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Descriptions

1. The document provides safety precautions for using FANUC linear motors. It defines warnings, cautions, and notes to classify precautions by level of safety risk. 2. Warnings indicate situations that could result in user injury or equipment damage if not followed. Warnings include wearing protective gear when handling motors, keeping a safe distance if having a medical device, and using proper lifting equipment rather than tapped holes when moving motors. 3. Additional warnings cover risks of magnetic attraction, electric shock from exposed or energized parts, fire from flammables near hot motors, and entanglement or collision during motor operation. Grounding, secure wiring, and shutting off power before touching motors are also warned.

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0% found this document useful (0 votes)

258 views228 pages

Descriptions

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Cnc Tien

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DESCRIPTIONS

B-65222EN/03
FOR USER
Before getting started
• Read this manual thoroughly before using FANUC LINEAR MOTOR. It contains many
important items.
• Do not try operation not described in this manual without permission. Otherwise, your
motor may get into trouble. If it is unavoidable to operate your motor in a way not
described in this manual, get FANUC's permission in advance.
• For easy maintenance, consider the structure for installing the motor on the machine.
• No part of this manual may be reproduced in any form.
• All specifications and designs are subject to change without notice.
B-65222EN/03 SAFETY PRECAUTIONS

SAFETY PRECAUTIONS
This "Safety Precautions" section describes the precautions which
must be observed to ensure safety when using FANUC linear motors.
Users of any linear motor model are requested to read this manual
carefully before using the linear motor.
The users are also requested to read this manual carefully and
understand each function of the motor for correct use.
The users are basically forbidden to do any behavior or action not
mentioned in this manual. They are invited to ask FANUC previously
about what behavior or action is prohibited.

s-1
SAFETY PRECAUTIONS B-65222EN/03

1.1 DEFINITION OF WARNING, CAUTION, AND NOTE

This manual includes safety precautions for protecting the user and
preventing damage to the machine. Precautions are classified into
Warning and Caution according to their bearing on safety. Also,
supplementary information is described as a Note. Read the Warning,
Caution, and Note thoroughly before attempting to use the machine.

WARNING
Applied when there is a danger of the user being
injured or when there is a damage of both the user
being injured and the equipment being damaged if
the approved procedure is not observed.

CAUTION
Applied when there is a danger of the equipment
being damaged, if the approved procedure is not
observed.

NOTE
The Note is used to indicate supplementary
information other than Warning and Caution.

* A "motor" described in this manual means all parts of the motor:

Coil slider, magnet plate, magnetic pole sensor, position
detection circuit, and others.
- Read this manual carefully, and store it in a safe place.

s-2
B-65222EN/03 SAFETY PRECAUTIONS

1.2 WARNING

WARNING
- Be safely dressed when handling a motor.
Wear safety shoes or gloves when handling a motor as you may get
hurt on any edge or protrusion on it or electric shocks.

- Any person having a medical apparatus must keep at least 30 cm away from any
magnet plate.
A magnet plate contains very strong magnets. If a person has a
medical apparatus and does not keep a safe distance, the medical
apparatus may malfunction. Any person having a medical apparatus
such as a pacemaker or defibrillation equipment must not handle the
motor if possible to prevent any accidents.

- Do not unpack any magnet plate from the packing box until starting work.
A magnet plate contains very strong magnets. Do not unpack any
magnet plate from the packing box until starting work to prevent any
accidents.

- Do not remove the tin plates and corrugated cardboard for protection unless it is
necessary.
Corrugated cardboard and tin plates are attached to a magnet plate
(using magnetic force) to protect the magnet plate and reduce
magnetic leakage. Do not remove the tin plates and corrugated
cardboard for protection also during work unless it is necessary.

- When moving a magnet plate, place it flat with the magnet side facing up and slide
it.
When moving a magnet plate on a table after unpacking it, always
place it flat with the magnet side facing up and slide it. If the table is
made of magnetic materials, standing the magnet plate on its narrow
surface and moving it is highly dangerous. This is because if the
magnet plate falls over, your hand or body may be caught between the
magnet plate and table.

- When moving the motor, do not use any tapped hole on the motor.
The tapped holes on the motor are dedicated to installing it on a
machine. Do not use any tapped hole for other purposes such as
moving the motor. If another part is installed on the motor or the
motor is installed on a machine, in particular, never use the tapped
holes. If it is absolute necessary to use a tapped hole for lifting the
motor, lift only the motor from the side on which coating is not
applied all over the surface (iron is partially exposed). Lifting the
motor from the other side may damage the motor, resulting in a fall of
the motor.

s-3
SAFETY PRECAUTIONS B-65222EN/03

WARNING
- When moving the motor, use a crane or another equipment.
A motor is a heavy object. Use a crane or another equipment as
required (for the weight of the motor, see this manual).
When moving the motor, lift it using a fabric rope passed round the
motor in balance or a dedicated handing jig. If it is absolute necessary
to use a tapped hole for lifting the motor, lift only the motor from the
side on which coating is not applied all over the surface (iron is
partially exposed).

- Be careful of the magnetic attraction when installing the motor.

A linear motor has the magnet attraction about 2.5 to 3 times as strong
as the maximum force. Before work, consider the magnetic attraction,
prepare devices, and take safety measures to prevent accidents.

- Do not touch a motor with a wet hand.

A failure to observe this caution is vary dangerous because you may
get electric shocks.

- Before starting to connect a motor to electric wires, make sure they are isolated
from an electric power source.
A failure to observe this caution is vary dangerous because you may
get electric shocks.

- Do not bring any dangerous stuff near a motor.

Motors are connected to a power line, and may get hot. If a flammable
is placed near a motor, it may be ignited, catch fire, or explode.

- Be sure to ground a motor frame.

To avoid electric shocks, be sure to connect the grounding terminal in
the terminal box to the grounding terminal of the machine.

- Do not ground a motor power wire terminal or short-circuit it to another power

wire terminal.
A failure to observe this caution may cause electric shocks or a
burned wiring.

- Connect power wires securely so that they will not get loose.
A failure to observe this caution may cause a wire to be disconnected,
resulting in a ground fault, short circuit, or electric shock.

- Do not supply the power to the motor while any terminal is exposed.
A failure to observe this caution is very dangerous because you may
get electric shocks if your body or any conductive stuff touches an
exposed terminal.

s-4
B-65222EN/03 SAFETY PRECAUTIONS

WARNING
- While the motor is running, do not get near or touch the motor driving section.
While the motor is running, getting near or touching the motor driving
section may entangle cloths or fingers with the motor or cause a
collision with a movable part. Before running the motor, check that
no object will fly due to the running motor.

- Before touching a motor, shut off the power to it.

Even if a motor is not rotating, there may be a voltage across the
terminals of the motor.
Especially before touching a power supply connection, take sufficient
precautions.
Otherwise you may get electric shocks.

- Do not touch any terminal of a motor for a while (at least 5 minutes) after the
power to the motor is shut off.
High voltage remains across power line terminals of a motor for a
while after the power to the motor is shut off. So, do not touch any
terminal or connect it to any other equipment. Otherwise, you may get
electric shocks or the motor and/or equipment may get damaged.

- To drive a motor, use a specified amplifier and parameters.

An incorrect combination of a motor, amplifier, and parameters may
cause the motor to behave unexpectedly. This is dangerous, and the
motor may get damaged.

- While the motor is running, do not stand in the way of travel of the motor.
While the motor is running, standing in the way of travel of the motor
may cause injury in the event of an accident.

- When designing and assembling a machine tool, make it compliant with

EN60204-1.
To ensure the safety of the machine tool and satisfy European
standards, when designing and assembling a machine tool, make it
compliant with EN60204-1. For details of the standards, refer to the
standards.

- Do not touch a motor when it is running or immediately after it stops.

A motor may get hot when it is running. Do not touch the motor
before it gets cool enough. Otherwise, you may get burned.

- Ensure that motors and related components are mounted securely.

If a motor or its component slips out of place or comes off when the
motor is running, it is very dangerous.

s-5
SAFETY PRECAUTIONS B-65222EN/03

1.3 CAUTION

CAUTION
- Keep electronic devices and magnetic media away from any magnet plate.
Bring an electronic device such as a personal computer, camera, or
cellular phone or magnetic media such as a magnetic card or disk near
a magnet plate may cause a failure or damage.

- FANUC motors are designed for use with machines. Do not use them for any other
purpose.
If a FANUC motor is used for an unintended purpose, it may cause an
unexpected symptom or trouble. If you want to use a motor for an
unintended purpose, previously consult with FANUC.

- Ensure that a base or frame on which a motor is mounted is strong enough.

Motors are heavy. If a base or frame on which a motor is mounted is
not strong enough, it is impossible to achieve the required precision.

- Be sure to connect motor cables correctly.

An incorrect connection of a cable cause abnormal heat generation,
equipment malfunction, or failure. Always use a cable with an
appropriate current carrying capacity (or thickness).

- Ensure that motors are cooled if they are those that require forcible cooling.
If a motor that requires forcible cooling is not cooled normally, it may
cause a failure or trouble. For air-cooled or water-cooled, ensure that
the amount of the liquid is appropriate and that the liquid piping is not
clogged. For both types, perform regular cleaning and inspection.

s-6
B-65222EN/03 SAFETY PRECAUTIONS

1.4 NOTE

NOTE
- Do not step or sit on a motor.
If you step or sit on a motor, it may get deformed or broken. Do not
put a motor on another unless they are in packages.

- When storing a motor, put it in a dry (non-condensing) place at room temperature

(0 to 40 °C).
If a motor is stored in a humid or hot place, its components may get
damaged or deteriorated. In addition, keep a motor horizontally.

- Be careful not to lose the nameplate.

If you lose the nameplate, you may not sure of the model number of
the motor or maintenance may become difficult. Stick the nameplate
on a place where it is easy to read it for maintenance and hard to tear
it off, such as on a surface near the motor or inside the cabinet of the
machine.

- Do not apply shocks to a motor or cause scratches to it.

If a motor is subjected to shocks or is scratched, its components may
be adversely affected, resulting in normal operation being impaired.
When handling linear motors, pay particular attention. Since they are
molded of resin in whole, they cause chips and cracks easily.

- Do not conduct dielectric strength or insulation test for a detector.

Such a test can damage elements in the detector.

- When testing the winding or insulation resistance of a motor, satisfy the

conditions stipulated in EN60034.
Testing a motor under a condition severer than those specified in
EN60034 may damage the motor.

- Do not modify a motor.

Do not modify a motor unless directed by FANUC. Modifying a
motor may cause a failure or trouble in it.

- Do not disassemble the motor.

Disassembling the motor may cause a failure or malfunction. Coil
sliders and magnet plates are molded products and cannot be used
once disassembled.

s-7
SAFETY PRECAUTIONS B-65222EN/03

NOTE
- Do not apply a commercial power source voltage directly to a motor.
Applying a commercial power source voltage directly to a motor may
result in its windings being burned. Be sure to use a specified
amplifier for supplying voltage to the motor.

- Before using a motor, measure its winding and insulation resistances, and make
sure they are normal.
Especially for a motor that has been stored for a prolonged period of
time, conduct these checks. A motor may deteriorate depending on the
condition under which it is stored or the time during which it is stored.
For the winding resistances of motors, refer to their respective
specification manuals. For insulation resistances, see the following
table.

- To use a motor as long as possible, perform periodic maintenance and inspection

for it, and check its winding and insulation resistances.
Note that extremely severe inspections (such as dielectric strength
tests) of a motor may damage its windings.

- Motor insulation resistance measurement

Measure an insulation resistance between each winding and
motor frame using an insulation resistance meter (500 VDC).
Judge the measurements according to the following table.

Insulation
Judgment
resistance
100 MΩ or higher Acceptable
The winding has begun deteriorating. There is no
10 to 100 MΩ problem with the performance at present. Be sure
to perform periodic inspection.
The winding has considerably deteriorated.
1 to 10 MΩ Special care is in need. Be sure to perform
periodic inspection.
Lower than 1 MΩ Unacceptable. Replace the motor.

s-8
B-65222EN/03 PREFACE

PREFACE
This manual covers information on the following models:

FANUC LINEAR MOTOR series

Model 300D/4
Model 600D/4
Model 900D/4
Model 1500A/4
Model 3000B/2, 3000B/4
Model 6000B/2, 6000B/4
Model 9000B/2, 9000B/4
Model 15000C/2, 15000C/3

CAUTION
Handling or installing the motor incorrectly may not
only prevent normal operation but also adversely
affect the life of the motor. Before designing or
installing axes, always read Part III, "HANDLING,
DESIGN, and INSTALLATION."

NOTE
1 The third angle projection method is used for many
drawings in this manual.
2 For details of amplifiers, refer to the latest version of
"FANUC Servo Amplifier α series Descriptions" (B-
65162E) or that of "FANUC Control Motor Amplifier α
series Servo Amplifier Unit Descriptions" (B-
65192EN).

p-1
PREFACE B-65222EN/03

1.1 ORGANIZATION OF THIS MANUAL

This manual is mainly divided into the following five chapters:

I. SPECIFICATIONS
Contains information about the specifications of linear motors
such as force versus speed diagrams, external dimensions, and
cooling conditions.

II. CONFIGURATIONS AND SELECTION

Contains system configurations of linear motors and information
required for selecting a motor, and explains how to select a
motor.

III. HANDLING, DESIGN, AND INSTALLATION

Explains how to handle a linear motor, how to design a machine,
and how to install a linear motor. Always read this chapter
before designing an axis containing a linear motor or installing a
linear motor.

IV. STARTUP
Contains information about servo adjustment of a linear motor.
Always read this chapter before running a linear motor.

V. MAINTENANCE
Contains information about maintenance of a linear motor.
Periodically maintain the linear motor according to the
instructions described in this chapter.

APPENDIX
Contains additional information that is not described in other
chapters.

p-2
B-65222EN/03 PREFACE

1.2 ACCEPTANCE AND STORAGE

WARNING
Mishandling a magnet plate may be highly
dangerous, resulting in a fatal accident. Read and
thoroughly understand the cautions on the next page
and Part III, "HANDLING, DESIGN, and
INSTALLATION," before handling the magnet plate
and strictly observe the cautions when handling it.
Do not handle the magnet plate unless you have
been trained in handling linear motors.
A "motor" described in this manual means all parts of
the linear motor: Coil slider, magnet plate, magnetic
pole sensor, cooling plate, and others.

After you have received a FANUC Linear Motor, check it as follows:

• Is the linear motor exactly what you ordered? Check the motor
model, magnet plate, and detector.
• Is it free from any damage? Damage may have occurred during
shipment.
• Are all accessories supplied with the linear motor?
All models of coil sliders are supplied with a nameplate and
laminate sheet. Terminal models of coil sliders are supplied
with a crimp terminal, rubber dripproof terminal cover, and
thermostat connector. Models 3000B and higher are
supplied with an O-ring for the cooling tube.

All FANUC Linear Motors are strictly inspected and carefully packed
before shipment. They need no special incoming inspection. Just
check the specifications (for wiring, current, voltage, and other data)
of the motor as required. When measuring resistance and insulation
data, reference Part V, "MAINTENANCE." Be extremely careful in
measuring the dimensions of the magnet plate as incoming inspection
because the plate has very strong magnetism.

• Do not apply unnecessary external force or shock to the motor.

Otherwise, the motor may be damaged and become incapable of
operating normally.
• Do not machine the motor without permission. If the motor
requires machining, machine only the portion specified or
approved by FANUC.
• Keep the motor from contact with and away from water and oil,
chemicals which may damage motors, conductive materials, and
other materials harmful to motors.
• Store the motor in indoor locations where are free from
rainwater, condensation, and excessive dust. Avoid warming or
cooling the motor externally when unnecessary and placing it in
special environments.

p-3
PREFACE B-65222EN/03

1.3 HANDLING A MAGNET PLATE (CAUTIONS)

WARNING
1 Mishandling a magnet plate may be highly
dangerous, resulting in a fatal accident. Read and
thoroughly understand these cautions and Part III,
"HANDLING, DESIGN, and INSTALLATION," before
handling the magnet plate and strictly observe the
cautions when handling it. Do not handle the magnet
plate unless you have been trained in handling linear
motors.
2 A magnet plate uses many very strong magnets. It
may cause a malfunction of a medical apparatus
such as a pacemaker or AICD. For this reason, any
person having a medical apparatus must keep away
from the magnet plate. Also arrange the environment
to keep any person having a medical apparatus
away from the magnet plate. Keep at least 30 cm
away from the magnet plate when it is absolutely
necessary.

When a magnet plate is shipped from FANUC, it is packed so that the

magnets will not seriously affect outside. Do not remove the tin plates
and cushioning corrugated cardboard attached to the magnet plate
until the magnet plate is installed on a machine.

Tin plate

Corrugated cardboard
Magnet plate
(magnet side) For reducing
Covered with black magnetic leakage
resin. and holding the
For
corrugated cardboard
cushioning
Keep any magnetic material (including a tool) away from the magnet
plate. If magnetic materials such as iron are brought near the magnet
plate, the magnetic materials may be pulled to the magnet plate with a
force of about 5 tons, resulting in serious injury. In any case, always
keep any magnetic material away from the magnet plate and also be
extremely careful of magnetic materials around the work area.
Magnetic attraction
5 tons maximum

Magnetic material
such as iron

Magnet side

p-4
B-65222EN/03 PREFACE

The following items may be affected by magnetic fields, resulting in

damage or malfunction. When handling the magnet plate, do not carry
any item listed below (or another item which is not listed) with you
and keep the items away from the magnet fields unless it is necessary.
FANUC accepts no liability for any damage such as corruption or
failure of an item due to magnetic fields.
• Watches, cellular phones, magnetic cards, and other portable
items
• Magnetic tapes, floppy disks, MO disks, and other magnetic
media
• Cameras, personal computers, and other electronic devices

When moving the magnet plate on a surface of a magnetic material

such as the mounting surface of the machine or a table, always place
it flat with the magnet side facing up and iron side facing down and
slide it. If the magnet plate is moved with standing it on its narrow
surface, the magnet plate may be attracted to the magnetic material
and your hand may be caught between the magnet plate and magnetic
material, resulting in injury. The force of magnetic attraction can be 5
tons at the maximum. If your hand is caught under the magnet plate, it
is difficult even to pull out the hand. Be extremely careful in moving
the magnet plate.

Surface of a
magnetic
material Magnet plate
(The magnet side shall face up.)

Moving the magnet plate with standing it on its

narrow surface is strictly prohibited.

p-5
B-65222EN/03 TABLE OF CONTENTS

TABLE OF CONTENTS

SAFETY PRECAUTIONS .......................................................................... s-1

PREFACE.................................................................................................. p-1
I. SPECIFICATIONS
1 OVERVIEW ............................................................................................3
2 SPECIFICATIONS..................................................................................5
2.1 TERMS USED IN THE SPECIFICATION LIST AND SPEED DIAGRAMS....6
2.2 SPECIFICATION LIST...................................................................................8
2.3 FORCE-VERSUS-SPEED DIAGRAMS AND OUTPUT-VERSUS-SPEED
DIAGRAMS..................................................................................................12
2.4 EXTERNAL DIMENSIONS ..........................................................................19
2.4.1 Coil Slider.............................................................................................................. 19
2.4.2 Magnet Plate .......................................................................................................... 29
2.4.3 Cooling Plate ......................................................................................................... 33
2.4.4 Magnetic Pole Sensor ............................................................................................ 35
2.4.5 Position Detection Circuit ..................................................................................... 37
2.4.6 Parts for Connecting a Cooling Tube .................................................................... 38
2.5 CABLES.......................................................................................................41
2.5.1 Overview of Connection........................................................................................ 41
2.5.2 Cable K2 (for Position Detection Circuit A860-0333-T001)................................ 42
2.5.3 Cable K2 (for Position Detection Circuit A860-0333-T002)................................ 43
2.5.4 Cable K4 ................................................................................................................ 44
2.5.5 Cable K5 ................................................................................................................ 45
2.5.6 Cable K6 ................................................................................................................ 45
2.5.7 Cable Length Design ............................................................................................. 46
2.6 APPLICABLE AMPLIFIERS.........................................................................47

II. CONFIGURATIONS AND SELECTION

1 SYSTEM CONFIGURATION ................................................................53
1.1 INCREMENTAL LINEAR ENCODER SYSTEM...........................................54
1.1.1 Example of Configuration ..................................................................................... 54
1.1.2 Applicable Linear Encoder.................................................................................... 55
1.2 ABSOLUTE LINEAR ENCODER SYSTEM .................................................56
1.2.1 Example of Configuration ..................................................................................... 56
1.2.2 Applicable Linear Encoder.................................................................................... 56
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TABLE OF CONTENTS B-65222EN/03

1.3 MOTOR ARRANGEMENT AND DRIVING METHODS ...............................57

1.3.1 When the Coil Slider Is Used as the Movable Part and When the Magnet Plate
Is Used as the Movable Part .................................................................................. 57
1.3.2 Parallel Arrangement, Serial Arrangement, and Symmetrical Arrangement ........ 58
1.3.3 Driving Two Motors.............................................................................................. 60
1.3.4 Driving Three or More Motors.............................................................................. 61
1.3.5 Driving Multiple Motors with a Large-Capacity Amplifier.................................. 62
2 SELECTION METHODS ......................................................................63
2.1 COIL SLIDER SELECTION .........................................................................64
2.1.1 Load Force............................................................................................................. 64
2.1.2 Required Maximum Force..................................................................................... 64
2.1.3 Root Mean Square Force ....................................................................................... 65
2.1.4 Overload Duty Characteristic ................................................................................ 67
2.1.5 Amount of Travel when Dynamic Brake is Applied ............................................. 71
2.2 MAGNET PLATE SELECTION....................................................................72
2.3 POWER SUPPLY MODULE (PSM) SELECTION .......................................74
2.3.1 Selecting a Power supply Module ......................................................................... 74
2.3.2 Calculating the Amount of Regenerative Energy.................................................. 77
2.4 EXTERNAL COOLING UNIT SELECTION..................................................78
2.4.1 Overview................................................................................................................ 78
2.4.2 Example of Selection............................................................................................. 79
3 LINEAR MOTOR SELECTION FORM .................................................................80

III. HANDLING, DESIGN, AND ASSEMBLY

1 HANDLING THE LINEAR MOTOR ......................................................85
1.1 COIL SLIDER...............................................................................................86
1.2 MAGNET PLATE .........................................................................................87
1.3 SENSOR......................................................................................................89
2 MECHANICAL DESIGN .......................................................................90
2.1 MOUNTING COIL SLIDERS........................................................................91
2.1.1 Mounting Surface Precision on the Machine Side ................................................ 91
2.1.2 Attaching coil sliders............................................................................................. 92
2.2 MOUNTING MAGNET PLATES ..................................................................93
2.3 LINEAR MOTOR AIR GAP ..........................................................................94
2.4 MOUNTING A LINEAR ENCODER .............................................................95
2.4.1 Mounting Rigidity and Noise Protection............................................................... 95
2.4.2 Linear Motor and Linear Encoder Directions ....................................................... 95

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B-65222EN/03 TABLE OF CONTENTS

2.4.3 Incremental Linear Encoder and Magnetic Pole Sensor Mounting Positions....... 98
2.4.4 Absolute Linear Encoder Mounting Position ...................................................... 101
2.5 THERMOSTAT CONNECTION .................................................................107
2.6 GROUND LEAD CONNECTION................................................................109
2.7 MOTOR AND POWER LEAD PROTECTION ...........................................110
2.8 MOTOR HEAT-UP AND COOLING...........................................................111
2.8.1 Temperature Increase on the Mounting Surface of Coil Sliders ......................... 111
2.8.2 Temperature Increase on the Surface of the Magnet Plate.................................. 112
2.8.3 Cooling Plate Addition ........................................................................................ 113
2.8.4 Cooling Water...................................................................................................... 113
2.9 VERTICAL AXIS BALANCER....................................................................114
2.10 CONSIDERATION OF MAGNETIC ATTRACTION ...................................115
2.11 AUXILIARY BRAKE MEASURES ..............................................................116
2.12 PROTECTION AGAINST DUST AND WATER .........................................117
2.13 AXIS DESIGN WITH A LOW GRAVITY CENTER ....................................119
2.14 SCREWS FOR FIXING THE LINEAR MOTOR .........................................120
2.15 CONFORMANCE TO STANDARDS .........................................................121
2.16 MAGNETIC LEAKAGE AND MAGNETIC SHIELDING .............................122
2.16.1 Level of Geomagnetism....................................................................................... 122
2.16.2 Magnetic Leakage................................................................................................ 122
2.16.3 Magnetic Shielding.............................................................................................. 123
2.17 NAMEPLATE ATTACHMENT AND SERIAL NUMBER MANAGEMENT ..124
2.18 INDICATION OF WARNING......................................................................125
3 ASSEMBLY........................................................................................126
3.1 LINEAR MOTOR MOUNTING PROCEDURES .........................................127
3.1.1 Procedure #1 for Mounting a Linear Motor on the Machine .............................. 127
3.1.2 Procedure #2 for Mounting a Linear Motor on the Machine .............................. 129
3.1.3 Procedure #3 for Mounting a Linear Motor on the Machine .............................. 130
3.1.4 Procedure #4 for Mounting a Linear Motor on the Machine .............................. 131
3.2 MOUNTING A COOLING PLATE AND CONNECTING A COOLING
TUBE .........................................................................................................132
3.2.1 300D/4, 600D/4, 900D/4 ..................................................................................... 132
3.2.2 3000B, 6000B, 9000B, and 15000C.................................................................... 133
3.3 POWER LEAD AND THERMOSTAT LEAD CONNECTION .....................134
3.3.1 300D/4, 600D/4, and 900D/4 .............................................................................. 134
3.3.2 1500A/4 ............................................................................................................... 135
3.3.3 3000B/2, 3000B/4, 6000B/2, 6000B/4, 9000B/2, and 9000B/4.......................... 136
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TABLE OF CONTENTS B-65222EN/03

3.3.4 15000C/2 and 15000C/3...................................................................................... 140

3.4 MOUNTING A LINEAR ENCODER ...........................................................144
3.5 MOUNTING A MAGNETIC POLE SENSOR .............................................145
3.5.1 Mounting a Magnetic Pole Sensor on 300D/4, 600D/4, or 900D/4 .................... 145

IV. START-UP
1 PREPARATION FOR START-UP.......................................................149
2 CHECKING MOUNTING STATE........................................................150
3 CHECKING FEEDBACK OUTPUT SIGNAL ......................................151
4 PARAMETER SETTING.....................................................................153
4.1 LINEAR MOTOR PARAMETER SETTING................................................154
4.1.1 Procedure for Setting the Initial Parameters of Linear Motors ........................... 154
4.1.2 Smooth Compensation for Linear Motor............................................................. 173
4.2 VELOCITY LOOP GAIN ............................................................................179
5 TROUBLES AND CAUSES................................................................180
V. MAINTENANCE
1 CHECKING EXTERNAL VIEW AND MOUNTING..............................183
1.1 COIL SLIDER.............................................................................................184
1.2 MAGNET PLATE .......................................................................................186
1.3 MAGNETIC POLE SENSOR (FOR AN INCREMENTAL SYSTEM) ..........187
2 CHECKING ELECTRIC CHARACTERISTICS ...................................188
2.1 CHECKING INSULATION RESISTANCE..................................................189
2.2 CHECKING WINDING RESISTANCE .......................................................190
3 CLEANING .........................................................................................191
APPENDIX
A ORDERING DRAWING NUMBER .....................................................195
B OPERATION THEORY OF THE LINEAR MOTOR ............................196
B.1 OPERATION THEORY OF THE LINEAR MOTOR (OVERVIEW).............197
B.2 ROLE OF THE MAGNETIC POLE SENSOR ............................................199
C MAGNET PLATE SURFACE PROTECTION .....................................201
D DRIVING THE LINEAR MOTOR WITH THE αi SERIES
AMPLIFIER ........................................................................................202

c-4
I. SPECIFICATIONS
B-65222EN/03 SPECIFICATIONS 1.OVERVIEW

1 OVERVIEW
Parts supplied by FANUC
The following shows a typical system configuration of the FANUC
Linear Motor series.

Thermostat line

Servo amplifier
Magnet plate Coil slider Magnetic pole sensor FSSB

Power line

Position detection circuit

Linear encoder

FANUC supplies the following parts according to the system

configuration of your machine:

- CNC system (CNC, PMC, amplifier, and others)

- Coil slider
- Magnet plate
- Cooling plate for the 300D/4, 600D/4, and 900D/4
(Other models have a coil slider containing a cooling tube.)
- Magnetic pole sensor
- Position detection circuit
- Signal cables (such as a cable between the position detection
circuit and amplifier)

NOTE
Some parts may be unnecessary depending on the
system configuration of the machine. For details,
see Part II,"CONFIGURATIONS AND SELECTION."

-3-
1.OVERVIEW SPECIFICATIONS B-65222EN/03

FANUC does not supply parts listed below. Use parts manufactured
by third parties as required.

- Linear encoder
- Movable cable and others
- Linear guide
- Cable carrier
- Axis cover
- Scraper
- Cooling devices (cooler, fan, and others)
- Shock absorber
- External brake
- Other than the above that are not in the list of FANUC-supplied
parts

NOTE
1 Select a linear encoder which meets the FANUC
specifications. For details, see Part II,
"CONFIGURATIONS AND SELECTION."
2 FANUC does not currently supply any system
consisting of a linear motor, linear guide, linear
encoder, and other parts you can use as a machine
immediately after you purchase it. As described
above, you must purchase required parts and
configure a system. When you use a motor
consisting of parts supplied by FANUC under the
specified conditions, FANUC guarantees the
performance of the motor. For a part which is not
supplied by FANUC, its performance is guaranteed
by the relevant manufacturer. For details of a part
which is not supplied by FANUC, contact the relevant
parts manufacturer or dealer.

-4-
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2 SPECIFICATIONS

-5-
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.1 TERMS USED IN THE SPECIFICATION LIST AND SPEED

DIAGRAMS

- Cooling method
There are the following methods for cooling a coil slider: No cooling,
air cooling, and water cooling.
- Maximum speed
Maximum speed of the motor. You can run the motor at up to this
speed.
- Upper speed for the maximum force
Upper limit of the speed at which the maximum force can be
maintained. If the speed exceeds this limit, the maximum force is
reduced.
- Continuous force
Force the motor can continuously output. How the coil slider
temperature rises depends on the material of the machine on which it
is mounted. When no cooling or air cooling is used, in particular,
the material affects the coil slider temperature. The specification list
contains the size of an aluminum heat sink on which each coil slider is
mounted.
Size of the heat sink (mm)
Model
Surface area of the coil slider × 2 × thickness
300D/4 (73 × 71) × 2 × 20
600D/4 (133 × 71) × 2 × 20
900D/4 (193 × 71) × 2 × 20
1500A/4 (297 × 130) × 2 × 50
3000B/2, 3000B/4 (297 × 210) × 2 × 50
6000B/2, 6000B/4 (537 × 210) × 2 × 50
9000B/2, 9000B/4 (777 × 210) × 2 × 50
15000C/2, 15000C/3 (897 × 260) × 2 × 50
- Maximum force
Maximum force the motor can generate when driven using the
standard amplifier. The maximum force can be used only in a short
time such as during acceleration or deceleration.
- Continuous current
Effective current per phase when the motor outputs the continuous
force. The peak value can be obtained by multiplying this value by
2.
- Maximum current
Effective current per phase when the motor outputs the maximum
force. The peak value can be obtained by multiplying this value by
2.
- Continuous output/maximum output
Value obtained by converting the force (N) during motor operation to
the output (kW). For selection of a power supply module (PSM), see
Part II, "CONFIGURATIONS AND SELECTION."

-6-
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

- Maximum amplifier current

Maximum peak current of the standard amplifier. The effective value
can be obtained by dividing this value by 2 .
- Force constant
Force obtained when 1 Arms flows for one phase. The following
expression can be satisfied: [force constant] × [continuous current] ≈
[continuous force]. This expression may not be satisfied due to
saturated magnetic force, however.
- Back electromotive force constant
Electromotive force per phase generated with the motor running at a
speed of 1 m/s that is indicated by the effective value. The voltage
between motor terminals can be obtained by multiplying this value
by 3 .
- Armature resistance
Resistance per phase of the coil slider at an ambient temperature of
25°C. The resistance between terminals is double this value.
- Thermal time constant
Thermal time constant for the coil slider
- Cooling conditions
Conditions for obtaining the rated output when forced cooling is used
- IC code:
Code indicating the cooling method that conforms to EN60034-6
- Coolant:
Primary coolant for directly cooling the coil slider
- Flow rate:
Required flow rate of the primary coolant
- Recommended pressure:
Recommended pressure for the primary coolant
- Maximum pressure:
Maximum pressure for the primary coolant
- Required cooling capacity:
Amount of heat absorbed that is required for obtaining the rated
output
- Magnetic attraction
Force of the magnetic attraction between the coil slider and magnet
plate
- Mass of the coil slider
Mass per coil slider
- Type of applicable magnet plate
Type of magnet plate that is applicable
- Intermittent operating area
Area in which the motor can be used intermittently. The area varies
depending on the cooling method.
- Continuous operating area
Area in which the motor can be used continuously. The area varies
depending on the cooling method.

-7-
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.2 SPECIFICATION LIST

*1
Model
Item Symbol Unit
300D/4 600D/4 900D/4
No Air Water No Air Water No Air Water
Cooling method(*2) - -
cooling cooling cooling cooling cooling cooling cooling cooling cooling
Maximum speed - m/s 4 4 4
Upper speed for the
- m/s 2.3 2.3 2.3
maximum force
Continuous force Fc N 50 60 100 100 120 200 150 180 300
Maximum force Fp N 300 600 900
Continuous output Oc kW 0.2 0.24 0.4 0.4 0.48 0.8 0.6 0.72 1.2
Maximum output Op kW 0.7 1.4 2.1
Continuous current Ic Arms 1.4 1.7 2.8 2.8 3.4 5.6 4.2 5.1 8.5
Maximum current Ip Arms 8.5 17.0 25.4
Maximum amplifier current - Ap 20 40 40
Force constant Kf N/Arms 35.4 35.4 35.4
Back electromotive force
Ke Vrms/(m/s) 11.5 11.5 11.5
constant
Armature resistance Ra Ω 3.0 1.5 1.0
Thermal time constant Tt min. 30 15 0.5 30 15 0.5 30 15 0.5
9W7A
IC CODE(*4) - - 0A8 9A7A7 0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7
7
Coolant(*5) - - - Air Water - Air Water - Air Water
Flow rate - L/min - - 4 - - 4 - - 4
Cooling
Recommended
conditions - Mpa - - 0.1 - - 0.1 - - 0.1
pressure
(*3)
Maximum
- Mpa - - 0.3 - - 0.3 - - 0.3
pressure
Required
- W - - 100 - - 200 - - 300
cooling capacity
Magnetic attraction (*6) Fa N 750 1500 2250
Weight of the coil slider (*7) W kg 0.8 1.5 2.2
Type of applicable magnet
- - D D D
plate (*8)

*1 Standard values at an ambient temperature of 25(C and a power supply voltage of 200 V
The values may vary depending on the ambient temperature, digital servo software, parameters, power supply voltage, amplifier specifications, and others.
*2 To use "air cooling" or "water cooling," a forced cooling system with a cooling plate (option) is required. For details, see Subsection 2.4.3, "Cooling Plate."
*3 When "no cooling" or "air cooling" is used, the thermal loss differs depending on the materials of parts around the coil slider and machine configuration.
According to the thermal loss, the rating may vary.
*4 Conforms to EN60034-6. IC code "0A8" for "no cooling" is cooling for a movable coil slider. For cooling for a movable magnet plate, the IC code is "0A0".
*5 Primary coolant for forced cooling (coolant for directly cooling the coil slider)
"Air" means ordinary industrial compressed air. "Water" means ion exchanged water (including 5% rust inhibitor).
*6 Approximate magnetic attraction between the coil slider and magnet plate when there is a 0.5-mm mechanical gap between the coil slider and magnet
plate
The value varies depending on the size of the gap.
*7 When "air cooling" or "water cooling" is used, the weight of the cooling plate is added. For details, see the subsection "Cooling Plate" below. When an
incremental linear encoder is used, the weight of the magnetic pole sensor is added. For details, see the subsection "Magnetic Pole Sensor" below.
*8 The type of applicable magnet plate differs depending on the motor model. For details, see the subsection "Magnet Plate" below.

-8-
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

*1
Model
Unit Symbol Item
1500A/4 3000B/2 *9 3000B/4
No Air Water No Air Water No Air Water
- - Cooling method (*2)
cooling cooling cooling cooling cooling cooling cooling cooling cooling
2
4 4 m/s - Maximum speed
(4)
1 Upper speed for the
2 2.2 m/s -
(2) maximum force
300 360 600 600 720 1200 600 720 1200 N Fc Continuous force
1500 3000 3000 N Fp Maximum force
1.2 1.4 2.4
1.2 1.4 2.4 2.4 2.8 4.8 kW Oc Continuous output
(2.4) (2.8) (4.8)
3.2
3.2 6.8 kW Op Maximum output
(6.8)
5.1 6.1 10.2 5.1 6.1 10.2 10.2 12.3 20.4 Arms Ic Continuous current
28 28 57 Arms Ip Maximum current
40 40 80 Ap - Maximum amplifier current
58.7 117.4 58.7 N/Arms Kf Force constant
Back electromotive force
19.6 39.1 19.6 Vrms/(m/s) Ke
constant
1.3 2.22 0.555 Ω Ra Armature resistance
60 30 1
60 30 1 60 30 1 min. Tt Thermal time constant
- - -
0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7 - - IC CODE (*4)
- Air Water - Air Water - Air Water - - Coolant (*5)
- - 7.5 - - 7.5 - - 7.5 L/min - Flow rate
Recommended Cooling
- - 0.35 - - 0.35 - - 0.35 Mpa -
pressure conditions
Maximum (*3)
- - 0.63 - - 0.63 - - 0.63 Mpa -
pressure
Required
- - 450 - - 900 - - 900 W -
cooling capacity
4500 9000 9000 N Fa Magnetic attraction (*6)
8 12 12 kg W Weight of the coil slider(*7)
Type of applicable magnet
A B B - -
plate(*8)

*1 Standard values at an ambient temperature of 25(C and a power supply voltage of 200 V
The values may vary depending on the ambient temperature, digital servo software, parameters, power supply voltage, amplifier specifications, and others.
*2 When "no cooling" is used, the cooling tube in the coil slider is not used. To use "air cooling" or "water cooling," a forced cooling system using the internal
cooling tube is required.
*3 When "no cooling" or "air cooling" is used, the thermal loss differs depending on the materials of parts around the coil slider and machine configuration.
According to the thermal loss, the rating may vary.
*4 Conforms to EN60034-6. IC code "0A8" for "no cooling" is cooling for a movable coil slider. For cooling for a movable magnet plate, the IC code is "0A0".
*5 Primary coolant for forced cooling (coolant for directly cooling the coil slider)
"Air" means ordinary industrial compressed air. "Water" means ion exchanged water (including 5% rust inhibitor).
*6 Approximate magnetic attraction between the coil slider and magnet plate when there is a 0.5-mm mechanical gap between the coil slider and magnet
plate
The value varies depending on the size of the gap.
*7 When an incremental linear encoder is used, the weight of the magnetic pole sensor is added. For details, see the subsection "Magnetic Pole Sensor"
below.
*8 The type of applicable magnet plate differs depending on the motor model. For details, see the subsection "Magnet Plate" below.
*9 Can be driven by 400 V input (FANUC HV amplifier). The values in parentheses in the table indicate data when the motor is driven with 400 V. Drive
parameters dedicated to 400 V are required.

-9-
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

*1
Model
Item Symbol Unit
6000B/2 *9 6000B/4 9000B/2 *9
No Air Water No Air Water No Air Water
Cooling method(*2) - -
cooling cooling cooling cooling cooling cooling cooling cooling cooling
2 2
Maximum speed - m/s 4
(4) (4)
Upper speed for the 1 1
- m/s 2.2
maximum force (2) (2)
Continuous force Fc N 1200 1440 2400 1200 1440 2400 1800 2160 3600
Maximum force Fp N 6000 6000 9000
2.4 2.9 4.8 3.6 4.3 7.2
Continuous output Oc kW 4.8 5.8 9.6
(4.8) (5.8) (9.6) (7.2) (8.6) (14.4)
6.4 9.6
Maximum output Op kW 13.5
(13.5) (20.3)
Continuous current Ic Arms 10.2 12.3 20.4 20.4 24.5 40.9 15.3 18.4 30.7
Maximum current Ip Arms 57 113 85
Maximum amplifier current - Ap 80 160 130
Force constant Kf N/Arms 117.4 58.7 117.4
Back electromotive force
Ke Vrms/(m/s) 39.1 19.6 39.1
constant
Armature resistance Ra Ω 1.11 0.278 0.74
Thermal time constant Tt min. 60 30 1 60 30 1 60 30 1
IC CODE(*4) - - 0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7
Coolant(*5) - - - Air Water - Air Water - Air Water
Flow rate - L/min - - 7.5 - - 7.5 - - 7.5
Cooling Recommended
- Mpa - - 0.42 - - 0.42 - - 0.5
conditions pressure
(*3) Maximum
- Mpa - - 0.63 - - 0.63 - - 0.63
pressure
Required
- W - - 1700 - - 1700 - - 2600
cooling capacity
Magnetic attraction(*6) Fa N 18000 18000 27000
Weight of the coil slider(*7) W kg 23 23 34
Type of applicable magnet
- - B B B
plate(*8)

*1 Standard values at an ambient temperature of 25(C and a power supply voltage of 200 V
The values may vary depending on the ambient temperature, digital servo software, parameters, power supply voltage, amplifier specifications, and others.
*2 When "no cooling" is used, the cooling tube in the coil slider is not used. To use "air cooling" or "water cooling," a forced cooling system using the internal
cooling tube is required.
*3 When "no cooling" or "air cooling" is used, the thermal loss differs depending on the materials of parts around the coil slider and machine configuration.
According to the thermal loss, the rating may vary.
*4 Conforms to EN60034-6. IC code "0A8" for "no cooling" is cooling for a movable coil slider. For cooling for a movable magnet plate, the IC code is "0A0".
*5 Primary coolant for forced cooling (coolant for directly cooling the coil slider)
"Air" means ordinary industrial compressed air. "Water" means ion exchanged water (including 5% rust inhibitor).
*6 Approximate magnetic attraction between the coil slider and magnet plate when there is a 0.5-mm mechanical gap between the coil slider and magnet
plate
The value varies depending on the size of the gap.
*7 When an incremental linear encoder is used, the weight of the magnetic pole sensor is added. For details, see the subsection "Magnetic Pole Sensor"
below.
*8 The type of applicable magnet plate differs depending on the motor model. For details, see the subsection "Magnet Plate" below.
*9 Can be driven by 400 V input (FANUC HV amplifier). The values in parentheses in the table indicate data when the motor is driven with 400 V. Drive
parameters dedicated to 400 V are required.

- 10 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

*1
Model
Unit Symbol Item
9000B/4 15000C/2 *9 15000C/3
No Air Water No Air Water No Air Water
- - Cooling method(*2)
cooling cooling cooling cooling cooling cooling cooling cooling cooling
2
4 3 m/s - Maximum speed
(4)
0.8 Upper speed for the
2.2 1.2 m/s -
(1.6) maximum force
1800 2160 3600 3000 3600 7000 3000 3600 7000 N Fc Continuous force
9000 15500 15500 N Fp Maximum force
6.0 7.2 14.0
7.2 8.6 14.4 9.0 10.8 21.0 kW Oc Continuous output
(12.0) (14.4) (28.0)
15.9
20.3 23.8 kW Op Maximum output
(31.8)
30.7 36.8 61.3 22.7 27.3 53.0 33.8 40.5 78.8 Arms Ic Continuous current
170 170 255 Arms Ip Maximum current
240 240 360 Ap - Maximum amplifier current
58.7 132 88.8 N/Arms Kf Force constant
Back electromotive force
19.6 44.4 29.6 Vrms/(m/s) Ke
constant
0.185 0.391 0.174 Ω Ra Armature resistance
60 30 1 60 30 1 60 30 1 min. Tt Thermal time constant
0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7 0A8 9A7A7 9W7A7 - - IC CODE(*4)
- Air Water - Air Water - Air Water - - Coolant(*5)
- - 7.5 - - 7.5 - - 7.5 L/min - Flow rate
Recommended Cooling
- - 0.5 - - 0.54 - - 0.54 Mpa -
pressure conditions
Maximum (*3)
- - 0.63 - - 0.63 - - 0.63 Mpa -
pressure
Required
- - 2600 - - 3400 - - 3400 W -
cooling capacity
27000 45000 45000 N Fa Magnetic attraction(*6)
34 48 48 kg W Weight of the coil slider(*7)
Type of applicable magnet
B C C - -
plate(*8)

*1 Standard values at an ambient temperature of 25(C and a power supply voltage of 200 V
The values may vary depending on the ambient temperature, digital servo software, parameters, power supply voltage, amplifier specifications, and others.
*2 When "no cooling" is used, the cooling tube in the coil slider is not used. To use "air cooling" or "water cooling," a forced cooling system using the internal
cooling tube is required.
*3 When "no cooling" or "air cooling" is used, the thermal loss differs depending on the materials of parts around the coil slider and machine configuration.
According to the thermal loss, the rating may vary.
*4 Conforms to EN60034-6. IC code "0A8" for "no cooling" is cooling for a movable coil slider. For cooling for a movable magnet plate, the IC code is "0A0".
*5 Primary coolant for forced cooling (coolant for directly cooling the coil slider)
"Air" means ordinary industrial compressed air. "Water" means ion exchanged water (including 5% rust inhibitor).
*6 Approximate magnetic attraction between the coil slider and magnet plate when there is a 0.5-mm mechanical gap between the coil slider and magnet
plate
The value varies depending on the size of the gap.
*7 When an incremental linear encoder is used, the weight of the magnetic pole sensor is added. For details, see the subsection "Magnetic Pole Sensor"
below.
*8 The type of applicable magnet plate differs depending on the motor model. For details, see the subsection "Magnet Plate" below.
*9 Can be driven by 400 V input (FANUC HV amplifier). The values in parentheses in the table indicate data when the motor is driven with 400 V. Drive
parameters dedicated to 400 V are required.

- 11 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.3 FORCE-VERSUS-SPEED DIAGRAMS AND OUTPUT-

VERSUS-SPEED DIAGRAMS

300D/4 (A06B-0421-B801)
Maximum force

Maximum output

Intermittent
operating area
Intermittent
operating area Water cooling
Force
(N) Output
(kW)
Water cooling
Air cooling
Continuous
Air cooling operating area
Continuous operating area

No cooling
No cooling

Speed (m/s) Speed (m/s)

600D/4 (A06B-0422-B801)
Maximum force

Maximum output

Intermittent
operating area
Intermittent
operating area Water cooling
Force Output
(N) (kW)
Water cooling Air cooling
Continuous
operating area
Air cooling
Continuous operating area

No cooling
No cooling

Speed (m/s)
Speed (m/s)

NOTE
1 Data obtained when the motor is driven with 200 V is
indicated unless the voltage is indicated.
2 The maximum output indicates the rated maximum
output and is not data for PSM selection. For PSM
selection, see Part II, "CONFIGURATIONS AND
SELECTION."

- 12 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

900D/4 (A06B-0423-B801)
Maximum force

Maximum output

Intermittent
operating area
Intermittent
operating area
Force Water cooling
Output
(N) (kW)
Water cooling
Air cooling
Continuous
Air cooling
Continuous operating area operating area

No cooling
No cooling

Speed (m/s)
Speed (m/s)

1500A/4 (A06B-0410-B901)

Maximum force

Maximum output

Intermittent
operating area Water cooling
Intermittent
operating area

Force
Water cooling Output
(N) Air cooling
(kW)

Continuous
Air cooling operating area
Continuous operating area

No cooling

Speed (m/s) Speed (m/s)

- 13 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

3000B/2 (A06B-0411-B911)
Maximum force

Maximum output

Water cooling
Intermittent Intermittent
operating area operating area

Force Output
(N) Air cooling
Water cooling (kW)

Continuous
operating area
Air cooling
Continuous operating area

No cooling

Speed (m/s)
Speed (m/s)

3000B/4 (A06B-0411-B811), 3000B/2 (A06B-0411-B911 driven with 400 V)

Maximum force

Maximum output

Intermittent
operating area Water cooling
Intermittent
operating area
Force Output
(N) (kW)
Water cooling
Air cooling

Air cooling Continuous

Continuous operating area operating area

No cooling
No cooling

Speed (m/s) Speed (m/s)

- 14 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

6000B/2 (A06B-0412-B911)
Maximum force

Maximum output

Water cooling

Intermittent
operating area
Intermittent
operating area
Force Walter cooling Output
(N) (kW) Air cooling

Continuous
operating area
Air cooling
Continuous operating area

No cooling

Speed (m/s) Speed (m/s)

6000B/4 (A06B-0412-B811), 6000B/2 (A06B-0412-B911 driven with 400 V)

Maximum force

Maximum output

Intermittent
operating area Water cooling
Intermittent
operating area
Force Water cooling Output
(N) (kW)
Air cooling

Continuous
Air cooling operating area
Continuous operating area

No cooling
No cooling

Speed (m/s)
Speed (m/s)

- 15 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

9000B/2 (A06B-0413-B911)
Maximum force

Maximum output

Intermittent Intermittent Water cooling

operating area operating area

Force Output
(N) Water cooling (kW)
Air cooling

Air cooling Continuous

Continuous operating area operating area

No cooling
No cooling

Speed (m/s) Speed (m/s)

9000B/4 (A06B-0413-B811), 9000B/2 (A06B-0413-B911 driven with 400 V)

Maximum force

Maximum output
Intermittent
Intermittent operating area
operating area Water cooling

Force Output
(N) Water cooling (kW)

Air cooling

Air cooling Continuous

Continuous operating area
operating area

No cooling
No cooling

Speed (m/s) Speed (m/s)

- 16 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

15000C/2 (A06B-0414-B901)
Maximum force

Maximum output

Water cooling

Intermittent Intermittent
operating area operating area

Force Water cooling Output Air cooling

(N) (kW)
Continuous
operating area
Continuous operating area Air cooling

No cooling

Speed (m/s) Speed (m/s)

15000C/3 (A06B-0414-B811)
Maximum force

Water cooling
Maximum output

Intermittent Intermittent
operating area operating area

Force Water cooling Output

(N) (kW)
Air cooling

Continuous
Air cooling operating area
Continuous operating area

No cooling

Speed (m/s) Speed (m/s)

- 17 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

15000C/2 (A06B-0414-B901 driven with 400 V)

Maximum output

Maximum output Water cooling

Intermittent
operating area
Intermittent
operating area

Air cooling
Output Water cooling Output
(kW) (kW)
Continuous
operating area

Continuous operating area Air cooling

No cooling

Speed (m/s)
Speed (m/s)

- 18 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.4 EXTERNAL DIMENSIONS

2.4.1 Coil Slider

300D/4 (A06B-0421-B801)
4 - M5×0.8, DEPTH: 10

POWER LEAD,
THERMOSTAT LEAD

M5×0.8, DEPTH: 10

DETAILS OF TAPPED HOLE

Lead type Sheath Conductor cross Average outside

2
color section (mm ) diameter (mm)
Power lead (U phase) Red 2.0 2.6
Power lead (V phase) White 2.0 2.6
Power lead (W phase) Black 2.0 2.6
Power lead (ground) Green 2.0 2.6
Thermostat lead 1 Black 0.35 1.28
Thermostat lead 2 Black 0.35 1.28
*1 The power and thermostat leads are about 350 mm long.
*2 No crimp terminal is supplied with any power or thermostat lead.
*3 The thermostat leads are nonpolarized.

NOTE
1 To bring a corner of the coil slider into intimate contact with a peripheral part, recess
the corner of the part by 0.2 to 0.3.
2 This drawing contains no magnetic pole sensor. To use an incremental linear
encoder, a magnetic pole sensor is required. For the outline drawings of magnetic
pole sensors, see the subsection "Magnetic Pole Sensor" below.
3 Always read and understand Part III, "HANDLING, DESIGN, and INSTALLATION,"
before handling or installing the motor.
- 19 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

600D/4 (A06B-0422-B801)
8 - M5×0.8, DEPTH: 10

POWER LEAD,
THERMOSTAT LEAD

M5×0.8, DEPTH: 10

DETAILS OF TAPPED HOLE

Lead type Sheath Conductor cross Average outside

- 20 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

900D/4 (A06B-0423-B801)

POWER LEAD,
THERMOSTAT LEAD

M5×0.8,
DEPTH: 10

DETAILS OF TAPPED HOLE

Lead type Sheath Conductor cross Average outside

- 21 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

1500A/4 (A06B-0410-B901)
COOLING TUBE
COIL SLIDER

MAGNET PLATE

MAGNETIC
POLE
SENSOR SECTION A-A

CABLE OUTLET
TAPPED HOLE FOR FOUR AWG10 POWER CABLES
MOUNTING M8×1.25 (8) ONE AWG23 2-CONDUCTOR THERMOSTAT CABLE

Cooling tube: Deoxidized copper phosphorus seamless tube.

Outside diameter: 8 mm, Wall thickness: 0.8 mm

Average outside
Lead type Sheath color AWG size
diameter (mm)
Power lead
Black/Green AWG10 (5.5mm2) 5.5
(U phase)
Power lead
Black/Red AWG10 (5.5mm2) 5.5
(V phase)
Power lead
Black/White AWG10 (5.5mm2) 5.5
(W phase)
Power lead
Green/Yellow AWG10 (5.5mm2) 5.5
(ground)
Gray
AWG32 2 cores Sheath : DIA 5.5
For thermostat (Core : Black and
(Core : 0.3mm2) (Core : DIA 1.44)
White)
*1 The power and thermostat leads are about 5.1 m long.
*2 No crimp terminal is supplied with any power or thermostat lead.
*3 The thermostat leads are nonpolarized.

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

- Side view (reference drawing for installation)

CLEARANCE (0.5)
MACHINE
MAGNET PLATE
ENLARGED VIEW
OF PART B (2:1)

MAGNET PLATE

NOTE
1 To bring a corner of the coil slider into intimate contact with a peripheral part, recess
the corner of the part by 0.2 to 0.3.
2 This drawing contains a magnetic pole sensor. When an absolute linear encoder is
used, the magnetic pole sensor is not required.
3 Always read and understand Part III, "HANDLING, DESIGN, and INSTALLATION,"
before handling or installing the motor.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

3000B/2 (A06B-0411-B911)
3000B/4 (A06B-0411-B811)
MAGNET PLATE
COIL SLIDER

MAGNETIC
POLE
SENSOR
SECTION A-A

COOLING TUBE
11/16" - 16 UNIFIED EXTERNAL THREAD (2)
FOR COUPLING MANUFACTURED BY PARKER
(#6-LHB3)

THERMOSTAT CONNECTOR

POWER LINE TERMINAL

TAPPED HOLE FOR MOUNTING M8×1.25 (12)

- Side view (reference drawing for installation)

NOTE
1 To bring a corner of the coil slider into intimate contact with a peripheral part, recess
the corner of the part by 0.2 to 0.3.
2 This slider contains a terminal for connecting power lines and a connector for
connecting a thermostat. For details, see Part III, "HANDLING, DESIGN, AND
INSTALLATION."
3 This drawing contains a magnetic pole sensor. When an absolute linear encoder is
used, the magnetic pole sensor is not required.
4 Always read and understand Part III, "HANDLING, DESIGN, and INSTALLATION,"
before handling or installing the motor.

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

6000B/2 (A06B-0412-B911)
6000B/4 (A06B-0412-B811)
MAGNET PLATE
COIL SLIDER

MAGNETIC
POLE SECTION A-A
SENSOR

COOLING TUBE
11/16" - 16 UNIFIED EXTERNAL THREAD (2)
FOR COUPLING MANUFACTURED BY
PARKER (#6-LHB3)

THERMOSTAT CONNECTOR

TAPPED HOLE FOR MOUNTING M8×1.25 (18)

POWER LINE TERMINAL

NOTE
1 To bring a corner of the coil slider into intimate contact with a peripheral part, recess
the corner of the part by 0.2 to 0.3.
2 This slider contains a terminal for connecting power lines and a connector for
connecting a thermostat. For details, see Part III, "HANDLING, DESIGN, AND
INSTALLATION."
3 This drawing contains a magnetic pole sensor. When an absolute linear encoder is
used, the magnetic pole sensor is not required.
4 The side view is the same as for the 3000B/2 and 3000B/4.
5 Always read and understand Part III, "HANDLING, DESIGN, and INSTALLATION,"
before handling or installing the motor.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

9000B/2 (A06B-0413-B911)
9000B/4 (A06B-0413-B811)
MAGNET PLATE
COIL SLIDER

SECTION A-A
MAGNETIC
POLE SENSOR
COOLING TUBE
11/16" - 16 UNIFIED EXTERNAL THREAD (2)
FOR COUPLING MANUFACTURED BY PARKER (#6-LHB3)

THERMOSTAT CONNECTOR

TAPPED HOLE FOR POWER LINE TERMINAL

MOUNTING M8×1.25 (30)

NOTE
1 To bring a corner of the coil slider into intimate contact with a peripheral part, recess
the corner of the part by 0.2 to 0.3.
2 This slider contains a terminal for connecting power lines and a connector for
connecting a thermostat. For details, see Part III, "HANDLING, DESIGN, AND
INSTALLATION."
3 This drawing contains a magnetic pole sensor. When an absolute linear encoder is
used, the magnetic pole sensor is not required.
4 The side view is the same as for the 3000B/2 and 3000B/4.
5 Always read and understand Part III, "HANDLING, DESIGN, and INSTALLATION,"
before handling or installing the motor.

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

15000C/2 (A06B-0414-B901)
15000C/3 (A06B-0414-B811)
MAGNET PLATE
COIL SLIDER

SECTION A-A

MAGNETIC POLE SENSOR

COOLING TUBE
11/16" - 16 UNIFIED EXTERNAL THREAD (2)
FOR COUPLING MANUFACTURED BY PARKER (#6-LHB3)

THERMOSTAT CONNECTOR

TAPPED HOLE FOR MOUNTING M8×1.25 (33)

POWER LINE TERMINAL

- Side view (reference drawing for installation)

- 27 -
2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

- Thermostat connector (standard accessory)

COOLING TUBE

MAGNETIC POLE SENSOR MOUNTING SECTION

(FOR INCREMENTAL LINEAR ENCODER)

THERMOSTAT CONNECTOR(ACCESSORY)

POWER LINE TERMINAL

NOTE
1 This connector is for the 3000B, 6000B, 9000B, and
15000C and supplied with the coil slider. It is not
supplied with other models.
2 The reference dimension, 55, is enclosed in
parentheses. The actual dimension may differ from
the reference dimension by about 1 to 2 mm. Design
the machine with considering the margin.
3 If the thermostat cable is bent at a distance of up to
55 mm from the connector, the connector may not
deliver dripproof performance.
4 To ensure appropriate waterproof performance, use
an appropriate cable. For details of applicable
cables, see Part III, "HANDLING, DESIGN, and
INSTALLATION."

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.4.2 Magnet Plate

WARNING
Mishandling a magnet plate may be highly
dangerous, resulting in a fatal accident. Read and
thoroughly understand Part III, "HANDLING,
DESIGN, and INSTALLATION," before handling the
magnet plate and strictly observe the cautions when
handling it.

For 300D/4, 600D/4, 900D/4 (Magnet plate D)

A06B-0423-B931 (Length 30mm)
A06B-0423-B933 (Length 120mm)
2 - 5.5-DIA THROUGH 8 - 5.5-DIA THROUGH
9-DIA COUNTERBORE, DEPTH: 5.5 9-DIA COUNTERBORE, DEPTH: 5.5

NOTE NOTE

A06B-0423-B931 A06B-0423-B933
Mass: 0.12kg Mass: 0.45kg

NOTE
1 These magnet plates are dedicated to the 300D/4,
600D/4, and 900D/4. They cannot be used for other
models. Use the above two types of magnet plates in
combination according to the required axis length
(track length).
2 A white marking is made on the surface (black resin
side) at the N-pole end of each magnet plate above.
(Marked with a circle in the above drawing.)

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

For 1500A/4 (Magnet plate A)

A06B-0410-B931 (Length 240mm)
A06B-0410-B932 (Length 420mm)
A06B-0410-B933 (Length 600mm)
A06B-0410-B934 (Length 960mm)
8.5-DIA THROUGH, 14-DIA COUNTERBORE, DEPTH: 9, A PLACES

DATUM PLANE

90 EQUIDISTANT PITCH

MARKING "N" (ONLY ON INDICATED SIDE)

Number of through
Length: L (mm) Mass (kg)
holes: A (places)
239 6 2.5
419 10 4.5
599 14 6
959 22 10

NOTE
These magnet plates are dedicated to the 1500A/4.
They cannot be used for other models. Use the above
four types of magnet plates in combination according
to the required axis length (track length).

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

For 3000B/2, 3000B/4, 6000B/2, 6000B/4, 9000B/2, 9000B/4 (Magnet plate B)

A06B-0413-B931 (Length 240mm)
A06B-0413-B932 (Length 420mm)
A06B-0413-B933 (Length 600mm)
A06B-0413-B934 (Length 960mm)
8.5-DIA THROUGH, 14-DIA COUNTERBORE, DEPTH: 9, A PLACES

DATUM PLANE

90 EQUIDISTANT PITCH

MARKING "N" (ONLY ON INDICATED SIDE)

Number of through
Length: L (mm) Mass (kg)
holes: A (places)
239 9 4.5
419 15 8
599 21 11.5
959 33 18

NOTE
These magnet plates are dedicated to the 3000B/2,
3000B/4, 6000B/2, 6000B/4, 9000B/2, and 9000B/4.
They cannot be used for other models. Use the above
four types of magnet plates in combination according
to the required axis length (track length).

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

For 15000C/2, 15000C/3

A06B-0414-B921 (Length 240mm)
A06B-0414-B922 (Length 420mm)
A06B-0414-B923 (Length 600mm)
A06B-0414-B924 (Length 960mm)
8.5-DIA THROUGH, 14-DIA COUNTERBORE, DEPTH: 9, A PLACES

DATUM PLANE

90 EQUIDISTANT PITCH

MARKING "N" (ONLY ON INDICATED SIDE)

Number of through
Length: L (mm) Mass (kg)
holes: A (places)
239 9 6
419 15 10
599 21 15
959 33 23

NOTE
These magnet plates are dedicated to the 15000C/2
and 15000C/3. They cannot be used for other
models. Use the above four types of magnet plates in
combination according to the required axis length
(track length).

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.4.3 Cooling Plate

For 300D/4 (A06B-0423-K001)

4 - 5.5-DIA THROUGH

Material:
Plate: Aluminum
Tube: Deoxidized copper phosphorus seamless tube. Outside
diameter: 6.35 mm (1/4 inches) Wall thickness: 0.6 mm
Mass: 0.15 kg

NOTE
This cooling plate is dedicated to the 300D/4. It
cannot be used for other models. For installation of a
cooling plate, see Part III, "HANDLING, DESIGN, and
INSTALLATION."

For 600D/4 (A06B-0423-K002)

8 - 5.5-DIA THROUGH

Material:
Plate: Aluminum
Tube: Deoxidized copper phosphorus seamless tube. Outside
diameter: 6.35 mm (1/4 inches) Wall thickness: 0.6 mm
Mass: 0.2 kg

NOTE
This cooling plate is dedicated to the 600D/4. It
cannot be used for other models. For installation of a
cooling plate, see Part III, "HANDLING, DESIGN, and
INSTALLATION."
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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

For 900D/4 (A06B-0423-K003)

10 - 5.5-DIA THROUGH

Material:
Plate: Aluminum
Tube: Deoxidized copper phosphorus seamless tube. Outside
diameter: 6.35 mm (1/4 inches) Wall thickness: 0.6 mm
Mass: 0.25 kg

NOTE
This cooling plate is dedicated to the 900D/4. It
cannot be used for other models. For installation of a
cooling plate, see Part III, "HANDLING, DESIGN, and
INSTALLATION."

- Spacer (common to the A06B-0423-K001, A06B-0423-K002, and A06B-0423-K003)

A cooling plate is supplied with two spacers of this type. To use a
magnetic pole sensor (that is, to use an incremental linear encoder) for
the 300D/4, 600D/4, or 900D/4, mount these spacers on the magnetic
pole sensor. They are not used when an absolute linear encoder is
used. For details, see Part III, "HANDLING, DESIGN, and
INSTALLATION."

2 - 5.5-DIA THROUGH

MATERIAL : ALMINIUM

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.4.4 Magnetic Pole Sensor

NOTE
To use an incremental linear encoder, a magnetic
pole sensor is required. A position detection circuit
described in the following subsection is also required.
When an absolute linear encoder is used, neither is
required.

For 300D/4, 600D/4, 900D/4 (A860-0331-T002)

4 - M5 THROUGH

APPROX.4m
TO : POSITION DETECTION CIRCUIT

Mass: 0.15 kg (body only, not including the cable)

NOTE
A cable 4 m long is directly connected. If the cable is
too long, form loops in the cable or cut it.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

For 1500A/4 to 15000C/3 (A860-0331-T001)

6.6-DIA

TO : POSITION DETECTION CIRCUIT

APPROX.83

WHEN CABLE IS CONNECTED

Mass: 0.12 kg (body only, not including the cable)

NOTE
To connect this detector and position detection circuit,
prepare cable K4. For details of cable K4, see Section
2.5, "CABLES."

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.4.5 Position Detection Circuit

One-output type (A860-0333-T001)

Two-output type (A860-0333-T002)

NOTE
To use an incremental linear encoder, a position
detection circuit is required. A magnetic pole sensor
described in the previous subsection is also required.
When an absolute linear encoder is used, neither is
required.
APPROX.70 APPROX.56

TO : LINEAR ENCODER

TO : MAGNETIC POLE SENSOR

Mass: 0.7 kg (body only, not including the cable)

NOTE
1 Use the one-output type (A860-0333-T001) in a
typical configuration. Use the two-output type (A860-
0333-T002) only when signals must branch off from
one linear encoder.
2 To connect the position detection circuit to a magnetic
pole sensor, prepare cable K4. The magnetic pole
sensor dedicated to the 300D/4, 600D/4, and 900D/4
is supplied with a cable.
3 For the cable between the linear encoder and position
detection circuit, contact the relevant linear encoder
manufacturer.
4 To connect the position detection circuit to a
CNC/amplifier, prepare cable K2.
5 For details of each cable, see Section 2.5, "CABLES."

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.4.6 Parts for Connecting a Cooling Tube

This subsection explains supplies (dedicated tool and couplers) for

connecting the cooling tube in the 3000B/2 to 15000C/3 Linear Motor
to an external cooling unit.

NOTE
You may create these parts by referencing the
dimensions indicated below. FANUC does not
guarantee the performance of a part you create,
however. Use a part you create on your own
responsibility.

Dedicated wrench (A06B-0413-K202)

This dedicated wrench is used to secure the base of the coil slider so
that it does not move during tube connection.

Material: SUS304, T = 3

NOTE
Mishandling this tool may damage the coil slider.
Before using this tool, see Part III, "HANDLING,
DESIGN, and INSTALLATION."

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

Coupler for transforming an inch screw to taper pipe thread R1/4 (external
thread) (A06B-0413-K203)
This coupler transforms the base for connecting an inch screw that is
mounted on a coil slider to taper thread R1/4 (external thread). A set
of two parts: A06B-0413-K203(A) and A06B-0413-K203(B) is
supplied. Use these parts in combination.

A06B-0413-K203(A)

Material: Brass

A06B-0413-K203(B)

Material: Brass

NOTE
The order drawing number is A06B-0413-K203. This
contains both of A06B-0413-K203(A) and A06B-
0413-K203(B). Before using them, see Part III,
"HANDLING, DESIGN, and INSTALLATION."

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

Coupler for transforming an inch screw to taper pipe thread R1/8 (external
thread) (A06B-0413-K204)
This coupler transforms the base for connecting an inch screw that is
mounted on a coil slider to taper thread R1/8 (external thread). A set
of two parts: A06B-0413-K204(A) and A06B-0413-K204(B) is
supplied. Use these parts in combination.

A06B-0413-K204(A)

Material: Brass

A06B-0413-K204(B)

PT1/8 : USABLE DEPTH 8

Material: Brass

NOTE
The order drawing number is A06B-0413-K203. This
contains both of A06B-0413-K204(A) and A06B-
0413-K204(B). Before using them, see Part III,
"HANDLING, DESIGN, and INSTALLATION."

- 40 -
B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.5 CABLES

2.5.1 Overview of Connection

A typical linear motor cable connection is shown below:

Thermostat line

Servo amplifier
Magnet plate Coil slider Magnetic pole sensor FSSB

Power line

Position detection circuit

Linear encoder

Cable
Connection Ordering information and remarks
number
Between the CNC and For details, refer to the related CNC
K1
servo amplifier connection manual.
Connects the CNC system using a TYPE B
Between the position interface or the servo amplifier using an
K2 detection circuit and FSSB interface.
CNC/servo amplifier Ordering information: A06B-6061-K802
Length: 7 m
Between the motor and For details, see Part III, "HANDLING,
K3
servo amplifier (power line) DESIGN, and INSTALLATION."
For the 300D/4, 600D/4, or 900D/4, this
cable is supplied with the dedicated
Between the magnetic pole
magnetic pole sensor. For other models,
K4 sensor and position
prepare this cable.
detection circuit
Ordering information: A06B-6061-K801
Length: 7 m
Between the linear encoder
Contact the relevant linear encoder
K5 and position detection
manufacturer or dealer.
circuit
For details, see Part III, "HANDLING,
K6 Thermostat lead wire
DESIGN, and INSTALLATION."

NOTE
FANUC does not recommend use of relayed signal
lines. Relay signal lines on your own responsibility if
required. If it is absolutely necessary to relay signal
lines, use connectors and connect a shield.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.5.2 Cable K2 (for Position Detection Circuit A860-0333-T001)

CNC/servo amplifier Position detection circuit

Grounded to the ground bar.

Connector: FI40-2015S Connector: RM21WTP-15S-(8)

Connector cover: FI-20-CV Manufacturer: Hirose Electric Co., Ltd.
Manufacturer: Hirose Electric Co., Ltd.

Used wires
2
Nominal cross section:0.5mm , at least three
0V, 5V
wires each
2
SD1, *SD1, REQ, *REQ Nominal cross section:0.18mm , twisted pair

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.5.3 Cable K2 (for Position Detection Circuit A860-0333-T002)

CNC/servo amplifier Position detection circuit

Axis (2N+1)
(DSP N+1)
N: Natural number Grounded to the ground bar.

Grounded to the ground bar.

Connector: FI40-2015S Connector: RM21WTP-15S-(8)

Connector cover: FI-20-CV Manufacturer: Hirose Electric Co., Ltd.
Manufacturer: Hirose Electric Co., Ltd.

Used wires
2
0V, 5V Nominal cross section:0.5mm , at least three
wires each
SD1, *SD1, SD2, *SD2, REQ, 2
Nominal cross section:0.18mm , twisted pair
*REQ

NOTE
SD2 and *SD2 are output to another driver with the
same logic signals as for SD1 and *SD1. In ordinary
cases, SD1 and *SD1 are connected to an axis
having an odd number of a DSP different from that
for SD2 and *SD2.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.5.4 Cable K4

Magnetic pole sensor Position detection circuit

Connector: RM15WTP-10S-(9) Connector: RM15WTP-10S-(9)

Manufacturer: Hirose Electric Co., Ltd. Manufacturer: Hirose Electric Co., Ltd.

Used wires
2
0V, 5V Nominal cross section:0.5mm , at least three wires each
2
CA, *CA, CB, *CB Nominal cross section:0.18mm , twisted pair

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.5.5 Cable K5
Linear encoder Position detection circuit

Connector: RM15WTP-12P-(dia)
Manufacturer: Hirose Electric Co., Ltd.

NOTE
Use the cable supplied with the linear encoder or
specified by the linear encoder manufacturer.
Specify dia (mm) at the end of the connector
specification according to the diameter of the cable
to be used. The dia value is between 6 to 9,
however.

2.5.6 Cable K6
Coil slider Cable K6

Not used

Connector: KMC9BPT-4P(01)
Manufacturer: Hirose Electric Co., Ltd.

NOTE
The above connector is for the 3000B/2, 3000B/4,
6000B/2, 6000B/4, 9000B/2, 9000B/4, 15000C/2,
and 15000C/3. Prepare the cable. For other models,
the thermostat lead wire juts out the coil slider.
Connect the lead wire to the PMC.

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

2.5.7 Cable Length Design

Design the cable length so that the voltage drop by cables K2

and K4 and that by cables K2 and K5 are 0.2 V or less.

NOTE
When designing the cable length, note that the sum
of the current consumption of the position detection
circuit, magnetic pole sensor, and linear encoder in a
linear motor flows through cable K2.

Sample calculations
When HEIDENHAIN LS486 is used and the length of cable K2 is
determined to be 10 m by design:
- Linear encoder LS486 (Maximum current consumption: 0.15 A)
- Position detection circuit A860-0333-T001 (Maximum current
consumption: 0.28 A)
- Magnetic pole sensor A860-0331-T001 (Maximum current
consumption: 0.05 A)
- Conductor resistance of a copper wire with a nominal cross
section of 0.5 mm2 at 20°C: 38.7 × 10-3 Ω/m

<1> Voltage drop by cable K2: Vd (V)

When three copper wires having a nominal cross section of 0.5
mm2 are connected, the voltage drop is:
Vd=(0.28+0.05+0.15) × {(38.7×10-3÷3) × (10×2)} 0.124(V)
according to V = I × R.
* (10 × 2) in the expression means both ways between 5 and
0 V.

<2> Maximum length of cable K4: L1 (m)

To suppress the voltage drop to 0.2 V or less, the cable length
must be designed so that the voltage drop by cable K4 is 0.076 V
or less.
When two copper wires having a nominal cross section of 0.5
mm2 are connected, the maximum cable length is:
L1=[{(0.2-0.124) ÷0.05}÷ (38.7×10-3÷2)] ÷2 3.93m
according to conductor length (m) = resistance (Ω) ÷ conductor
resistance (Ω/m).

<3> Maximum length of cable K5: L2

L2=[{(0.2-0.124) ÷0.15} ÷38.7×10-3] ÷2 6.5m

NOTE
The standard LS486 cable uses two copper wires
having a nominal cross section of 0.25 mm2 for
connecting each of 5 and 0 V. At this time, the
conductor resistance of the wires is 38.7 × 10-3 Ω/m.

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

2.6 APPLICABLE AMPLIFIERS

The FANUC Linear Motor series is driven using the FANUC

servo amplifier α and β series that support the FSSB
interface.

CAUTION
Combining these motors with any amplifier other than
listed below may damage the motor or amplifier.

NOTE
1 For details of amplifiers, refer to the relevant
amplifier descriptions.
2 For selection of a power supply module (PSM), see
Section 2.2, "SPECIFICATION LIST," and Section
2.3, "SELECTING A POWER SUPPLY MODULE
(PSM)," in Part II, "CONFIGURATIONS AND
SELECTION."
3 The applicable amplifiers listed below are
representative examples. You can also use an
amplifier which is not listed when the maximum
current and rated current of the amplifier satisfy the
conditions. In any case, the motor output may be
limited because the used amplifier cannot exceed its
limit, however. Note that when an amplifier which is
not listed below is used, the drive parameters must
also be changed.

For 300D/4
Connectable
Type of amplifier Name Specification
axis
SVM1-20 A06B-6096-H102
SVM2-12/20 A06B-6096-H202 M axis
SVM2-20/20 A06B-6096-H203 L and M axes
SVM2-20/40 A06B-6096-H205 L axis
α series SVM3-12/12/20 A06B-6096-H302 N axis
servo amplifier module SVM3-12/20/20 A06B-6096-H303 M and N axes
L, M, and N
SVM3-20/20/20 A06B-6096-H304
axes
SVM3-12/20/40 A06B-6096-H306 M axis
SVM3-20/20/40 A06B-6096-H307 L and M axes
β series
SVU-20 A06B-6093-H112
servo amplifier unit

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2.SPECIFICATIONS SPECIFICATIONS B-65222EN/03

For 600D/4 and 900D/4

Connectable
Type of amplifier Name Specification
axis
α series SVM1-40L A06B-6096-H104
servo amplifier module SVM2-40L/40L A06B-6096-H209 L,M axis
β series
SVU-40 A06B-6093-H113
servo amplifier unit

For 1500A/4 and 3000B/2

Connectable
Type of amplifier Name Specification
axis
α series SVM1-40L A06B-6096-H104
servo amplifier module SVM2-40L/40L A06B-6096-H209 L and M axes
α series
SVU1-40 A06B-6089-H104
servo amplifier unit

For 3000B/4
Connectable
Type of amplifier Name Specification
axis
SVM1-80 A06B-6096-H105
α series
SVM2-40/80 A06B-6096-H207 M axis
servo amplifier module
SVM2-80/80 A06B-6096-H208 L and M axes

For 6000B/2
Connectable
Type of amplifier Name Specification
axis
SVM1-80 A06B-6096-H105
α series
SVM2-40/80 A06B-6096-H207 M axis
servo amplifier module
SVM2-80/80 A06B-6096-H208 L and M axes
α series
SVU1-80 A06B-6089-H105
servo amplifier unit

For 6000B/4, 9000B/4, and 15000C/2

Connectable
Type of amplifier Name Specification
axis
α series
SVM1-240 A06B-6096-H107
servo amplifier module

For 9000B/2
Connectable
Type of amplifier Name Specification
axis
α series
SVM1-130 A06B-6096-H106
servo amplifier module
α series
SVU1-130 A06B-6089-H106
servo amplifier unit

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B-65222EN/03 SPECIFICATIONS 2.SPECIFICATIONS

For 15000C/3
Connectable
Type of amplifier Name Specification
axis
α series
SVM1-360 A06B-6096-H108
servo amplifier module

NOTE
1 For details of the α series servo amplifier modules, refer
to the latest version of the descriptions (B-65162E).
2 For details of the α series servo amplifier units, refer to
the latest version of the descriptions (B-65192EN).
3 To use the latest servo control technology HRV3, the
servo software, servo axis control card, and servo
amplifier compatible with HRV3 are required. For details,
refer to B-65150E/04-010 or later version of the
descriptions.

- 49 -
II. CONFIGURATIONS AND SELECTION
B-65222EN/03 CONFIGURATIONS AND SELECTION 1.SYSTEM CONFIGURATION

1 SYSTEM CONFIGURATION

- 53 -
1.SYSTEM CONFIGURATION CONFIGURATIONS AND SELECTION B-65222EN/03

1.1 INCREMENTAL LINEAR ENCODER SYSTEM

For the FANUC Linear Motor series, motors are controlled using
feedback signals from a linear encoder. This section explains a system
in which an incremental linear encoder is used.

1.1.1 Example of Configuration

For a system in which an incremental linear encoder is used, the

following devices are required to configure a motor, in addition to a
coil slider and magnet plate.

Magnetic pole sensor

The magnetic pole sensor is a sensor to simply determine the position
of the motor for each magnetic pole before the zero point is checked
at start (the reference mark signal is detected).

Position detection circuit

The position detection circuit converts signals output from the
magnetic pole sensor and linear encoder to FANUC serial interface
signals and outputs the converted signals to the servo amplifier or
CNC. This circuit internally multiplies a signal output from the
encoder by 512 and outputs the multiplied signal. For examples, when
the scale pitch is 20 µm, the resolution is about 0.04 µm.

NOTE
For the specifications of the magnetic pole sensor
and position detection circuit, see Part I,
"SPECIFICATIONS."

An example of a typical system configuration is shown below:

Thermostat line

Servo amplifier
Magnet plate Coil slider Magnetic pole sensor FSSB

Power line

Position detection circuit

Linear encoder

This system requires detection of the zero point whenever the power
to the NC is turned on or off.

NOTE
For how to install the linear encoder, see Part III,
"HANDLING, DESIGN, AND INSTALLATION."
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B-65222EN/03 CONFIGURATIONS AND SELECTION 1.SYSTEM CONFIGURATION

1.1.2 Applicable Linear Encoder

An incremental linear encoder to be used for the FANUC Linear

Motor series must satisfy the following specifications:
- The output from the scale is an analog signal at 1 Vp-p.
- Reference mark signals (such as the Z-phase signal) are output
only from one device.
If reference mark signals are output from two or more devices, an
alarm may occur when the same signal is detected for the second
time.
The following table lists typical incremental linear encoders that can
currently be combined with the FANUC Linear Motor series.

Manufacturer Signal pitch Resolution Maximum speed Effective stroke

Manufacturer
specification µm)
(µ µm)
(µ (m/min) (mm)
LS486 20 0.04 120 70 - 2040
LS186 20 0.04 120 240 - 3040
LB382 40 0.08 120 440 - 30040
LF183 4 0.008 48 140 - 3040
LF481 4 0.008 48 50 - 1220
LT181 20 0.04 120 35 or 60
HEIDENHAIN LIP481R 2 0.004 24 10 - 420
LIF181 4 0.008 48 70 - 3040
LIDA181 40 0.08 480 220 - 2040
LIDA185 40 0.08 480 140 - 30040
LIDA187 40 0.08 480 240 - 6040
LIDA189 40 0.08 480 70 - 2000
PP281R 4 0.008 48 68 × 68
AT211 * 20 0.04 120 100 - 1500
Mitutoyo
AT402 20 0.04 120 100 - 2000
RENISHAW RGH22 20 0.04 120 50000
SH12 20 0.04 120 70 - 1240
SH52 20 0.04 120 120 - 2270
Sony Precision SL700 800 2 50 50 - 30000
Technology 8 0.02 48 100 - 2200
FMV
20 0.04 120 100 - 2200
FTV 20 0.04 120 75 - 1200
Optodyne LDS 40.513167 0.08 240 1016 - 50800
* Specify the analog output special type.

NOTE
1 Optodyne LDS is Laser Doppler encoder.
2 The "resolution" in the above table indicates the value internally multiplied by the
position detection circuit. The last digit is rounded off.
3 An incremental linear encorder must output only one reference mark signal. Before
ordering a linear encoder, designate this requirement to the relevant linear encoder
manufacturer.
4 Linear encoder manufacturers are responsible for the specifications, performance,
guarantee, and other items of their linear encoders. For details, contact the relevant
manufacturer.

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1.SYSTEM CONFIGURATION CONFIGURATIONS AND SELECTION B-65222EN/03

1.2 ABSOLUTE LINEAR ENCODER SYSTEM

For the FANUC Linear Motor series, motors are controlled using
feedback signals from a linear encoder. This section explains a system
in which an absolute linear encoder is used.

1.2.1 Example of Configuration

When an absolute linear encoder is used, the absolute position is

always determined. For this reason, magnetic pole sensor and position
detection circuit are not required, which are required for an
incremental linear encoder system. Consequently, the system
configuration can be made simple. Currently available absolute linear
encoders can handle a stroke of up to 3 m, however.
An example of a typical system configuration is shown below:
Thermostat line

Servo amplifier
Magnet plate Coil slider FSSB

Power line

Linear encoder

1.2.2 Applicable Linear Encoder

An absolute linear encoder to be used for the FANUC Linear Motor

series must conform to the FANUC serial interface. If not, the
absolute linear encoder cannot be used.
The following table lists absolute linear encoders that can currently be
combined with the FANUC Linear Motor series.

Maximum
Manufacturer Signal pitch Effective stroke
Manufacturer speed
specification µm)
(µ (mm)
(m/min)
LC191F 0.1 120 240 – 3040
HEIDENHAIN
LC491F 0.05 (0.1) * 120 70 – 2040
AT353 0.05 120 100 – 3000
Mitutoyo
AT553 0.05 120 100 – 1500
* Two models of specifications of 0.05 µm and 0.1 µm are
distributed.

NOTE
Linear encoder manufacturers are responsible for
the specifications, performance, guarantee, and
other items of their linear encoders. For details,
contact the relevant manufacturer.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 1.SYSTEM CONFIGURATION

1.3 MOTOR ARRANGEMENT AND DRIVING METHODS

1.3.1 When the Coil Slider Is Used as the Movable Part and When
the Magnet Plate Is Used as the Movable Part

When installing a linear motor on a machine, you can select using the
coil slider as the movable part and the magnet plate as the stationary
part or using the magnet plate as the movable part and the coil slider
as the stationary part. Select either way that is optimum for the
configuration of the machine using linear motors.

When the coil slider is used as the movable part and the magnet plate is used
as the stationary part

- Advantages
A long-stroke system can easily be configured. As many magnet
plates as required for the length (effective stroke + length of the coil
slider +α) can be arranged to secure the required stroke.

- Disadvantages
The cables and cooling tube must also be movable. Carefully select
these parts, in particular, for a machine requiring high-speed
operation. When the stroke exceeds 3 m, no absolute linear encoder
can be selected currently.

When the magnet plate is used as the movable part and the coil slider is used
as the stationary part

- Advantages
The cables and cooling tube can be fixed. So, it is not necessary to
consider movability of these parts. Only the magnet plate is the
movable part and is lighter than the coil slider. So, it is easy to
implement operation at a higher speed and acceleration. Consequently,
this method is optimum for a short-stroke machine which oscillates
in short cycles.

- Disadvantages
This method is not suitable for a long-stroke machine because an axis
space of a length of at least double the effective stroke is always
required.

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1.SYSTEM CONFIGURATION CONFIGURATIONS AND SELECTION B-65222EN/03

1.3.2 Parallel Arrangement, Serial Arrangement, and Symmetrical

Arrangement

One feature of linear motors is that multiple motors (coil sliders) can
be installed along one axis. For example, when the force obtained by
one motor is insufficient, two motors can be arranged along the same
axis to ensure the double force. This subsection introduces several
typical types of linear motor arrangements.

NOTE
Explanation in this subsection assumes that the coil
slider is used as the movable part. When the magnet
plate is used as the movable part, each arrangement
based on the same concept is available. There are
rules for the orientation and position of a motor,
however. For details of installation, see Part III,
"HANDLING, DESIGN, AND INSTALLATION."

Parallel arrangement
Two or more linear motors are arranged in parallel. As many magnet
plate tracks as the number of coil sliders are required. The length per
track is the same as that when one linear motor is used. The following
figure shows an example of arranging two motors in parallel:
Movable table
Coil slider #1
Magnet plate track #1

Magnet plate track #2

Coil slider #2

Serial arrangement
Two or more linear motors are arranged in serial. Only one magnet
plate track is required regardless of the number of coil sliders. It is
very difficult to arranger by using a ball screw and a rotation motor.
The length of the magnet plate track depends on the number of coil
sliders installed, however. The following figure shows an example of
arranging two linear motors in serial:
Movable table Magnet plate track

Coil slider #1 Coil slider #2

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B-65222EN/03 CONFIGURATIONS AND SELECTION 1.SYSTEM CONFIGURATION

Combination of parallel and serial arrangements

Three or more linear motors can be arranged using the method of
combining parallel and serial arrangements. The following figure
shows an example of arranging four linear motors using this method:
Movable table Magnet plate track #1

Coil slider #1 Coil slider #2

Coil slider #3 Coil slider #4

Magnet plate track #2

Symmetrical arrangement
The FANUC Linear Motor series has the magnet attraction about
three times as strong as the maximum force. The magnetic attraction
always acts between the coil slider and magnet plate. For example, for
the 6000B/4, a force of about 1.8 tons always acts. The magnetic
attraction cannot be ignored for machine design which aims at
lightness and rigidity in many cases. The symmetrical arrangement
cancels out the magnetic attraction. There are two typical symmetrical
arrangement methods.
Coil slider #1
Magnet plate track #1

Machine base

Magnet plate track #2

Coil slider #2

The side view of a motor arrangement is shown above. This is an

example of arranging magnet plates back to back.
Machine base

Coil slider #1
Magnet plate track #1

Magnet plate track #2

Coil slider #2

Machine base

This is an example of arranging coil sliders back to back. With either

method, the magnetic attraction can be canceled out. Either
symmetrical arrangement can be combined with the parallel
arrangement and serial arrangement introduced above.

- 59 -
1.SYSTEM CONFIGURATION CONFIGURATIONS AND SELECTION B-65222EN/03

1.3.3 Driving Two Motors

If you want to drive two motors along one axis, select one of the
following control methods according to the connection rigidity
between motors.

NOTE
This subsection gives typical examples when an
incremental linear encoder is used. When an
absolute linear encoder is used, the magnetic pole
sensor and position detection circuit in each figure
are not required. The rules may not always apply to
the actual machine configuration. For details, contact
FANUC.

When the connection rigidity between motors is high

In ordinary cases, torque tandem control is exercised. For linear
motors, velocity tandem control or simple synchronous control can
also be exercised by using common feedback signals in one DSP. In
this case, only one linear encoder is required. The following is a block
diagram for torque tandem control. The same configuration is used for
velocity tandem control and simple synchronous control.

CNC Position detection

circuit
Magnetic pole
sensor
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encoder
High connection
Torque rigidity between
command motors

Axis #2 Servo amplifier #2 Linear motor #2

When the two-output type of position detection circuit is used in an

incremental linear encoder system, control as shown below is also
available:

CNC Position detection Output #1

circuit
Magnetic pole Position
sensor detection
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encoder circuit
High connection Output #2
Position rigidity between
motors
Axis #2 Servo amplifier #2 Linear motor #2

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B-65222EN/03 CONFIGURATIONS AND SELECTION 1.SYSTEM CONFIGURATION

When the connection rigidity between motors is low

The motors are driven with simple synchronous control based on

separate position control for each axis or complete synchronous
control. In this case, two linear encoders are required. The following
is a block diagram for simple synchronous control:
CNC Position detection
circuit#1
Magnetic pole
sensor #1
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encoder #1
Low connection
Position
rigidity between
command
motors
Axis #2 Servo amplifier #2 Linear motor #2 Linear encoder #2
Magnetic pole
sensor #2
Position detection
circuit#2

When the connection rigidity between motors is medium

If the motors cannot be driven successfully with the method

introduced on the previous page, they may be driven with velocity
tandem control using two linear encoders. The following is a block
diagram for velocity tandem control:
CNC Position detection
circuit#1
Magnetic pole
sensor #1
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encoder #1
Medium
Velocity connection rigidity
command between motors

Axis #2 Servo amplifier #2 Linear motor #2 Linear encoder #2

Magnetic pole
sensor #2
Position detection
circuit#2

1.3.4 Driving Three or More Motors

Use three or more motors with combining control methods introduced

in the previous subsection. The following shows an example of a
configuration for driving four motors with torque tandem control and
simple synchronous control in combination. In this example, the two-
output type of position detection circuit is used for using signals from
one linear encoder for all motors.
CNC Output #1
Magnetic pole
sensor Position
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encocer detection
High connection
circuit
Torque rigidity between Output #2
command motors

Axis #2 Servo amplifier #2 Linear motor #2

High connection
DSP#1 rigidity between
motors

Axis #3 Servo amplifier #3 Linear motor #3

High connection
Torque rigidity between
command motors

Axis #4 Servo amplifier #4 Linear motor #4

DSP#2

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1.SYSTEM CONFIGURATION CONFIGURATIONS AND SELECTION B-65222EN/03

1.3.5 Driving Multiple Motors with a Large-Capacity Amplifier

With the methods introduced above, one motor is combined with one
amplifier. Combining one motor with one amplifier is the best method
from control and motor protection viewpoints because current is
controlled individually. For a machine having many axes, however,
the number of axes available for the CNC may be insufficient because
as many hardware axes as the number of amplifiers are required. To
resolve this problem, a method for connecting multiple motors in
parallel and driving them with a large-capacity amplifier is available.
The following figure is a typical example of this method. Two motors
can be seen as one motor from the amplifier. Therefore, the number of
linear encoders is one and the number of required axes is also one.

CNC Magnetic pole

sensor Position detection
circuit
Axis #1 Servo amplifier #1 Linear motor #1 Machine Linear encoder

High connection
rigidity between
motors
Linear motor #2

NOTE
To drive multiple motors with one amplifier, special
installation and parameter settings different from
those used in ordinary cases are required. For
details, see Part III, "HANDLING, DESIGN, AND
INSTALLATION," and contact FANUC.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2 SELECTION METHODS

- 63 -
2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

2.1 COIL SLIDER SELECTION

A coil slider should be selected according to the following items.

NOTE
For information related to the motor specifications,
also see Part I, "SPECIFICATIONS."

2.1.1 Load Force

The load force means the whole load on a motor. That is, the weight
of the movable objects including the weight of the motor itself,
magnetic attraction between the coil slider and magnet plate, and
items related to the friction in the machine such as the friction
coefficient must be considered. This value is always required for
selecting a motor. An example of calculation is shown below:

- Motor model: 9000B/2

Movable part: Slider
Weight of the slider: 34 kg
Magnetic attraction: 27,000 N
- Weight of movable objects (not including the motor): 300 kg
- Friction coefficient: 0.02

When the above conditions are assumed:

Load force=í(300+34)×9.8+27000ý×0.02 605[N]

2.1.2 Required Maximum Force

The required maximum force means the force required for

implementing desired acceleration and maximum speed when the load
force described above is present. Make sure that the maximum force
in the motor specifications is not less than the required maximum
force. When checking the requirement, it is desirable to allow a
margin of about 10% by taking a load variation into account. An
example of calculation is shown below:
- Load force: 605 [N] as calculated in the previous subsection
- Acceleration: 1.5 G
- Maximum speed: 1.5 m/sec (90 m/min)
- Other conditions are the same as those listed in the previous
subsection.

When the above conditions are assumed:

Required maximum force= (300+34)×9.8×1.5+605 5515[N]

The maximum force of the 9000B/2 is 6,300 N at 1.5 m/sec as listed

in Part I, "SPECIFICATIONS," and therefore has a margin of 13.5%
for the required maximum force of 5,515 [N].

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2.1.3 Root Mean Square Force

The root mean square force means the root mean value of the force
required in one duty cycle. The root mean square force must not be
greater than the rated continuous force of the motor. If the root mean
square force exceeds the rated continuous force, the motor may
overheat. It is desirable to allow a margin of about 20% by taking a
load variation into account.

The rated continuous force of the motor varies depending on the type
of cooling method used for the motor (no cooling, air cooling, or
water cooling). It also varies depending on the heat dissipation and
other characteristics of the machine. Be extremely careful of force for
supporting frictional load and weight along a vertical axis because it
sometimes fluctuates largely. Even when the motor is at rest, it keeps
producing force to prevent drifting.

An example of calculation is shown below.

For explanation, a simple duty cycle as shown below is assumed.

After 0.2-second positioning for a 150-mm stroke, cutting is
performed for 5 seconds in the constant feed mode. It is assumed that
a cutting load (cutting reaction force) of 1,000 N is applied in the
direction of thrust during cutting. After cutting, the machine stops for
0.5 seconds. Other conditions are the same as those listed in
Subsections 2.1.1 and 2.1.2.

Positioning in the rapid traverse mode

Rate [m/s]

Cutting in the constant feed mode, cutting

load: 1,000 N

The machine stops. Time

[seconds]
0.05s

0.05s

0.1s 0.1s 5.0s 0.5s

1 cycle (5.8 seconds)

According to the above conditions, create a force distribution chart

for one cycle. The force distribution chart is made as follows:
Force [N]

5,515 N during ac cel erati on

5,515 N during
acceleration

4,305 N during deceleration

4,305 N during
deceleration

1,605 N during cutting at a constant

feedrate
605 N during stop Time
[seconds]
0.05s

0.05s

0.1s 0.1s 5.0s 0.5s

1 cycle (5.8 seconds)

5,515 N during acceleration is the required maximum force calculated

in Subsection 2.1.2. 4,305 N during deceleration is obtained as
follows:

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

Force required during deceleration=(300+34)×9.8×1.5-605 4305[N]

because the load force contributes to deceleration.

When the motor stops, it also keeps producing force to prevent

drifting, a load force of 605 N calculated in Subsection 2.1.1 is
required as the force.

The load during cutting is:

605+100=1605[N]
because a cutting reaction force of 1,000 N is added to the force
during stop as a load.

Consequently, the root mean square force is:

5515 2 × 0.15 + 4305 2 × 0.15 + 1605 2 × 5 + 605 2 × 0.5
1876[N ]
5.8

The continuous force of the 9000B/2 with air cooling used is 2,160 N
NOTE
as listed in Part I, "SPECIFICATIONS," and therefore the motor
can be used with an enough margin when air or water cooling is used.

NOTE
The rated continuous force varies depending on the
cooling method. For details of the values, see Part I,
"SPECIFICATIONS." These values also vary
depending on the actual cooling condition.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2.1.4 Overload Duty Characteristic

A linear motor can be used intermittently, even out of its rated

continuous operating area, when the maximum force is not exceeded.
The overload duty characteristic represents the duty ratio (%) and "on
time" for which the motor runs under a given overload condition. The
conditions for the "on time" and "off time" of the motor can be
calculated as follows:

<1> Obtain the overload ratio using the following expression:

Overload ratio = load force ( rated continuous force
Then, the duty ratio (%) and on time of the motor can be
determined from the overload ratio and overload duty cycle
characteristic curves (shown on the next and subsequent pages).

Example:
To run the 1500A/4 (no cooling) with a load force of 360 N
at very low speed for one minute:
Overload ratio = 360 ÷ 300 = 1.2 (120%)
because the rated continuous force of the 1500A/4 is 300 N.
From the overload duty characteristic curve for the 1500A/4
with no cooling, the duty ratio (%) is determined to be 68%
when the motor runs with an overload ratio of 120% for one
minute.

<2> Obtain the off time of the motor using the following expression.
Off time = on time × (100 ÷ duty ratio (%) - 1)

Example:
From the value obtained in the example in <1>:
Off time=1×(100÷68-1) 0.47 minutes (about 28 seconds)
Therefore, it is necessary to keep the motor stopped for at
least 28 seconds after it runs for one minute under the
conditions described above.

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

The following show the overload duty characteristic curves for each
motor.

300D4, 600D/4, 900D/4 No cooling

Duty (%)

On time (minutes)

300D4, 600D/4, 900D/4 Air cooling

Duty (%)

On time (minutes)

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

300D4, 600D/4, 900D/4 Water cooling

Duty (%)

On time (minutes)

1500A/4, 3000B, 6000B, 9000B, 15000C No cooling

Duty (%)

On time (minutes)

NOTE
The 3000B, 6000B, 9000B, and 15000C mean the 3000B/2 and 3000B/4, 6000B/2
and 6000B/4, 9000B/2 and 9000B/4, and 15000C/2 and 15000C/3, respectively.

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

1500A/4, 3000B, 6000B, 9000B, 15000C Air cooling

Duty (%)

On time (minutes)

1500A/4, 3000B, 6000B, 9000B, 15000C Water cooling

Duty (%)

On time (minutes)

NOTE
1 The 3000B, 6000B, 9000B, and 15000C mean the 3000B/2 and 3000B/4, 6000B/2
and 6000B/4, 9000B/2 and 9000B/4, and 15000C/2 and 15000C/3, respectively.
2 A drive amplifier used for the linear motor incorporates a thermal protection unit such
as a circuit breaker or thermal circuit. In addition to the conditions described above,
the thermal protection unit may restrict the use of the motor. Moreover, the software
used to control machining operation has a function of protecting the motor and
amplifier from short-time overload. This function may also restrict the use of the
motor.
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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2.1.5 Amount of Travel when Dynamic Brake is Applied

Because the FANUC Linear Motor is a synchronous motor, a dynamic

brake can be applied by short-circuiting the power wires. When an
emergency stop is used, for example, because of an abnormal
condition, a dynamic brake is put in effect.
When a dynamic brake is applied, the moving object coasts before it
comes to a complete stop. The coasting distance is calculated as
follows:

Coasting distance (m) = VM×(t1+t2)+MT×(A×VM+B×VM3)

where
VM: Motor speed (m/s)
t1+t2: Control delay time, usually about 0.05 s
MT: Weight of the moving object (kg)

A and B:
Values specific to each motor model, which are as listed below:

Motor model A B
-3 -3
300D/4 7.90×10 5.99×10
-3 -3
600D/4 3.95×10 3.00×10
-3 -3
900D/4 2.63×10 2.00×10
-3 -4
1500A/4 1.24×10 3.02×10
-4 -4
3000B/2, 3000B/4 5.32v10 1.79×10
-4 -5
6000B/2, 6000B/4 2.66×10 8.87×10
-4 -5
9000B/2, 9000B/4 1.77×10 5.97×10
-5 -5
15000C/2 7.34×10 3.75×10
-5 -5
15000C/3 7.27×10 2.39×10

Calculation example
The following calculation of a coasting distance that occurs when a
dynamic brake is applied assumes the selection conditions used in
Subsections 2.1.1 to 2.1.3.

Coasting distance(m)=
1.5×0.05+334× (1.77×10-4×1.5+5.97×10-5×1.53) 0.231(m)

NOTE
1 Add the coasting distance calculated as above to the
required length of the magnet plate that is obtained
according to the method described in the following
subsection.
2 When only the dynamic brake is used, the required
sufficient braking distance may not be obtained (the
linear motor may coast longer). In this case, add
auxiliary brake systems such as stoppers or
dampers at the ends of an axis and an external
mechanical brake to protect the machine.

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

2.2 MAGNET PLATE SELECTION

Magnet plates can be combined only with the motor models listed in
the following table.

Magnet Specification
Magnet plate
Motor model plate length drawing number of
type
(mm) the magnet plate
300D/4, 600D/4, D 30 A06B-0423-B931
900D/4 (Width 70mm) 120 A06B-0423-B933
240 A06B-0410-B931
A 420 A06B-0410-B932
1500A/4
(Width 98mm) 600 A06B-0410-B933
960 A06B-0410-B934
240 A06B-0413-B931
3000B/2, 3000B/4
B 420 A06B-0413-B932
6000B/2, 6000B/4
(Width 178mm) 600 A06B-0413-B933
9000B/2, 9000B/4
960 A06B-0413-B934
240 A06B-0414-B921
C 420 A06B-0414-B922
15000C/2, 15000C/3
(Width 228mm) 600 A06B-0414-B923
960 A06B-0414-B924

NOTE
The magnet plates which can be combined with
each motor are determined. Each motor can be
combined only with the magnet plates listed in the
above table.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

Procedure for selecting a magnet plate

<1> Obtain the magnet plate track length (total length of magnet
plates).
Magnet plate track length ≥ effective stroke + coil slider length +
coasting distance when the dynamic brake is applied + margin
for wires and tube (+ magnetic pole sensor length and length
required for installing it)
NOTE
To use an incremental linear encoder, a magnetic
pole sensor is required. The mounting margin may
also be required in addition to the length of the
magnetic pole sensor itself. For details, see Parts I,
"SPECIFICATIONS," and III, "HANDLING, DESIGN,
AND INSTALLATION."

<2> Combine magnet plates so that the magnet plate track length
obtained as above is satisfied.
Example of selection:
When the following conditions are assumed:
- Motor model: 6000B/2
- Effective stroke: 500 mm
- Coasting distance + margin: 100 mm
Magnetic plate track length ≥ 537+500+100=1137(mm)

Because the motor model is the 6000B/2, magnet plates of the B

type must be used in combination. To obtain a length of at least
1137 mm, any of the following three cases can be selected, for
example:
(a) 420 mm × 1 + 240 mm × 3 = 1140 mm
This case is a combination for the shortest total length.
(b) 600 mm × 2 = 1200 mm
Only one type of magnet plate can be used.
(c) 960 mm × 1 + 240 mm × 1 = 1200 mm
This case may be the optimum selection when many 960-
mm magnet plates are used on other axes.
NOTE
1 For workability and safety on installation on a
machine, it is appropriate to select case (a) or (b).
With case (c), workability or safety may be impaired.
For installation of a linear motor on a machine, see
Part III, "HANDLING, DESIGN, AND
INSTALLATION."
2 To arrange coil sliders in parallel or symmetrical, as
many sets of magnet plates as the number of tracks
are required. For example, with a symmetrical
arrangement, the required number of magnet plates
is double the number of them with a single
arrangement.

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

2.3 POWER SUPPLY MODULE (PSM) SELECTION

2.3.1 Selecting a Power supply Module

Select a power supply module (called a PSM below) required for

driving the linear motor as follows.

NOTE
PSM selection described in this subsection assumes
the use of linear motors only along one axis. When
there is another feed axis or a spindle, consider and
add the PSM capacity required for it.

<1> Check the rated continuous output of the linear motor.

Check the rated continuous output of the linear motor to be used
according to the cooling condition and maximum speed to be
used. Read the rated continuous output value from the
corresponding output versus speed diagram (diagram shown on
the right) in Section 2.3, "FORCE VERSUS SPEED
DIAGRAMS AND OUTPUT VERSUS SPEED DIAGRAMS,"
in Part I, "SPECIFICATIONS."
Example:
- Motor model: Two 300D/4s arranged face to face
- Cooling condition: Water cooling
- Maximum speed to be used: 2 m/s

It can be seen from the output versus speed diagram on the right
of the 300D/4 on page 12 in this manual that the output with
water cooling at a speed of 2 m/s is 0.2 kW. Therefore, the
output of two 300D/4s is:
0.2kW×2=0.4kW

<2> Calculate the maximum output during acceleration/deceleration.

Calculate the maximum output required during acceleration/
deceleration of the linear motor. Use the corresponding
expression in the following table according to the speed range to
be used for the motor model. When multiple motors are to be
driven simultaneously, add the values obtained for the motors.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

When the motor is driven with 200 V

Reference data for PSM selection (Maximum
Model name
output during acceleration/deceleration: kW)
0m/s to 2.3m/s 2.3m/s to 4m/s
300D/4
P=V×1.4÷2.3 1.4kW
0m/s to 2.3m/s 2.3m/s to 4m/s
600D/4
P=V×2.7÷2.3 2.7kW
0m/s to 2.3m/s 2.3m/s to 4m/s
900D/4
P=V×4.1÷2.3 4.1kW
0m/s to 2.1m/s 2.1m/s to 4m/s
1500A/4
P=V×6.4÷2.1 6.4kW
0m/s to 1m/s 1m/s to 2m/s
3000B/2
P=V×8.6 8.6kW
0m/s to 2.2m/s 2.2m/s to 4m/s
3000B/4
P=V×12.1÷2.2 12.1kW
0m/s to 1m/s 1m/s to 2m/s
6000B/2
P=V×17.1 17.1kW
0m/s to 2.2m/s 2.2m/s to 4m/s
6000B/4
P=V×24.2÷2.2 24.2kW
0m/s to 1m/s 1m/s to 2m/s
9000B/2
P=V×28.3 28.3kW
0m/s to 2.2m/s 2.2m/s to 4m/s
9000B/4
P=V×36.3÷2.2 36.3kW
0m/s to 1m/s 1m/s to 2m/s
15000C/2
P=V×47.6 47.6kW
0m/s to 1.5m/s 1.5m/s to 3m/s
15000C/3
P=V×58.2÷1.5 58.2kW
P: Maximum output (kW)
V: Maximum speed to be used (m/s)

When the motor is driven with 400 V

Reference data for PSM selection (Maximum
Model name
output during acceleration/deceleration: kW)
0m/s to 2m/s 2m/s to 4m/s
3000B/2
P=V×12.1÷2 12.1kW
0m/s to 2m/s 2m/s to 4m/s
6000B/2
P=V×24.2÷2 24.2kW
0m/s to 2m/s 2m/s to 4m/s
9000B/2
P=V×36.3÷2 36.3kW
0m/s to 1.6m/s 1.6m/s to 4m/s
15000C/2
P=V×77.8÷1.6 77.8kW
P: Maximum output (kW)
V: Maximum speed to be used (m/s)

NOTE
The values listed in the above table and values
obtained using the expressions in the above table
can be used only for power supply module selection.
They are not guaranteed values.

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

Example:
Assume that the selection conditions are the same as those
described above.
Because two 300D/4s are to be used at a maximum speed of
2 m/s, the maximum output is:
P=2×1.4÷2.3×2 2.5(kW)
(with fractions rounded up)

<3> Determine a PSM.

Find a PSM which satisfies the continuous and maximum output
conditions determined in steps <1> and <2>. For the PSM
specifications, refer to the latest version of "FANUC Servo
Amplifier α series Descriptions" (B-65162E).

Example:
Find a PSM which satisfies the following conditions
obtained in the examples in <1> and <2> above: continuous
output of 0.4 kW and short-time (maximum) output of 2.4
kW. It can be seen from the descriptions (B-65162E) that
the PSM-5.5 (continuous output of 5.5 kW and maximum
output of 11 kW) and PSMR-3 (continuous output of 3 kW
and maximum output of 12 kW) are applicable.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2.3.2 Calculating the Amount of Regenerative Energy

NOTE
When you use an amplifier using the power supply
regeneration method, you need not calculate the
amount.

The following expressions give the amount of energy regenerated in a

linear motor. If the amount of regenerative energy exceeds the
permissible amount of regenerative energy for the drive amplifier, it is
necessary to provide a separate regenerative discharge unit.

P=(MT×VM2-FF×VM×ta)÷(2×F).................................... <1>
Q=(9.8×MT-FF)-VM×(D÷100) ..................................... <2>

P: Deceleration energy (W)

Q: Energy generated at a drop by gravity (W)
FF: Friction (N)
t a: Rapid traverse acceleration/deceleration time (sec)
F: Rapid traverse count (sec/count)
D: Duty ratio (%) at rapid traverse downward movement
* D < 50

Obtain the amount of regenerative energy for the horizontal axis using
expression <1>. Obtain the amount of regenerative energy for the
vertical axis using expression <1> + expression <2>.

- Amount of regenerative energy for the horizontal axis ≥ P

- Amount of regenerative energy for the vertical axis ≥ P + Q

NOTE
For the permissible amount of regenerative energy
for drive amplifiers and the specifications of
separate regenerative discharge units, refer to the
latest version of "FANUC Servo Amplifier α series
Descriptions" (B-65162E) or that of "FANUC Servo
Amplifier Unit α series Descriptions" (B-65192EN).

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2.SELECTION METHODS CONFIGURATIONS AND SELECTION B-65222EN/03

2.4 EXTERNAL COOLING UNIT SELECTION

2.4.1 Overview

To forcibly cool a linear motor, an external cooling unit is required. It

is desirable to use a chiller (cooler) for water cooling or industrial dry
air for air cooling. The cooling unit to be used must satisfy the
"cooling conditions" listed in Section 2.2, "SPECIFICATION LIST,"
in Part I, "SPECIFICATIONS." If it is absolutely necessary to use
another cooling medium such as oil, note that the rated continuous
force may be reduced by several percent to several tens of percent due
to the difference in characteristics between coolants.

For water cooling, it is desirable to use a chiller (cooler) which keeps

the room temperature when the ambient temperature of the motor is
not high. If a coolant temperature lower than the motor ambient
temperature is set, condensation may occur on the motor depending
on the ambient condition, resulting in degraded insulation of the
motor. For this reason, when selecting a chiller of which coolant
temperature is fixed, carefully manage the coolant temperature so that
no condensation occurs.

NOTE
If any cooling condition listed in Part I,
"SPECIFICATIONS," is not satisfied, the motor
output specifications are not guaranteed.

CAUTION
If condensation occurs on the motor due to
excessive cooling or high humidity, immediately
change the coolant temperature and take other
measures against condensation. In an environment
which keeps condensation for a long time, insulation
of the motor may tend to be degraded, resulting in
considerable reduction of the life of the motor.

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B-65222EN/03 CONFIGURATIONS AND SELECTION 2.SELECTION METHODS

2.4.2 Example of Selection

The cooling unit to be used must has the capacity listed under
"Required cooling capacity" in the specification list in Part I,
"SPECIFICATIONS." This value is determined under the condition
that root mean square force/rated continuous force = 1. Under
ordinary use conditions, the capacity is usually lower than the listed
value. For example, when root mean square force/rated continuous
force = 0.7, the heat output is reduced to 0.72 = 0.49 (49%) as
compared with that during continuous operation with the rated
continuous force. For this reason, as the required capacity of the
cooling unit, the value in the specification list can be reduced to 49%.

An example of calculation is shown below:

Assume the following machine:
- X-axis:
One 9000B/4, water cooling, root mean square force/rated
continuous force = 0.7
- Y-axis:
One 3000B/4, water cooling, root mean square force/rated
continuous force = 0.8
Because the cooling capacity required for the X-axis (9000B/4) is
2,600 W as listed in Section 1.2, "SPECIFICATION LIST," in Part I,
"SPECIFICATIONS," the required cooling capacity under the above
condition is:
2,600[W]×0.72=1,274[W]
Similarly, the cooling capacity required for the Y-axis (3000B/4) is:
900[W]×0.82=576[W]
Consequently, if the motors on both the X-and Y-axes run
simultaneously, the maximum required cooling capacity is:
1,274[W]+576[W] =1,850[W]
If the motors on both the X-and Y-axes do not run simultaneously, the
required cooling capacity is 1,274 [W].
To determine the required cooling capacity more precisely, it is
advisable to add the duty curves (root mean square force/rated
continuous force) for both axes based on the time axis and calculate
the cooling capacity at the point where the sum is the maximum.

NOTE
1 For how to calculate the root mean square force, see Part II, "CONFIGURATIONS
AND SELECTION."
2 The cooling capacity calculated as above is required when the internal temperature
of the coil slider rises to a temperature near the maximum operating temperature. For
this reason, if the machine is apt to be easily deformed by temperature rising, it may
be desirable to select a cooling unit with an adequate margin of the required cooling
capacity.
3 Use of strong cooling can increase the rated continuous force of the motor to some
extent. Carefully use strong cooling so that condensation does not occur on the coil
slider due to excessive cooling.

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3.LINEAR MOTOR SELECTION FORMCONFIGURATIONS AND SELECTION B-65222EN/03

3 LINEAR MOTOR SELECTION FORM

For selecting a FANUC linear motor, fill in a "Linear Motor Selection
Form" shown on another page and submit the form to a FANUC sales
representative. FANUC experts on linear motors will consider an
appropriate motor in detail and FANUC can make give you
suggestions and advice at your request.

How to use a "Linear Motor Selection Form"

<1> Make a copy of "Linear Motor Selection Form" shown on
another page and enter the linear motor selection conditions in
the copy without omission. Entering a permissible range as a
selection condition is very useful for consideration by FANUC.
<2> Submit the entered "Linear Motor Selection Form" to a FANUC
sales representative.
<3> FANUC experts on linear motors select an appropriate motor by
detailed consideration, then the FANUC sales representative
informs you of the selection result.

NOTE
1 If there is an omission in the Linear Motor Selection
Form, an appropriate motor may not be able to be
selected. Be sure to fill in the form without omission.
2 Motor selection at FANUC needs 1 to 2 weeks in
ordinary cases. If you are in a rush, write your
request in the selection form or make it known to the
sales representative.

Explanation of terms in the "Linear Motor Selection Form"

- Direction of travel
If the axis is slanted, enter the angle from a horizontal line.

- Weight of movable objects

Enter the maximum weight of all movable objects (table, tool
post, workpiece, and so on), excluding the motor.

- Type of counterbalance on a vertical axis

Enter whether to use a counterbalance on a vertical axis. When
using a counterbalance on a vertical axis, also enter its type and
weight (or force applied to it).

- Table support (sliding, rolling, and static pressure)

Enter the type of sliding surface. Also enter a special material for
the sliding surface if used.

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B-65222EN/03 CONFIGURATIONS AND SELECTION3.LINEAR MOTOR SELECTION FORM

- Friction coefficient
Enter the friction coefficient of the machine sliding surface.

- Load weight
If the required force varies between when the load is lifted and
when it is lowered, enter the required force for the both cases.
• Low-speed feeding
Enter the force required for very low-speed operation and at
a stop. Keep the force within 60% of the rated continuous
force.
• Rapid traverse
Enter the force required for rapid traverse at a constant rate.
Do not include the force required during
acceleration/deceleration.
• Cutting thrust
Enter the maximum reaction force that occurs during
cutting.
• Maximum cutting load
Enter the force applied to the linear motor when cutting
thrust is produced. The cutting load may vary depending on
the reaction force caused from the sliding surface by cutting
thrust. Try to enter as accurate values as possible by
referencing data measured on similar machines.

- Maximum cutting duty ratio/on time

Enter the duty ratio (%) and on time for which the maximum
cutting load is applied. For the duty ratio (%) and on time, see
Subsection 2.1.4, "Overload Duty Characteristic."

- Rapid traverse positioning frequency

Enter how many times rapid traverse positioning is to be
performed every minute.

- Positioning stroke
Enter the minimum amount of travel for rapid traverse
positioning.

- Duty cycle
Draw one cycle of the most extreme operation pattern you expect.
Be sure to add the dwell operation if used.

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3.LINEAR MOTOR SELECTION FORMCONFIGURATIONS AND SELECTION B-65222EN/03

Linear Motor Selection Form

Enter all items without omission.
NOTE
Be sure to read this part, "CONFIGURATIONS AND SELECTION," before entering
items.

Company name Date of entry Year: Month: Day:

Department and name of person in charge Machine type
CNC name FANUC Series Machine name

Axis name
Effective stroke
Direction of travel (horizontal or vertical)
Weight of movable objects (including the workpiece) kg
Type of counterbalance on a vertical axis
Table support (sliding, rolling, and static pressure)
Friction coefficient
Movable part (slider or magnet plate)
Slider arrangement (single, serial, parallel, or symmetrical)
Motor installation size (length × width) mm
CNC least input increment mm
Rapid traverse rate m/min
Acceleration G
Cutting feedrate m/min
Low-speed feeding
Rapid traverse
Load weight N
Cutting thrust
Maximum cutting load
Maximum cutting duty ratio/on time %/min
Rapid traverse positioning frequency count/min
Positioning stroke mm

Duty cycle (including dwell operation)

Draw a chart indicating time-speed-load or time-position-load

relationships (in landscape orientation) for one cycle. If the
space on this form is not enough, draw the chart on another
sheet and attach it to this form.

Type and model of linear encoder

Signal pitch of linear encoder µm
Rapid traverse acceleration/deceleration time msec
Cutting feed acceleration/deceleration time msec
Positional loop gain sec-1
Distance required in decelerating to stop mm
Distance required to stop by dynamic braking mm
Amplifier specification
Regenerative discharge unit specification
Transformer specification
Remarks and others

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III. HANDLING, DESIGN, AND ASSEMBLY
B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 1.HANDLING THE LINEAR MOTOR

1 HANDLING THE LINEAR MOTOR

WARNING
For the linear motor, very powerful magnets are
used. If the linear motor is handled incorrectly,
serious accidents including fatal accidents can
occur. Read this chapter carefully for thorough
understanding, and do not fail to observe the
cautions and warnings described in this chapter.
Ensure that only persons educated for the handling
of the linear motor handle the linear motor.

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1.HANDLING THE LINEAR MOTOR HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

1.1 COIL SLIDER

Storing the coil slider

The coil slider is an electric component. When storing coil sliders,
observe the following:
- Store coil sliders in a temperature range of 0°C to 40°C.
- Store coil sliders in an indoor environment where the coil sliders
are not exposed to rain and dust.
- Ensure that coil sliders are not exposed to water (including
condensation), oil, chemicals, and so forth.
- Do not machine coil sliders.
- Do not apply a shock to coil sliders.
- Do not flaw the resin surface of coil sliders.

Transporting coil sliders

A large coil slider may not be carried by hand. In such a case, use an
auxiliary tool such as a crane for safe transportation. A motor of
1500A/4 or a larger size has many tapped holes for assembly to a
machine. If it is difficult to transport a coil slider by using a fabric
rope, those tapped holes may be used to lift the coil slider.

NOTE
1 For the positions and sizes of tapped holes, see Part
I, "SPECIFICATIONS".
2 When using the tapped holes of a coil slider for
transportation, transport the coil slider singly.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 1.HANDLING THE LINEAR MOTOR

1.2 MAGNET PLATE

WARNING
For a magnet plate, many very powerful magnets
are used. So, a magnet plate can cause medical
appliances such as a pacemaker and AICD to
malfunction. Ensure that persons wearing these
medical appliances do not get closer to a magnet
plate. If a person wearing any of those medical
appliances must get closer to a magnet plate, the
person must be at least 30 cm away from the
magnet plate.

Storing a magnet plate

When a magnet plate is shipped from FANUC, it is packed so that it
does not affect the outside. Until a magnet plate is assembled to a
machine, keep the tin plates and cushioning corrugated cardboard
attached to it.

Tin plate

Corrugated cardboard
Magnet plate
(magnet side) For reducing
Covered with black magnetic leakage
resin. and holding the
For
corrugated cardboard cushioning
For other storage requirements, see the description of coil sliders.

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1.HANDLING THE LINEAR MOTOR HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

Transporting a magnet plate

WARNING
1 When transporting a magnet plate, be sure to keep
the corrugated cardboard and tin plates attached to
it.
2 Ensure that no magnetic materials (including a tool)
are brought closer to the magnet plate and that the
magnet plate is away from magnetic materials. If a
magnetic material such as iron is brought closer to
the magnet plate, the magnetic material and the
magnet plate can pull each other with a force of up
to 5 tons, resulting in a serious injury.
3 When moving a magnet plate on the surface of a
magnetic material such as a machine installation
face or work table, be sure to face the magnet side
of the magnet plate upward and face the iron side of
the magnet plate downward, and be sure to slide the
magnet plate horizontally relative to the move
direction. Do not tilt the magnet plate or slide it on an
edge of the magnet plate. Otherwise, the magnet
plate can be pulled to the magnetic material to catch
your hand or body, resulting in a serious injury.
Because of an enormous pulling force, it is difficult to
relieve your caught hand or body.
Surface of a
magnetic
material Magnet plate
(The magnet side shall face up.)

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 1.HANDLING THE LINEAR MOTOR

1.3 SENSOR

NOTE
For the handling of a linear encoder, contact the
manufacturer of the linear encoder.

The magnetic pole sensor and position detection circuit are precision
electronic components. Handle these components carefully as with
ordinary electronic devices.

CAUTION
Do not conduct tests such as a breakdown voltage
test on the magnet pole sensor and position
detection circuit. Moreover, do not disassemble
these components by removing the screws when
unnecessary. Otherwise, the internal circuitry can be
damaged and the components can fail.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

2 MECHANICAL DESIGN
CAUTION
This section provides information about the
mechanical design of the linear motor. The linear
motor can become uncontrollable in the worst case
when its dimensions for installation are incorrect. Be
sure to read this section before designing a machine
with a linear motor mounted.

NOTE
The mountable positions of the FANUC Linear Motor
series and linear encoder are predetermined. This
requirement is related to the operation theory of the
linear motor. For the operation theory of the FANUC
Linear Motor series, see Appendix.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.1 MOUNTING COIL SLIDERS

Mounting surface of a coil slider

NOTE
The surface of a coil slider used for mounting onto
the machine is predetermined. If the surface of a coil
slider used for mounting onto the machine is
incorrect, the linear motor does not operate normally.

2.1.1 Mounting Surface Precision on the Machine Side

As a guideline, the machining precision of the mounting surface on

the machine side should not exceed 50 µm for both roughness and
undulation.

300D/4, 600D/4, 900D/4

Mount the metallic side provided with screw holes onto the machine.
Insert screws through the screw holes from the machine side and
fasten the coil slider. On the opposite side, no screw hole is provided.
The opposite side is coated with black resin (coating compound) and
is to face the magnet plate.

Mount the metallic side provided with screw holes onto the machine.

Machine side

NOTE
For forced cooling (air cooling or water cooling) of
300D/4, 600D/4, and 900D/4, an optional cooling
plate is required. The cooling plate is to be inserted
between the table and coil slider. In mechanical
design, consider the thickness of the cooling plate.
For the specification of the cooling plate, see Part I,
"SPECIFICATIONS". For the method of mounting
the cooling plate, see Chapter 3, "ASSEMBLY" in
this chapter.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

1500A/4 or models of larger sizes

Mount the metallic side onto the machine. The opposite side is coated
with black resin (coating compound) and is to face the magnet plate.
With 1500A/4 or models of larger sizes, either side of the slider can
be used for mounting onto the machine. For inserting screws from the
machine side, use M8 screws within the coil slider. For mounting
from the magnet plate side, use the M6 screws on the machine side.

Mount the metallic side onto the machine.

Machine side

Magnet plate side

Rear side: Faces the magnet plate and coated

with black resin.

NOTE
Note that the motor does not operate normally if the
mounted side is incorrect.

2.1.2 Attaching accuracy of coil sliders

The mounting margin in the width direction between the coil slider
and magnet plate is about 2 mm. This means that if the sum of shifts
and distortions in the width direction between the coil slider and
magnet plate is within ±1 mm from the true center, the characteristics
of the motor are little affected.
Coil slider
Magnet plate

WM
WL

WM : Magnetically effective width of the magnet track

WL : Magnetically effective width of the coil slider
Mounting margin = WL-WM 2mm

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.2 MOUNTING MAGNET PLATES

Direction and mounting hole locations of magnet plates

Mount the metallic side of a magnet plate onto the machine, and face
the black resin side toward the coil slider.

"N" mark "N" mark Resin

Magnet plate Magnet plate
Machine Mount the metallic side surface
mounting surface onto the machine.

N N

G Metallic
surface
P1 P1 P2 P1 P1

When mounting multiple magnet plates, be sure to arrange them so

that their "N" marks are oriented in the same direction.

NOTE
If the mounting direction ("N" mark direction) of a
magnet plate is incorrect, the motor cannot be driven
normally.

The table below indicates reference dimensions for the mounting

screw hole pitch (P1), the shortest screw span between adjacent
magnet plates (P2), and the gap between magnet plates (G). In
accordance with these dimensions, produce mounting holes (screws)
on the machine.

Type of Applicable
P1 (mm) P2 (mm) G (mm)
magnet plate model
A, B, C 1500A/4 and up 90±0.1 60±0.1 (1)
D Up to 900D/4 30±0.1 30±0.1 (0.5)

Mounting surface precision on the machine side

As a guideline, the machining precision of the mounting surface on
the machine side should not exceed 50 µm for both roughness and
undulation.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

2.3 LINEAR MOTOR AIR GAP

An air gap of a specified width is required between the coil slider and
magnet plate of the FANUC Linear Motor series. If an adequate air
gap is not provided, the force of the motor changes.
The required air gap of the FANUC Linear Motor series is 0.5 mm
(nominal). Provide an air gap according to this target dimension. The
table below indicates how the force constant ratio changes as the air
gap varies.

Air gap (mm) Force constant ratio

0.38 1.02
0.50 (nominal) 1.00
0.70 0.97
1.00 0.91

NOTE
1 If it is difficult to provide a specified nominal gap (0.5
mm), it is recommended to provide a wider gap to
ensure safety.
2 For a force constant, see Part I,
"SPECIFICATIONS".

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.4 MOUNTING A LINEAR ENCODER

2.4.1 Mounting Rigidity and Noise Protection

The linear motor is controlled using only a feedback signal from the
linear encoder. This means that if the mounting rigidity of the linear
encoder is insufficient, a feedback signal can pick up noise such as
mechanical vibration, resulting in a problem such as degraded
precision and uncontrollability. Be sure to mount a linear encoder
with a high rigidity so that it does not pick up peripheral vibration.
Moreover, ensure that a linear encoder is mounted with the specified
precision.
If a feedback signal from the linear encoder picks up noise from
another electric system, a problem similar to the problems mentioned
above can occur. Ensure that the feedback signal cable is sufficiently
shielded and grounded, and that the feedback signal cable does not
run across or along with the motor power lead.

2.4.2 Linear Motor and Linear Encoder Directions

To drive a linear motor normally, the positive direction of the linear

motor and the positive direction of the linear encoder must match
each other.

CAUTION
If the direction of the linear motor does not match
the direction of the linear encoder, the motor can
become uncontrollable in the worst case. In
mechanical design and assembly, ensure the
matching of the directions.

Positive direction of a linear motor

The positive (plus) direction of a linear motor depends on whether the
coil slider is movable or the magnet plate is movable. The positive
direction can be determined from the direction of power lead running
direction.

- When the coil slider is movable

Power line Positive
direction
Slider movable

Magnet plate fixed

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

- When the magnet plate is movable

Power line

Positive Slider fixed

direction

Magnet plate movable

Positive direction of a linear encoder
The positive direction of a linear encoder is the direction in which the
encoder counts up. The positive direction of a linear encoder depends
on the manufacturer and model. For details, refer to the specifications
of a linear encoder used. Examples of positive direction are described
below using the HEIDENHAIN's absolute linear encoder LC191F and
the Mitutoyo's absolute linear encoder AT353.

NOTE
The examples described below are based on the
linear encoder specifications that are available to
FANUC as of the publication of this manual. The
information below is subject to change if the
specifications of the linear encoders are updated.

- HEIDENHAIN's absolute linear encoder LC191F (with the head movable)

The direction in which the feedback cable of LC191F extends is the
positive direction.

Main linear encoder unit fixed

Feedback cable
Head movable

Positive
direction

- HEIDENHAIN's absolute linear encoder LC191F (with the main linear encoder unit
movable)
The direction opposite to the direction in which the feedback cable of
LC191F extends is the positive direction.

Positive
direction
Main linear encoder unit movable
Feedback cable
Head fixed

- Mitutoyo's absolute linear encoder AT353 (with the head movable)

The position where the "AT353" mark is provided on the main
encoder unit represents the positive direction.

Mitutoyo Main linear encoder unit fixed AT353 Feedback cable

Head movable

Positive
direction

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- Mitutoyo's absolute linear encoder AT353 (with the main linear encoder unit
movable)
The position where the "Mitutoyo" mark is provided on the main
encoder unit represents the positive direction.

Positive
direction
Main linear encoder unit movable
Mitutoyo AT353
Feedback cable
Head fixed

NOTE
The Mitutoyo's absolute linear encoder AT353 allows
a feedback cable to be connected on either the right
side or the left side, so that the positive direction
cannot be determined from the feedback cable.

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2.4.3 Incremental Linear Encoder and Magnetic Pole Sensor

Mounting Positions

For 300D/4, 600D/4, and 900D/4

To use an incremental linear encoder, a magnetic pole sensor is
required. The positional relationships of these components are
predetermined.
L

Magnetic pole P Slider mounting

sensor mounting screw nearest to the
screw power line

Magnetic pole Coil slider 300D/4, 600D/4 or Magnet plate

sensor 900D/4 mounting screw
Power line
Signal line

N SN SN SN SN SN S

Position where the reference mark signal

(reference signal) is output

Linear encoder

Mount a linear motor, magnetic pole sensor, and linear encoder at the
following position in the figure above where the linear encoder
outputs the reference mark signal:
P = 30 × N + 10.4 (mm) N: Natural number

Magnet end face on the

L (mm) M: Natural number
magnetic pole sensor side
N pole L=30×M+17.5±0.5 (mm)
S pole L=30×M+2.5±0.5 (mm)

CAUTION
1 Before mounting a magnetic pole sensor and linear
encoder, check that the positive direction of the linear
motor matches the positive direction of the linear
encoder. If a positive direction mismatch exists, the
motor can become uncontrollable in the worst case.
For the method of checking, see Subsection 2.4.2, "
Linear Motor and Linear Encoder Directions".
2 If a magnetic pole sensor or linear encoder is
mounted at an incorrect position, the power factor can
drop, and a soft thermal (OVC) alarm can be issued.
In addition, the motor can become uncontrollable in
the worst case. Before turning on the power to the
machine after machine assembly, recheck the
positional relationships.
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NOTE
With the FANUC Linear Motor series, an
incremental linear encoder that outputs the
reference mark signal (Z-phase signal) at one
position only is required. Specify this requirement
when ordering an incremental linear encoder. If an
incremental linear encoder has two positions where
the reference mark signal is output, a count miss
alarm may be issued when the second reference
mark signal is detected.

1500A/4 or models of larger sizes

To use an incremental linear encoder, a magnetic pole sensor is
required. Mount a magnetic pole sensor with screws of M6×15 mm in
the concave on the power lead or terminal side of the coil slider. At
this time, ensure that the bottom surface (facing the magnet plate) of
the magnetic pole sensor is flush with the bottom surface (facing the
magnet plate) of the coil slider.

NOTE
If the bottom surface of the magnetic pole sensor is
projected relative to the bottom surface of the coil
slider, the magnetic pole sensor can rub against the
magnet plate.

When a linear motor with a magnetic pole sensor, and an incremental

linear encoder are mounted, their predetermined positional
relationships need to be observed.
L
Magnetic pole sensor

Power line or
terminal Coil slider

N S N S N S N S N S

Position where the reference mark signal

(reference signal) is output

Linear encoder

Mount a linear motor and linear encoder at the following position in

the figure above where the linear encoder outputs the reference mark
signal (reference signal):
Magnet end face on the
L (mm) M: Natural number
magnetic pole sensor side
N pole L=60×M+27±0.5 (mm)
S pole L=60×M+57±0.5 (mm)

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CAUTION
1 Before mounting a magnetic pole sensor and linear
encoder, check that the positive direction of the
linear motor matches the positive direction of the
linear encoder. If a positive direction mismatch
exists, the motor can become uncontrollable in the
worst case. For the method of checking, see
Subsection 2.4.2, " Linear Motor and Linear Encoder
Directions".
2 If a magnetic pole sensor or linear encoder is
mounted at an incorrect position, the power factor
can drop, and a soft thermal (OVC) alarm can be
issued. In addition, the motor can become
uncontrollable in the worst case. Before turning on
the power to the machine after machine assembly,
recheck the positional relationships.

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2.4.4 Absolute Linear Encoder Mounting Position

For 300D/4, 600D/4, and 900D/4

When a linear motor and absolute linear encoder are mounted, their
predetermined positional relationships need to be observed.
Slider mounting screw
L nearest to the power lead

Coil slider 300D/4, 600D/4 or Magnet plate

900D/4 mounting screw
Power lead

N SN SN SN SN SN S

Absolute linear encoder

Position of the head end face when

the encoder detects the origin S

Mount a linear motor and linear encoder at the following position in

the figure above:
S = 30 × N (mm) N: Natural number or 0

Magnet end face on the

L (mm) M: Natural number
magnetic pole sensor side
N pole L=30×M+17.5±0.5 (mm)
S pole L=30×M+2.5±0.5 (mm)

CAUTION
1 Before mounting a linear encoder, check that the
positive direction of the linear motor matches the
positive direction of the linear encoder. If a positive
direction mismatch exists, the motor can become
uncontrollable in the worst case. For the method of
checking, see Subsection 2.4.2, "Linear Motor and
Linear Encoder Directions".
2 If a linear encoder is mounted at an incorrect
position, the power factor can drop, and a soft
thermal (OVC) alarm can be issued. In addition, the
motor can become uncontrollable in the worst case.
Before turning on the power to the machine after
machine assembly, recheck the positional
relationships.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

- Example using the HEIDENHAIN 's absolute linear encoder LC191F or LC491F
Slider mounting
L screw nearest to the
power lead

Coil slider 300D/4, 600D/4 Magnet plate

or 900D/4 mounting screw
Power lead

N S N S N S N S N S N S

Absolute linear encoder

LC191F, LC491F

Mount a linear motor and linear encoder at the following position in

the figure above:

Magnet end face on the

L (mm) M: Natural number
power lead side
N pole L=30×M+17.5±0.5 (mm)
S pole L=30×M+2.5±0.5 (mm)

Encoder model S (mm) M: Natural number

LC191F S=30×N-1.5
With mounting spur S=30×N-3.5
LC491F
Without mounting spur S=30×N-20

CAUTION
1 Before mounting a linear encoder, check that the positive
direction of the linear motor matches the positive direction
of the linear encoder. If a positive direction mismatch
exists, the motor can become uncontrollable in the worst
case. For the method of checking, see Subsection 2.4.2,
"Linear Motor and Linear Encoder Directions".
2 If a linear encoder is mounted at an incorrect position, the
power factor can drop, and a soft thermal (OVC) alarm can
be issued. In addition, the motor can become
uncontrollable in the worst case. Before turning on the
power to the machine after machine assembly, recheck the
positional relationships.

NOTE
1 Note that the measurement length ML start point of
LC191F and LC491F differs from the origin of the encoder.
2 For details of the linear encoders LC191F and LC491F,
contact HEIDENHAIN, or their sales representative.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

- Example using the Mitutoyo's absolute linear encoder AT353 or AT553

Slider mounting screw
L nearest to the power lead

Coil slider 300D/4, 600D/4 Magnet plate mounting

or 900D/4 screw
Power lead

N S N S N S N S N S N S

Absolute linear encoder AT353, AT553

Mitutoyo ATx53

Position where the mark of the head matches

the mark of the main unit (Precision: ±1 mm)

Mount a linear motor and linear encoder at the position where the
mark of the linear encoder head matches the mark of the main
linear encoder unit in the figure above.

Magnet end face on the

L (mm) M: Natural number
power lead side
N pole L=30×M+17.5±0.5 (mm)
S pole L=30×M+2.5±0.5 (mm)

NOTE
For details of the linear encoders AT353 and AT553,
contact Mitutoyo, or their sales representative.

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1500A/4 or models of larger sizes

When a linear motor and absolute linear encoder are mounted, their
predetermined positional relationships need to be observed.

Power lead
or terminal Coil slider

N S N S N S N S N S

Absolute linear encoder

Position of the head end face when

the encoder detects the origin S

Mount a linear motor and linear encoder at the following position in

the figure above:
S = 60 × N (mm) N: Natural number or 0

Magnet end face on the power lead

L (mm) M: Natural number
(terminal) side
N pole L=60×M+27±0.5 (mm)
S pole L=60×M+57±0.5 (mm)

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

- Example using the HEIDENHAIN 's absolute linear encoder LC191F or LC491F
L

Power lead
or terminal Coil slider

N S N S N S N S N S

Absolute linear encoder

LC191F, LC491F

Mount a linear motor and linear encoder at the following position in

the figure above:

Magnet end face on the power lead

L (mm) M: Natural number
(terminal) side
N pole L=60×M+27±0.5 (mm)
S pole L=60×M+57±0.5 (mm)

Encoder model S (mm) M: Natural number

LC191F S=60×N-1.5
With mounting spur S=60×N-3.5
LC491F
Without mounting spur S=60×N-20

CAUTION
1 Before mounting a linear encoder, check that the positive
direction of the linear motor matches the positive direction
of the linear encoder. If a positive direction mismatch
exists, the motor can become uncontrollable in the worst
case. For the method of checking, see Subsection 2.4.2,
"Linear Motor and Linear Encoder Directions".
2 If a linear encoder is mounted at an incorrect position, the
power factor can drop, and a soft thermal (OVC) alarm can
be issued. In addition, the motor can become
uncontrollable in the worst case. Before turning on the
power to the machine after machine assembly, recheck the
positional relationships.

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- Example using the Mitutoyo's absolute linear encoder AT353 or AT553

Power lead
or terminal Coil slider

N S N S N S N S N S

Absolute linear encoder AT353, AT553

Mitutoyo ATx53

Position where the mark of the head matches

the mark of the main unit (Precision: ±1 mm)

Mount a linear motor and linear encoder at the position where the
mark of the linear encoder head matches the mark of the main
linear encoder unit in the figure above.

Magnet end face on the

L (mm) M: Natural number
power lead side
N pole L=60×M+27±0.5 (mm)
S pole L=60×M+57±0.5 (mm)

NOTE
For details of the linear encoders AT353 and AT553,
contact Mitutoyo, or their sales representative.

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2.5 THERMOSTAT CONNECTION

A coil slider has a built-in thermostat used to prevent the motor from
overheating. The specification of the thermostat is as follows:
- Actuation temperature: 90°C±5°C (temperature inside the motor)
- Normal close (Usually, the contact is closed. The contact is
opened at 90°C±5°C.)
- Use 24 VDC (1A or less).
From the coil slider, two leads or connector pins are extended. These
leads or pins are to be connected to the I/O (PMC) of the CNC. The
leads have no polarity. Configure a system (such as a PMC ladder) so
that when the thermostat is actuated (the contact is opened), alarm
information is passed from the PMC to the CNC and the machine
stops safely for an emergency stop. The normal method of connection
is shown below.

In normal operation (when the motor is not overheated)

Drives the
system.
CNC

TH1
Coil slider PMC

Contact closed
TH2

When the motor is overheated

Emergency
stop
CNC

Alarm information

Coil slider TH1

PMC

Contact opened
TH2

CAUTION
1 Without connecting a thermostat, the motor can be
driven. In such a case, however, the motor cannot be
protected from overheating. So, be sure to connect a
thermostat according to the method described above
before driving the motor.
2 If an emergency stop is performed immediately after an
overheat is detected, the motor can coast, for example,
during acceleration, or an axis drop can occur. It is
recommended that when an overheat is detected, the
machine be stopped safely by using a brake as
required before performing an emergency stop.

When multiple linear motors are used, two methods of thermostat

connection are available. The customer can freely choose between the
two methods. Each method has an advantage and disadvantage.

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Serial connection of multiple thermostats

CNC

Coil slider #1 PMC

Coil slider #2

In this case, only one signal lead system is connected to the PMC.
However, which motor overheated cannot be identified easily.

Parallel connection of multiple thermostats

CNC

Coil slider #1 PMC

Coil slider #2

In this case, signal lead systems as many as the number of coil sliders
are connected to the PMC. However, which motor overheated can be
easily identified.

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2.6 GROUND LEAD CONNECTION

Ground lead connection is very important to safety, conformance to

the European standards, and improved noise protection. A typical
example of connection is shown below.

Ground bar (insulation)

Power supply
(transformer)

24 V power supply, etc.

Shield
PSM SVM Power supply or circuit to be
prepared by the customer
according to the
specifications of the machine

Feedback
PE PE
Power lead
G UVW
Machine cabinet

Linear motor
Position
detection Magnetic pole
circuit sensor
Ground
Linear encoder head
Head

NOTE
1 Connect all ground leads securely.
2 When an absolute linear encoder is used, a
magnetic pole sensor and position detection circuit
are unnecessary. The feedback lead from the linear
encoder head is directly connected to SVM.
3 For some types of linear encoders, it is
recommended that the main linear encoder unit be
grounded. For details, refer to the specifications of
each linear encoder or contact the manufacturer of
each linear encoder.
4 Use ground leads that conform to the European
standard (EN) and UL in thickness, color, type, and
so forth.

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2.7 MOTOR AND POWER LINE PROTECTION

In order to obtain a desired force, one amplifier may be used to drive

multiple linear motors. If a motor fails or a power lead is broken in
such a case, a current larger than the specified level flows into other
motor. In this case, an alarm may be issued because of an insufficient
force, or an overheat alarm may be issued because of an excessive
current flowing into a drivable motor. In the worst case, an abrupt
increase in current can burn a power lead or motor. If possible, take
the following protective measures:

PMC

Thermostat
Power line
Coil slider #1 Fuse

Servo amplifier module

Power supply module

Terminal block
Coil slider #2 Fuse
V

Three-phase
Ground fault
interrupter
Coil slider #3 Fuse W

power
Coil slider #4 Fuse

As shown above, insert a fuse between the servo amplifier module

and each coil slider. If an excessive current flows through a power
lead, an inserted fuse can shut down power. When a fuse with a built-
in microswitch is used, whether the fuse has blown can be known by
applying the signal to the PMC. With this function, the machine can
be stopped more safely with damage minimized when a fuse blows;
for example, the machine can be stopped after retracting the machine.

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2.8 MOTOR HEAT-UP AND COOLING

2.8.1 Temperature Increase on the Mounting Surface of Coil Sliders

The figures below show the temperature increase curves of 900D/4

and lower models, and 1500A/4 and higher models in the cases of no
cooling and water cooling.

Temperature increase [K]

No cooling

Water cooling

Root mean square force/continuous rated force [%]

Temperature increase curve for 900D/4 and lower models
Temperature increase [K]

No cooling

Water cooling

Root mean square force/continuous rated force [%]

Temperature increase curve for 1500A/4 and higher models

From the curves above, an increase in temperature on the machine

mounting surface of a coil slider can be approximately known by
making root mean square force/continuous rated force calculations.

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NOTE
1 This data provides reference values and does not
represent guaranteed values.
2 The values of air cooling depend on the state of
cooling, but lie between those of no cooling and
those of water cooling.
3 The water cooling data is collected based on the
required cooling capability described in Part I,
"SPECIFICATIONS".
4 The values of water cooling for 900D/4 and lower
models assume that the optional cooling plate is
mounted.
5 This data is calculated from data measured using a
single coil slider unit with peripheral components
such as a heat sink not mounted and with the coil
slider stopped. So, this data is considered to
approximate an increase in temperature under a
relatively severe use condition. An increase in
temperature observed with an actual machine
depends on the state of peripheral component
installation, heat capacity, operation conditions, and
so forth. An increase in temperature slightly varies,
depending on the model of coil slider.
6 By using more powerful cooling, the continuous
rated force can be increased to some extent.
However, be careful not to cause condensation on
the coil slider by excessive cooling.

2.8.2 Temperature Increase on the Surface of the Magnet Plate

A magnet plate itself dissipates almost no heat. So, an increase in

temperature on a magnet plate is mainly caused by radiant heat from
the coil slider and slight heat conduction through the air. This means
that under an ordinary use condition, the temperature on the surface of
a magnet plate increases by about 5 K at most. However, the
temperature can increase more if the magnet plate faces the coil slider
at all times in an area and the operation condition is relatively severe.
In many cases, the magnet plate need not be cooled. To suppress or
shield an increase in temperature by all means, however, take
measures such as blowing air onto the magnet surface or building a
cooling mechanism under the mounting surface of the magnet plate.

NOTE
1 The customer is to prepare a cooling mechanism for
a magnet plate, and equipment and components
required for cooling a magnet plate.
2 When cooling a magnet plate, be careful not to
cause condensation by excessive cooling.

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2.8.3 Cooling Plate Addition

The coil sliders of 1500A/4 and higher models have a built-in cooling
tube. An optional cooling plate is available with the coil sliders of
900D/4 and lower models. For further cooling, improved continuous
rated force, or higher-level heat shielding, the customer is to prepare
an additional cooling plate (cooling mechanism). A relatively higher
effect can be expected from the use of a cooling plate with a higher
cooling capability or from the installation of a cooling tube on the
sides of the coil slider.

NOTE
1 Be careful not to cause condensation on the coil
slider by excessive cooling.
2 The rated force cannot be improved beyond the
specified value of the driven amplifier by any highly
efficient cooling.

2.8.4 Cooling Water

Water is used for water cooling. However, tap water may contain
metallic ions. If tap water is used for a long time, scales (contaminant
layers and lumps) build up, and can degrade heat exchange efficiency
and can clog the cooling tube. So, use ion exchange water.

Copper is employed for a cooling tube used with the linear motor. So,
as an anti-corrosive agent to be added to cooling water, use an agent
that does not corrode copper. Moreover, do not use a strong alkaline
anti-corrosive agent.

Cooling oil may be used instead of cooling water. When cooling oil is
used, however, a degraded cooling efficiency results due to a
characteristic difference between water and oil, and the continuous
rated force decreases accordingly. So, when using cooling oil,
consider an output margin of ten percent to several tens percent.

NOTE
On cooling water, an anti-corrosive agent, and
cooling oil, a restriction may be imposed not only
from the motor but also from the chiller. So, consult
with a chiller supplier as well to select a cooling
medium that does not adversely affect the motor
and chiller.

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2.9 VERTICAL AXIS BALANCER

If a linear motor is used with the vertical axis when no balancer or

mechanical brake mechanism is used, the linear motor needs to
preserve its position with the continuous rated force that can be output
by the linear motor. If a stop state is caused for a long time by a force
greater than the continuous rated force, the probability that an
overheat occurs increases. Since the continuous rated force of a linear
motor is relatively small, a balancer is often required with the vertical
axis. If the power to the machine is turned off, a gradual drop occurs
with the vertical axis. To prevent this from occurring, a balancer may
be required.

If the acceleration exceeds 1 G, a balancing effect using a counter

weight cannot be achieved. In such a case, a balancer that dissipates
less heat and has a superior response characteristic is needed.

Many types of balancers are available: weight, pneumatic balancer,

hydraulic balancer, and so forth. Select a balancer that is most
suitable for a machine designed. If the friction of a balancer is large,
heat can be generated, or a backlash can be caused when a reverse
axis operation is performed. Be careful at the time of design.

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2.10 CONSIDERATION OF MAGNETIC ATTRACTION

Between a coil slider and magnet plate, magnetic attraction about

three times as powerful as the maximum force of the motor is exerted.
This force is constant, and is exerted even when the power to the
motor is turned off. In mechanical design, take the points below into
consideration.

Design of a light and high-rigidity frame

A mechanical frame that can withstand magnetic attraction and has a
sufficiently high rigidity to maintain precision is required. On the
other hand, a light mechanical frame is required to achieve higher
acceleration. When high speed and high precision are needed, a
higher gain is required. For this purpose, consider setting a resonance
frequency as high as possible for the machine.

Low-friction design
If the friction coefficient is high, a large frictional force results due to
high magnetic attraction. Heat is generated by a large frictional force,
and a degraded efficiency results. So, a design for ensuring low
friction is needed.

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2.11 AUXILIARY BRAKE MEASURES

The linear motor allows the dynamic brake to be applied by

connecting the power lead. If an object being moved weighs much or
moves at high speed, a longer coasting distance is required. If there is
no sufficient stroke margin, a collision against a stroke end can occur,
resulting in a damage to the machine. So, a mechanical brake or shock
absorber needs to be additionally installed.

The motor itself does not have a mechanical brake, so that a

mechanical brake is needed to preserve the position at power-off time.
This is because strong magnetic attraction can cause the motor to
move freely to the magnetically stablest position even with the
horizontal axis. Note that with the vertical axis, in particular, the
motor makes a downward movement.

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2.12 PROTECTION AGAINST DUST AND WATER

If magnetic dust such as metallic dust is located near a magnet plate,

the dust may be attracted to the magnet plate. In particular, dust larger
than the air gap between the coil slider and magnet plate is caught
between the gap, resulting in a failure. In order to remove dust that
builds up on the magnet plate, it is strongly recommended that a
scraper be installed. Moreover, if the motor is exposed to coolant
ceaselessly, the insulation of the motor can degrade. Consider a
structure that can minimize the penetration of coolant.
Usually, the penetration of foreign matter is prevented using a bellows
cover or telescopic cover. In addition, increasing the internal pressure
by air purge operation is very effective.

Besides coolant penetrating into the motor from the outside,

condensation may occur on the motor because of excessive cooling or
excessively high humidity. If condensation lasts for a long time, the
insulation of the motor can degrade. In such a case, take anti-
condensation measures such as reviewing the cooling condition and
blowing dry air to the motor.

The penetration of foreign matter may not be prevented by a dust and

waterproof cover or by air purge operation. In particular, an axis
installed horizontally allows more metallic dust or coolant to
penetrate. Moreover, for a high-speed moving axis, the securing of
sealing performance tends to be difficult. In such a case, review the
installation location of a linear motor axis. For example, keep a linear
motor axis away from the machining spot as much as possible, or
mount a linear motor axis on the top of the machine. These measures
are very effective.

In any case, the penetration of dust and coolant cannot be prevented

completely. So, be sure to conduct periodic maintenance (including
cleaning).
For reference information, a typical axis structure is shown below.

Dust cover

Coil slider

Scraper

Linear encoder

Table

Machine base
Magnet
plate Linear guide

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

NOTE
If sufficient dust and water protection is provided,
foreign matter may penetrate unexpectedly near the
motor, causing a failure or reducing the life of the
motor remarkably. Be sure to conduct period
maintenance according to Part V,
"MAINTENANCE".

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.13 AXIS DESIGN WITH A LOW GRAVITY CENTER

For high-acceleration machines, load should be imposed uniformly on

the linear guide surface. For this purpose, such a design that the
center of the driving source or the motor is closer to the gravity center
of a moving object is desirable. Such a design is also expected to
improve efficiency.
If the gravity center is deviated in high-speed operation, machine
operation and precision may be adversely affected.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

2.14 SCREWS FOR FIXING THE LINEAR MOTOR

A magnet plate has a powerful magnetic attraction force. When

magnetic screws are used, they are attracted abruptly to the magnet,
resulting in very inefficient workability. In such a case, use, for
example, nonmagnetic stainless screws. Such screws are not attracted
to the magnet, and therefore improve workability. In addition, use
nonmagnetic tools. Nonmagnetic tools are not attracted to the magnet,
so that workability and safety usually attainable can be maintained.

For securing a coil slider, ordinary magnetic screws may be used

because the coil slider itself does not exert magnetic attraction force.
When securing a coil slider, use those screws that are stronger than
stainless steel and have a strength equivalent to that of high tensile
steel.

When selecting any type of screw, consider the load and magnetic
attraction of the linear motor sufficiently. Tighten each screw
securely within the specified tightening torque. Control torque, and be
careful not to exceed the screw strength limit.

CAUTION
When securing a coil slider and magnet plate with
screws, be sure to use all screw holes and tighten
the screw securely. For a long-stroke axis, in
particular, a very large number of screws need to be
used with the magnet plate. Be sure not to omit
screws. Moreover, be sure not to secure a coil slider
and magnet plate only by using means other than
screws (for example, by using adhesive only).

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.15 CONFORMANCE TO STANDARDS

Machine design and component selection considering the

following are needed so that machines incorporating the
linear motor conform to the CE marking of Europe:
- Machine design, cabling, and so forth conforming to Article 19
of EN60204-1
- Machine design and component selection conforming to the
machine commands of Europe
- Use of components conforming to the European standards
- Conformance to the standards related to electric wiring and
cabling, insulation, and dust and water protection
- Ensuring a use condition that guarantees the rating of the motor
- Conformance to the EMC commands
- Conformance to the standards related to safety

Conformance to other standards such as the UL standard of the U.S.A.

may need to be considered separately. Referring to each relevant
standard for details, perform machine design and component selection
without failing to satisfy each standard.
The FANUC linear motor conforms to the EMC commands. Take
necessary action according to the guideline titled "To Conform to the
EMC Commands (A-72937)" released by FANUC separately.

NOTE
1 To obtain "To Conform to the EMC Commands (A-
72937)", contact your FANUC sales representative.
2 For details of the standards such as the EN and UL
standards, refer to each standard.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

2.16 MAGNETIC LEAKAGE AND MAGNETIC SHIELDING

Powerful permanent magnets are used for a magnet plate, so that a

magnetic material, if any near the magnet plate, can be magnetized.
This section describes the method of shielding magnetic leakage from
a magnet plate.

2.16.1 Level of Geomagnetism

According to a publication such as a chronological table of science,

the geomagnetism is 0.1 to 0.6 G. On the other hand, the FANUC
laboratory finds that a geomagnetism of about 2 G is observed at a
location far from a magnet plate. The level of 2 G is found in the
routine life environment and poses no problem.

2.16.2 Magnetic Leakage

A magnet plate manufactured by FANUC consists of a base iron plate

on which permanent magnets are attached. The base iron plate is
sufficiently thick to allow little downward magnetic leakage from the
magnet plate. On the magnet side, there is little magnetic leakage in
the area that faces the coil slider. Magnetic leakage occurs in other
areas where the magnet plate is exposed. Even in this case, the level
of magnetic leakage is as low as the level found in the daily life
environment at a location 20 cm or more away upward or sideward
from the magnet plate. There is little magnetic leakage downward
from the magnet plate.
leakage to 0
Magnetic

Magnetic
Magnetic

leakage
leakage

Resin
Magnetic
leakage to 0 leakage

Coil slider
Magnet Magnet plate
Magnetic

Iron plate

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.16.3 Magnetic Shielding

As shown below, let Lf (mm) be the thickness of the iron plate for
magnetic shielding, and let Lg (mm) be the distance between the ion
plate and magnets.

Iron plate
(shielding plate)
Resin
Magnet Magnet
plate
Iron plate

If an iron with a high transmittance (with a less amount of carbon

contained) is used at this time, no magnetic leakage occurs through
the shielding iron plate when:

Lf=11.4÷ (1+Lg÷5) For 1500A/4 or linear motors of larger sizes

Lf=5.7÷ (1+Lg÷5) For 900D/4 or linear motors of smaller sizes

The graph below shows the values of Lf when various values are
assigned to Lg.
12

8
Lf (mm)

6
Small linear motor(*)

4
Large linear motor(*)

0
0 20 40 60 80 100
Lg (mm)

* Large linear motor = 1500A/4 or larger sizes

Small linear motor = 900D/4 or smaller sizes

Magnetic leakage can be prevented by selecting an installation

location and a shielding plate thickness with some margin relative to
the expressions and graph above.

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2.MECHANICAL DESIGN HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

2.17 NAMEPLATE ATTACHMENT AND SERIAL NUMBER

MANAGEMENT

One of the nameplates shown below and a laminated sheet are packed
together with the coil sliders of all models.

FANUC nameplate GE Fanuc nameplate

For maintenance, attach the nameplate to the following location

where:
- The nameplate is always visible at the time of maintenance.
- The nameplate is easily visible without removing components.
- The nameplate is not easily detached.
Next, to protect the nameplate, attach the laminated sheet over the
nameplate. The recommended nameplate attachment locations
include:
- Inside of the door of the cabinet
- Near the main power supply of the machine
- Near the operator's panel or the back of the operator's panel

In addition, record and keep the combinations of machine numbers

and motor serial numbers so that which machine incorporates a motor
of which serial number can be identified easily after machine
shipment.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 2.MECHANICAL DESIGN

2.18 INDICATION OF WARNING

Be sure to indicate a warning to notify the operators of the presence

of magnets mounted on the machine and prevent an accident from
occurring. For example, attach a label or sticker that clearly indicates
the mounting location of a magnet plate by providing an illustration at
a position that is accessed for maintenance at all times or at an easily
noticeable position. Ensure that such a label or sticker is not easily
removed or is hidden behind a component. An example of warning
label is given below.

WARNING
Under this cover, very powerful magnets are mounted.
Mishandling can cause a serious accident. So, before
opening this cover, fully understand the possible risks
involved and prepare a safe work environment by
referring to page XX of the operator's manual of the
machine.
- Do not operate this machine if you wear a medical
appliance such as a pacemaker.
- Take off any unnecessary magnetic materials.

Mounting location of a magnet plate

A magnet plate is mounted at the following location
under the cover:
Table
Magnet plate (800 mm long), black
Linear guide

NOTE
The customer is to prepare a warning label or
sticker.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3 ASSEMBLY
WARNING
For the linear motor, very powerful magnets are
used. If the linear motor is handled incorrectly,
serious accidents including fatal accidents can
occur. Read this chapter carefully for thorough
understanding, and do not fail to observe the
cautions and warnings described in this chapter.
Ensure that only persons educated for the handling
of the linear motor handle the linear motor.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.1 LINEAR MOTOR MOUNTING PROCEDURES

This section introduces four procedures for mounting a linear motor

on the machine. Depending on the structure of the machine, select the
safest procedure.

3.1.1 Procedure #1 for Mounting a Linear Motor on the Machine

If the total length of magnet plates for one axis is greater than the total
length of a coil slider by a factor of 2 or more, the linear motor can be
mounted using the procedure below.

<1> Shift the movable table to one end of the axis, then secure a
magnet plate (half of the total length).

Securing screws
Movable table

Linear guide
Magnet plate

<2> Shift the movable table onto the magnet plate. Note that if the
table is magnetic, the table may be attracted toward the magnet
plate. Place a spacer as thick as the magnet plate in the area
where no magnet plate is mounted, then place a coil slider on the
spacer.
Coil slider

Spacer

<3> Shift the movable table onto the coil slider, then secure the coil
slider with screws.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

<4> Shift the movable table onto the magnet plate again, then mount
a remaining magnet plate. Note that when the movable table is
shifted, the movable table is pulled toward the magnet plate by
magnetic attraction.

CAUTION
Powerful magnetic attraction is exerted at all times.
When securing magnet plates and a coil slider, be
sure to securely tighten all screws. Do not tighten
the screws temporarily. Until the magnet plates have
been secured, do not remove the tin plate and
corrugated board attached onto the top face of each
magnet plate.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.1.2 Procedure #2 for Mounting a Linear Motor on the Machine

If the total length of magnet plates for one axis is greater than the total
length of a coil slider by a factor of 2 or more, the linear motor can be
mounted using the procedure below.

<1> Secure a coil slider to the movable table.

Securing screws
Movable table

Coil slider

<2> Mount a magnet plate on a half side of the axis, then mount the
movable table on the other half side where no magnet plate is
mounted.

Magnet plate
Linear guide

<3> Shift the movable table onto the magnet plate, then mount a
remaining magnet plate. Note that when the movable table is
shifted, the movable table is pulled toward the magnet plate by
magnetic attraction.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.1.3 Procedure #3 for Mounting a Linear Motor on the Machine

This procedure mounts a coil slider and magnet plate separately then
performs integration.

<1> Mount a magnet plate on the actual axis, and mount a coil slider
onto the movable table on a temporary axis.

Actual axis Temporary

axis

<2> Connect the temporary axis to the actual axis, then shift the
movable table to the actual axis. Note that when the movable
table is shifted, the movable table is pulled toward the magnet
plate by magnetic attraction.

<3> After shifting the movable table, disconnect the temporary axis.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.1.4 Procedure #4 for Mounting a Linear Motor on the Machine

WARNING
Procedure #4 described in this subsection is most
affected by the magnetic attraction of magnet plates.
Do not use this procedure if the use of this
procedure is avoidable. This procedure is very
dangerous. Do not use this procedure if any other
safer mounting procedure is usable.

<1> Mount a coil slider and magnet plate separately as done in

Subsection 3.1.3.
<2> Hang the coil slider with a crane and lower it slowly, then secure
it onto the guide. At this time, do not use a lifting tool equipped
with a spring, such as an air balance.

WARNING
1 Use a crane that is more powerful than the magnetic
attraction.
2 As the coil slider gets closer to the magnet plate,
greater magnetic attraction is exerted (inversely
proportional to the square of distance). Ensure that
the machine (or magnet plate in this example) is not
pulled up.
3 When performing this operation, be sure to keep the
coil slider and magnet plate horizontal. Do not
perform this operation with the magnet plate tilted
upward.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.2 MOUNTING A COOLING PLATE AND CONNECTING A

COOLING TUBE

This section describes how to mount a cooling plate on the linear

motor and connect the cooling tube.

3.2.1 300D/4, 600D/4, 900D/4

When performing forced air cooling or forced water cooling with

300D/4, 600D/4, or 900D/4, mount a cooling plate between the slider
and table so that the cooling tube extends in the same direction as the
power lead. The mounting hole pitch of a cooling plate is the same as
the mounting screw pitch of the coil slider. A cooling plate is inserted
and secured by pulling the coil slider toward the table with setscrews.
Then, connect an external chiller to the cooling tube with tube joints.

Setscrew
Table

Power
lead

Coil slider
Cooling plate
Cooling tube

NOTE
1 The cooling plate is optional. The size of a cooling plate varies
from one model to another. Order an appropriate cooling plate
according to the motor model used.
2 When an incremental linear encoder is used, a magnetic pole
sensor is required. When a cooling plate is mounted, the
method of mounting a magnetic pole sensor changes. See
Section 3.5, "MOUNTING A MAGNETIC POLE SENSOR".
3 The cooling tube is made of relatively thin copper. If a large
force is applied onto the cooling tube, the cooling tube can be
easily deformed or broken. Be careful when attaching a joint
to the cooling tube. When the coil slider is movable, relay the
cooling tube in the middle to ensure that no external force is
applied to the cooling tube of the cooling plate. The customer
is to prepare piping components such as tube joints.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.2.2 3000B, 6000B, 9000B, and 15000C

The coil slider for 3000B through 15000C has a built-in cooling tube.
The tube built into a coil slider is based on inch screws, so that a joint
for conversion to taper screws for piping (R1/4 or R1/8) is available
as an option. Mount the conversion joint as shown below.

O-ring
(Delivered with motor)

Chiller

Inside motor

When attaching a joint to the coil slider, ensure that the joint on the
coil slider side is held firmly. When attaching a conversion joint, be
sure to hold the joint on the coil slider side firmly by using an
optional dedicated wrench or an equivalent wrench. Do not turn the
wrench, but use it only to hold the joint on the coil slider side.

Magnetic pole sensor

Coil slider

Connector for thermostat

Power line terminal

CAUTION
If the joint on the coil slider side is moved, the resin of
the coil slider can crack, and can disable the motor
from being used in the worst case. Be sure not to turn
the joint on the coil slider side.

NOTE
1 When the coil slider is movable, relay the tube in the
middle to ensure that no external force is applied to the
tube joint.
2 For information about the conversion joint and
dedicated wrench, see Part I, "SPECIFICATIONS".
3 When an absolute linear encoder system is used, the
magnetic pole sensor shown above is not required.
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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.3 POWER LEAD AND THERMOSTAT LEAD CONNECTION

This section describes the method of linear motor power lead

connection and thermostat lead connection. Connect the leads
correctly according to the model used.

3.3.1 300D/4, 600D/4, and 900D/4

From the coil slider, six leads are directly extended: four power leads
and two thermostat leads. The table below indicates the specifications
of the leads.

Lead type Sheath Conductor cross Average outside

2
color section (mm ) diameter (mm)
Power lead (U phase) Red 2.0 2.6
Power lead (V phase) White 2.0 2.6
Power lead (W phase) Black 2.0 2.6
Power lead (ground) Green 2.0 2.6
Thermostat lead 1 Black 0.35 1.28
Thermostat lead 2 Black 0.35 1.28
*1 No crimp terminal is supplied with any power or thermostat lead.
*2 The thermostat leads are nonpolarized.

When the coil slider is movable, relay the leads to movable cables
through an intermediate fixed terminal block. For conformance to the
CE marking, use a terminal block conforming to the European
standards, and make a PE connection securely.

Movable cables for

thermostat
Relay terminal block
To PMC

Lead for thermostat To servo amplifier

Table (movable) Movable cable for power

Coil slider
Lead for power

Magnet plate (fixed)

CAUTION
The leads for power are not movable cables. If the
leads are moved, the leads can be broken during
motor operation. So, when the coil slider is movable,
be sure to relay the leads to movable cables.

NOTE
For conformance to the CE marking, conform to
EN60204-1 for cabling.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.3.2 1500A/4

From the coil slider, six leads are directly extended: four power leads
and two thermostat leads. The table below indicates the specifications
of the leads.

Average outside
Lead type Sheath color AWG size
diameter (mm)
Power lead (U phase) Black/Green AWG10 (5.5mm2) 5.5
Power lead (V phase) Black/Red AWG10 (5.5mm2) 5.5
Power lead (W phase) Black/White AWG10 (5.5mm2) 5.5
Power lead (ground) Green/Yellow AWG10 (5.5mm2) 5.5
Gray
AWG32 2 cores Sheath : DIA 5.5
For thermostat (Core : Black and
(Core : 0.3mm2) (Core : DIA 1.44)
White)
*1 No crimp terminal is supplied with any power or thermostat lead.
*2 The thermostat leads are nonpolarized.

Movable cables for

thermostat
Relay terminal block
To PMC

Lead line for To servo amplifier

thermostat

Table (movable) Movable cable for power

Coil slider
Lead line for power

Magnet plate (fixed)

NOTE
For conformance to the CE marking, conform to
EN60204-1 for cabling.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.3.3 3000B/2, 3000B/4, 6000B/2, 6000B/4, 9000B/2, and 9000B/4

A terminal for power lead connection and a connector for thermostat

lead connection are built into these models.

Terminal and connector allocation

For thermostat (pins 1 and 2)

Power line, phase V

Power line, phase W

Power line, phase U

Power line, grounding

Cables usable for power leads

Nominal cross- Cable
Model AWG 2 NOTE
sectional area (mm ) diameter
3000B/2, 3000B/4
UL1015 AWG#10 5.5 φ4.5 to φ4.9
6000B/2, 6000B/4
9000B/2 - 5.5 φ4.5 to φ4.9
9000B/4 - 10 φ6.2 to φ6.7

NOTE
1 If the diameter of a cable is not within the allowable range
specified above, the drip protection capability of the
terminal is not guaranteed. Be sure to select a cable that
satisfies the diameter range specified above.
2 Bend a power lead outside the terminal. If a power lead is
bent inside the terminal, the drip protection capability of
the terminal is not guaranteed.
3 When the coil slider is movable, be sure to use movable
cables. Do not attach a movable cable to each terminal,
but attach a movable cable to a relay terminal block in the
middle.

Cable usable for the thermostat

Nominal cross- NOTE
AWG 2 Cable diameter
sectional area (mm )
UL1015 AWG#23×2 0.3×2 φ4.6 to φ5.0

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

NOTE
1 If the diameter of a cable is not within the allowable range
specified above, the drip protection capability of the
terminal is not guaranteed. Be sure to select a cable that
satisfies the diameter range specified above.
2 When the coil slider is movable, be sure to use movable
cables.
Terminal connection
<1> Peel off a power lead by 8 to 10 mm, then attach a delivered
crimp terminal.

Crimp terminal model number: R5.5-S4

Manufacturer: Japan Solderless Terminal MFG. CO., LTD.

R8-NK4 is to be selected for 9000B/2 and 9000B/4.

NOTE
If a crimp terminal not specified is used, the drip
protection capability of the terminal is not
guaranteed.

<2> Insert a crimped power lead into the hole of the terminal, then
fasten the lead with a delivered screw.

<3> Connect all power leads (including a ground lead) according to

the procedure above.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

<4> Attach a waterproof cover onto the terminal. Ensure that the top
face of the cover is flat, and that there is no gap between the
cover and terminal.

Waterproof cover

<5> Attach a connector and cable for the thermostat.

Thermostat line

Power line

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

Thermostat connector pin allocation

Using a delivered connector, connect the thermostat lead. The pin
allocation is shown below. Connect the thermostat lead to pin 1 and
pin 2. No polarity is applicable. Pin 3 and pin 4 are not used.

NOTE
For cabling, conform to EN60204-1.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.3.4 15000C/2 and 15000C/3

A terminal for power lead connection and a connector for thermostat

lead connection are built into these models.

Terminal and connector allocation

For thermostat. No polarity applicable. (Pins 1 and 2)

Power line, phase V, 2 locations

Power line, phase W, 2 locations

Power line, phase U, 2 locations

Power line, grounding, 2 locations

Cables usable for power leads

Nominal cross- Cable
Model AWG 2 NOTE
sectional area (mm ) diameter
15000C/2 UL1015 AWG#10 5.5 φ4.5 to φ4.9
15000C/3 - 10 φ6.2 to φ6.7

NOTE
1 If the diameter of a cable is not within the allowable
range specified above, the drip protection capability
of the terminal is not guaranteed. Be sure to select a
cable that satisfies the diameter range specified
above.
2 Bend a power lead outside the terminal. If a power
lead is bent inside the terminal, the drip protection
capability of the terminal is not guaranteed.
3 When the coil slider is movable, be sure to use
movable cables. Do not attach a movable cable to
each terminal, but attach a movable cable to a relay
terminal block in the middle.

Cable usable for the thermostat

Nominal cross-sectional NOTE
AWG 2 Cable diameter
area (mm )
UL1015 AWG#23×2 0.3×2 φ4.6 to φ5.0

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

Terminal connection
<1> Peel off a power lead by 8 to 10 mm, then attach a delivered
crimp terminal.

Crimp terminal model number: R8-NK4

Manufacturer: Japan Solderless Terminal MFG. CO., LTD.

NOTE
If a crimp terminal not specified is used, the drip
protection capability of the terminal is not
guaranteed.

<2> Insert a crimped power lead into the hole of the terminal, then
fasten the lead with a delivered screw.

<3> Connect all power leads (including a ground lead) according to

the procedure above.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

<4> Attach a waterproof cover onto the terminal. Ensure that the top
face of the cover is flat, and that there is no gap between the
cover and terminal.
Waterproof cover

<5> Attach a connector and cable for the thermostat.

Thermostat line

Power line

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

Thermostat connector pin allocation

Using a delivered connector, connect the thermostat lead. The pin
allocation is shown below. Connect the thermostat lead to pin 1 and
pin 2. No polarity is applicable. Pin 3 and pin 4 are not used.

NOTE
For cabling, conform to EN60204-1.

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3.ASSEMBLY HANDLING, DESIGN, AND ASSEMBLY B-65222EN/03

3.4 MOUNTING A LINEAR ENCODER

A linear encoder must be mounted at a specified location. If a linear

encoder is mounted at an incorrect location, the motor can become
uncontrollable in the worst case. Mount a linear encoder correctly and
securely according to Chapter 2, "MECHANICAL DESIGN", in this
chapter.

CAUTION
If the motor becomes uncontrollable, the machine
can be damaged. Before turning on the power to the
machine, be sure to check the mounting location of
the linear encoder.

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B-65222EN/03 HANDLING, DESIGN, AND ASSEMBLY 3.ASSEMBLY

3.5 MOUNTING A MAGNETIC POLE SENSOR

NOTE
When an absolute linear encoder is used, no
magnetic pole sensor and position detection circuit
are required.

3.5.1 Mounting a Magnetic Pole Sensor on 300D/4, 600D/4, or

900D/4

A magnetic pole sensor must be mounted at a specified location. For

the mounting location, see Chapter 2, "MECHANICAL DESIGN".

When a cooling plate for forcibly cooling is mounted, a spacer needs

to be attached to the magnetic pole sensor as shown below. A spacer
is delivered with the cooling plate. When the cooling plate is not used,
the spacer is not required.

Coil slider setscrew

Table

Magnetic pole sensor

setscrew

Motor power lead

Coil slider

Spacer for magnetic pole

sensor (delivered with
Magnetic pole sensor Magnetic pole cooling plate)
signal lead sensor Cooling tube

Run the power lead and thermostat lead through the groove on the
side of the magnetic pole sensor. Run the cooling tube of the cooling
plate between the spacer and table.

NOTE
For the mounting of a magnetic pole sensor for
1500A/4 and up, see Part 2, "MECHANICAL
DESIGN". For position detection circuit connection,
see Part I, "SPECIFICATIONS".

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IV. START-UP
B-65222EN/03 START-UP 1.PREPARATION FOR START-UP

1 PREPARATION FOR START-UP

For the start-up of an axis with a linear motor mounted, the items
below are required or desirable for convenience. Prepare the
following beforehand:

- Descriptions (B-65222EN)
- Oscilloscope (for an incremental linear encoder)
- DC power supply (for an absolute linear encoder)
Capable of constant current control. 5 to 10A, up to about 30V
* When using a heavy axis or an axis with many motors,
consult with FANUC beforehand.
- FANUC AC SERVO MOTOR αi series Parameter Manual (B-
65270EN)
- SD (servo waveform measurement software) and its operating
environment

NOTE
1 The execution of SD requires a personal computer
compatible with IBM PC/AT (DOS/V machine in
Japan), MS-DOS or Windows 95/98 (DOS mode),
printer cable conforming to the Centronics
specification, and serial check board.
2 The customer is to prepare a personal computer,
oscilloscope, and DC power supply.
3 To obtain SD, a serial check board, and FANUC AC
SERVO MOTOR αi series Parameter Manual,
contact your FANUC sales representative.
4 iTUNE enables waveform observation as with SD.
For information about iTUNE, contact FANUC.
5 This part describes the method of start-up using SD.
For the method of start-up using iTUNE, contact
FANUC.

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2.CHECKING MOUNTING STATE START-UP B-65222EN/03

2 CHECKING MOUNTING STATE

CAUTION
If a linear motor or linear encoder is mounted
incorrectly, the motor can become uncontrollable in
the worst case. Before turning on the power, check
that the linear motor and linear encoder are
mounted correctly.

Before turning on the power, check that the coil slider, magnet plate,
and linear encoder are mounted correctly, and that the type of
amplifier used and the power line and signal line connections are
correct, according to Part II, "SPECIFICATIONS", and Part III,
"HANDLING, DESIGN, AND ASSEMBLY".

NOTE
If a motor or linear encoder is mounted using a
method not described in this manual, contact
FANUC beforehand to check if the motor can be
operated normally and safely.

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B-65222EN/03 START-UP 3.CHECKING FEEDBACK OUTPUT SIGNAL

3 CHECKING FEEDBACK OUTPUT

SIGNAL
NOTE
The operation described below is required only
when an incremental linear encoder is used. The
operation described below is not required when an
absolute linear encoder is used.

CAUTION
Turn on the power to the machine here. However,
do not excite the motor when performing the work
described below.

Open the cover of the position detection circuit, and check the
waveform with the signal check lands placed on the periphery of the
printed circuit board.
Input from the scale (12-pin round connector)

A, XA, B, XB, Z, XZ:

Signal from the scale

T1: Analog reference voltage

0°, 90°: Internal analog signal

0V, 5V: Power supply

PA, PB, PZ: Digital signal

Output to the CNC or separate detector

interface unit (15-pin round connector)

Check the analog signal inside the circuit to check the waveform
output from the linear encoder.

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3.CHECKING FEEDBACK OUTPUT SIGNAL START-UP B-65222EN/03

Connect the probe GND of the oscilloscope to the reference voltage

T1 (= 2.5 V) then check 0° (phase A) 90° (phase B).

If the coil slider moves in the direction opposite to the power line
extension direction, ensure that the output waveform of the linear
encoder is in the positive direction (phase B is 90° ahead of phase A).
(Fig. 2.1)

Phase A

Phase B
Correct

Fig. 2.1 Waveform where phase B is ahead

Fig. 2.2 shows a waveform pattern where the signal waveform of

phase A is 90( ahead of the signal waveform of phase B. In this case,
the mounting direction of the scale needs to be reversed, or the
connections of phase A and phase B in the signal cable need to be
reversed. For phase reversion, connect phase A and phase B reversely
in cable K5.

Phase B

Phase A Incorrect

Fig. 2.2 Waveform where phase A is ahead

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B-65222EN/03 START-UP 4.PARAMETER SETTING

4 PARAMETER SETTING
To drive the linear motor, the parameters for the linear motor need to
be set. This section describes the method of setting basic parameters
required to start up an axis with a linear motor mounted.

NOTE
For the methods of parameter setting and servo
adjustment such as the method of servo tuning not
covered in this manual, refer to "FANUC AC SERVO
MOTOR αi series Parameter Manual (B-65270EN)".

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4.PARAMETER SETTING START-UP B-65222EN/03

4.1 LINEAR MOTOR PARAMETER SETTING

4.1.1 Procedure for Setting the Initial Parameters of Linear Motors

(1) Overview
The following describes the procedure for setting the digital servo
parameters to enable the use of a FANUC linear motor.

(2) Series and editions of applicable servo software

Series 9096/A(01) and subsequent editions (Series 21i, Power Mate i)
Series 90B0/A(01) and subsequent editions (Series 15i, 16i, 18i, 21i)

(3) Setting parameters

The position and velocity of the linear motor are detected using a
linear encoder. Two types of linear encoders are available:
incremental type and absolute type. The parameter setting and
connection vary according to the type of encoder.

Incremental type
The linear encoder of incremental type is connected to a servo
amplifier via a position detection circuit (A860-0333-T001, A860-
0333-T002) manufactured by FANUC. Depending on the signal pitch
(resolution) of an encoder connected, the parameter setting varies.
First, check the signal pitch. Table lists examples in the II-1.1.2 of
incremental type linear encoders currently usable.

Absolute type
The linear encoder of absolute type is directly connected to a servo
amplifier. Depending on the resolution of an encoder used, the
parameter setting varies. First, check the resolution. Table lists
examples in the II-1.1.2 of absolute type linear encoders currently
usable.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

(4) Parameter settings

Set the parameters according to the procedure below. Note the points
below when setting the parameters.

[Note on using absolute type linear encoders]

In the parameter setting procedure below, there is a parameter
dependent on the encoder signal pitch. When using an absolute
type linear encoder, convert a resolution to an encoder signal
pitch by using the following conversion formula to make a
parameter calculation:
Encoder signal pitch [µm] = 512 × resolution [µm]

[Note on pole-to-pole spans]

In the parameter setting procedure below, there is a parameter
dependent on the pole-to-pole span. The table below indicates
the pole-to-pole span of each motor model.

Table List of pole-to-pole spans

Classification Pole-to-pole span (D) Motor model
900D/4 or smaller motors 30mm 300D, 600D, 900D
1500A, 3000B, 6000B,
1500A/4 or larger motors 60mm
9000B, 15000C

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4.PARAMETER SETTING START-UP B-65222EN/03

(5) Servo Parameter Initialization Procedure

(1) Switch on the NC in an emergency stop state.

Enable parameter writing (PWE = 1).
(2) Initialize servo parameters on the servo setting screen.
For a Power Mate with no CRT, specify a value for an item
number on the servo setting screen.
To display the servo setting screen, follow the procedure below,
using the key on the NC.

l Series 15
Press the SERVICE
key several times, and the servo setting screen will
appear.

l Series 16, 18, 20, 21

SYSTEM
→ [SYSTEM] → [ ] → [SV-PRM]

If no servo screen appears, set the following parameter as shown, and

switch the NC off and on again.
#7 #6 #5 #4 #3 #2 #1 #0
3111 SVS
SVS (#0) 1: Displays the servo screen.

When the following screen appears, move the cursor to the item you
want to specify, and enter the value directly.

Power Mate
Servo set 01000 N0000
X axis Z axis
INITIAL SET BITS 00001010 00001010 No.2000
Motor ID No. 16 16 No.2020
AMR 00000000 00000000 No.2001
CMR 2 2 No.1820
Feed gear 1 1 No.2084
(N/M) 100 100 No.2085
Direction Set 111 111 No.2022
Velocity Pulse No. 8192 8192 No.2023
Position Pulse No. 12500 12500 No.2024
Ref. counter 10000 10000 No.1821

Servo setting menu Correspondence of Power Mate

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B-65222EN/03 START-UP 4.PARAMETER SETTING

(3) Start initialization.

#7 #6 #5 #4 #3 #2 #1 #0
INITIAL SET BIT PRMC DGPR PLC0
( Note)

Start initialization (Keep the NC power on until step (10).)

DGPR (#1) = 0 Automatically set to 1 after initialization.

NOTE
Once initialization has been completed,
automatically set bit 3 (PRMC) for initialization to 0.

(4) Specify the motor ID No.

Based on the motor model and drawing number (A06B-)
information, select the motor type number of a linear motor used.

Model name Drawing number Motor type number

300D/4 0421-B801 124
600D/4 0422-B801 125
900D/4 0423-B801 126
1500A/4 0410-B901 90
3000B/2 0411-B911, 0411-B901 91
3000B/4 0411-B811 120
6000B/2 0412-B911, 0412-B901 92
6000B/4 0412-B811 121
9000B/2 0413-B911, 0413-B901 93
9000B/4 0413-B811 122
15000C/2 0414-B901 94
15000C/3 0414-B811 123
* Motor type numbers are for servo HRV1 driven by 200 V.

NOTE
Servo axes are controlled in groups of two axes. So,
for successive servo control numbers (odd number
and even number), motor type number unified for
servo HRV1 or for servo HRV2 or HRV3 must be
specified.

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4.PARAMETER SETTING START-UP B-65222EN/03

Parameter setting procedure (1)

Procedure (1) can be used to initialize the parameters (such as current

gain) necessary to drive a linear motor. After initialization, it is
necessary to set the parameters that depend on the signal pitch of the
encoder. So, follow procedure (2) below.

1804 - Initialization bit

2000 -
For PLCO (#0), see Table 4.1.1(a) and Table 4.1.1(b).

1806 - AMR
2001 -
Specify 00000000.

1879 - Movement direction

2022 -
111: The torque command direction matches the specified direction of
the NC.
-111:The torque command direction is opposite to the specified
direction of the NC.

1874 - Motor number

2020 -
The following twelve different linear motor models are available as of
April, 2001. Their drawing numbers and model numbers are listed
below.

Model name Drawing number Motor type number

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B-65222EN/03 START-UP 4.PARAMETER SETTING

Parameter setting procedure (2)

Procedure (2) can be used to specify the parameters that depend on

the signal pitch of the scale. Set the parameters according to Table
4.1.1 (a), (b).
When using an absolute type linear encoder, calculate as follows:
Encoder signal pitch [µm] = 512 × resolution [µm]
The pole-to-pole span used in calculation varies, depending on the
motor model.
900D/4 or smaller linear motors: 30 mm
1500A/4 or larger linear motors: 60 mm
(See Table 4.1.1(c).)

1876 - Number of velocity pulses (PULCO)

2023 -
(Parameter calculation expression)
PULCO = 5000 × 20/(scale signal pitch [µm])

1891 - Number of position pulses (PPLS)

2024 -
(Parameter calculation expression)
PPLS = 16000 × 20/(scale signal pitch [µm])

#7 #6 #5 #4 #3 #2 #1 #0
1707 - APTG
2013 -
APTG(#7) When using an absolute type linear encoder, set this bit to:
1: Ignores an α pulse coder soft disconnection.

1705 - AMR conversion coefficient 1

2112 -
(Parameter calculation expression for not using AMR conversion
coefficient 2)
AMR conversion coefficient 1
= 512 × (60 [mm]/scale signal pitch [µm])
(Parameter calculation expression for using AMR conversion
coefficient 2)
AMR conversion coefficient 1
= 512 × 1000 × (pole-to-pole span [mm]/encoder signal pitch [µm]) /
2 (AMR conversion coefficient 2)

1761 - AMR conversion coefficient 2

2138 -
Usually specify 0 in this parameter. If AMR conversion coefficient 1
exceeds 32,767 or is not an integer, use AMR conversion coefficient
2.
(Parameter calculation expression)
(AMR conversion coefficient 1) × 2 (AMR conversion coefficient 2)
= Pole-to-pole span [mm] × 1000 × (512/encoder signal pitch [µm])
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4.PARAMETER SETTING START-UP B-65222EN/03

1977 - Flexible feed gear numerator

2084 -

1978 - Flexible feed gear denominator

2085 -
Use a unified detection unit for the flexible feed gear (FFG)
parameters according to Tables 4.1.1 (a) and 4.1.1 (b).
(Parameter calculation expression)
FFG = 5/128 × (encoder signal pitch [µm]/20) / (detection unit [µm])

Table 4.1.1 (a) Setting parameters for detection unit of 1 µm (incremental)

[Linear motor 1500A/4 or larger linear motors]
Number of Number of
AMR conversion AMR conversion FFG FFG
Signal pitch PLC0 velocity position
coefficient 1 coefficient 2 numerator denominator
pulses pulses
20 0 5000 16000 1536 0 5 128
40 0 2500 8000 768 0 5 64
2(*1) 1 5000 (*2) 15360 0 1 256
4(*1) 1 2500 8000 7680 0 1 128
100 0 1000 3200 1200 8 25 128
40.513167 0 2468 7899 1481 9 301 3804
[Linear motor 900D/4 or smaller linear motors]
Number of Number of
AMR conversion AMR conversion FFG FFG
Signal pitch PLC0 velocity position
coefficient 1 coefficient 2 numerator denominator
pulses pulses
20 0 5000 16000 768 0 5 128
40 0 2500 8000 384 0 5 64
2(*1) 1 5000 (*2) 7680 0 1 256
4(*1) 1 2500 8000 3840 0 1 128
100 0 1000 3200 1200 7 25 128
40.513167 0 2468 7899 1481 8 301 3804

Table 4.1.1 (b) Setting parameters for detection unit of 1 µ m (absolute)

[Linear motor 1500A/4 or larger linear motors]
Number of Number of
AMR conversion AMR conversion FFG FFG
Resolution PLC0 velocity position
coefficient 1 coefficient 2 numerator denominator
pulses pulses
0.1 0 1953 6250 600 0 1 10
0.05 0 3906 12500 1200 0 1 20
[Linear motor 900D/4 or smaller linear motors]
Number of Number of
AMR conversion AMR conversion FFG FFG
Resolution PLC0 velocity position
coefficient 1 coefficient 2 numerator denominator
pulses pulses
0.1 0 1953 6250 300 0 1 10
0.05 0 3906 12500 600 0 1 20

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B-65222EN/03 START-UP 4.PARAMETER SETTING

*1 If the number of position/velocity pulses does not fit one word,

set the following bit to 1.
#7 #6 #5 #4 #3 #2 #1 #0
1804 - PLC0
2000 -
PLC0 (#0) Specifies whether to use the number of velocity or position pulses
without modifying them, as follows:
0: Not to modify
1: Multiply by 10 ← To be set

*2 Because the number of position pulses exceeds 130,000, specify

the position pulse conversion coefficient (supported by Series
90B0).

2628 - Position pulse conversion coefficient (PSMPYL)

2185 -
Bit for multiplying the number of position/velocity pulses by ten
(PLC0) = 1
Number of pulses (PPLS) = 8000
Position pulse conversion coefficient (PSMPYL) = 2
Regard 160,000 pulses as: (8000*2)*10

*3-a Because the velocity loop proportional gain overflows, set the
following bit to 1 (supported by Series 90B0).
#7 #6 #5 #4 #3 #2 #1 #0
1740 - P2EX
2200 -
P2EX (#6) Velocity loop proportional gain (PK2V)
0: Standard format
1: Changes the format ← To be set

*3-b Because the dead zone compensation parameter overflows

internally, change it as follows:

1866 - Dead zone compensation (tilt) (PDDP)

2054 -
PDDP Dead zone compensation (tilt)
1894 (typical value for linear motor) → 1500

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4.PARAMETER SETTING START-UP B-65222EN/03

Parameter setting procedure (3)

When a linear motor is used, the linear encoder must be installed so

that the Z phase of the linear encoder matches the origin of the
activating phase. Otherwise, the specified motor characteristics
cannot be obtained. (For details of installation positions, refer to Part
III, “HANDLING, DESIGN, AND ASSEMBLY”".

Procedure (3) describes the method of adjusting the activating phase

origin (AMR offset adjustment) when it is difficult to install a linear
encoder at a specified position with a specified precision.

1762 - AMR offset

2139 -
Specifies an activating phase (AMR offset) for phase Z.
[Increment system] Degrees
[Valid data range] -45 to 45 (*)

* With Series 90B0/C(03) and subsequent editions, an extended

AMR offset setting range (-60 degrees to 60 degrees) can be
specified by setting the parameter below. So, if the AMR offset
value does not lie within the range -45 degrees to 45 degrees in
adjustment processing, set the bit below. (Usually, set the bit
below to 0.)

#7 #6 #5 #4 #3 #2 #1 #0
2683 - AMR60
2270 -
AMR60 (#0) Changes the AMR offset setting range.
0: -45 degrees to 45 degrees (standard setting range)
1: -60 degrees to 60 degrees (extended setting range)

The procedure for AMR offset adjustment is described below. The

procedure varies according to whether an incremental type linear
encoder or absolute type linear enable is used. Before starting an
adjustment, check the type of linear encoder used.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

Incremental type

The procedure for AMR offset adjustment when an incremental type

linear encoder is used is described below. When using an absolute
type linear encoder, see the item of Absolute type described later.

Make a fine activating phase adjustment according to the procedure

below.

1) Connect the servo check board to the CNC.

2) Set the 7-segment LED on check board CH1 as follows:
Set the axis number of parameter No. 1023 in the AXIS digit.
Set 5 in the DATA digit.
3) For activating phase measurement, set the parameter below.

1726 - Parameter for internal data measurement

2115 -
Series 9096:
326 for an odd-numbered axis and 966 for an even-numbered axis
Series 90B0:
326 for an odd-numbered axis and 2374 for an even-numbered axis
Under this condition, the activating phase is output from CH1 on the
check board.
To use a digital check board to measure data with a personal
computer, set up "SD" (servo adjustment software) as stated below.
The displayed value is in degree units ("360 degrees" is displayed as
"360").
DOS prompt > SD INIT [Enter]
o (Origin of position)
F9 (System setting)
0 (CH0)
2 [Enter] (TCMD)
639.84375 [Enter](A)
F10 (Return to main menu.)

NOTE
See Section 4.18 in the FANUC ACSERVO MOTOR
αi series Parameter Manual (B-65270EN) for
explanations about how to use the SD software.
In addition, the analog voltage from the check board
can be observed using an oscilloscope. In output
conversion, 2.5 V corresponds to 360 degrees.

4) Run the linear motor using a JOG operation for example, and
observe the behavior of the activating phase (AMR) before, at
the moment, and after phase Z is captured. (See Figs. 4.1.1 (a)
and (b).)
The activating phase changes to 0 (or 360) degrees at the
moment phase Z is captured. Measure the value just before it
changes, and let this value be A.

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4.PARAMETER SETTING START-UP B-65222EN/03

0.3 V (45°) or lower 2.2 V (315°) or higher

Phase Z Phase Z
Fig. 4.1.1 (a) If the offset is set with a positive number Fig. 4.1.1 (b) If the offset is set with a negative number

* The figures above show examples where AMR60 = 0. When

AMR60 = 1, "0.3 V (45°) or lower" should read "0.4 V (60°) or
lower", and "2.2 V (315°) or higher" should read "2.1 V (60°) or
higher".

5) Set the AMR offset parameter with A (or A - 360).

* The parameter setting range is:
-45 degrees to +45 degrees (when AMR60 = 0)
-60 degrees to +60 degrees (when AMR60 = 1)
When the value of A does not lie within the setting range, the
installation position of the linear encoder needs to be readjusted.
The voltage range of A allowing parameter setting, when
measured by analog voltage, is as follows:
0 V to 0.3 V and 2.2 V to 2.5 V (when AMR60 = 0)
0 V to 0.4 V and 2.1 V to 2.5 V (when AMR60 = 1)

6) Switch the power off and on again. Now parameter setting is

completed.

7) Observe the activating phase (AMR) again according to step 4)

above, and check that the activating phase changes continuously
in the phase Z rising portion.
Return the parameter set in step 3) above to 0.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

8) Switch the power off and on again. This completes parameter

setting.

0.3 V (45°) or lower() 2.2 V (315°) or lower()

2.5V 2.5V

Phase Z Phase Z

Fig. 4.1.1(c) If the offset is set with a positive number Fig. 4.1.1(d) If the offset is set with a negative
(after AMR offset adjustment) number (after AMR offset adjustment)

* The figures above show examples where AMR60 = 0. When

AMR60 = 1, "0.3 V (45°) or lower" should read "0.4 V (60°) or
lower", and "2.2 V (315°) or higher" should read "2.1 V (60°) or
higher".

Absolute type
The procedure for AMR offset adjustment when an absolute type
linear encoder is used is described below. When using an incremental
type linear encoder, see the item of Incremental type described
earlier.
Make a fine activating phase adjustment according to the procedure
below.

CAUTION
In this adjustment, the linear motor is driven by
current fed from the DC power supply. So, the CNC
does not exercise position control. For safety, move
the coil slider of the linear motor to near the stroke
center and make an adjustment. (Activation by the
DC power supply moves a medium-size or large
linear motor for up to about 60 mm, and moves a
small linear motor for up to about 30 mm.)

1) For activating phase adjustment, set the parameter below.

1726 - For internal data measurement

2115 -
Series 9096:
320 for an odd-numbered axis, 960 for an even-numbered axis
Series 90B0:
320 for an odd-numbered axis, 2368 for an even-numbered axis
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4.PARAMETER SETTING START-UP B-65222EN/03

In this state, activating phase data is output to No. 353 on the CNC
diagnosis screen. Note that display data = 256 on the diagnosis screen
corresponds to an activating phase of 360 degrees. The following
expression is used for output unit conversion to an activation phase
[degrees]:
Activating phase [degrees] = (Value of DGN No. 353) × 360/256

2) Turn off the power to the CNC and servo amplifier.

3) Detach the linear motor power line from the servo amplifier, then
connect the power line to the DC power supply.
Connect the + terminal of the DC power supply to phase U of the
power line, and connect the - terminal of the DC power supply to
phase V and phase W of the power line.
DC power
l

Coil slider
+ -

W
Fig. 4.1.1(e) Connection of DC power supply

4) In the emergency stop state, turn on the power to the CNC and
servo amplifier.

5) Display No. 353 on the CNC diagnosis screen, and turn on the
power to the DC power supply. Next, increase the current
gradually (DC activation).
When the force of the linear motor produced by current supplied
from the DC power supply exceeds static friction, the linear
motor starts moving, and the linear motor automatically stops at
a position where activation phase = 0.
A position where activating phase = 0 is present at intervals of
60 mm with 1500A/4 or larger linear motors, or at intervals of 30
mm with 900D/4 or smaller linear motors.

WARNING
If a large current flows abruptly, the motor produces
a large force, resulting in a very dangerous situation.
When making this adjustment, be sure to increase
the current value gradually starting from current
value = 0 [A].

6) When the linear motor is at rest, read the value of No. 353 on the
CNC diagnosis screen. Turn off the power to the DC power
supply immediately after reading the value of No. 353.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

* Make measurements of 5) and 6) several times by changing

the DC activation start position within one pole (medium-
size, large linear motor = 60 mm, small linear motor = 30
mm) to fine average activating phase data (value of DGN
No. 353).

7) Based on activating phase data measured with up to step 6)

above, set the AMR offset parameter as described below.
* In the description below, the parenthesized values assume
AMR60 = 1.

When 0 ≤ Value of DGN No. 353 ≤ 32 (42)

AMR offset setting=-1×(value of DGN No. 353)×360/256
When 224 (214) ≤ Value of DGN No. 353 ≤ 255 (255)
AMR offset setting=360-(value of DGN No. 353)×360/256
When 0 ≤ Value of DGN No. 353 ≤ 224 (214)
In this case, a soft phase alarm is issued when phase Z is
passed. Adjust the linear encoder installation position
according to Part III, “HANDLING, DESIGN, AND
ASSEMBLY”". After adjustment, make an AMR offset
adjustment again from step 1).

8) Turn off then turn on the power to the CNC.

9) Perform steps 5) and 6) again, and check that the activating

phase data at a stop position is about 0 or 255.

10) Turn off the power to the CNC and servo amplifier. Next,
connect the power line of the linear motor to the servo amplifier.
Then, turn on the power to the CNC and servo amplifier again.

11) Check that feed operation by jogging and so forth can be

performed normally. If no problem is observed, return the
parameter set in step 1) to 0. This completes setting.

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4.PARAMETER SETTING START-UP B-65222EN/03

Parameter setting procedure (4)

Procedure (4) can be used to set parameters according to the cooling

method used for linear motors.
Change the following parameters as listed in Table 4.1.1 (c). For no
cooling linear motors, the parameters need not be set here, because
they are set up at initialization in procedure (1).

1877 - OVC alarm parameter (POVC1)

2062 -

1878 - OVC alarm parameter (POVC2)

2063 -

1893 - OVC alarm parameter (POVCLMT)

2065 -

1979 - Current rating parameter (RTCURR)

2086 -

Table 4.1.1 (c) Setting OVC and current rating parameters by cooling
method (driven by 200 V)

Cooling Rated
Model POVC1 POVC2 POVCLMT RTCURR
method (N)
No cooling 50 32731 463 1373 862
300D/4 Air-cooled 60 32715 667 1977 1034
Water-cooled 100 32620 1849 5491 1724
No cooling 100 32731 463 1373 862
600D/4 Air-cooled 120 32715 667 1977 1034
Water-cooled 200 32620 1849 5491 1724
No cooling 150 32685 1041 3089 1293
900D/4 Air-cooled 180 32648 1498 4448 1552
Water-cooled 300 32436 4149 12354 2584
No cooling 300 32698 873 2590 1184
1500A/4 Air-cooled 360 32667 1257 3729 1421
Water-cooled 600 32490 3481 10358 2369
No cooling 600 32698 873 2590 1184
3000B/2 Air-cooled 720 32667 1257 3729 1421
Water-cooled 1200 32490 3481 10358 2369
No cooling 600 32698 873 2590 1184
3000B/4 Air-cooled 720 32667 1257 3729 1421
Water-cooled 1200 32490 3481 10358 2368
No cooling 1200 32698 873 2590 1184
6000B/2 Air-cooled 1440 32667 1257 3729 1421
Water-cooled 2400 32490 3481 10358 2369

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B-65222EN/03 START-UP 4.PARAMETER SETTING

Cooling Rated
Model POVC1 POVC2 POVCLMT RTCURR
method (N)
No cooling 1200 32740 345 1024 744
6000B/4
Air-cooled 1440 32728 497 1474 893
*
Water-cooled 2400 32658 1380 4095 1489
No cooling 1800 32708 744 2207 1093
9000B/2
Air-cooled 2160 32682 1071 3177 1311
*
Water-cooled 3600 32730 2968 8826 2186
No cooling 1800 32698 873 2590 1184
9000B/4
Air-cooled 2160 32667 1257 3729 1421
*
Water-cooled 3600 32490 3481 10358 2368
No cooling 3000 32730 471 1396 869
15000C/2
Air-cooled 3600 32714 678 2010 1043
*
Water-cooled 7000 32563 2557 7601 2029
No cooling 3000 32682 1078 3197 1316
15000C/3 Air-cooled 3600 32644 1551 4604 1579
Water-cooled 7000 32301 5883 17406 3070
When a motor marked with * is used with an αi series amplifier, the
parameters above are not applicable.

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4.PARAMETER SETTING START-UP B-65222EN/03

Parameter setting procedure (5)

Procedure (5) supplements descriptions about application of servo

HRV2 for linear motors.
When servo HRV2 is applied to increase the current loop gain of a
linear motor, it is necessary to set the following parameter, because
linear motors have a higher current gain compared with rotational
motors. This parameter setting must be done whenever the absolute
value of the current loop proportional gain (PK2) becomes higher
than 16000 (as a rule of thumb) after application of servo HRV2.

#7 #6 #5 #4 #3 #2 #1 #0
1750 - PK12S2
2210 -
PK12S2 (#2) Specifies whether to use the quadruple current loop gain function.
0: Not to use
1: To use ← To be set
When setting this function to ON, re-set the current gain parameters
(PK1 and PK2) to one-fourth.

Table 4.14.1 (d) Current gain parameter setting when servo HRV2 is applied

Setting after servo HRV2 is

Model Typical setting
applied
name
PK12S2 PK1 PK2 PK12S2 PK1 PK2
300D/4 0 526 -2141 0 421 -3426
600D/4 0 717 -3333 0 574 -5332
900D/4 0 390 -2009 0 312 -3214
1500A/4 0 1890 -7180 0 1512 -11488
3000B/2 0 4804 -14453 1 961 -5782
3000B/4 0 1620 -11180 1 324 -4472
6000B/2 0 4804 -13138 1 961 -5253
6000B/4 0 2626 -10051 1 525 -4020
9000B/2 0 5036 -16000 1 1008 -6400
9000B/4 0 4944 -11831 1 989 -4732
15000C/2 1 1420 -5600 1 1136 -8960
15000C/3 0 2392 -8448 1 478 -3379

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B-65222EN/03 START-UP 4.PARAMETER SETTING

(6) Invalid-parameter alarm when linear motors are used

The following invalid-parameter alarm checks are added when linear
motors are used (they are not issued for rotational motors).
• No separate detector can be used for linear motors. (Full-closed
loop setting results in an alarm being issued.)
* The invalid-parameter alarm detail No. is 10043.
• If no AMR conversion coefficient is set, an alarm is issued.
(Even when the linear encoder is not relocated after the motor is
replaced, the AMR conversion coefficients must be re-set,
because initialization accompanying motor replacement causes
the AMR coefficients to be erased.)
* The invalid-parameter alarm detail No. is 1123.
• The valid AMR offset data range is below :
-45 (degrees) and +45 (degrees) : (AMR60=0)
-60 (degrees) and +60 (degrees) : (AMR60=1)
If a value out of this range is specified in the parameter, an
invalid-parameter alarm is issued.
* The invalid-parameter alarm detail No. is 1393.

CAUTION
When an AMR conversion coefficient is not set, an
alarm is issued. If it is set, but incorrect, no alarm is
issued. In this case, the linear motor fails to drive
correctly immediately after it passes phase Z. It may
move within one pole-to-pole span (60 mm or 30
mm) in the worst case.

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4.PARAMETER SETTING START-UP B-65222EN/03

(7) Notes on using high-speed HRV current control or the cutting feed/rapid
traverse switchable velocity loop gain function
In general, a higher velocity loop gain (load inertia ratio) is set for a
linear motor than for a rotary motor. So, if high-speed HRV current
control and the cutting feed/rapid traverse switchable velocity loop
gain function are used at the same time to achieve an even higher
velocity loop gain, an overflow can occur in the internal value of the
post-override velocity load proportional (PK2V: parameter No. 2044
for Series 15i or No. 1856 for Series 16i). (The parameter error detail
number is 443(*)). In this case, set the parameter indicated below.
Whether an overflow occurs or not can be checked using Fig. 4.1.1(f).
* Parameter error occurrence and detail number display in velocity
gain overriding are supported by Series 90B0/D(04) and
subsequent editions.

#7 #6 #5 #4 #3 #2 #1 #0
1740 - P2EX
2200 -
P2EX(#6) The format of velocity loop proportional gain (PK2V) is:
0: Standard format.
1: Converted. ← To be set

|PK2V parameter| × (load inertia ratio + 256) × 2000

A= Greater than 32767
(Number of velocity pulses) × 64

greater than 32767?

Not greater than 32767

B = A × (velocity loop gain override [%](*1))/100 Greater than 32767

greater than 32767?

Not greater than 32767

Overflow not produced Overflow occurred.

Set the following bits:
Bit 6 of No. 1740 = 1 (Series 15i)
*1 In the flowchart above, the velocity loop gain override is represented by one Bit 6 of No. 2200 = 1 (Series 16i)
of the following parameters:
Velocity gain magnification when high-speed HRV current control is enabled
→ (No. 2335 for Series 16i or No. 2742 for Series 15i)
Velocity gain override when the cutting feed/rapid traverse switchable velocity
loop gain function is enabled
→ (No. 2107 for Series 16i or No. 1700 for Series 15i)
Fig. 4.1.1(f) PK2V overflow check

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B-65222EN/03 START-UP 4.PARAMETER SETTING

4.1.2 Smooth Compensation for Linear Motor

(1) Overview
Smooth compensation for linear motors improves the smoothness in
feed of a linear motor by producing a sinusoidal compensation torque
with a cycle of 1/2, 1/4, or 1/6 of the pole-to-pole span produced by
servo software and by applying such a torque to the current command.
Compensation torque can be generated for each motor by setting gain
and phase for each components.
Torque command for correction
A 2Sin (2θ + P2) Activating phase angle θ
+ A 4Sin (4θ + P4)
+ A 6Sin (6θ + P6)

+
+
Velocity loop Current loop
TCMD

Scale
Linear motor

(2) Series and editions of applicable servo software

Series 9096/A(01) and subsequent editions (Series 21i, Power Mate i)
Series 90B0/A(01) and subsequent editions (Series 15i, 16i, 18i, 21i)

(3) Setting parameters

1753 - Correction of two thrust ripples per magnetic pole pair

2130 - Correction gain (high-order 8 bits) Correction phase (low-order 8 bits)

1754 - Correction of four thrust ripples per magnetic pole pair

2131 - Correction gain (high-order 8 bits) Correction phase (low-order 8 bits)

1755 - Correction of six thrust ripples per magnetic pole pair

2132 - Correction gain (high-order 8 bits) Correction phase (low-order 8 bits)

The way thrust ripples occur varies from one motor (rather than
model) to another. Therefore, the correction parameters must be
determined specifically for each individual motor. This can be done
using "SD" (servo adjustment software) as a measurement tool.
The torque command ripples which occur at a specific position during
low-speed motor operation are assumed to be the ripples specific to
the motor at that position. A torque command having the same ripples
as these specific ripples is created to enable correction.
Follow the procedure described below to measure the activating phase
angle and torque command necessary to determine the correction
parameters.

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4.PARAMETER SETTING START-UP B-65222EN/03

The following procedure use terms "odd-numbered axis" and "even-

numbered axis" in relation to axis numbers specified in parameter No.
1023 (common to the Series 15i and Series 16i).

<1> Series 90B0: Does not require step <1>. Go to step <2>.
Series 9096: To measure an odd-numbered axis, set a dummy bit
to 1 for the even-numbered axis paired with it.
If a linear motor is used in tandem control, however, do not set a
dummy bit for the paired axis.

#7 #6 #5 #4 #3 #2 #1 #0
1953 - SERD
2009 -
SERD (#0) Specifies whether to enable the dummy serial feedback function.
0: To disable
1: To enable ← To be set
* Do not forget to restore the previous setting after parameter
setting is completed.

<2>-a When using A06B-6057-H620 (digital check board), set the

DIP switches on the check board as follows:

To measure an odd-numbered axis:

A06B-6057-H620

CNB CNB CNB CNB CNS

Axis 2 Axis 1 Outputs for PIO-48W PC-Card Output to Analog Spindle

CN13
Input from JA8A

A A A A A A A A
DIP switch
3 2 1 0 3 2 1 0
CNA1

CN12
1

CN11
Data Type Setting
Axis4 Axis3 Axis2 Axis1
A16B-2300- xxxx xxxx 0001 1010
0 1: High 0: Low

AXIS2: 1 (torque) AXIS1: 10 (phase)

To measure an even-numbered axis:

Axis 2 Axis 1
A A A A A A A A
3 2 1 0 3 2 1 0

0
AXIS2: 3 (torque) AXIS1: 11 (phase)

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B-65222EN/03 START-UP 4.PARAMETER SETTING

<2>-b When using A06B-6057-H630 (one-piece analog/digital type),

set up the 7-segment LED digits on the check board as shown
below:
* Letter X stands for an axis
X 5 X 1 number specified in parameter
No. 1023.
CH1 CH2
Phase Torque

<3> To measure the activating phase angle, set the following

parameter.

1726 - Parameter for internal data measurement

2115 -
Series 9096: 1328 (for both odd- and even-numbered axes)
Series 90B0: 704 for odd-numbered axis and 2752 for even-
numbered axis
Steps <2> and <3> enable CH0 and CH1 of the SD software to be
used to measure the motor activating phase angle (CH0) and torque
command (CH1).

<4> Start the "SD" software, and make the following setting.

DOS prompt > SD INIT [Enter]

o (Origin of position)
F9 (System setting)
0 (CH0)
2 [Enter] (TCMD)
1.0 [Enter] (1.0A)
1 (CH1)
2 [Enter] (TCMD)
40 [Enter] (Maximum current for servo amplifier to be used)
F10 (Return to main menu.)

(Ctrl)T (XTYT mode selected)

F2 (Data number)
9000 [Enter] (Number of data items to be measured)

* This description uses the 3000B as an example. It differs from

other models only in the current rating of the servo amplifier.

<5> When determining the correction parameters, set the velocity

gain to a rather low value.

<6> For medium-size and large motors, make a reciprocating motion

for 200 mm or more at F1200 (mm/min).
For small linear motors, make a reciprocating motion for 100
mm or more at F1200 (mm/min).

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4.PARAMETER SETTING START-UP B-65222EN/03

<7> Pressing the F1 key (to start measurement) at regular speed

displays the data shown below. (Check that the activating phase
angle-based sine waveform changes from negative to positive at
three points or more.)

CAUTION
Measurement direction varies with the setting of the
direction-of-movement parameter.
When the setting is 111: Measurement is
performed during forward movement.
When the setting is -111: Measurement is
performed during backward movement.
Measurement in the wrong direction hinders correct
calculation of the correction parameter.

TCMD

Activating phase angle θ

<8> Pressing CTRL+L causes the correction parameter values to be

calculated as shown below. Enter the displayed parameter
values.
Usually, use the correction parameter values displayed on the top
row.
The parameter values displayed on the middle and bottom rows
are used for special parameter setting.
Middle row: To be used when either quadruple ripple correction
or quadruple TCMD output is selected.
Bottom row: To be used when both quadruple ripple correction
and quadruple TCMD output are selected.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

Example of measurement
(a) Measured waveform where parameter value calculation is
possible

(b) Measured waveform where parameter value calculation is

impossible (No. 1)
Two activating phase angle-based sine waves cannot be acquired
because of insufficient measurement time.

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4.PARAMETER SETTING START-UP B-65222EN/03

(c) Measured waveform where parameter value calculation is

impossible (No. 2)
Two activating phase angle-based sine waves cannot be acquired
because of an inappropriate measurement start position.

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B-65222EN/03 START-UP 4.PARAMETER SETTING

4.2 VELOCITY LOOP GAIN

The velocity loop gain of a linear motor is based not on the concept of
load inertia but on the ratio of load mass to coil slider mass. For
15000C, for example, suppose that the mass of the coil slider is 48 kg,
and the load (the mass of the movable section including the coil
slider) is 1500 kg. The mass ratio is about 31 times. This means that
the reference velocity loop gain is 3100%.
If a very low velocity loop gain (200% or less) is set initially,
oscillation with a large amplitude can occur. For velocity loop gain
adjustment, first set a half of the reference value, then check the state
of oscillation by operating the manual pulse generator. If oscillation
still occurs, the point of resonance is very low.
Increase the velocity loop gain by 300% to 500% from this state, then
observe oscillation and sound by operating the manual pulse generator.
If no problem is found, increase the velocity loop gain furthermore.
If oscillation occurs, return the velocity loop gain to the previous
setting, then combine the following functions so that a high
oscillation limit can be set:
- Proportional term high-speed processing function or 250 µs
acceleration feedback
- Torque command filter
- Vibration suppression filter

The oscillation limit may be increased by changing the frequency

characteristics of the current loop.
No. 1852 (FS15)/No. 2040 (FS16) PK1 Current loop integral gain
As a guideline, about a half of the standard value should be set.

After determining an oscillation limit by using various functions, set

70% of the oscillation limit as a velocity loop gain. When a machine
with a long stroke is used, finally check that no oscillation occurs
across the stroke.
If the use of HRV2 or HRV3 causes the absolute value of the current
loop gain PK2 to exceed 16000, the maximum force can decrease.
In this case, set the following:
Bit 2 of No. 1750 (FS15)/No. 2210 (FS16) = 1
Then, set the current loop gain (PK1, PK2) to 1/4.
With both the linear motor and rotary motor, a higher velocity loop
gain needs to be set in order to ensure precision.

NOTE
For the functions described in this section, refer to
"FANUC AC SERVO MOTOR αi series Parameter
Manual (B-65270EN)".

- 179 -
5.TROUBLES AND CAUSES START-UP B-65222EN/03

5 TROUBLES AND CAUSES

The table below lists those troubles that often occur when a machine
with a linear motor mounted is started up, and their causes.

Trouble Possible cause

The linear motor does not The coil slider is mounted upside down.
operate. The power line is disconnected.
The power line connection is incorrect.
The signal line of the linear encoder is
Stop-time excessive error alarm
disconnected.
Loss of control
The AMR conversion coefficient is
incorrect.
Move-time excessive error
The power line connection is incorrect.
alarm
The power line connection is incorrect.
The coil slider is mounted upside down.
OVC (soft thermostat) alarm A very heavy load is imposed.
The setting for cooling in the OVC
parameter is different.
The reference mark signal (reference
signal) output position is not within the
Soft phase alarm
normal range.
The reference mark signal includes noise.
The scale signal line is disconnected.
Disconnection alarm
The pole sensor signal line is disconnected.
The reference mark signal includes noise.
Count error alarm
The A/B phase signal includes noise.
α pulse coder soft
Bit 7 of No. 1707 (FS15)/No. 2013 (FS16) is
disconnection (when an absolute
set to 1.
linear encoder is used)

NOTE
To protect against a malfunction and alarm arising
from noise, observe the following:
- Do not omit connector connections, but make
connector connections as specified (including
shielding).
- Do not relay an analog signal from the linear
encoder through a terminal block or the like.
- Make a ground connection securely between the
power distribution board (involving the NC and
amplifier) and the machine.
- Connect the shield of the feedback cable securely
to ground in the power distribution board.

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V. MAINTENANCE
B-65222EN/03 MAINTENANCE 1.CHECKING EXTERNAL VIEW AND MOUNTING

1 CHECKING EXTERNAL VIEW AND

MOUNTING
The linear motor is an electric component. In particular, a flaw on the
coil slider can degrade insulation, resulting in a failure. So, check the
external view of the linear motor periodically for any abnormality.

- 183 -
1.CHECKING EXTERNAL VIEW AND MOUNTING MAINTENANCE B-65222EN/03

1.1 COIL SLIDER

Check the external view of the coil slider and maintain the coil slider
as described below.

Periodic checking of the external view

Check the external view at least once in every month. By making a
frequent check at short intervals, you can protect against trouble
beforehand.

Checking of water and oil

Check if the coil slider is exposed to water or oil ceaselessly. If so, the
insulation can gradually degrade, reducing the life of the motor
remarkably. If such a state lasts, consider a structure that prevents the
coil slider from being exposed to water and oil.

Chipped resin
If the material inside the coil slider is exposed because of chipped
resin, replace the coil slider immediately. If the resin is chipped but
the inside material is not exposed, the use of the coil slider can be
continued. However, frequently check if the chipping of the resin gets
worse.

Cracked resin
If the resin is cracked, replace the coil slider immediately. If the coil
slider is used without being replaced, a failure (such as insulation
degradation) can occur abruptly.

Peeled cable sheath and terminal crack

If the material in question is replaceable, replace it immediately. If the
material in question is directly built into the main coil slider unit, it is
not replaceable. In this case, replace the coil slider. However, by
patching the trouble, the materiel in question may be used only
temporarily.

Play in assembly
If there is play although the mounting screws are tightened firmly,
replace the coil slider immediately after checking that the play is not
caused by the machine. If the coil slider is used without being
replaced, a failure or accident can occur abruptly.

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B-65222EN/03 MAINTENANCE 1.CHECKING EXTERNAL VIEW AND MOUNTING

Scratch on the surface (facing the magnet plate)

Only when a scratch in question is as slight as the removal of a part of
the black protective coating, the continued use of the coil slider is
enabled by recoating the coil slider. For recoating, contact FANUC.
For other scratches, replace the coil slider as soon as possible.
Particularly when a material inside the coil slider is exposed, replace
the coil slider immediately. If a scratch is caused by foreign matter
caught in the gap between the coil slider and magnet plate, remove the
foreign matter immediately, and take measures to prevent foreign
matter from being caught in the gap.

- 185 -
1.CHECKING EXTERNAL VIEW AND MOUNTING MAINTENANCE B-65222EN/03

1.2 MAGNET PLATE

Check the external view of the coil slider and maintain the coil slider
as described below.

Periodic checking of the external view

Check the external view at least once in every month. By making a
frequent check at short intervals, you can protect against trouble
beforehand.

When a magnet is exposed or floating

Replace the magnet plate immediately. If the magnet plate is used
without being replaced, a failure can occur.

When the resin is cracked or chipped

Replace the magnet plate as soon as possible. If the magnet plate is
used without being replaced, a failure can occur.

When the resin on the magnet plate surface has a flaw

If a flaw in question is a slight scratch, and no magnet is exposed, the
use of the magnet plate can be continued. If a magnet is exposed,
replace the magnet plate immediately. If a flaw is caused by foreign
matter caught in the gap between the coil slider and magnet plate,
remove the foreign matter immediately, and take measures to prevent
foreign matter from being caught in the gap.

Deformed or lost mounting screws

By using new mounting screws, secure the magnet plate tightly.

Play in assembly
If there is play although the mounting screws are tightened firmly,
replace the magnet plate immediately after checking that the play is
not caused by the machine. If the magnet plate is used without being
replaced, a failure or accident can occur abruptly.

- 186 -
B-65222EN/03 MAINTENANCE 1.CHECKING EXTERNAL VIEW AND MOUNTING

1.3 MAGNETIC POLE SENSOR (FOR AN INCREMENTAL

SYSTEM)

Check the external view of the coil slider and maintain the coil slider
as described below.

Periodic checking of the external view

Check the external view at least once in every month. By making a
frequent check at short intervals, you can protect against trouble
beforehand.

Deformed or lost mounting screws

By using new mounting screws, secure the magnetic pole sensor
tightly.

Play in assembly
If there is play although the mounting screws are tightened firmly,
replace the magnetic pole sensor immediately after checking that the
play is not caused by the machine. If the magnetic pole sensor is used
without being replaced, a failure or accident can occur abruptly.

- 187 -
2.CHECKING ELECTRIC CHARACTERISTICS MAINTENANCE B-65222EN/03

2 CHECKING ELECTRIC
CHARACTERISTICS
The linear motor is an electronic component, and has a life as with
other ordinary electric components. Depending on the environment in
which a linear motor is used, the insulation performance degrades
abruptly, reducing the life remarkably. Check the electric
characteristics periodically.

WARNING
When making resistance and insulation checks, turn
off the power and disconnect the terminal to prevent
an electric shock from occurring. Perform insulation
processing for those terminals that are not used.

- 188 -
B-65222EN/03 MAINTENANCE 2.CHECKING ELECTRIC CHARACTERISTICS

2.1 CHECKING INSULATION RESISTANCE

Measure an insulation resistance between each winding and motor

frame using an insulation resistance meter (500 VDC). Judge the
measurements according to the following table.

Insulation resistance Judgment

100 MΩ or higher Acceptable
The winding has begun deteriorating. There is no
10 to 100 MΩ problem with the performance at present. Be sure
to perform periodic inspection.
The winding has considerably deteriorated.
1 to 10 MΩ Special care is in need. Be sure to perform
periodic inspection.
Lower than 1 MΩ Unacceptable. Replace the motor.

CAUTION
If a voltage is kept applied to the motor at the time of
insulation resistance measurement, the insulation of
the motor can degrade. Make an insulation
resistance measurement in a shortest possible time.

- 189 -
2.CHECKING ELECTRIC CHARACTERISTICS MAINTENANCE B-65222EN/03

2.2 CHECKING WINDING RESISTANCE

By using a milliohm meter, make a winding resistance measurement

as described below. Insulate those terminals that are not used for
measurement. For winding resistance values, see Part I,
"SPECIFICATIONS".

- Measure the resistance values between U and V, V and W, and

W and U of the coil slider.
- Check that the variations among measured values are within
±5%.
- Check that each measured value is within ±5% of two times the
resistance value described in Part I, "SPECIFICATIONS".

If a resistance value not satisfying the above is measured, replace the

coil slider immediately.

NOTE
1 For a linear motor based on the terminal
specification, detach the power line, and make a
measurement at the terminal.
2 For a linear motor based on the power lead
specification, make a measurement at the tip of the
power lead (lead on the motor side).

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B-65222EN/03 MAINTENANCE 3.CLEANING

3 CLEANING
WARNING
When performing cleaning, turn off the power to the
machine, ensure that the motor does not move
freely, and be careful not to be electrically shocked.

Reasons for cleaning

The linear motor has a gap of 0.5 mm (nominal) between the coil
slider and magnet plate. If foreign matter is caught in the gap, the
motor can fail. Moreover, a buildup of oil can adversely affect the
motor. To prevent trouble caused by dust and oil, clean the linear
motor periodically.

If an axis with a linear motor mounted is not shielded or is

insufficiently shielded, magnetic dust can be attracted to or near the
top surface of the magnet plate. If such dust is left, it can be caught in
the gap between the coil slider and magnet plate, resulting in a
damage to the motor in the worst case. So, for an axis with a structure
that can catch dust, cleaning must be performed frequently.

Method of cleaning
Magnetic dust attached onto the surface of the magnet plate can be
removed relatively easily by scraping off the dust toward the stroke
end of the magnet plate with a spatula made of hard rubber.

Wipe off any oil attached onto the coil slider or magnet plate softly
with alcohol. Do not use a large amount of alcohol and do not rub the
surface of the coil slider and magnet plate intensely. Otherwise, the
protective coating on the surface can be adversely affected.

CAUTION
Do not use an agent other than alcohol. Otherwise,
the resin used for the motor can be eroded, resulting
in a damage to the motor.

- 191 -
APPENDIX
B-65222EN/03 APPENDIX A.ORDERING DRAWING NUMBER

A ORDERING DRAWING NUMBER

NOTE
When placing a formal order, refer to "FANUC
LINEAR MOTOR series Ordering List (B-65221EN)".
For details including the specifications, dimensions,
and applicable amplifiers, see Part I,
"SPECIFICATIONS".

Model Magnetic pole position detection

Coil slider NOTE 1 Magnet plate
NOTE 3
Cooling plate
NOTE 4
Piping component
name sensor NOTE 5 circuitNOTE 5

300D/4 A06B-0421-B801 A06B-0423-K001

A06B-0423-B931 To be prepared by
600D/4 A06B-0422-B801 A06B-0423-K002 A860-0331-T002
A06B-0423-B933 the customer
900D/4 A06B-0423-B801 A06B-0423-K003
A06B-0410-B931
A06B-0410-B932 To be prepared by
1500A/4 A06B-0410-B901
A06B-0410-B933 the customer
A06B-0410-B934
A06B-0411-B901 NOTE 2 A860-0331-T001
3000B/2
A06B-0411-B911 NOTE 2 (One-output type)
3000B/4 A06B-0411-B811
A06B-0413-B931 A06B-0413-K202
A06B-0412-B901 NOTE 2 A860-0331-T002
6000B/2 NOTE 2
A06B-0413-B932 (Dedicated wrench) NOTE 6
A06B-0412-B911 Built-in A860-0331-T001
A06B-0413-B933 A06B-0413-K203
6000B/4 A06B-0412-B811 (Two-output type)
A06B-0413-B934 (R1/4 conversion
A06B-0413-B901 NOTE 2
9000B/2 joint)
NOTE 2
A06B-0413-B911
A06B-0413-K204
9000B/4 A06B-0413-B811
(R1/8 conversion
A06B-0414-B921
15000C/2 A06B-0414-B901 joint)
A06B-0414-B922
A06B-0414-B923
15000C/3 A06B-0414-B811
A06B-0414-B924

*1 For a FANUC nameplate, specify #0000 after each drawing number above. For a GE Fanuc nameplate, specify #7000
after each drawing number above.
*2 -B901 represents the power lead type (with a power lead directly extending from the coil slider), and -B911 represents
the terminal type. -B901 is a model for maintenance, so that it is not described in this manual. For a purpose other
than maintenance of an old model, specify -B911 whenever possible.
*3 Select a magnet plate suitable for the coil slider and axis length required.
*4 Option required for forced cooling (air cooling or water cooling) of 300D/4, 600D/4, and 900D/4. A spacer for the
magnetic pole sensor is delivered with this option.
*5 Required when an incremental linear encoder is used. Not required when an absolute linear encoder is used.
*6 To be specified only when a signal needs to be distributed to two systems from one linear encoder

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B.OPERATION THEORY OF THE LINEAR MOTOR APPENDIX B-65222EN/03

B OPERATION THEORY OF THE LINEAR

MOTOR
The FANUC LINEAR MOTOR series uses a linear encoder for a
motor position signal. The linear motor is controlled using only this
signal. If a linear encoder is mounted or set incorrectly, the linear
motor cannot be operated normally. This appendix briefly describes
the operation theory of the linear motor as a basic knowledge.

CAUTION
If a linear motor or linear encoder is mounted or
connected incorrectly, the motor can become
uncontrollable in the worst case. Before turning on
the power, ensure that the linear motor and linear
encoder are mounted and connected correctly.

- 196 -
B-65222EN/03 APPENDIX B.OPERATION THEORY OF THE LINEAR MOTOR

B.1 OPERATION THEORY OF THE LINEAR MOTOR

(OVERVIEW)

The linear motor viewed from the side is outlined in the illustration
below.

I'm wondering what

Linear encoder level of current
should flow for which
phase.
Coil slider
U V W
Magnetic pole sensor
Magnet plate
--- N S N S N S ---

NOTE
The illustration above shows an incremental
encoder system. For an absolute encoder system,
no magnetic pole sensor is required.

When the coil slider is to be moved to or stopped at a particular

position, a proper current calculated from the positional relationship
between the coil slider and magnet plate needs to be flown for each
phase of the coil slider. Thus, the coil generates proper magnetism for
controlling the motor position. The positional relationship between
the coil slider and magnet plate can be determined from the position
signal sent from the linear encoder.

The position of the motor

can be determined with
the encoder. So, the state
of current to be flown for
each phase can be
Linear encoder determined.

Coil slider

U V W
Magnet plate Magnetic pole sensor

--- N S N S N S

Before the positions of the coil slider and magnet plate can be known
from the position signal sent from the linear encoder, the positional
relationship between the motor (coil slider, magnet plate, and
magnetic pole sensor) and linear encoder must be predetermined. So,
the motor and linear encoder need to be mounted at specified
positions as described in Part III, "HANDLING, DESIGN, AND
ASSEMBLY".

Actually, however, the inside of the linear encoder may involve a

deviation of up to several millimeters. If this deviation is excessively
large, the linear encoder cannot return the correct position of the
motor. This means that a current that is not reflecting the correct
position is flown into the motor, and therefore the power factor and

- 197 -
B.OPERATION THEORY OF THE LINEAR MOTOR APPENDIX B-65222EN/03

precision of the motor can degrade. To compensate for this current

phase shift, the AMR offset parameter is used. With this parameter,
the position of zero-degree electric angle of the motor (exciting phase
from phase U) and the reference position of the linear encoder are
taken into consideration for compensation to flow current in the
correct phase. Usually, an AMR offset in the range ±45° can be set.
(Depending on the servo software, an AMR offset in the range ±60°
can be set.)

- 198 -
B-65222EN/03 APPENDIX B.OPERATION THEORY OF THE LINEAR MOTOR

B.2 ROLE OF THE MAGNETIC POLE SENSOR

When an incremental linear encoder is used, line motor axis operation

is initially in a special state. So, a magnetic pole sensor is needed. The
role of a magnetic pole sensor used with an incremental linear
encoder is described below.

System activation (power-on)

↓
Linear motor exciting
Because an incremental system is used, the motor does not know where the
motor is positioned.
The position is unknown. I
Reference position will make a movement with
IncrementalLinear encoder
the Magnetic pole sensor.

Coil slider
U V W
Magnetic pole sensor
Magnet plate
--- N S N S N S ---

↓
Detection of the reference position of the linear encoder
The reference position (phase Z signal) of the linear encoder is detected. At
this time, move the linear motor to the position where the reference position
of the linear encoder is detected, according to magnetic pole information
(which is the N pole, and which is the S pole) obtained from the magnetic pole
sensor.
Reference position This is N, and that is
IncrementalLinear encoder S. I can manage to
make a movement.

Coil slider
U V W
Magnetic pole sensor
Magnet plate
--- N S N S N S ---

↓
Switching to the linear encoder
When the reference position of the linear encoder is detected, current control
is switched from the magnetic pole sensor to the linear encoder. After this
point, the signal from the magnetic pole sensor is used to check the matching
of the position waveform of the linear encoder with the magnetic pole.
The reference position
Reference position is found. Now, the
IncrementalLinear encoder motor position is
known.

Coil slider

U V W
Magnetic pole sensor
Magnet plate
--- N S N S N S ---

- 199 -
B.OPERATION THEORY OF THE LINEAR MOTOR APPENDIX B-65222EN/03

NOTE
1 Even after the reference position of a linear encoder
is detected, and current control is switched to the
linear encoder, the signal from the Magnetic pole
sensor is used to check the linear encoder for an
error. So, even after the reference position of the
linear encoder is detected, ensure that the Magnetic
pole sensor is not detached from the magnet plate.
If the Magnetic pole sensor is detached from the
magnet plate, an alarm is issued.
2 The reference position of an incremental linear
encoder needs to be detected each time the power
to the system is turned on after turning off the power
to the system.
3 If a Magnetic pole sensor is mounted in an incorrect
position, an alarm is issued, and the motor may not
operate normally.
4 If an absolute linear encoder is used, the position of
the motor is established when the power is turned
on. So, the reference position (phase Z signal) of the
linear encoder need not be detected. When the
power is turned on, position control based on the
signal from the linear encoder starts.

- 200 -
B-65222EN/03 APPENDIX C.MAGNET PLATE SURFACE PROTECTION

C MAGNET PLATE SURFACE

PROTECTION
As shown below, the magnet side of a magnet plate (that faces the
coil slider) is completely coated with epoxy resin selected to endure a
severe use environment.

Magnet Epoxy resin

Iron plate (bottom)

Cross section of a magnet plate

If foreign matter is caught between the coil slider and magnet plate,
epoxy resin protects the magnets. The most suitable type of epoxy
resin is selected. So, resin may be flawed or chipped, but a serious
and unrecoverable failure such as the peeling of the entire resin
coating involving other peripheral components is unlikely to occur. If
a slight flaw not extending to a magnet occurs, apply epoxy resin of
heat resistant type A or higher onto the flaw to recover the original
height. With such a remedy, the epoxy resin coating can be practically
used permanently.

If a damage that reaches a magnet occurs, a large and hard foreign

material is caught. In such a case, the probability that the coil slider is
also damaged is very high. In this case, perform maintenance
according to Part V, "MAINTENANCE". Moreover, take measures to
prevent foreign matter from being caught in order to protect against
similar trouble.

NOTE
It is recommended that periodic maintenance be
performed according to Part V, "MAINTENANCE" in
order to use the linear motor safely for a longer time.

- 201 -
D.DRIVING THE LINEAR MOTOR WITH THE αi SERIES AMPLIFIER APPENDIX B-65222EN/03

D DRIVING THE LINEAR MOTOR WITH

THE αi SERIES AMPLIFIER
The FANUC Linear Motor series is driven with the latest αi series
amplifier as with the α series amplifier. However, because of the
addition and discontinuation of amplifier models, an amplifier with a
capacity different from an α series amplifier may need to be used. In
such a case, the parameters for driving need to be modified.
For the allowable combinations of the FANUC Linear Motor series
and αi series amplifiers, and the associated parameters for driving, a
technical report will be issued in the future.

NOTE
1 For the allowable combinations of the FANUC
Linear Motor series and αi series amplifiers, and the
associated parameters for driving, contact FANUC.
2 The latest edition of the technical report will be
available from the FANUC sales representative. The
technical report will be attached to the end of
descriptions released after the report is issued.

- 202 -
B-65222EN/03 INDEX

INDEX
<A> <E>
Absolute Linear Encoder Mounting Position ............... 101 Example of Configuration......................................... 54, 56
ABSOLUTE LINEAR ENCODER SYSTEM................ 56 Example of Selection ...................................................... 79
Amount of Travel when Dynamic Brake is Applied ....... 71 EXTERNAL COOLING UNIT SELECTION................ 78
APPLICABLE AMPLIFIERS ........................................ 47 EXTERNAL DIMENSIONS.......................................... 19
Applicable Linear Encoder ....................................... 55, 56
<F>
ASSEMBLY................................................................. 126
FORCE-VERSUS-SPEED DIAGRAMS AND OUTPUT-
Attaching coil sliders ...................................................... 92
VERSUS-SPEED DIAGRAMS ............................... 12
AUXILIARY BRAKE MEASURES............................ 116
AXIS DESIGN WITH A LOW GRAVITY CENTER . 119 <G>
GROUND LEAD CONNECTION ............................... 109
<C>
Cable K2 (for Position Detection Circuit A860-0333- <H>
T001)........................................................................ 42 HANDLING THE LINEAR MOTOR ............................ 85
Cable K2 (for Position Detection Circuit A860-0333-
<I>
T002)........................................................................ 43
Incremental Linear Encoder and Magnetic Pole Sensor
Cable K4......................................................................... 44
Mounting Positions .................................................. 98
Cable K5......................................................................... 45
INCREMENTAL LINEAR ENCODER SYSTEM ........ 54
Cable K6......................................................................... 45
INDICATION OF WARNING..................................... 125
Cable Length Design ...................................................... 46
Is Used as the Movable Part ........................................... 57
CABLES......................................................................... 41
Calculating the Amount of Regenerative Energy............ 77 <L>
CHECKING ELECTRIC CHARACTERISTICS ......... 188 Level of Geomagnetism ................................................ 122
CHECKING EXTERNAL VIEW AND MOUNTING. 183 LINEAR MOTOR AIR GAP.......................................... 94
CHECKING FEEDBACK OUTPUT SIGNAL............ 151 Linear Motor and Linear Encoder Directions ................. 95
CHECKING INSULATION RESISTANCE ................ 189 LINEAR MOTOR MOUNTING PROCEDURES ....... 127
CHECKING MOUNTING STATE .............................. 150 LINEAR MOTOR PARAMETER SETTING .............. 154
CHECKING WINDING RESISTANCE ...................... 190 LINEAR MOTOR SELECTION FORM........................ 80
CLEANING.................................................................. 191 Load Force...................................................................... 64
Coil Slider......................................................... 19, 86, 184
<M>
COIL SLIDER SELECTION ......................................... 64
Magnet Plate ..................................................... 29, 87, 186
CONFORMANCE TO STANDARDS......................... 121
MAGNET PLATE SELECTION.................................... 72
CONSIDERATION OF MAGNETIC ATTRACTION 115
MAGNET PLATE SURFACE PROTECTION............ 201
Cooling Plate .................................................................. 33
Magnetic Leakage......................................................... 122
Cooling Plate Addition ................................................. 113
MAGNETIC LEAKAGE AND MAGNETIC SHIELDING
Cooling Water .............................................................. 113
................................................................................ 122
<D> Magnetic Pole Sensor ..................................................... 35
Driving Multiple Motors with a Large-Capacity Amplifier62 MAGNETIC POLE SENSOR (FOR AN INCREMENTAL
DRIVING THE LINEAR MOTOR WITH THE αi SERIES SYSTEM)............................................................... 187
AMPLIFIER........................................................... 202 Magnetic Shielding....................................................... 123
Driving Three or More Motors ....................................... 61 MECHANICAL DESIGN .............................................. 90
Driving Two Motors ....................................................... 60 MOTOR AND POWER LEAD PROTECTION .......... 110

i-1
INDEX B-65222EN/03

MOTOR ARRANGEMENT AND DRIVING METHODS57 <R>

MOTOR HEAT-UP AND COOLING.......................... 111 Required Maximum Force .............................................. 64
MOUNTING A COOLING PLATE AND CONNECTING ROLE OF THE MAGNETIC POLE SENSOR ............ 199
A COOLING TUBE............................................... 132 Root Mean Square Force ................................................ 65
MOUNTING A LINEAR ENCODER.................... 95, 144
<S>
MOUNTING A MAGNETIC POLE SENSOR ............ 145
SAFETY PRECAUTIONS .............................................s-1
Mounting a Magnetic Pole Sensor on 300D/4, 600D/4, or
SCREWS FOR FIXING THE LINEAR MOTOR........ 120
900D/4.................................................................... 145
Selecting a Power supply Module................................... 74
MOUNTING COIL SLIDERS ....................................... 91
SELECTION METHODS .............................................. 63
MOUNTING MAGNET PLATES ................................. 93
SENSOR......................................................................... 89
Mounting Rigidity and Noise Protection ........................ 95
Smooth Compensation for Linear Motor ...................... 173
Mounting Surface Precision on the Machine Side.......... 91
SPECIFICATION LIST.................................................... 8
<N> SPECIFICATIONS........................................................... 5
NAMEPLATE ATTACHMENT AND SERIAL NUMBER SYSTEM CONFIGURATION ....................................... 53
MANAGEMENT ................................................... 124
<T>
<O> Temperature Increase on the Mounting Surface of Coil
OPERATION THEORY OF THE LINEAR MOTOR . 196 Sliders..................................................................... 111
OPERATION THEORY OF THE LINEAR MOTOR Temperature Increase on the Surface of the Magnet Plate112
(OVERVIEW)........................................................ 197 TERMS USED IN THE SPECIFICATION LIST AND
ORDERING DRAWING NUMBER............................ 195 SPEED DIAGRAMS.................................................. 6
Overload Duty Characteristic ......................................... 67 THERMOSTAT CONNECTION ................................. 107
TROUBLES AND CAUSES ........................................ 180
<P>
Parallel Arrangement, Serial Arrangement, and <V>
Symmetrical Arrangement ........................................ 58 VELOCITY LOOP GAIN ............................................ 179
PARAMETER SETTING............................................. 153 VERTICAL AXIS BALANCER .................................. 114
Parts for Connecting a Cooling Tube ............................. 38
<W>
Position Detection Circuit .............................................. 37
When the Coil Slider Is Used as the Movable Part and
POWER LEAD AND THERMOSTAT LEAD
When the Magnet Plate ........................................... 57
CONNECTION ...................................................... 134
POWER SUPPLY MODULE (PSM) SELECTION ...... 74
PREPARATION FOR START-UP .............................. 149
Procedure #1 for Mounting a Linear Motor on the
Machine.................................................................. 127
Procedure #2 for Mounting a Linear Motor on the
Machine.................................................................. 129
Procedure #3 for Mounting a Linear Motor on the
Machine.................................................................. 130
Procedure #4 for Mounting a Linear Motor on the
Machine.................................................................. 131
Procedure for Setting the Initial Parameters of Linear
Motors .................................................................... 154
PROTECTION AGAINST DUST AND WATER........ 117

i-2
Revision Record

FANUC LINEAR MOTOR series DESCRIPTIONS (B-65222EN)

03 Jun., 2001 Total revision

02 Jun., 1998 Total revision

01 Dec., 1996

Edition Date Contents Edition Date Contents

FANUC LTD

Printed in Japan

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