ID: φ56～91 （1）

E-WJ-R10A OD: φ5～110 （3）

Manufactured after
Iris chuck E-WJ-R378A OD: φ5～150 （5）
receipt of order
ø5

E-WJ-R393A OD: φ5～250 （10）

Height:
Clamp set JC-3
40～60 ---

300×300 Manufactured after

Ceramic load plate E-WJ-S252A
angle plate （5.3） receipt of order

500×500 Manufactured after

Ceramic load plate E-WJ-S234A
angle plate （15） receipt of order

Sample Adjustment Stand/Holder Configurations

Scroll chuck
V-stand set E-WJ-R01C
E-WJ-S02A
V-stand set
Universal stand
E-WJ-S02A
E-WJ-S03A

Leveling
adjustment stand
Adjustment stand E-AT-S02A
E-AT-S04A Adjustment Adjustment stand
stand E-AT-S04A
E-AT-S05A
V-stand set
E-WJ-S02A

V-holder set
Adjustment Double-side open vice E-WJ-S04A
stand E-WJ-S01B
E-AT-S01D

Universal stand
E-WJ-S03A

X-direction movement Adjustment stand X-direction movement

adjustment stand E-AT-S01D adjustment stand
E-AT-S08A E-AT-S08A

12
 ■ Peripherals

Name Model Outer Appearance Specifications Rearks

1074 824

Anti-vibration: ･ Dimensions :
Anti-vibration
table E-VS-S21A 700 Pneumatic diaphragm spring 1100W×850D×700Hmm
Natural frequency: V:1.6Hz; H: 2Hz ･ Air source : 350∼700kPa
850 600 Load weight: 550kg ･ Weight : 340kg

･ Dimensions :
E-DK-S24A W 420
800W×800D×1070∼1370Hmm
･ Weight : 44.5kg

System rack H
670

･ Dimensions :
E-DK-S25A D
1200W×800D×1070∼1370Hmm

129 35
10
･ For measurements with stylus
pointing downwards
E-MC-S48A 79 89
･ For S5000DX/SD
standard accessory
129 125.5

72 52
16
10 ･ For measurements with stylus
Master ball pointing upwards
calibration unit E-MC-S51A 149
･ For S5000DX/SD

120 130

Calibration ･ For measurements with probe

ball
Block gage pointing downwards,
ø1.5
1.5mm 0.75 Block gage：1.5mm for small hole stylus
E-MC-S59A
30

11 Calibration ball：φ1.5mm ･ For S5000DX/SD

6 Reference plate
63

･ Pin diameter: 7.9mm

Pitch gage E-MG-S02A ･ Dimensions : 144 ×38 ×49 mm
W D H
38
･ Pitch: 15mm

90° 1(Edge line length)

Stylus check Tip radius: 0.1μm or less.

28.2

master E-MG-S24A Material: Knife edge diamond

ø64

Compact Input: 100V ･ Dimensions :

Output: 100V ±2% 150 W×415D×250Hmm
250

uninterrupted E-TF-S14A
power supply Capacity: 1KVA ･ Weight : 22kg
150

13
 Description of data analysis/parameter standard
Definition of Surface texture and Stylus instrument

Profile by Stylus and phase correct filter

ISO4287: ’97 and ISO3274: ’96
Total profile Primary profile P
Measure perpendicular to lay

X axis Z
axis Stylus method Form deviation profile
probe P-parameter =Mean line for roughness profile
=Waviness profile on old DIN & JIS
λs profile filter

Real surface λc profile filter

λf profile filter
Traced profile • Stylus deformation Phase correct filter 50%
perpendicular • Noise transmission at cutoff
θ to real surface No phase shift / low
distortion

rtip
Waviness profile W
Roughness profile R (Filtered center line waviness profile)

R-parameter W-parameter

Stylus tip geometry 100%

Transmission

θ = 60° (or 90°) cone

rtip = 2μm (or 5, 10μm)
Roughness profile Waviness profile

50%

0
λs λc Wavelength λ λf
Cutoff (Wavelength) λc

Acceptance decision rule Sampling length setting procedure

ISO4288 : ’96 JIS B0633 : ’01 JIS B0633 : ’01/ ISO 4288 : ’96
Upper limit - the 16% rule (shown with U, Upper limit - the 16% rule (shown with U,
Default) in EU Default) in JISB0633 1 . View the surface and decide whether
Measure the most critical surface. Measure the most critical surface. If not more than profile is periodic or non-periodic.
The surface is acceptable if not more than 16% of 16% of all values based on sampling length are 2 . Estimate roughness and measure it in
all values averaged through evaluation length are exceed the limit, surface is acceptable corresponding condition in the table.
exceed the limit
3 . Change condition according with above
Lower limit - the 16% rule (shown with L) in EU Lower limit - the 16% rule (shown with L) in result and measure it again.
Measure the surface that can be expected the JISB0633 4 . Repeat “3.” if the result does not reached
lowest roughness. Measure the surface that can be expected the the condition.
The surface is acceptable if not more than 16% of lowest roughness.
all values averaged through evaluation length are The surface is acceptable if not more than 16% of 5 . When the result reaches the condition,
less than the limit. all sampling lengths are less than the limit it will be the final value.
Check it in shorter sampling length at
non periodic and change it if it meets.
Max value - the max rule (shown with “max” Max value - the max rule (shown with “max”
suffix) in EU suffix) in JISB0633 6 . Judge if the value clear the tolerance
The surface is acceptable when none of values The surface is acceptable when none of values by the rule shown at the left column.
averaged through evaluation length in entire based on each sampling length in entire surface
surface are over the limit. are over the limit.

14
Sampling length and Evaluation length Mean line
ISO4287: ’97
Primary profile P

Top of profile
peak Roughness
profile R
Profile Mean line
peak

Profile valley
Sampling length r Bottom of Profile element width Xs
= Cutoff λc profile valley
r r r r

Evaluation length n＝n× r (n: Default 5)

Pre travel Tracing length Lt＝Lp ＋Ln ＋Lp Post travel

p (λc/2) p (λc/2)

Indication of surface texture Note.:

Default item (red) is not indicated.
ISO 1302: ’02 Additional item (blue) is indicated if necessary.

not allowed Required Manufacturing method Surface parameter and condition

c ground
Material removal
Example
a U 0.008 − 2.5/Rz 3max 12.3
e d b 3 ＝ L“ 2RC ”0.008 − 0.8/Ra75 0.2

Machining The second surface parameter

allowance (mm) Surface lay and orientation and condition
＝,⊥, X, M, C, R, P

Upper U Filter Phase correct Transmission band No. of S. length Comparison

Parameter Value limit
or or λs − λc (mm) n rule
(μm)
Lower L 2RC Default is table below Profile Type (Default 5) 16% or max

U “2RC” 0.008–2.5/Rz 3 max 12.3

Measuring condition: R -parameter Measuring condition : P -parameter

JIS B0633 : ’01/ ISO4288 : ’96 JIS B0633 : ’01/ ISO4288 : ’96
Non-periodic profile Measuring Condition Stylus No. of S. length E. length
Periodic profile λs λc p =n p n
radius
Ra,Rq,Rsk,Rku Rz,Rv,Rp,Rc, or RSm
or R∆q or Rt Sampling Evaluation 2μm 2.5μm
length: length Length of Length of
r= n (mm) = 5μm 8μm – 1 feature feature
Ra (μm) Rz (μm) RSm (mm) (Plane, Line)
CutOff 5× r 10μm 25μm
Over> Less≤ Over> Less≤ Over> Less≤ λc (mm)

0.006 0.02 0.025 0.1 0.013 0.04 0.08 0.4

Measuring condition: W -parameter
,
ISO1302: 02
0.02 0.1 0.1 0.5 0.04 0.13 0.25 1.25
No. of
0.1 2 0.5 10 0.13 0.4 0.8 4 λc λf w=m S. length w E. length n
2 10 10 50 0.4 1.3 2.5 12.5
λc nλc
(for roughness) (n: specified)
m: specified λf mλf
10 80 50 200 1.3 4 8 40

15
 Description of data analysis/parameter standard
Basic surface texture parameters and curves
Amplitude parameters (peak and valley) Amplitude average parameters

Rp Rt Ra
Pp Maximum profile peak height Pt Total height of profile Pa Arithmetical mean deviation
Wp Wt (Pt = Rmax at JIS’82) Wa
The largest profile peak height Zp within a Sum of height of the largest profile peak height Arithmetic mean of the absolute ordinate
sampling length. Rp and the largest profile valley Rv within an values Z(x) within a sampling length.
evaluation length.
1 L
Rp, Pp, Wp = max (Z(x)) Rt, Pt, Wt = max (Rpi) + max (Rvi) Ra, Pa, Wa = Z (x) dx
L 0

Rp Rp5
Rp2
Zp1 Zp2 Zpi Ra
Rt

r Rv2 Rv4
Sampling length L Sampling length L
Evaluation length n

Rv Rc Rq
Pv Maximum profile valley depth Pc Mean height of profile elements Pq Root mean square deviation
Wv Wc Wq
The largest profile valley depth Zp within a Mean value of the profile element heights Zt Root mean square value of the ordinate values
sampling length. within a sampling length. Z(x) within a sampling length.
1 m 1
Rc, Pc, Wc = Σ Zti Rq, Pq, Wq =
L
Z 2 (x) dx
Rv, Pv, Wv = min (Z(x)) m l=1
L 0
Z ti
Zt1 Z t2 Z tm
Z t3

2
Rq
Rv

Zv1 Zv2 Zvi

Sampling length L
Sampling length L

Profile element:
Profile peak & the adjacent valley Sampling length L

Rz Rzjis Ten point height of roughness profile Ra75 Center line average
Pz Maximum height of profile (Rz at JIS’94) (Old Ra, AA, CLA )
Wz (Rz = Ry at ISO4287 ’84) Sum of mean value of largest peak to the fifth Arithmetic mean of the absolute ordinate value
largest peak and mean value of largest valley to Z(x) in a sampling length of roughness profile
Sum of height of the largest profile peak height
the fifth largest valley within a sampling length. with 2RC filter of 75% transmission.
Rp and the largest profile valley Rv within a
sampling length.
Rzjis= 1 Σ (Zpj + Zvj)
5
1 n

Rz = Rp + Rv 5 j=1 Ra75= Z (x) dx

L 0

Zp1st
Zp2nd Zp3rd Zp4th
Rp Zp5th Ra75

Rz Rzjis

Rv
Zv5th
Zv3rd Zv4th Zv2nd Zv1st
Sampling length L Sampling length L
Sampling length L

Different from Rz at old ISO, ANSI & JIS Annex of JIS only and confirm to JIS’94 Annex of JIS only
Different from Rz at JIS’82 Same as Ra at old ISO, ANSI & DIN

16
 Spacing parameters Hybrid parameters Height characteristic average parameters

RSm RΔq Rsk

PSm Mean width of the profile elements PΔ q Root mean square slope Psk Skewness
WSm (RSm = Sm at ISO4287 ’84) WΔ q Wsk
Mean value of the profile element width Xs Root mean square value of the ordinate slopes Quotient of mean cube value of the ordinate
within a sampling length. dZ/dX within a sampling length. values Z (x) and cube Pq, Rq, Wq respectively,
within a sampling length.

1 m R∆q 1 1 r 3
RSm, PSm, WSm = Σ Xsi 1 L d 2 Rsk = Z (x) dx
m i=1 P∆q = Z (x) dx Rq 3 r 0

W∆q L 0 dx
Xs1 Xs2 Xs3 Xsi Xsm
dZ (x) / dx Rsk > 0

Rsk < 0
Sampling length L
Sampling length L
Probability density

Parameter from bearing ratio curve and profile height amplitude curve Rku
Pku Kurtosis of profile
Material ratio curve of the profile Profile height amplitude curve Wku
(Abbott Firestone curve)
Quotient of mean quartic of the ordinate values
Curve representing the material ratio of the Sample probability density function of ordinate Z (x) and 4th power of Pq, Rq, Wq respectively,
profile as a functional of level c. Z (x) within an evaluation length. within a sampling length.

1 1 r 4
Rku = Z (x) dx
Rq 4 r 0
M (c) 1 M (c) i 0%
c

Rt Rku > 3

100%
0% 100% 0 Probability
Evaluation length n density Rku < 3
Rmr (c)
Profile
Bearing ratio curve Profile height
amplitude curve Probability density

Rmr(c) Rδc Rmr

Pmr(c) Material ratio of profile Pδc Profile section height difference Pmr Relative material ratio
Wmr(c) (Rmr (c) = ex- tp) Wδc Wmr
Ratio of the material length of the profile Vertical distance between two section levels of Material ratio determined at a profile section
elements Ml (c) at a given level c to the given material ratio. level Rδc, related to a reference c0.
evaluation length.
Rmr = Rmr (c 1)
100 m Rδc =c(Rmr1) --c(Rmr2) : Rmr1<Rmr2
Rmr (c) = Σ M (c)i (%) C1 = C0 -- Rδc, C0 = C (Rmr 0)
n i=1 0 0

M (c) M (c)
c c (Rmr 1) C0
Rδc Rδc
Rt
c (Rmr 2) C1

100% or 100% or
Evaluation length n Rt (μm) Rt (μm)
0% Rmr 1 Rmr 2 100% 0% Rmr 0 Rmr 100%

17
 Description of data analysis/parameter standard
Expanded surface texture parameters and curves
Traditional local parameters

RmaxDIN Maximum peak to valley height R3z Base roughness depth Pc Peak density /cm: ASME B46.1: ’95
Rz DIN Average peak to valley height PPI Peaks per inch: SAEJ911
3Zi is the height of the 3rd height peak from
Zi is the maximum Peak to valley height of a the 3rd depth valley in a sampling length r. HSC High spot count
sampling length r.
RmaxDIN is the maximum Zi of 5 adjoining R3z is arithmetic mean of 3Zi’s of 5 sampling Pc is the number of peaks counted when a
sampling length r in an evaluation length n. lengths in an evaluation length n. profile intersects a lower boundary line –H and
RzDIN is arithmetic mean of 5 Zi. n an upper line +H per unit length 1 cm.
1 n R3z = 1 Σ 3zi PPI shows Pc in 1 inch (25.4mm) unit length.
RzDIN = Σ Zi n i=1 HSC shows the number of peaks when the
n i=1 lower boundary level is equal to zero.

Z 5 = RmaxDIN
Z2 Z3 3z3 3z4
Z1 Z4 3z1 3z2 3z5 count 1st count m
count 2nd
H

r r
n=5× r n=5× r -H
Reset Mean line
Reset or
Reset
German old standard DIN4768/1: ’90
unit length (1cm or 1 inch) zero

Confirm to ISO4287: ’96, ISO12085: ’96

& ISO13565-1: ’96 / -2: ’96 / -3: ’98

Parameters of surfaces having stratified functional properties ISO13565's Rolling circle waviness parameter JIS B0610：’01
Measuring condition
Filtering process of ISO13565-1:’96 Measuring conditions of ISO13565-1 Radius of rolling circle rti p：0.08, 0.25, 0.8, 2.5, 8, 25mm
Calculate mean line 1 from a primary profile Cutoff value λc Evaluation length n w Sampling length：0.25, 0.8, 2.5, 8, 25, 80mm
with phase correct filter. 0.8 mm 4 mm
Rolling circle traced profile r tip
Mean line 1 2.5 mm 12.5 mm
40% length secant of smallest gradient separate
the material ratio curve into core area & projected
Primary profile X areas.
Calculate Rpk & Rvk with equivalent triangles of
Calculate profile 2 with cutting valley lower projected areas. w
than mean line 1.
Profile 2 Peak area A1 Tilt correction
0 Rolling circle waviness total profile
Mean line 1 Equivalent triangle area A1
Rpk Equivalent straight line
Calculate mean line 3 from profile 2 with Delete longer component than waviness by λf filter
phase correct filter. Valley area A2
Profile 2
λf cutoff value：0.8, 2.5, 8, 25mm
Rk Equivalent triangle Default value：8 mm
area A2
Mean line 3
Rvk Z（x）Filtered rolling circle waviness profile
Calculate roughness profile 4 by taking
mean line 3 off from a primary profile. Rt (μm)
0% Mr 1 Mr 2 100% WEM WEM Maximum height of rolling
40% circle waviness profile
Secant with Defined only JIS standard
smallest gradient
Roughness profile 4 Vertical spacing between 2 line parallel to mean
line within sampling length w of Filtered rolling
circle waviness profile.
Rolling circle waviness total profile Z (x)

Height characterization using the linear material ratio curve ISO13565-2:’96

WEM
Rk core roughness depth : Depth of the roughness core profile
Rpk reduced peak height : Average height of protruding peaks above roughness core profile.
Rvk reduced valley depths : Average depth of valleys projecting through roughness core profile. sampling length w
Mr1 material portion 1 : Level in %, determined for the intersection line which separates
the protruding peaks from the roughness core profile.
Mr2 material portion 2 : Level in %, determined for the intersection line which separates WEA Arithmetical mean deviation of filtered
the deep valleys from the roughness core profile. rolling circle waviness profile.
Defined only JIS standard
Roughness Roughness core area
Peak area 0 Arithmetical mean of absolute ordinate value Z(X)
profile 4
within evaluation length of Filtered rolling circle
waviness profile.
Rpk
1 n
Equivalent WE A = Z (x) dx
straight line n 0
Rk Rolling circle waviness total profile Z (x)

WEA
Rvk
Valley area
Evaluation length n Rt (µm) 0% Mr1 Mr 2 100%
evaluation length n

18
Comparison of national standards of surface texture measurement
ID. of national JIS B0601-’82 ANSI B46.1-’85 NF E05-015(’84) ISO468-'82
standard JIS B0031-’82 NF E05-016(’78) ISO4287/1-’84
NF E05-017(’72) ISO4288-’85
country ISO1302-'78
Specification former Japan former U.S.A. former France former ISO
Profile format Analog signal Analog signal with Analog signal Analog signal
Primary without filtering low pass filtering without filtering without filtering
profile P 1 sampling length
Evaluation length ——— not defined ———
0.25, 0.8, 2.5, 8, & 25
Maximum height Rmax (S indication) ——— Pt ———

P profile Ten point height Rz (Z indication) ——— ——— ———

parameter
Other P parameters ——— ——— Pp, Pa, (Tp)c, ———

Motif parameters ——— R, AR, Kr, W, ———

——— W’max, W’t, AW, Kw
Indication of Rmax=1.6 Pt 0.8 - 0.6
maximum height Rmax=0.8 ——— ———
< 1.5μm

Unit of height μm μm or μin. μm μm

Unit of length mm mm or in. mm mm

Filter 2RC 2RC 2RC 2RC

Roughness
Long cutoff λc λB λc λc
profile R
Short cutoff ——— cutoff value 2.5μm ——— ———

Sampling length L=3 × λc or over L:1.3-5mm@λB 0.25

L:2.4-8mm@λB 0.8
Evaluation length TL=L=3 × λc or over L:5-15mm @λB 2.5 L=n× n=n×

——— Peak-to-Valley Ry Ry
Maximum height Height (Rmax, Ry )
Maximum peak to ———
valley height ——— Rmax Ry max
R profile
Height Ten point height ——— (Rz ) Rz Rz
parameter
Average peak to ———
valley height ——— ——— Ry 5
Other peak height (Rp ) Rp, Rp max, Rp 5,
parameters ——— Rp
Rm, Rc
0.25mm Rmax, Rz ≤ 0.8μm ——— not defined 0,1 < Rz, Ry ≤ 0,5μm
r & λc for ———
0.8mm 0.8 < Rmax, Rz ≤ 6.3μm not defined 0,5 < Rz, Ry ≤ 10μm
peak height parameter
2.5mm 6.3 < Rmax, Rz ≤ 25μm ——— not defined 10 < Rz, Ry ≤ 50μm

Indication of Maximum height Rmac 1.6 Ry = 1.6

——— ———
in case of Rz < 1.5μm

Arithmetic average Ra (a indication) Ra Ra Ra

R profile
averaging root mean square ——— (Rq ) Rq Rq
parameter
Skewness, kurtosis ——— (Skewness, Kurtosis) Sk, Ek Sk

0.25mm optional 0.0063 < Sm ≤ 0.05μm not defined 0,02 < Ra ≤ 0,1μm
r & λc for Ra on Ra ≤ 12.5μm 0.02 < Sm ≤ 0.16μm not defined 0,1 < Ra ≤ 2μm
0.8mm
non-periodic profile
2.5mm 12.5 < Ra ≤ 100μm 0.063 < Sm ≤ 0.5μm not defined 2 < Ra ≤ 10μm
3.2 125 3.2 N8
Indication of Ra 1.6 63 Ra 1.6 - 3.2 1.6 N7
in case of 1.5 < Ra < 3.1μm

Mean spacing ——— Roughness spacing Sm Sm

RMS slope ——— ——— Δq Δq

R profile other
parameter
material ratio ——— (tp) ——— tp

Other parameters ——— (Peak count Pc ) S, Δa, λa, λq S, Δa, λa, λq,
Lo, D
average value of all average value of all ———
Average sampling lengths sampling lengths not defined
Comparison rule of
measured value with 16% rule ——— ——— not defined 16% rule default
tolerance limits
Maximum rule ——— ——— not defined Max rule for parameter
with suffix "max"

19
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