OPERATING INSTRUCTIONS

GA03107_1502

RUVAC WA/WAU
251/501/1001/2001
Roots pump

Cat.-No.
111 68 118 31/41/51
112 17/54 128 38
113 22 917 20/30/40/50
117 20/30/40/50 917 21/31/41/51
117 21/31/41/51 155 008
117 24/34/44

vacuum
 Contents

Section
Page
Important Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1 Design and Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2 Standard Specificaion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.4 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2 Transportation and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3 Installation and connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
3.2 Filling in of the lubricants . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
3.3 Elektrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
3.4 Connection of the flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
4 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.1 Start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
4.2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
4.3 Shutdown and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
4.4 Changing from vertical to horizontal flow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.1 Safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.2 Oil change / gear box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.3 Oil change / shaft seal housing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.4 Cleaning the fan cowl and the cooling fins . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.5 Cleaning the dirt trap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.6 Cleaning the pumping chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
5.7 Cleaning the valve of the pressure balance line . . . . . . . . . . . . . . . . . . . . . . . 26
5.8 Exchanging the shaft seals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
5.9 Leybold service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
5.10 Maintenance Schedule. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
EC Declaration of Conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
EC Manufacturer´s Declaration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Declaration of Contamination of Compressors,
Vacuum Pumps and Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

Figures
The references to figures, e.g. (1/2) consist of the Fig. No. and the Item No.
in that order.
We reserve the right to modify the design and the specified data. The
illustrations are not binding.

2 GA03107_1502 - 10/2005
 Notes

Leybold-Service
If a pump is returned to Leybold, indicate whether the pump is free of sub-
stances damaging to health or whether it is contaminated.
If it is contaminated also indicate the nature of the hazard. Leybold must
return any pumps without a “Declaration of Contamination” to the sender’s
address.

Disposal of waste oil

Under the amended law relating to waste disposal dated November 1,
1986 (valid in the Federal Republic of Germany) the disposal of used oil is
subject to new provisions. According to legislation relating to waste dispo-
sal the so-called principle of causality is applied. Hence, anyone in posses-
sion of used oil is responsible for its proper disposal.
Used oils coming from vacuum pumps must not be mixed with other sub-
stances.
Used oils from vacuum pumps (Leybold oils on the basis of mineral oils)
having been affected by normal contamination due to oxygen from the
ambient air, increases in temperature and mechanical wear, must be dis-
posed of as used oil in accordance with the regulations.
Used oils from vacuum pumps that have been contaminated by other sub-
stances must be labelled, stored and disposed of as special waste with
reference to the kind of contamination.
If you send a pump to LEYBOLD for repair please indicate any harmful sub-
stances existing in the pump oil or around the pump.
When disposing of used oil please observe the safety regulations that are
valid in your country.

We strongly recommend that you read these Operating

Instructions with care so as to ensure optimum operation of the
pump right from the start.

The icon Indicates procedures that must be strictly observed to Warning

prevent hazards to persons.

This special icon warns about dangers caused by high electric Warning
voltages. Touching parts at a high voltage can result in immediate
death. Covers which are marked with this icon must only be
removed by trained electricians after having reliably disconnected
the electric power source.

Indicates procedures that must strictly be observed to prevent Caution

damage to, or destruction of the pump.

Emphasises additional application information and other useful Note

information provided within these Operating Instructions.

GA03107_1502 - 10/2005 3
 Safety

IMPORTANT SAFETY
CONSIDERATIONS
The Leybold RUVAC vacuum pump is designed for safe and efficient ope-
ration when used properly and in accordance with this manual. It is the res-
ponsibility of the user to carefully read and strictly observe all safety pre-
cautions described in this section and throughout the manual. This product
must be operated and maintained by trained personnel only. Consult local,
state, and national agencies regarding specific requirements and regulati-
ons. Address any further safety, operation and/or maintenance questions to
your nearest Leybold Vacuum office.

Warning ■ Before beginning with any maintenance or service work on the

Failure to observe the following RUVAC, disconnect the pump from all power supplies.
precautions could result in
serious personal injury! ■ Do not operate the pump with any of the covers removed.
Serious injury may result.
■ If exhaust gases must be collected or contained, do not allow
the exhaust line to become pressurized.
■ Make sure that the gas flow from the exhaust port is not
blocked or restricted in any way.
■ The standard version of the RUVAC is not suited for operation
in explosion hazard areas. Contact us before planning to use
the pump under such circumstances.
■ Before starting up for the first time, the motor circuit must be
equipped with a suitable protective motor switch. Please take
note of the information in these Operating Instructions or on
the electric motor (wiring diagram).
■ The RUVAC is not suited for pumping of
■ combustible and explosive gases or vapours
■ radioactive and toxic substances
■ pyrophorous substances.

■ The RUVAC must be integrated in the system control

arrangement so that the pump can not run-up automatically
after it has been shut down by the temperature switches in the
motor. This applies equally to emergency shut-down
arrangements. After having determined the fault cause, the
pump should be switched on manually again.
■ Avoid exposing any part of the human body to the vacuum.
■ Never operate the RUVAC without connected intake line
or blank flange at the inlet.
■ The location at which the RUVAC (including its accessories) is
operated should be such that angles over > 5° from the
vertical are avoided.
■ The location of the RUVAC should be such that all controls
are easily accessible.

4 GA03107_1502 - 10/2005
 Safety

■ Under certain ambient conditions the RUVAC may attain a

temperature of over 80 °C (176 °F). There then exists the
danger of receiving burns. Note the symbols on the pump
pointing to the hazards, and in the case of a hot pump wear
the required protective clothing.
■ The noise level of the RUVAC is less than 72 dB(A).
Make sure that suitable protection measures are taken to
protect your hearing.
■ Before pumping oxygen (or other highly reactive gases) at Warning
concentrations exceeding the concentration in the
atmosphere (> 21 % for oxygen) it will be necessary to use
a special pump. Such a pump will have to be modified and
degreased, and an inert special lubricant (like PFPE) must
be used.
■ Before commissioning the RUVAC, make sure that the
media which are to be pumped are compatible with each
other so as to avoid hazardous situations. All relevant
safety standards and regulations must be observed.
■ It is recommended to always only operate the RUVAC with a
suitable exhaust line which is properly connected.
■ When moving the RUVAC always use the allowed means.
Two crane eyes are provided on this pump as standard.
■ Do not allow the ingestion of small objects (screws, nuts, Warning
washers, pieces of wire, etc.) through the inlet port. The use Failure to observe the following
of an inlet screen is recommended precautions could result in
serious personal injury!
■ Do not use the pump for applications that produce abrasive
or adhesive powders or condensable vapors that can leave
adhesive or high viscosity deposits. Please contact Leybold
Sales for selecting the right separator.
■ Vapours which condense upon being compressed within the
pump to liquids must be avoided when their vapour pressure
exceeds the vapour tolerance of the pump.
■ Before pumping vapors, the RUVAC should have attained
its operating temperature. The pump will have attained its
operating temperature about 30 minutes after starting the
pump. During this time the pump should be separated
from the process by a valve in the intake line, for example.
■ In the case of wet processes we recommend the installation
of liquid separators upstream and downstream of the pump
so as to avoid a massive influx of liquid into the pump.
■ The exhaust line should be laid so that it slopes down and
away from the pump so as to prevent condensate from
backstreaming into the pump.
■ In order to prevent the transfer of vibrations from the
RUVAC to other parts of the system we recommend the use
of corrugated hoses or compensators on both the intake and
the exhaust sides.
■ The pump must only be operated at ambient temperatures
between 12 and 40° C. It needs to be ensured that the ther-
mal radiation produced by the pump can be dissipated suffi-
ciently, particularly when built into enclosed systems (cabi-
nets), and that a temperature of 40° C is not exceeded.
GA03107_1502 - 10/2005 5
 Description

5
Key to Fig. 1
1 Intake flange
2 Pumping chamber
3 Casing
4 Impeller
5 Discharge flange

Fig. 1 Schematic cross-section of a Roots pump (vertical flow) Fig. 2 Functional diagram of a Roots pump (vertical flow)

1 Description
1.1 Design and Function
The RUVAC WA and RUVAC WAU are Roots vacuum pumps which are dri-
ven directly by an electric motor.
The WAU types have a pressure balance line between the discharge and
intake flange.
Standard RUVAC pumps are not suited for pumping of oxygen when the
oxygen concentration exceeds that in the atmosphere.
Before planning to use RUVAC pumps for pumping of highly aggressive
gases, contact us first.

1.1.1 Principle of Operation

Roots pumps - also known as Roots blowers - contain in their pump casing
(1/3) two symmetrical impellers (1/4) rotating in opposite directions. The
impellers have roughly the cross section of a figure “8” and are synchronised
by a toothed gear so that they move past each other and the casing with-
out contact but with a small clearance.
The principle of operation is explained in fig. 2.
In impeller positions I and II, the volume in the intake flange is increased.
When the impellers rotate further to position III, part of the volume is sealed
off from the intake side.
In position IV, this volume is opened to the discharge side, and gas at
backing pressure (higher than the intake pressure) flows in. The inflowing
gas compresses the gas volume pumped from the intake side. As the
impellers rotate further, the compressed gas is ejected via the discharge
flange.

6 GA03107_1502 - 10/2005
 Description

This process occurs twice per complete revolution of each of the two
impellers.
Due to the non-contacting rotation in the pumping chamber, Roots pumps
can be operated at high speeds (standard n = 3,000 rpm at a mains
frequency of 50 Hz). Thus a relatively high pumping speed is attained with
small pumps.
The pressure differential and compression ratio between the intake and
discharge sides are limited on Roots pumps. If the allowable pressure
differential is exceeded, the pump overheats.
In practice, the maximum attainable pressure differential is significant only
in the rough vacuum range (p > 10 mbar), whereas for pressures in the fine
vacuum range (p < 1 mbar) the attainable compression ratio is decisive.
RUVAC pumps from the WS 2001 FC range have been specifically designed
for operation in the rough and fine vacuum ranges. They are thus either used
in connection with backing pumps or in closed gas cycles.
Power consumption of the pump depends on
■ the volume of the pump chamber
■ the speed of the pump
■ the existing pressure range
■ the pressure difference between the inlet and the discharge flange
(see fig. 7)
■ and the type of gas to be pumped.

14

Key to Fig. 3
1 Gearwheels 8 Coupling
2 Bearings 9 Motor
3 Impeller seals 10 Drive shaft
4 Intake port 11 Centrifugal disc lubricator
5 Impellers 12 Discharge port
6 Shaft seals 13 Connecting pipes
7 Oiler 14 Crane eye

Fig. 3 Longitudinal section of a RUVAC WAU 2001 (vertical flow)

GA03107_1502 - 10/2005 7
 Description

1
Key to Fig. 4
1 Pressure balance line
2 Pressure balance valve

Fig. 4 Schematic diagram of a Roots pump with pressure balance line

1.1.2 Design
RUVAC Roots pumps can pump gas in the vertical or horizontal direction.
Although the pumping chamber of Roots pumps is free of sealing agents
and lubricants, the two gearwheels of the synchromesh gearing (3/1) and
the bearings (3/2) are lubricated with mineral oil. The gearwheels and bea-
rings of the RUVAC are located in two side chambers which also contain
the oil supply.
These two side chambers are separated from the pumping chamber by the
impeller seals (3/3). During operation of the pump, the side chambers are
evacuated via the impeller seals.
The side chambers are linked to each other by two passages (3/12). These
passages are arranged so that for either horizontal or vertical flow the pres-
sure will be equalised between the oil supplies.
In both side chambers there are integrated oil pumps to ensure that the
bearings and gearwheels receive sufficient lubricant at all recommended
speeds.
The motor of the RUVAC WA/WAU is directly flanged to the coupling hou-
sing. One shaft of the pump is linked to the shaft of the motor by an elastic
coupling (3/8). The shaft of the other impeller is driven via the synchromesh
gear.
With the standard motors, the RUVAC WA/WAUs can run on either 50 Hz
or 60 Hz power supplies.
The speed is then increased to 3,600 rpm and the pumping speed increa-
ses correspondingly.
For the permissible electrical connection data with respect to these fre-
quencies, see Section 1.3.
Motors for operation in connection with special supply voltages or frequen-
cies as well as explosion hazard protected motors are available upon
request.
The feedthrough of the impeller’s shaft between the evacuated bearing
space and the atmosphere is sealed by means of shaft seals. The shaft
seals are immersed in oil. They are located in a seal housing with a sepa-
rate oil reservoir. The oil level in the shaft seal housing can be checked at
oiler (3/7).

8 GA03107_1502 - 10/2005
 Description

RUVAC WA/WAUs are air-cooled. The airflow for cooling the motor and
pump is produced by a fan which sits on the motor.
An additional blade wheel is located on the coupling for additional coo-
ling.

1.1.3 Pressure Balance Line

The RUVAC WAU has an integrated pressure balance line (4/1). It links the
discharge and intake flanges via a pressure balance valve.
If the pressure differential between the flanges is too large, the valve opens
(4/2). Some of the gas which has already been pumped then flows back
through the line to the intake flange.
The valve is weight- and spring-loaded so that it works with both vertical
and horizontal flow of the pump.
As a result of this pressure balance line, no additional devices are needed
to protect the pump against excessive pressure differentials. The RUVAC
WSU can be switched on at atmospheric pressure at the same time as a
backing pump. As a result, the pumping speed of the pump combination is
increased even at high intake pressures.

1.1.4 Lubricants
The standard RUVAC WA/WAU pumps are ready for operation with mine-
ral oil.
We recommend the use of our N 62 oil for vacuum pumps (HE-200 in the
USA). Other types of oil are available upon request.

WA/WAU pumps running with a filling of PFPE today no longer Caution

meet the world-wide requirements for semiconductor processes.
For such applications the WS/WSU models should be preferred.

1.1.5 Flange Connections

The cast flanges on the pump’s body comply with DIN 2501, nominal pres-
sure 6.
The pumps are supplied with different collar flanges:
Pumps with Cat. Nos. beginning with 917... are equipped with collar
flanges corresponding to the ASA standard. These are intended for the
American market (“US version”).
Pumps with Cat. Nos. beginning with 117... are equipped with ISO-K
collar flanges. This standard can be applied in all other parts of the world
(“Euro version”)

GA03107_1502 - 10/2005 9
 Description

1.2 Standard Specification

RUVAC WA/WAUs are supplied for vertical flow as standard. The shaft seal
housing is supplied with a filling of oil.
Before the pump is shipped the oil has been drained out. The quantity of
mineral oil needed for running the pump is supplied in a separate container.
The intake flanges of all pumps contain a wire mesh dirt trap and have been
vented with nitrogen for protection against corrosion. The flanges are sea-
led with plastic adhesive film.
Pumps with Cat. Nos. beginning with 117... are supplied with a sealing
disc, a blank flange and an ISO-K collar flange fitted with the required num-
ber of screws. These pumps are equipped with a standard motor in accor-
dance with the IEC standard.
The WA/WAU models are supplied without a motor, but have been prepa-
red for operation in connection with a motor which complies with the IEC
standard. The motor flange is sealed with a cardboard disc. The coupling
is included with the pump.
Pumps with Cat. Nos. beginning with 917... are supplied with ASA adap-
ter flanges. Standard motors in accordance with the NEMA standard are
attached to these pumps.

10 GA03107_1502 - 10/2005
 Description

b8

a4 DN

DN DN h5
h2
h7 h4
h
h1 h3

d b6 b9
b6 b9
a5 a3 DN
a2 b2 b5
b b4
a1 b 1
a b7 b3

Type DN/DN1 a 1) a 2) a1 a2 a3 a4 a5 a6
WA/WAU 251 mm 63 ISO-K 729 790 405 365 14 209 120 194
in. 28.70 31.10 15.94 14.37 0.55 8.23 4.72 7.64
WA/WAU 501 mm 63 ISO-K 825 918 486 450 14 237 155 218
in. 32.48 36.14 19.13 17.72 0.55 9.33 6.10 8.58
WA/WAU 501H mm 63 ISO-K 825 918 486 450 14 237 155 218
in. 32.48 36.14 19.13 17.72 0.55 9.33 6.10 8.58
WA/WAU 1001 mm 100 ISO-K 1054 1085 560 520 16.5 298 180 262
in. 41.50 42.72 22.05 20.47 0.65 11.73 6.10 10.31
WA/WAU 1001H mm 100 ISO-K 1054 1085 560 520 16,5 298 180 262
in. 41.50 42.72 22.05 20.47 0.65 11.73 6.10 10.31
WA/WAU 2001 mm 160 ISO-K 1237 1283 800 740 18 367 220 310
in. 48.70 50.51 31.50 29.13 0.71 14.45 8.66 12.20
WA/WAU 2001H mm 160 ISO-K 1237 1283 800 740 18 367 220 310
in. 48.70 50.51 31.50 29.13 0.71 14.45 8.66 12.20

b b1 b2 b3 b4 b5 b6 b7 3) b8 b9
WA/WAU 251 mm 250 270 210 280 230 170 24 305 285 7.5
in. 9.84 10.63 8.27 11.02 9.06 6.69 0.94 12.01 11.22 0.30
WA/WAU 501 mm 310 299 229 320 271 201 24 390 313 7.5
in. 12.20 11 77 9.02 12.60 10.67 7.91 0.94 15.35 12 32 0.30
WA/WAU 501H mm 310 299 229 320 271 201 24 414 330 7.5
in. 12.20 11 77 9.02 12.60 10.67 7.91 0.94 16.30 12 99 0.30
WA/WAU 1001 mm 376 352 278 370 320 246 24 494 366 7.5
in. 14.80 13 86 10.94 14.57 12.60 7.91 0.94 19.45 14.41 0.30
WA/WAU 1001H mm 376 352 278 370 320 246 24 524 398 7.5
in. 14.80 13.86 10.94 14.57 12.60 7.91 0.94 20.63 15.67 0.30
WA/WAU 2001 mm 463 518 388 460 422 292 24 638 456 7.5
in. 18.23 20.39 15.28 18.11 16.61 11.50 0.94 25.12 17.95 0.30
WA/WAU 2001H mm 463 518 388 460 422 292 24 642 460 7.5
in. 18.23 20.39 15.28 18.11 16.61 11.50 0.94 25.28 18.11 0.30

d h h1 h2 h3 h4 h52) h6 h7
WA/WAU 251 mm 50 300 160 280 180 306 360 330 307
in. 2.00 11.81 6.30 11.02 7.09 12.05 14.17 12.99 12.09
WA/WAU 501 mm 50 340 180 320 194 348 430 370 332
in. 2.00 13.39 7.09 12.60 7.48 13.70 16.93 14.57 13.07
WA/WAU 501H mm 50 340 180 320 194 348 450 370 350
in. 2.00 13.39 7.09 12.60 7.48 13.70 17.72 14.57 13.78
WA/WAU 1001 mm 50 396 211 370 227 414 532 425 392
in. 2.00 15.59 8.31 14.57 8.94 16.30 20.94 425 15.43
WA/WAU 1001H mm 50 396 211 370 227 414 564 425 424
in. 2.00 15.59 8.31 14.57 8.94 16.30 22.20 425 16.69
WA/WAU 2001 mm 50 530 300 460 351 578 753 541 523
in. 2.00 20.87 11.81 18.11 13.82 22.76 29.65 21.3 20.59
WA/WAU 2001H mm 50 530 300 460 351 578 760 541 530
in. 2.00 20.87 11.81 18.11 13.82 22.76 29.92 21.3 20.87

1) This dimension “a” relates to pumps with the IEC motor used as standard by DN1 = ND 6 pump flange in accordance with DIN 2501
Leybold DN1 = Collar flange with gasket for connecting ISO-K
2) This dimension “a” relates to pumps with the NEMA motor used as standard by standard components
Leybold
3) For RUVAC WAU only Outside dimensions +/- 3mm

Fig. 5 Dimensional drawing for the RUVAC WA/WAU pumps

GA03107_1502 - 10/2005 11
 Description

1.3 Technical Data (SI-Units)

RUVAC WA/WAU 251 501 1001 2001
50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz 50 Hz 60 Hz
Nominal pumping speed 1) m3 x h-1 253 304 505 606 1000 1200 2050 2460
(cfm) (149) (179) (297,4) (357) (589) (707) (1207.5) (1449)
Max. pumping speed m3 x h-1 210 251 410 530 800 1000 1850 2100
(cfm) (123.7) (148) (241) (312) (470) (588) (1089) (1236)
■ with backing pump TRIVAC D 65 B - - -
■ with backing pump SOGEVAC - SV 200 SV 300 SV 630 F

Ultimate partial pressure 2) mbar < 2 x 10-5 < 8 x 10-3 < 8 x 10-3 < 8 x 10-3
(Torr) (< 1.5 x 10-5) (< 6 x 10-3) (< 6 x 10-3) (< 6 x 10-3)
Ultimate total pressure 2) mbar < 8 x 10-4 < 4 x 10-2 < 4 x 10-2 < 4 x 10-2
(Torr) (< 6 x 10-4) (< 3 x 10-2) (< 3 x 10-2) (< 3 x 10-2)
Poss. cut-in pressure – RUVAC WA mbar (Torr) 90 (67.5) 60 (45) 100 (75) 80 (60) 60 (45) 45 (33.5) 30 (22.5) 25 (18.5)
Maximum allowable pressure differential
in continous operation3) mbar (Torr) 80 (60) 80 (60 80 (60 80 (60 80 (60 80 (60 50 (37.5) 50 (37.5)
Leak rate, integral mbar x l x s-1 ≤5x 10-4
Permissible ambient temperatures °C 12 - 40
Main supply IEC motor ∆/Y V 220-240/ 220-277/ 220-240/ 220-277/ 220-240/ 220-277 380-420/ 380-480/
380-420 380-480 380-420 380-480 380-420 380-480 655-725 -

Main supply NEMA motor (US version) ∆/Y V 230/400 200-230/ 230/400 200-230/ 230/400 200-230/ 400/- 460
460 460 460

Temperature class F F F F
Motor power, 50/60 Hz kW (hp) 1.1 (1.5) 2.2 (3.0) 4.0 (5.4) 7.5 (10)
Nominal speed, 50/60 Hz approx. rpm 3000/3600 3000/3600 3000/3600 3000/3600
Max. permissible speed rpm 3600 3600 3600 3600
Motor protection category IP 55 55 55 55
5 5 5 5
Oil filling for the bearing chamber 4) 1. Filling / 2. Filling 1. Filling / 2. Filling 1. Filling / 2. Filling 1. Filling / 2. Filling
vertical pumping action, approx. l (qt) 0.65/0.6 (0.69/0.63) 0.9/0.8 (0.95/0.85) 2.0/1.8 (2.11/1.90) 3.85/3.6 (4.07/3.81)
horizontal pumping action, approx. l (qt) 0.5/0.45 (0.53/0.48) 0.75/0.7 (0.79/0.74) 1.2/1.1 (1.27/1.16) 2.65/2.4 (2.75/2.54)
Oil filling of the shaft sealing ring housing l (qt) 0.6 (0.63) 1.0 (1.06) 1.3 (1.37) 1.6 (1.69)
Connection flanges 6) DN 63 ISO - K 63 ISO - K 100 ISO - K 160 ISO - K
DN 3“ ANSI 3“ ANSI 4“ ANSI 6“ ANSI
Weight WA / WAU kg (lbs) 85/89 (187.4/196.2) 128/133 (282.2/293.3) 220/225 (485.1/496.1) 400/406 (882/895.2)
Noise level7) dB (A) < 64 < 67 < 75 < 80
Cat-Nos.
RRUVAC WA 117 20 117 30 117 40 117 50
RUVAC WA, 60 Hz (USA version) 917 20 917 30 917 40 917 50
RUVAC WA - horizontal flow - 128 38 111 68 -
RUVAC WA without motor 117 24 117 34 117 44 112 54
RUVAC WAU 117 21 117 31 117 41 117 51
RUVAC WAU, 60 Hz (USA version) 917 21 917 31 917 41 917 51
RUVAC WAU(H) with ACE vibration absorber - 118 31 118 41 118 51
RUVAC WAU without motor - 155 008 112 17 113 22

1) To DIN 28 400 and subsequent numbers

2) With double-stage rotary vane vacuum pump TRIVAC, resp. single-stage rotary vane vacuum pump SOGEVAC
(Type of backing pump look at max. pumping speed).
When using 2-stage backing pumps the ultimate pressures will be correspondingly lower
3) Applicable for ratio up to 1 : 10 between backing pump and Roots vacuum pump at 3000 rpm
4) Authoriative, however, is the oil level at the oil-level glass
5) After a complete disassembly
6) US models ANSI flanges
7) At an operating pressure below < 10-1 mbar (< 0.75 x 10-1 Torr)

12 GA03107_1502 - 10/2005
 Description

1.4 Accessoriesr
Cat.-No.
Set of gasket
WA/WAU 251 194 60
WA/WAU 501 194 64
WA/WAU 1001 194 68
WA/WAU 2001 194 72
Öl drain facility (M 16 x 1,5)
■ with straight drain coupling 190 02
■ with right-angled drain coupling 200 14 271
ACE vibation absorber
WAU/WSU 501 200 03 251
WAU/WSU 1001 200 03 252
WAU/WSU 2001 100 22
Pressure switch PS 115 160 04
Pressure switch setting 160 05
Accessories for mounting PS 115
Adapter 168 40
Right-angle bend DN 16 KF 184 36
Centering ring DN 16 KF, 2 x 183 26
Clamping ring DN 16 KF, 2x 183 41
Contact amplifier SV 110
■ 230 V 160 78
Öl N 62*, 5l 177 02
Öl HE-200*, 1gal 98-198-007

* N 62 is an oil grade of Leybold Cologne, and HE-200 is an oil grade of LHVP Export.
They are interchangeable.
For other quantities, see catalogue.

Torr
10 -5 10 -4 10-3 10 -2 10 -1 10 0 10 1 750
4
10 5000
cfm
3
m x h -1
1000
10 3
Pumping speed

500

100
10 2 50
8
6 WAU 2001+SV 630F
4 WAU 1001+SV 300
WAU 501 +SV 200
2 WAU 251 +D 65 B 10
10 1 2 4 68
-3 -2 -1 0 1 2 3
10 -5 10 -4 10 10 10 10 10 10 10
mbar
Pressure
Total pressure
Partial pressure

Fig. 6 Pumping speed of the RUVAC WA/WAU, 50 Hz Fig. 7 Power consumption of the RUVAC WA/WAU

GA03107_1502 - 10/2005 13
 Transportation and Storage

2 Transportation and
Storage
Roots pumps are heavy machines made of grey cast iron and thus should
only be lifted using suitable lifting equipment tied to the crane eye (8/3) pro-
vided for this purpose.
Caution Before transporting the pump always drain out the oil from of the
bearing spaces (see Section 5.2). Screw the oil-drain plug with its
gasket back in and wipe any oil droplets off from the casing.

It will not be required to drain out the oil from the shaft seal hou-
sing (oiler).

The pump should be transported and stored in a horizontal posi-

tion (5° max. tilt with respect to its longitudinal axis). Otherwise
there is the danger that oil from the bearing chambers may enter
the pump chamber, even before the pump is filled with oil for the
first time.

The pump must only be moved and installed in its horizontal ori-
entation. Otherwise the oil in the shaft seal housing (oiler) may spill
out.

When shelving the pump for a longer period of time, the oil should be
drained out and you should seal off the flanges of the pump with a
piece of foil or the cardboard discs initially supplied with the pump
using the collars. If required, place in the pump chamber a bag con-
taining desiccant which needs to be removed upon recommissioning
the pump.

The area of the motor (fan and slits at the flange of the motor)
must be protected against dust and dripping water.

3 Installation and
Connection
Caution Only fill in the oil after having installed the pump.

3.1 Installation
Install RUVAC pumps on a flat, horizontal surface (5° max. tilt with respect
to the longitudinal axis).
Caution If the pump is tilted by more than 5°, lubricant may enter the pum-
ping chamber from the gear chambers.
Keep the air intake and exhaust ducts for cooling the motor unobstructed
(for minimum clearance with respect to the fan cowl, see Fig. 5).
The pump’s ambient temperature should be between 12 °C and 40 °C.
Lower temperatures hamper run-up; higher ones shorten the oil change
intervals and may lead to greater wear.
Special oil for operation at temperatures below 12 °C is available upon
request.
Secure the pump.

14 GA03107_1502 - 10/2005
 Installation and Connection

Four holes in the feet are provided for this purpose.

When bolting the feet down, make certain that there is no stress Caution
or twist on the pump casing. Stress on the pump can change the
close tolerances between the impellers and the pump casing and
may result in damage to the pump (use washers to equalise).

Since compensation elements must be attached to the flanges on Warning

the suction and pressure sides, the screws for attachment of the
feet must always be fitted and tightened well.

Use the following screws:

RUVAC 251/501: 4 x M 12
RUVAC 1001/2001: 4 x M 16

3.2 Filling in of the Lubricants

The housing for the shaft seal and the oiler (8/11) are filled with N 62 oil
when the pump is supplied. The oil level must be visible in the oiler.

Correct oil level: 1/3 of the oiler must be filled when the pump is Caution
cold. Top up oil as required.
The lubricant needed for running the pump is supplied in a separate con-
tainer.
Unscrew the oil-fill plug (8/4) and add oil.
An oil without additives and of viscosity class ISO VG 100 (formerly
SAE 30) must be used for the pump. We recommend our special oils N 62

Key to Fig. 8
1 Discharge flange 4 5 6 7 8
2 Oil-level glass 3
3 Crane eye
4 Oil-fill port 2 9
5 Intake flange
6 Connection for pressure switch 10
7 Adapter
8 Pressure switch
9 Centering and clamping ring 11
10 Right-angle bend
11 Oiler 12
12 Direction-of-rotation arrow
13 Junction box
14 Fan cowl 13
1
14

large arrows = direction of flow

Fig. 8 Connections and controls

vertical Pumping action of the vacuum pump horizontal Approximate oil

level during
operation
Oil level in the oil glass
max. (+4 mm) Oil level with
Oil level with min. (-2 mm)
the pump at
Approximate oil max. (0 mm) the pump at standstill
level during min. (-6 mm) standstill
operation

Fig. 9 WA/U 251-2001

GA03107_1502 - 10/2005 15
 Installation and Connection

or HE-200. Please consult us if you intend to run the pump with other oils
or special lubricants.
When the pump is not running the correct oil level is:
■ for vertical flow of the pump in the center
■ for horizontal flow it is 4 mm above the center of the oil-level glass (9).
Caution It needs to be ensured that the oil filling levels stated in Fig. 9
which apply to switched off pumps (at standstill) are correctly
maintained.

If the oil level is too low, the bearings and gearwheels are not lubri-
cated adequately; if it is too high oil may enter the pumping cham-
ber.

Clean the oil-fill port and screw the plug back in using a gasket
which is in perfect condition.

The oil-fill port must be sealed air-tight. Entry of air from the out-
side may cause oil-containing gas to enter the pumping chamber
via the impellers seals.

3.3 Electrical Connection

Warning Disconnect the mains before doing work on the wiring.

The electrical connections must only be provided by a trained

electrician in accordance with the regulations of the EN 60204
international series of standards.

For proper connection, a suitable motor protection switch must

be used. Set the switch in accordance with the rating on the
motor nameplate.

Connect the pump to the correct mains voltage through the ter-
minals provided in the junction box (8/13).

Only the fittings provided on the junction box may be used.

Always provide an uninterrupted connection for the protective

ground conductor connecting it in a professional manner.
Never leave the protective ground conductor for the pump
unconnected.

Do not link control circuits to the power circuit of the motor.

Observe the wiring diagram of Fig. 10.

Caution The WA/WAU pumps are only limited suitable for operation in
connection with frequency converters. The max. permissible
speed is 3,600 rpm regardless of the size of the pump.

After connecting the motor and every time you alter the wiring,
check the direction of rotation.

Never allow the pump to run in the wrong direction or with open
flanges for a longer period of time.
An arrow (8/12) on the motor flange shows the correct direction of rotation
for the motor shaft. To check rotation, switch on the motor briefly and
observe the direction of impeller rotation through the pump’s intake and
then immediately switch off again.

16 GA03107_1502 - 10/2005
 Installation and Conection

Wear protective goggles for protection against particles which Warning

may be forced out of the flange opening. Keep your hands away
from the flange opening.

The impellers should move up from the center and drop down to the side.
If this is not the case, disconnect the pump from the mains and interchan-
ge two mains phases.
Even if the pump has been already firmly connected to the piping, you may
determine the direction of rotation.
For this, evacuate the vacuum system down to a pressure below 20 mbar
with the aid of the backing pump. Then switch on the RUVAC briefly; now
the pressure must drop. If the pressure increases or remains constant, the
RUVAC is turning in the wrong direction.
Then rewire as described above.
The RUVAC can be automatically switched on and off via a contactor using
a pressure switch and the contact amplifier SV 110 (see Section 1.4).
At Leybold, the pressure switch PS 115 is set to a fixed value. When orde-
ring the pressure switch please state the required switch-on pressure.
The contact amplifier is identical for all pressure switches.
After removing a screw plug, the pressure switch (8/8) together with an
adapter (8/7) and a right-angle bend (8/10) can be mounted on the bore
(8/6).

W2 U2 V2 W2 U2 V2 W2 U2 V2

U1 V1 W1 U1 V1 W1

U1 V1 W1

L1 L2 L3 L1 L2 L3
Y - Star connection ∆ - Delta connection Connection to Star/Delta switch

IEC - Motors

6 5 4 6 5 4

9 8 7 9 8 7

3 2 1 3 2 1

L1 L2 L3 L1 L2 L3
Low Voltage
High Voltage NEMA - Motors
Fig. 10 Electrical connection

GA03107_1502 - 10/2005 17
 Installation and Conection

When doing so, ensure proper sealing and air-tight installation.

It is advisable to mount the switch vertically to reduce the entry of conta-
minants.

3.4 Connection of the Flanges

Caution Already small quantities of liquids (from the vacuum chamber or
the piping) can lead to liquid damages within the pump. These
may lead to a deformation of the impellers and may entirely dest-
roy the pump. Suitable protective measures should be provided
as required in the piping on the suction side (separator, T-piece).

Warning The RUVAC WA/WAU pumps have not been designed to pump
ignitable or explosive mixtures without additional protection.

If the pumps are none-the-less to be used under such conditions,

the customer himself must ensure that proper measures for the
purpose of protection against explosions (pressure monitor, flame
arresters etc.) are introduced, in line with the requirements of the
applicable laws.

Consult us for advice.

If not already having done so, remove cardboard discs, foils or shipping
flanges from the flanges (8/5 and 8/1).
We recommend that you retain the shipping flanges of the pumps in case
you want to store the pump at a later date.
Clean the flanges and check that the sealing surfaces are in perfect condi-
tion.
Flange the pump to the vacuum system.

Caution Don’t place any stress on the pump casing when installing the
intake and discharge lines.

Fit compensation elements in order to avoid such stresses.

When attaching the pump directly (without bolting down the feet)
to the forevacuum pump, you must always use on the pressure
side the full number of screws defined by the flange standard
(ISO-K, DIN or ASA) whereby these must comply with the deman-
ded property class rating.

You must also check whether the backing pump is rigid and sta-
ble enough to support the load of the RUVAC pump in each case.
The dirt-trap which is supplied with the pump should always be fitted into
the intake flange when there is the possibility of contaminants entering the
pump coming from the vacuum chamber or the piping. Even with clean
vacuum processes, contaminants from the system may enter upon initial
start-up. Depending on the operating conditions, the dirt trap may reduce
the pumping speed of the pump.
Observe the maintenance information provided in Section 5.5.

18 GA03107_1502 - 10/2005
 Operation

4 Operation
4.1 Start-up
Check the pump motor’s direction of rotation and the oil level in Caution
the bearing spaces (see Section 3.2 and 3.3).

RUVAC WAU
The RUVAC WAU can be started together with the backing pump at atmos-
pheric pressure.
It is protected against excessively high pressure differentials by a bypass
line.

The opening pressure of the differential valve is designed only for Caution
50 or 60 Hz operation of the pumps

RUVAC WA
Do not switch on the RUVAC WA until the backing pump has evacuated
the vacuum vessel to the cut-in pressure.
For processes in which condensable vapours are pumped, it is advisable to
evacuate the vacuum vessel via a roughing line to the cut-in pressure.
Electrically switch on the Roots pump together with the backing pump and
cut it in upon reaching the cut-in pressure. The initial bypassing of the
Roots pump serves to prevent condensation of vapours in the cold pump.
The permissible cut-in pressure depends on the ratio between the Roots
pump and the backing pump.
∆ pmax
pE = ———
keff - 1
Since keff is not always known, the following equation may be used for a
first estimate:
∆ pmax
pE ≈ ———
kth - 1
pE = Cut-in pressure
∆ pmax = Maximum permissible pressure differential (see technical data)
nominal pumping speed 1) RUVAC
kth = theoretical compression ratio = ———————————————————
nominal pumping speed of backing pump

effective pumping speed RUVAC

keff = effective compression ratio = ———————————————————
effective pumping speed of backing pump

Example - Pump combination:

RUVAC WA 5012) / SOGEVAC SV 100

505 m3 · h-1
kth = ————— ~ 5
100 m3 · h-1

80 mbar
pE ≈ ———— ≈ 20 mbar
5-1

1) at the crresponding operating frequency

2) at 50 Hz operation

GA03107_1502 - 10/2005 19
 Operation

With small vacuum vessels, the maximum permissible pressure differential

can be briefly exceeded (max. 3 min) upon start-up. If a pressure switch has
been installed, do not set it to this higher pressure because it will fail to pro-
tect the pump against overload in the event of a greater gas quantity.

Caution It is advisable to switch the RUVAC WA on and off via a pressure

switch to ensure that it runs only in the permissible pressure
range.

4.2 Operation
Warning Do not operate the pump without having connected the flanges to
a vacuum system.

The screws of the flanges on the suction and the pressure side
must not be loosened in the presence of a vacuum even if the
pump is not running.

During operation of the RUVAC, check the oil level and the condition of the
oil in the oil level glass and the oiler from time to time. Correct as required
(see Section 5.2 and 5.3). Normally, the oil N 62 or HE-200 is light-brown.
If it turns dark, this is a sign of early ageing due to excessively high tempe-
ratures.

Caution Run the Roots pump exclusively under the operating conditions
for which it has been designed. Any modification of the operating
parameters (e. g. intake pressure, intake temperature, ratio bet-
ween Roots pump and backing pump) for a longer period may
place an inadmissible thermal load on the pump. Increases in
temperature which are not compensated by taking suitable mea-
sures may damage the Roots pump and/or the backing pump.

Warning During normal operation temperatures exceeding 80 °C may

occur at the discharge port, the oil chambers and the line on the
pressure side. When touching these there is the danger of recei-
ving burns.

Note the labels on the pump.

Never open the oil-fill or oil-drain screw (Fig. 12) in the presence
of a vacuum or while the pump is running. There is the danger that
oil may squirt out.ut.

The oil level for the shaft seal housing must always be visible in the oiler
(11/1). The correct oil level is 1/3 of the height of the oil when the pump is
cold 1/2 of the height of the oiler when the pump is warm. Top up any oil
as required.
For this we recommend that you use N 62 or HE 200 oil.
If it is required to top up oil very often, it is quite likely that a shaft seal is
faulty (see Section 5.8).

20 GA03107_1502 - 10/2005
 Operation

4.3 Shutdown and Storage

Separate the Roots pump from the vacuum system by closing the corre- Caution
sponding valve. First switch off the Roots pump, then the backing pump.
After working with corrosive gases, the system should be vented with dry
protective gas (e.g. N2) to prevent corrosion during standstill.
When shutting down the pump and removing it from the system, it is advis-
able to seal the connecting flanges tightly.

Before removing pump from the vacuum system, disconnect it Warning

from the mains supply.

Take note of possibly contaminated pumps.

Observe all safety regulations.

For transportation and storing of the pump, observe the information provi-
ded in Section 2.

4.4 Changing from Vertical to

Horizontal Flow
The RUVAC WA/WAUs are supplied as standard for vertical flow unless you
specifically request horizontal flow. Moreover, the pump may be converted
from one flow direction to the other.
For this proceed as follows:
Unscrew the sealing screws (12/2 and 12/4) and drain out the oil from the
side chambers.
Seal off of the bottom opening with the closure screw and a seal which is
in perfect condition so that a vacuum-tight seal is attained again.
Unscrew the pump’s feet, turn the pump by 90° and as shown in figure 5
(dimensional drawing) fit the feet for the changed direction of pumping
action.

The longitudinal axis of the pump must remain horizontal so that Caution
no residual lubricant can flow from the side chambers into the
pumping chamber.
Unscrew oiler (11/1) and sealing screw (11/2). Screw in the oiler from the
top using a perfect gasket and screw in the sealing screw from the side also
using a perfect gasket.
Fill in the oil for the side chambers at (11/8) and the oil for the shaft seal
housing at the oiler (11/1) (see Section 3.2).
If a pressure switch has been installed, turn it so that it again points verti-
cally upwards.
The valve in the pressure balance line of the RUVAC WAU is designed to
work with both vertical and horizontal flow of the pump.

GA03107_1502 - 10/2005 21
 Operation

Key to Fig. 11
1 Oiler 8
2 Sealing screw
3 Sealing screw
4 Feet of the pump 1
5 Sealing screw
6 Sealing screw
7 Sealing screw
8 Oil-fill opening

2
7

4 3

Fig. 11 Changing the direction of flow

Key to Fig. 12
1 Sealing screw for oil-drain opening in connection with a horizontal gas flow
2 Sealing screw for oil-drain opening in connection with a vertical gas flow
3 Oil level glass
4 Sealing screw for oil-fill opening 2 1

Fig. 12 Changing the lubricant

22 GA03107_1502 - 10/2005
 Maintenance

5 Maintenance
5.1 Safety Information
The safety information given in the following applies to all maintenance
work.

Disconnect the electrical power before disassembling the pump. Warning

Make absolutely sure that the pump cannot be accidentally star-
ted. If the pump has been pumping harmful substances, determi-
ne the nature of hazard and introduce suitable safety measures.

Observe all safety regulations !

If you send a pump to Leybold for repair please indicate any harm-
ful substances existing in or around the pump. For this use the
„Declaration of Contamination“ form which has been prepared by
us and which we will provide upon request.

Any pump received by us without, or an incompletely filled in

declaration will delay the repair.

When shipping contaminated pumps which require approval by

the authorities, you must observe the applicable packaging and
shipping regulations.

All maintenance and cleaning work described in this section must Caution
be carried out only by suitably trained personnel.

When disposing of used lubricants please observe the relevant

environmental regulations.

Improper maintenance or repairs may affect the service life and

performance of the pump, and cause problems when filing war-
ranty claims.

Advanced repair work not described here should be left to the

Leybold service.
We would like to point out that Leybold offers training courses on the main-
tenance, repair, and troubleshooting of RUVAC pumps. Further details are
available on request.

5.2 Oil Change / Gear Box

Before pumping oxygen (or other highly reactive gases) at con- Warning
centrations exceeding the concentration in the atmosphere
(> 21 % for oxygen) it will be necessary to use a special pump.
Such a pump will have to be modified and de-greased, and an
inert special lubricant (like PFPE) must be used.

Observe all safety information provided in Section 5.1.

Very little oil is consumed by wear in the bearings and the gear under clean
operating conditions. We recommend that you change the oil after the first
500 hours of operation to remove any wearing residue.
Then, under normal operating conditions, change the oil after every
3,000 hours of operation.
Change the oil more frequently when pumping corrosive vapours or large

GA03107_1502 - 10/2005 23
 Maintenance

amounts of dust or when cycling frequently from atmospheric to working

pressure.
Under such operating conditions it is recommended to regularly check the
neutralisation value (to DIN 51 558) based on a sample of oil. If the neutra-
lisation value exceeds 2, an oil exchange will be required.
Warning Before removing the oil-drain or oil-fill plug always switch off the
pump first and vent to atmospheric pressure.
When the pump has become warm during operation, the casing
and the oil temperature may exceed 80 ºC.
Leave the pump to cool down. Always wear protective gloves also
to protect yourself against aggressive residues in the oil.

To simplify the process and also for safety reasons we recom-

mend the use of our oil-drain facility (see Section 1.4).

Unscrew the oil-drain screws (12/2) or (12/1) and the oil-fill screw (12/4) and
drain the oil.
Clean the sealing surface and firmly reinstall the oil-drain screw (12/2) or
(12/1) using a gasket which is in perfect condition. Wipe off any oil residu-
es from the casing.
Fill in new oil.
For oil quantities and ordering data see Sections 1.3 and 1.4.
Make sure to use the right kind of oil.
An oil without additives of viscosity class ISO VG 100 (formerly SAE 30)
must be used for the pump.

Caution We recommend the use of our special oil N 62 or HE-200.

Please consult us if you intend to run the pump with other oils or special
lubricants.
At vertical flow the correct oil level is at the center of the oil-level glass
(8/2) when the pump is not running.
At horizontal flow the correct oil level must be 4 mm above the center
of the oil-level glass (see Fig. 9).

Caution If the oil level is too low, the bearings and gearwheels are not lubri-
cated adequately; if it is too high, oil may enter the pumping
chamber.
Clean the oil-fill port and reinstall the screw (12/4) using a gasket which is
in perfect condition. Wipe off any oil residues from the casing.

Caution The oil-fill port must be sealed air-tight. In the presence of a vacu-
um, the entry of air may cause oil-containing gas to enter the
pumping chamber via the impeller seals.

24 GA03107_1502 - 10/2005
 Maintenance

5.3 Oil change / shaft seal housing

Observe all safety information provided in Section 5.1. Warning

The oil in the shaft seal housing should be changed every 3,000 operating
hours.
Unscrew the oil-drain screw (11/3) under the shaft seal housing, drain out
the oil and screw in the oil-drain screw using a gasket which is in perfect
condition.
Fill in fresh oil at the oiler (11/1). The oil level for the shaft seal housing must
be visible in the oiler.
Maximum level – when the pump is warm = 1/2 of the height of the oiler
– when the pump is cold = 1/3 of the height of the oiler.
Wipe off any oil residues from the casing.

5.4 Cleaning the Fan Cowl and the

Cooling Fins
Observe all safety information provided in Section 5.1. Warning

The slits in the fan cowl (8/14) as well as the fins on the motor and on the
pump may be contaminated depending on humidity conditions and the
degree of contamination in the ambient air.
In order to ensure a sufficient air flow for the motor and the pump’s casing,
the grid of the fan cowl must be cleaned with a clean brush when conta-
minated.
Any coarse dirt must be removed from the fins on the motor and the pump.

5.5 Cleaning the Dirt Trap

Observe all safety information provided in Section 5.1. Warning

A wire-mesh sieve is located in the intake port (8/5) to collect foreign objec-
ts. It should be kept clean in order to avoid a reduction of the pumping
speed.
To do so, take off the intake line. Remove the dirt trap from the intake flan-
ge and rinse it using a suitable solvent. Then thoroughly dry it with com-
pressed air. If the dirt trap is damaged, replace it.

GA03107_1502 - 10/2005 25
 Maintenance

5.6 Cleaning the Pumping

Chamber
Warning Observe all safety information provided in Section 5.1.

Under dirty operating conditions, contaminants may be deposited in the

pumping chamber or on the impellers. After removing the two connecting
lines, the contaminants can be blown out with dry compressed air or flus-
hed out with a suitable solvent.
Contaminants that cannot be blown or flushed out, can be removed com-
pletely from the pumping chamber with a wire brush, metallic sponge or
scraper.
Then change the oil.

Warning During cleaning, the impellers must be turned only by hand.

Caution The loosened deposits must not remain in the pump. After clea-
ning, check the pump by slowly turning the impellers by hand.
They should move freely and without any resistance.

Generally, the Roots pump does not need to be disassembled. If

necessary, this should only be done by our after-sales service.

5.7 Cleaning the Valve of the

Pressure Balance Line
Warning Observe all safety information provided in Section 5.1.

Remove the screws and take off the cover (13/1) with O-ring (13/2).
Take out the spring (13/4).
Remove the valve disk (13/6) with O-rings (13/5) and (13/7).
If the bushing (13/3) is damaged, pull it out of the valve disk and replace it.
Clean all parts or replace them if necessary. Reassemble in the reverse
sequence. When doing so, check the O-rings for leak-tightness and repla-
ce if found faulty. Finally a leak test should be run.

26 GA03107_1502 - 10/2005
 Maintenance

Key to Fig. 13
1 Cover 1
2 O-ring
3 Bushing
4 Spring 2
5 O-ring
6 Valve disc
7 O-ring 3

Fig. 13 Valve of the pressure balance line

5.8 Exchanging the Shaft Seals

Observe all safety information provided in Section 5.1. Warning

The shaft feedthrough of the RUVAC WA/WAU is sealed with two shaft
seals. In order to reduce wear on the shaft these shaft seals run on a bus-
hing.
A dropping oil level in the oiler (11/1) is a sign for malfunctioning shaft seals.
When the oil level in the oiler drops and when no oil appears under the shaft
seal housing, it is likely that the inner shaft seal is faulty. In this case the oil
flows from the shaft seal housing into the bearing spaces of the pump the-
reby creating in the bearing spaces an unacceptably high oil level. In such
a case the pump must be switched off immediately and it must be repai-
red.
When the oil level in the oiler drops and when oil appears under the shaft
seal housing, it is likely that the outer shaft seal is malfunctioning. If the oil
loss is only slight, the pump may still be operated for some time, provided
the lost oil is topped up regularly.

Collect the oil which drips out under the motor. There is the dan- Warning
ger that someone may slip.

Have the pump repaired.

GA03107_1502 - 10/2005 27
 Maintenance

5.8.1 Required Special Tools

(see Fig. 15)
■ Two-armed puller for the bushing of the RUVAC WA/WAU 251 and
501. A suitable puller must be adapted according to Fig. 15/c. In the
case of the RUVAC 1001 and 2001 a commercially available puller will
do.
■ Pulling device for the coupling of the RUVAC WA/WAU 251 and 501
according to Fig. 15/a.
■ Shaft seal driver according to Fig. 15/b.
The shaft seal drivers can be ordered at LVP Export in the USA.
Order No.:
WA/WAU 251/501 722 81027
WA/WAU 1001/2001 722 81028

5.8.2 Preparations
Unscrew sealing screw (14/21) with the gasket, drain the oil out from the
shaft seal housing and screw the sealing screw back in using a gasket
which is in perfect condition.
Support the motor so that it can not drop.
Unscrew the nuts (14/18) and remove the motor with the coupling piece
(14/17).
Remove protection tube (14/16). Remove the coupling element (14/15).
Unscrew screw (14/19) with the disc and pull off coupling piece (14/14)
using the puller (Fig. 15/a).
Remove key (14/13).
Unscrew screws (14/20).

5.8.3 RUVAC WA/WAU 251, 501

Pull the shaft seal housing (14/8) out. Forcing threads are provided on the
shaft seal housing for this purpose.
Take the O-ring (14/4) out of the flange of the coupling.
Use the puller (Fig. 15/c) to pull the bushing (14/3)off from the shaft.
Take the O-ring (14/2) from the shaft.
Take the O-ring (14/5) from the housing. Remove securing ring (14/6).
Pull out the shaft seal (14/7).
Take out snap ring (14/12) and felt ring (14/11).
Take out shaft seal (14/10). Remove securing ring (14/9).
It is strongly recommended always to exchange the shaft seals, the bus-
hing and the felt ring against new parts. Clean all other parts and replace
them as required.
Fit securing ring (14/9).
Use shaft seal driver (15/b) to drive the shaft seal (14/10) down to the secu-
ring ring (14/9) (for position of the shaft seal refer to Fig. 14).
Fit felt ring (14/11) and snap ring (14/12).

28 GA03107_1502 - 10/2005
 Maintenance

Use shaft seal driver (15/b) to drive the shaft seal (14/7) down. Here the
depth must be defined by the tool (for position of the shaft seal refer to Fig.
14).
Fit securing ring (14/6).
Now reassemble the parts in the reverse order as for disassembly.
Before starting the pump, fill in the required amount of oil at the oiler (see
Section 3.2).

Key to Fig. 14
1 Oiler 15 Coupling element
2 O-ring 16 Protection tube
3 Bushing 17 Motor with coupling piece (other half)
4 O-ring 18 Nuts
5 O-ring 19 Screw
6 Securing ring 20 Screw
7 Shaft seal 21 Sealing screw (WA/WAU 1001 and 2001 only)
8 Shaft seal housing 22 Securing ring
9 Securing ring (WA/WAU 251 and 501 only) 23 Ball bearing
10 Shaft seal 24 Spacing disc
11 Felt ring 25 Wave washer
12 Snap ring 26 Adjusting disc
13 Key 27 Wave washer
14 Coupling piece (one half) 28 Adjusting disc

Fig. 14 Exchanging the shaft seal

GA03107_1502 - 10/2005 29
 Maintenance

5.8.4 RUVAC WA/WAU 1001, 2001

Use a puller to pull out shaft seal housing (14/8) and bushing (14/3)
together.
Remove O-rings (14/4 and 14/2).
Pull the bushing out of the housing.
Take the O-ring (14/5) out of the housing. Remove securing ring (14/6).
Pull out shaft seal (14/7).
Pull out snap ring (14/12) and felt ring (14/11).
Remove shaft seal (14/10).
Remove securing ring (14/22). Pull out bearing (14/23).
Take out spacing disc (14/24), wave washers (14/25 and 14/27) as well as
adjusting discs (14/26 and 14/28).
It is strongly recommended always to exchange the shaft seals, the bus-
hing and the felt ring against new parts. Clean all other parts and replace
them as required.
Place adjusting disc (14/28), wave washer (14/27), adjusting disc (14/26),
wave washer (14/25) and spacing disc (14/24) into the housing.
Drive bearing (14/23) back in.
Fit securing ring (14/22).
Use shaft seal driver (15/b) to drive the shaft seal (14/10) down to the stop
(for position of the shaft seal refer to Fig. 14).
Fit felt ring (14/11) and snap ring (14/12).
Use shaft seal driver (15/b) to drive the shaft seal (14/7) down.
Here the depth must be defined by the tool (for position of the shaft seal
refer to Fig. 14).
Fit securing ring (14/6).
Now reassemble the parts in the reverse order as for disassembly.

Caution Before starting the pump, fill in the required amount of oil at the
oiler (see Section 3.2).

5.9 Leybold Service

If a pump is returned to Leybold, indicate whether the pump free of sub-
stances damaging to health or whether it is contaminated.
If it is contaminated also indicate the nature of the hazard. For this you must
use a form which has been prepared by us which we will provide upon
request.
A copy of this form is reproduced at the end of these Operating
Instructions: “Declaration of Contamination of Vacuum Instruments and
Components”.
Please attach this form to the pump or enclose it with the pump.
This “Declaration of Contamination” is required to meet German Law and
to protect our personnel.

30 GA03107_1502 - 10/2005
 Maintenance

Leybold must return any pumps without a “Declaration of Contamination”

to the sender’s address.

Package the pump such that it cannot be damaged during trans- Warning
portation and such that no hazardous materials can escape from
the packaging.

Radioactively contaminated pumps cannot be serviced (repaired)

and disposed of by Leybold. Both needs to be ensured by the
owner of the equipment.

a – Pulling device for the coupling

20 width

b– Shaft seal driver;

material: aluminium, brass or similar

RUVAC WA/WAU 251/501 RUVAC WA/WAU 1001/2001

c – Two-armed puller

For item 1: Reworking of the cross bar

For item 2: Reworking of both hooks

Fig. 15 Special tools

GA03107_1502 - 10/2005 31
32
5.10 Maintenance Schedule
No. Process Meas./test quantity Maintenance interval Remark
Operating/auxiliary Bef. swit- 500 h after daily Weekly 1/4 yearly Yearly
materials ching on commissioning rsp. 3000 h
1 Check the oil level min./max. oil level x x Check oil level while the pump
Maintenance

in the bearing in oil level glass x has been shut down (see Sec.

GA03107_1502 - 10/2005
chambers. 3.2 with Fig. 9)
2 Oil quality visual x In the normal state, PFPE is
light, clear and transparent.
(Anderol is yellow)
In the case of black oil
an oil change is necessary
(See Section 5.2).
Neutralisation value When pumping corrosive For normal If the neutralisation number is,
(DIN 51 558) vapours, in the case of much dust operating > 2and oil changes required
and for cyclic operation. conditions (see Section 5.2).
3 Exchange the oil x When pumping corrosive For normal Oil change (see Section 5.2)
for the bearing (Recommended) vapours, in the case of much dust operating ■ Oil change after 3000
chambers. and for cyclic operation. conditions operating hours
■ Waste oil disposal
(see page 3).
4 Check leak tight- x
ness of the cooling
water connections
at the motor.
5 Clean motor fan Weekly check, See Section 5.3.
and cooling fins. cleaning intervals will depend on
the ambient conditions.
6 Check the oil level x x The oil level in the oiler
in the shaft sealing can be checked during
ring housing. operation (see Section 4.2).
3 Exchange the oil For normal Oil change (see Section 5.2)
for the shaft sealing operating ■ Oil change after 3000
ring housing. conditions operating hours
■ Waste oil disposal
(see page 3).
 Troubleshooting

6 Troubleshooting
Malfunction Likely cause Remedy Repair
Pump Motor/frequency converter incorrectly connected. Connect motor/frequency converter correctly. 3.3
does not start up Pressure switch is defective. Replace the pressure switch. 3.3
Oil is too thick. Exchange the oil or warm up oil and pump. 5.2
Motor rotor defective. Leybold Service _
Pump has seized: detectives pistons, bearings Leybold Service _
or toothed wheels.
Pump Ambient temperature is too high or cooling air flow Install the pump at a suitable place or ensure 3.1/5.4
gets too hot is obstructed. a sufficient flow of cooling air.
Pump is operating in the wrong pressure range. Check the pressure levels within the system. _
Pressure differences too high. Check the pressure levels within the system. _
Gas temperature is too high. Check system. _
Clearance between housing and rotors are too small
due to
- contamination Clean pumping chamber. 5.6
- distortion of the pump Affix and connect the pump free of tensions. 3.1/3.4
Friction resistance is too high due to contaminated
bearings and/or contaminated oil.
Oil level is too high. Drain oil down to the correct level. 5.2
Oil level is too low. Top up oil to the correct level. 5.2
Wrong oil filled in. Drain oil, fill in correct lubricant. 5.2
Bearing is defective. Leybold Service _
Ventil der Druckausgleichleitung öffnet nicht. Ventil reinigen oder instandsetzen. 5.7
Power Like „Pump gets too hot“. Like malfunction „Pump gets too hot“. -
consumption Incorrect mains voltage for the motor. Connect the motor to the correct mains voltage. 1.3/3.3
of the motor Motor defective. Repair or replace the motor. -
is too high. Oil is too thick. Exchange the oil or warm up oil and pump. 5.2
Pump is Distances between housing and rotors is too small
to loud. due to
- contamination Clean pumping chamber. 5.6
- distortion of the pump Affix and connect the pump free of tensions. 3.1/3.4
Bearing or gear damage. Leybold Service, shutdown the pump immediately. -
Pistons make contact with the housing. Leybold Service, shutdown the pump immediately. -
Rotor is running untrue. Leybold Service, shutdown the pump immediately. -
Oil splash duct makes contact with the gear housing Leybold Service. -
or the oil pipe.
Oil pump is blocked or defective. Leybold Service, shutdown the pump immediately. -
Pump is losing Oil leak is apparent:
oil Oil drain plug is leaky. Drain oil, firmly screw in a new oil drain plug 5.2
.. with the gasket, fill in correct lubricant quantity
Oil level glasses leaky. Leybold Service -
Gear cover is leaky. Replace the O-ring of the gear cover. -
Pool of oil under the motor, can is leaky. Leybold Service, shutdown the pump immediately. -
No oil leak is apparent:
See malfunction „Oil in the pump chamber“. See malfunction „Oil in the pump chamber“. -
The oil level in the Visible oil leak: Replace the shaft sealing rings. 5.8
oiler drops. Outer shaft sealing ring is defective. In case the oil loss is only slight, the pump may continue to
operate providing it is ensured that a sufficient quantity of
oil is topped up at the oiler.
No visible oil leak: Replace the shaft sealing rings. 5.8
Inner shaft sealing ring is defective. Switch the pump off; the draining out oil enters into the
bearing chambers causing there an unacceptably high oil
a level.
Oil gets Oil has been used up. Exchange the oil. 5.2
too dark Pump gets too hot. See malfunction „Pump gets too hot“; after remedy -
of the malfunction, exchange the oil.
Oil in the Oil level is too high. Drain the oil down to the correct level. 5.2
pump chamber. Oil is ejected from the system. Check system. -
Pump is not standing horizontally. Place the pump correctly. 3.1
Pump has a gas leak towards the outside. Check to see that the oil fill and oil drain plugs are 3.2/5.2
correctly seated, if required replace gaskets.
Replace the O-ring of the gear cover. -
Pump has an internal leak. Leybold Service -
Piston rings are defective. Leybold Service -
Pump Inlet screen is clogged. Clean inlet screen. 5.5
does not attain its Motor incorrectly connected. Connect motor correctly. 3.3
pumping speed. Motor defective. Leybold Service -
Pump vacuum pump system has a gas leak. Detect leak and seal it. -
Piston play is too great. Leybold Service -
Bearing defective. Leybold Service -
Ventil der Druckausgleichleitung schließt nicht. Ventil reinigen oder instandsetzen. 5.7
Ansaug- oder Druckleitung haben zu großen Ansaug- oder Druckleitung richtig dimensionieren
Strömungswiderstand

* Repair information: refer to the section stated in the Operating Instructions

33
 EC Conformance Declaration

We, the Leybold Vacuum GmbH, declare herewith that the products listed below, in the embodiment which we
have placed on the market, comply with the applicable EC guidelines.
This declaration becomes invalid if modifications are made to the product without consultation with us.

Designation of the products: Roots pumps

Model: RUVAC WA 251-2001
RUVAC WAU 251-2001

Cat.-No.: 111 68 112 17 112 54 113 22 117 20

117 21 117 24 117 30 117 31 117 34
117 40 117 41 117 44 117 50 117 51
118 31 118 41 118 51 128 38 917 20
917 21 917 30 917 31 917 40 917 41
917 50 917 51 155 008

The products comply to the following guidelines:

■ EC Machinery Directive (98/37/EG)
■ EC Low Voltage Directive (73/23)+(98/68/EG)
■ EC Directive Electromagnetic Compatibility (89/336/EG)/(91/263/EG)/(92/31/EWG)/(93/68/EG)

Related, harmonized standards:

■ DIN EN 292 Part 1 11.91
■ DIN EN 292 Part 2 06.95
■ DIN EN 1012 Part 2 07.96
■ DIN EN 60 204-Part 1 11.98

Related, national standards and technical specifications:

■ DIN 31 001 April 1983
■ DIN ISO 1940 Dec. 1993

Cologne, 2005-09-26 Cologne, 2005-09-26

————————————————— —————————————————————
Ralf Adamietz Dr. Thomas Dreifert
Head of Design Department Head of Forevacuum Development

vacuum
Leybold Vacuum GmbH
Bonner Straße 498
50968 Cologne
Tel.: ++49 (0)221 347-0
Fax: ++49 (0)221 347-1250
[email protected] www.leybold.com

34 GA03107_1502 - 10/2005
 EC Manufacturer´s Declaration
in the sense of EEC Directive on Machinery 98/37/EEC, Annex IIb

We - LEYBOLD Vacuum GmbH - herewith declare that operation of the incomplete machine defined below, is not
permissible until it has been determined that the machine into which this incomplete machine is to be installed,
meets the regulations of the EEC Directive on Machinery.
At the same time we herewith certify conformity with EEC Directive on Low-Voltages 73/23/EEC.

Designation of the products: Roots pumps

Model: RUVAC WA without motor
RUVAC WAU without motor

Cat.-No.: 112 17 112 54 113 22 117 24

117 34 117 44 155 008

Related, harmonized standards:

■ DIN EN 292 Part 1 11.91
■ DIN EN 292 Part 2 06.95
■ DIN EN 1012 Part 2 07.96
■ DIN EN 60 204-Part 1 11.98

Related, national standards and technical specifications:

■ DIN 31 001 April 1983
■ DIN ISO 1940 Dec. 1993

Cologne, 2005-09-26 Cologne, 2005-09-26

————————————————— —————————————————————
Ralf Adamietz Dr. Thomas Dreifert
Head of Design Department Head of Forevacuum Development

vacuum
Leybold Vacuum GmbH
Bonner Straße 498
50968 Köln
Tel.: ++49 (0)221 347-0
Fax: ++49 (0)221 347-1250
[email protected] www.leybold.com

GA03107_1502 - 10/2005 35
 vacuum

Declaration of Contamination of Compressors, Vacuum Pumps and Components

The repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed declaration has been sub-
mitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration.
A separate declaration has to be completed for every single component.
This declaration may be completed and signed only by authorised and qualified staff.
Customer/Dep./Institute: ________________________________ Reason for returning applicable please mark
___________________________________________________ repair chargeable warranty
Address ___________________________________________ replacement chargeable warranty
___________________________________________ DKD-calibration Factory calibration
Person to contact: ___________________________________ restoring goods because of following reason:
Phone: __________________ Fax: __________________ rent/loan for credit against exchange
Order number of customer: ______________________________ exchange already received/arranged

A. Description of the equipment (machine or component) Ancillary equipment

Type: _______________________________________ __________________________________________________
Part number: _______________________________________ __________________________________________________
Serial number: _______________________________________ __________________________________________________
Type of oil used: _______________________________________ __________________________________________________
B. Condition of the equipment
No Yes No Contamination: No Yes
1. Has the equipment been used toxic
2. Drained (Product/service fluid) corrosive
3. All openings sealed airtight microbiological
4. Purged explosive
If yes which cleaning agent: _______________________________________ radioactive
and which method of cleaning: _______________________________________ other harmful substances

C. Description of processed substances (Please fill in absolutely)

1. What substances have come into contact with the equipment:

Trade name and / or chemical term of service fluids and substances processed, properties of the substances; According to safety data sheet
(e.g. toxic, inflammable, corrosive, radioactive)
Trade name: Chemical name: Residues:
a) ____________________________________________________________________________________ Yes No
b) ____________________________________________________________________________________ Yes No
c) ____________________________________________________________________________________ Yes No
d) ____________________________________________________________________________________ Yes No
Yes No
2. Are these substances harmful?
3. Dangerous decomposition products when thermally loaded
Which:

Components contaminated by microbiological, explosive or radioactive products will not be accepted

without written evidence of decontamination.

D. Legally binding declaration

I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.

Name of authorised person (block letters): ____________________________

Date _____________ Signature of authorised person ___________________________

Company stamp
© Leybold Vacuum Cologne

36 GA03107_1502 - 10/2005
 Notes

GA03107_1502 - 10/2005 37
 Sales and Service Net Worldwide
Germany Europe Asia
Leybold Vacuum GmbH Belgium Netherlands P.R. China Japan
Bonner Strasse 498 Leybold Vacuum Nederland B.V. Leybold Vacuum (Tianjin) Leybold Vacuum
D-50968 Cologne Leybold Vacuum Nederland B.V.
Belgisch bijkantoor Computerweg 7 International Trade Co., Ltd. Japan Co., Ltd.
Phone: +49-221-347 1234 Leuvensesteenweg 542-9A Beichen Economic Development Head Office
Fax: +49-221-347 1245 NL-3542 DP Utrecht
B-1930 Zaventem Area (BEDA), Shuanghai Road Tobu A.K. Bldg. 4th Floor
[email protected] Sales and Service: Tianjin 300400, China
Sales: 23-3, Shin-Yokohama
Phone: +31-346-58 39 99
Phone: +32-2-711 00 83 Sales and Service: 3-chome
Leybold Vacuum GmbH Fax: +31-346-58 39 90
Fax: +32-2-720 83 38 Phone: +86-22-2697 0808 Kohoku-ku, Yokohama-shi
Sales Area North/East [email protected]
[email protected] Fax: +86-22-2697 4061 Kanagawa-ken 222-0033
Branch office Berlin [email protected]
Service: Fax: +86-22-2697 2017 Sales:
Buschkrugallee 33 [email protected] Phone: +81-45-4713330
Phone: +32-2-711 00 82 Spain
1. Obergeschoss Fax: +81-45-4713323
Fax: +32-2-720 83 38
D-12359 Berlin Leybold Vacuum España S.A.
[email protected] Leybold Vacuum (Tianjin)
Phone: +49-30-435 609 0 C/. Huelva, 7 Equipment Manufacturing Co., Ltd. Leybold Vacuum
Fax: +49-30-435 609 10 E-08940 Cornella de Llobregat
France Beichen Economic Development Japan Co., Ltd.
[email protected] (Barcelona) Area (BEDA), Shuanghai Road Osaka Branch Office
Leybold Vacuum France S.A. Sales: Tianjin 300400, China MURATA Bldg. 7F
Leybold Vacuum GmbH 7, Avenue du Québec Phone: +34-93-666 46 16 Phone: +86-22-2697 0808 2-7-53, Nihi-Miyahara
Sales Area South/Southwest Z.A. de Courtaboeuf, B.P. 42 Fax: +34-93-666 43 70 Fax: +86-22-2697 4061 Yodogawa-ku
Branch office Munic F-91942 Courtaboeuf Cedex [email protected] Fax: +86-22-2697 2017 Osaka-shi 532-0004
Karl-Hammerschmidt-Strasse 38 Sales and Service: Service: [email protected] Sales:
D-85609 Aschheim/Dornach Phone: +33-1-69 82 48 00 Phone: +34-93-666 49 51 Phone: +81-6-6393-5211
Phone: +49-89-357 33 90 Fax: +33-1-69 07 57 38 Fax: +34-93-685 40 10 Leybold Vacuum (Tianjin) Fax: +81-6-6393-5215
Fax: +49-89-357 33 933 [email protected]
[email protected] International Trade Co., Ltd.
[email protected] Sweden Beijing Branch: Leybold Vacuum
Leybold Vacuum France S.A.
Leybold Vacuum Scandinavia AB 1-908, Beijing Landmark Towers Japan Co., Ltd.
Valence Factory
Box 9084 8 North Dongsanhuan Road Tsukuba Technical S.C.
Leybold Vacuum GmbH 640, rue A. Bergès - B.P. 107
SE-40092 Göteborg Chaoyang District Tsukuba Minami Daiichi
Sales Area West F-26501 Bourg-lès-Valence Cedex
Beijing 100004, China Kogyo Danchi
Branch office Cologne Phone: +33-4-75 82 33 00 Sales and Service:
Sales and Service: 21, Kasumi-no-Sato,
Emil-Hoffmann-Straße 43 Fax: +33-4-75 82 92 69 Phone: +46-31-68 84 70
Phone: +86-21-5064-4666 Ami-machi, Inashiki-gun
D-50996 Cologne-Suerth [email protected] Fax: +46-31-68 39 39
Fax: +86-21-5064-4668 Ibaraki-ken, 300-0315
Phone: +49-221-347 1270 [email protected]
Fax: +49-221-347 1291 [email protected] Service:
Great Britain Visiting/delivery address:
[email protected] Phone: +81-298-89-2841
Datavägen 57B
Leybold Vacuum UK Ltd. Leybold Vacuum (Tianjin) Fax: +81-298-89-2838
SE-43632 Askim
Leybold Vacuum GmbH Waterside Way, Plough Lane International Trade Co., Ltd.
Service Center GB-London SW17 0HB Shanghai Branch: Korea
Sales: Switzerland Add: No. 33, 76 Futedong San
Emil-Hoffmann-Straße 43 Leybold Vacuum Korea Ltd.
D-50996 Cologne-Suerth Phone: +44-20-8971 7000 Leybold Vacuum Schweiz AG Rd., Waigaoqiao FTZ , #761-4, Yulkeum-ri,
Phone: +49-221-347 1439 Fax: +44-20-8971 7001 Leutschenbachstrasse 55 Shanghai 200131, China SungHwan-eup, Chonan
Fax: +49-221-347 1945 [email protected] CH-8050 Zürich Sales and Service: Choongchung-Namdo,
[email protected] Service: Sales: Phone: +86-21-5064-4666 330-807, Korea
Phone: +44-20-8971 7030 Phone: +41-1-308 40 50 Fax: +86-21-5064-4668 Sales:
Leybold Vacuum GmbH Fax: +44-20-8971 7003 Fax: +41-1-302 43 73 [email protected] Phone: +82-41-580-4421
Mobile after sales service [email protected] [email protected] Fax: +82-41-588-3737
Emil-Hoffmann-Straße 43 Service: Leybold Vacuum (Tianjin) Service:
D-50996 Cologne-Suerth Italy Phone: +41-1-308 40 62 Guangzhou Branch: Phone: +82-41-580-4419
Phone: +49-221-347 1765 Leybold Vacuum Italia S.p.A. Fax: +41-1-308 40 60 Add: G/F,#301 Building, Fax: +82-41-588-0166
Fax: +49-221-347 1944 8, Via Trasimeno 110 Dongguangzhuang Rd.
[email protected] I-20128 Milano Tianhe District, Singapore
Sales: Guangzhou 510610, China
Leybold Vacuum Leybold Vacuum
Phone: +39-02-27 22 31 Sales:
Dresden GmbH Fax: +39-02-27 20 96 41
America Phone: +86-20-8723-7873
Singapore Pte Ltd.
Zur Wetterwarte 50, Haus 304 No.1, International
[email protected] Phone: +86-20-8723-7597
D-01109 Dresden Business Park,
Service: USA Fax: +86-20-8723-7875
Service: B1-20B, The Synergy
Phone: +39-02-27 22 31 Leybold Vacuum USA Inc. [email protected]
Phone: +49-351-88 55 00 Singapore 609917
Fax: +39-02-27 20 96 41 5700 Mellon Road Sales and Service:
Fax: +49-351-88 55 041 Export, PA 15632 India
[email protected] Phone: +65-66652910
[email protected] [email protected]
www.leybold-dresden.de Leybold Vacuum India Pte Ltd. Fax: +65-65668202
Field Service Base Sales: A-125 Road No. 30 [email protected]
Z.I.Le Capanne Eastern & Central time zones MIDC Wagle Industrial Estate
I-05021 Acquasparta (TR) Phone: +1-724-327-5700 Thane(W) - 400 604 Maharashtra Taiwan
Phone: +39-0744-93 03 93 Fax: +1-724-733-1217 India
Leybold Vacuum Taiwan Ltd.
Fax: +39-0744-94 42 87 Pacific, Mountain, Sales and Service:
No 416-1, Sec. 3
[email protected] Alaskan & Hawaiian time zones Phone: +91-22-2581 2929
Chung-Hsin Rd., Chu-Tung
Phone: +1-480-752-9191 Fax: +91-22-2581 2626
Hsin-Chu, Taiwan, R.O.C.
Fax: +1-480-752-9494 [email protected]
Hotline Service:
Sales and Service:
Phone: +886-3-5833988
Sales: +49-221-347 1234 Phone: +1-724-327-5700
Fax: +886-3-5833999
Fax: +1-724-733-3799
Service: +49-221-347 1765
[email protected]
[email protected]
09.05

Leybold Vacuum GmbH

Bonner Strasse 498
LV_08068_2005

D-50968 Cologne vacuum

Phone: +49-221 347- 0
Fax: +49-221 347-1250
[email protected] www.leybold.com