3.

Unipolar devices

3.1 The Metal-Semiconductor (M-S) junction

Metal-to-semiconductor contacts are of great importance since they are present in every

semiconductor device. They can behave either as a barrier or as an ohmic contact

dependent on the characteristics of the interface. This section discusses the electrostatics

of the M-S junction (i.e. the charge, field and potential distribution within the device) as

well as the current versus voltage characteristics. The electrostatics are calculated using

what is known as the "full depletion approximation" and complemented with a description

of the numeric solution. Various approximations are used to obtain closed form

expressions under different circumstances.

3.1.1 Electrostatics of the M-S junction

E
E
0

Φ
qΦ χ
qχ
M s

Ec
φ
qφ Efn
E fM B φ
qφ
i

Ev
x
0

Fig.3.1 Flatband energy band diagram of a metal-semiconductor contact

A description of the electrostatics problem starts from the "flatband diagram" shown in

Fig.3.1: the energy band diagram for the M-S junction in the absence of charge anywhere

Principles of Electronic Devices 3.1 © Bart J. Van Zeghbroeck 1996

in the structure. We define the barrier height, φB, for a junction containing n-type material

as the difference between the metal work function, ΦM, and the electron affinity, χ. For p-

type material it is given by the difference between the valence band edge and the Fermi

energy in the metal:

φB = ΦM - χ (n-type) φB = χ + Eg - ΦM (p-type) [3.1.1]

In addition we define the built-in potential, φi, as the difference between the Fermi energy

of the metal and that of the semiconductor.

φi = ΦM - χ - (Ec - Efn)/q (n-type) φi = χ + (Ec - Efp)/q - ΦM (n-type) [3.1.2]

The traditional derivation of the M-S junction electrostatics is based on the full depletion

approximation which assumes that the semiconductor is depleted over a distance xd, called
the depletion region. A comparison of the correct solution and the solution obtained when

using the full depletion approximation can be found in figures 3.3 through 3.6. Having the

semiconductor depleted of free carrier over a distance xd implies the following charge

density for n-type material :

ρ = q Nd 0 < x < xd

ρ=0 xd < x [3.1.3]

Using Gauss's law we obtain the maximum field at the interface:

q Ndxd
max = - Qs/εs = - εs
[3.1.4]

and a relation between the applied voltage and the depletion region width is obtained from

the electric field:

q Nd xd2
φi - Va = - max xd/2 = [3.1.5]
2εs

Principles of Electronic Devices 3.2 © Bart J. Van Zeghbroeck 1996

where the factor of two reflects the triangular field distribution. The above equation can be

solved to obtain the depletion region width and the capacitance per unit area:

2εs(φi - Va) εs q Nd
xd = C = εs/xd = [3.1.6]
q Nd 2(φi - Va)

3.1.2 Exact solution of the M-S junction

In order to correctly asses the error made when using the full depletion approximation we

now derive the correct solution by solving Poisson's equation analytically1. The actual

solution for the potential is then obtained by numerically integrating the expression for the
electric field. We start from the charge density ρ in a semiconductor for the general case

where electrons, holes, ionized acceptors and ionized donors are present:

ρ(φ) = q(p + Nd+ - n - Na-) [3.1.7]

Where φ is the potential in the semiconductor. The potential is chosen to be zero deep into

the semiconductor. For an n-type semiconductor without acceptors or free holes this can

be further reduced to:

qφ
ρ(φ) = q Nd (1 - exp( )) [3.1.8]
kT

assuming the semiconductor to be non-degenerate and fully ionized. A similar expression

can be obtained for p-type material. Poisson's law can then be rewritten as:

d2φ - ρ(φ) - q Nd qφ
2 = = (1 - exp( )) [3.1.9]
dx εs εs kT

1This derivation follows that of Goodman and Perkins, J. Appl. Phys. 35, p 3351, 1964.

Principles of Electronic Devices 3.3 © Bart J. Van Zeghbroeck 1996

Multiplying both sides with dφ/dx, this equation can be integrated between an arbitrary

point x and infinity. The electric field at infinity (deep into the semiconductor) is taken to

be zero. The electric field for a given potential is then:

φ
⌠-q Nd qφ V φ φ
(φ) = 2 (1 - exp( ))dφ = sign(φ) t 2 [exp( )- -1] [3.1.10]
⌡ εs kT LD Vt Vt
0

Where the sign function equals +1 or -1 depending on the sign of φ and LD is the Debye
εs kT
length given by, LD = . Equation [3.1.10] is plotted in figure 3.2 using
q2Nd

normalized parameters. Depletion occurs for negative potentials while accumulation

occurs for positive potentials.

100000

10000
Normalized Field

1000

100

10

0.1

0.01
-100 -80 -60 -40 -20 0 20
Normalized Potential

Fig.3.2 Absolute value of the normalized electric field, | | LD/Vt, versus normalized
potential, φ/Vt

Principles of Electronic Devices 3.4 © Bart J. Van Zeghbroeck 1996

Applying Gauss's law (Q = εs ) we the find the relation between the total charge in the

semiconductor region and the total potential across the semiconductor. The capacitance

can also be obtained from:

dQ d εs exp(φs/Vt) - 1
C=| | = εs | |= | | [3.1.11]
dVa dVa LD 2[exp(φs/Vt) - φs/Vt -1]

where φs is the potential across the semiconductor and equals -φi + Va. This expression

can be approximated for φs<0 and |φs|>>Vt yielding:

εs 1 εs q Nd
C= = [3.1.12]
LD 2(φi - Va - Vt)/Vt 2(φi - Va - Vt)

This expression equals [3.1.6] as derived using the full depletion approximation, except

for the added term in the denominator. This expression yields the capacitance value with a
relative accuracy better than 0.3% for Va<φi-6Vt.

3.1.2 Numeric solution

A numeric solution can be obtained by integrating equation [3.1.10]. The solution to the

energy band diagram, the charge density, the electric field and the potential are shown in

the figures below: Integration was started four Debye lengths to the right of the edge of
the depletion region as obtained using the full depletion approximation. Initial conditions

were obtained by assuming the potential at the starting point to be adequately expressed

by a solution to the homogenous equation:

φ = Vt exp (-(x-xd)/LD) [3.1.13]

Shown are solutions for a gold-silicon M-S junction with ΦM = 4.75V, χ = 4.05V, Nd =

1016 cm-3 and εs/ε0 = 11.9.

Principles of Electronic Devices 3.5 © Bart J. Van Zeghbroeck 1996

 1.5

Energy [eV]
Efm 0.5

Ec
Efn 0

Ei
-0.5

Ev
-1
-0.2 -0.1 0 0.1 0.2 0.3 0.4 0.5 0.6
Distance [micron]

Fig.3.3 Energy band diagram of an M-S junction

0.0018
Charge Density [C/cm3]

0.0016
0.0014
0.0012
0.001
0.0008
0.0006
0.0004
0.0002
0
0 0.1 0.2 0.3 0.4 0.5 0.6
Distance [micron]

Fig.3.4 Charge density versus position in a M-S junction. The solid line is the numeric
solution, and the dotted line is the solution based on the full depletion
approximation.

Principles of Electronic Devices 3.6 © Bart J. Van Zeghbroeck 1996

 Distance [micron]
0 0.1 0.2 0.3 0.4 0.5 0.6
0.0E+00

-1.0E+06
Electric Field [V/m]

-2.0E+06

-3.0E+06

-4.0E+06

-5.0E+06

-6.0E+06

Fig.3.5 Electric field versus distance in a M-S junction. The solid line is the numeric
solution, and the dotted line is the solution based on the full depletion
approximation.

Distance [micron]
0 0.1 0.2 0.3 0.4 0.5 0.6
0
-0.1
-0.2
Potential [V]

-0.3
-0.4
-0.5
-0.6
-0.7
-0.8
-0.9
-1

Fig.3.6 Potential versus distance of an M-S junction. The solid line is the numeric
solution, and the dotted line is the solution based on the full depletion
approximation.

a) Depletion at the Metal-Semiconductor interface

Principles of Electronic Devices 3.7 © Bart J. Van Zeghbroeck 1996

Most metal semiconductor contacts have a depletion region adjacent to the interface. We

distinguish between the case where a large potential variation is found across the

semiconductor, for which only a small correction is obtained compared to the full

depletion approximation, and the case where a small potential variation exists across the

semiconductor, for which the full depletion approximation does not apply.

α ) large potential approximation

If the potential difference across the semiconductor is larger than the thermal voltage, or
φs = Va - φi < 0 and |Va-φi| >> kT/q we find the effective depletion layer width, xd,

defined as the ratio of the total depletion layer charge to the charge density of the fully

ionized donors, to be:

Q φ -V -V
xd = d = LD 2 ( i a t) [3.1.14]
qN d Vt

where LD is the extrinsic Debye length of the semiconductor, which is given by:

εs kT
LD = [3.1.15]
q2Nd

The small signal capacitance can be expressed by:

dQd εs Vt ε
C= = = s [3.1.16]
dV LD 2 (φi -Va -Vt) xd

where Qd is the total charge per unit area in the depletion layer. This result differs from

the one obtained by using the full depletion approximation in that the applied voltage is

increased by the thermal voltage. However the capacitance is still the ratio of the dielectric

constant to the depletion layer width.

β) small potential approximation

Principles of Electronic Devices 3.8 © Bart J. Van Zeghbroeck 1996

If the potential difference across the semiconductor is smaller than the thermal voltage, or
φ=Va-φi < 0 and |Va - φi| < kT/q, the depletion layer width is proportional to the Debye

length and the applied voltage:

φ - Va
xd = LD i [3.1.17]
Vt

and the capacitance is constant, independent of the applied voltage:

ε
C= s [3.1.18]
LD

b) Accumulation at the Metal-Semiconductor interface

Accumulation occurs at the semiconductor metal interface if the Fermi level of the metal

lies between the conduction band edge and the Fermi level in the n-type semiconductor, or
Φs > ΦM > χ . A similar condition can be defined for p-type material. Equation [3.1.10]

applies for depletion as well as accumulation. However it does not provide a solution for

the electric field and potential as a function of position. Instead we start again from the

integral formulation of equation [3.1.10] but set the potential equal to zero at the interface

and integrate from 0 to x. We also assume that the electron concentration at the surface,

ns is much larger than the donor concentration. Using this convention, equation [3.1.10]

can be rewritten as:

2 ns kT qφ dφ
(φ) = exp( )=- [3.1.19]
εs 2 kT dx

integrating this equation again from 0 to x yields

2 q ns kT
x = 2 Vt (e-φ/2Vt - 1) [3.1.20]
εs

from which the charge density can be obtained:

Principles of Electronic Devices 3.9 © Bart J. Van Zeghbroeck 1996

 - q ns
ρ(x) = - q ( ns eφ/Vt) = [3.1.21]
x 2
(1 + )
2LD

Integration of the charge density yields the electric field.

2 kT x -1
(x) = (1 + ) [3.1.22]
LD q 2LD

The width of the accumulation layer is obtained by solving the expression for the potential
for x with φ(xd) = φi - Va .

xd = 2 LD (e|φi-Va|/2Vt - 1) [3.1.23]

The correct solution can also be obtained by integrating [3.1.10]. A solution for a M-S
junction with ΦM = 4.2V, χ = 4.05V, Nd = 1016cm-3 and εs/ε0 = 11.9 is shown in the

figures below.

Principles of Electronic Devices 3.10 © Bart J. Van Zeghbroeck 1996

 0

Charge Density
-0 .0 05

[C/cm3] -0 .0 1

-0 .0 15

-0 .0 2
2.5E+06
Electric Field [V/m]

2.0E+06

1.5E+06

1.0E+06

5.0E+05

0.0E+00

0.07
0.06
Potential [V]

0.05
0.04
0.03
0.02
0.01
0

0 .4

0 .2 Ec

0 E fm E fn
Energy [eV]

- 0 .2
Ei
- 0 .4

- 0 .6

- 0 .8
Ev
-1
- 0 .0 5 0 0 .0 5 0 .1 0 .1 5 0 .2
D is ta n c e [m ic r o n ]

Fig.3.7 Charge density, electric field, potential and energy band diagram under
accumulation conditions.

3.1.3 Schottky barrier with an interfacial layer

Principles of Electronic Devices 3.11 © Bart J. Van Zeghbroeck 1996

A more elaborate model of the Schottky barrier contains an interfacial layer between the

semiconductor and the metal. Typically this layer is a thin oxide layer, with thickness d,

which naturally forms on the surface of a semiconductor when exposed to air. The analysis

of the Schottky diode can now be repeated using the full depletion approximation yielding

the following relation between the total applied voltage and the depletion layer width:

q Nd xn2 q Nd xn d
φi - Va = + = φn + φox [3.1.24]
2εs εox

from which the depletion layer width can be solved. The capacitance of the structure can

be obtained from the series connection of the oxide and semiconductor capacitance:

1 ε Vt
Cj = = s [3.1.25]
d xn LD 2 (φi* -Va)
+
εox εs

with

d 2 q Nd εs
φi* = φi + ( ) [3.1.26]
ε ox 2

This expression is very similar to that of equation [3.1.16] except that the built-in voltage
is increased by the oxide layer. The potential φn across the semiconductor can be written

as:

ε q Nd d2 ε q Nd d2 2 2εs q Nd d2
φn = φi - Va + s - ( s ) + (φi - Va) [3.1.27]
εox2 εox2 εox2

for zero applied voltage this reduces to:

ε q Nd d2 ε q Nd d2 2 2εs q Nd d2
φn = φi + s - ( s ) + φi [3.1.28]
εox2 εox2 εox2

instead of simply φn = φi when no oxide is present. This analysis can be interpreted as

follows: the interfacial layer reduces the capacitance of the Schottky barrier diode,

Principles of Electronic Devices 3.12 © Bart J. Van Zeghbroeck 1996

although a capacitance measurement will have the same characteristics as an ideal

Schottky barrier diode except that the built-in voltage is increased. However the potential

across the semiconductor is decreased due to the voltage drop across the oxide layer, so

that at low voltage the barrier for electrons flowing into the semiconductor is reduced

yielding a higher current that without the oxide. It has been assumed that the interfacial

layer forms a very thin tunnel barrier which at low voltages does not restrict the current.

As the voltage applied to the Schottky barrier is more positive, the depletion layer width

reduces, so that the field in the oxide also reduces and with it the voltage drop across the

oxide. The current under forward bias conditions therefore approaches that of the ideal

Schottky diode until the tunnel barrier restricts the current flow. This results in a higher

ideality factor for Schottky barrier with an interfacial layer. From equations [3.1.24]

through [3.1.26] we find that the effect is largest for highly doped semiconductors and

interfacial layers with low dielectric constant.

3.1.4 Current across a M-S junction

The current across a metal-semiconductor junction is mainly due to majority carriers.

Three distinctly different mechanisms exist: diffusion of carriers from the semiconductor

into the metal, thermionic emission of carriers across the Schottky barrier and quantum-

mechanical tunneling through the barrier. The diffusion theory assumes that the driving

force is distributed over the length of the depletion layer. The thermionic emission theory

on the other hand postulates that only energetic carriers, those which have an energy equal

to or larger than the conduction band energy at the metal-semiconductor interface,

contribute to the current flow. Quantum-mechanical tunneling through the barrier takes

into account the wave-nature of the electrons allowing them to penetrate through thin

barriers. In a given junction one finds that a combination of all three mechanisms could

exist. However typically one finds only one to limit the current, making it the dominant

current mechanism.

Principles of Electronic Devices 3.13 © Bart J. Van Zeghbroeck 1996

 a) Diffusion theory

This analysis assumes that the depletion layer is large compared to the mean free path, so

that the concepts of drift and diffusion are valid. We start from the expression for the total

current and then integrate it over the width of the depletion region:

dn
J = q (n µn + Dn ) [3.1.29]
dx

which can be rewritten by using = -dφ/dx and multiplying both sides of the equation with

exp(-φ/Vt), yielding:

n dφ dn d
J exp(-φ/Vt) = q Dn (- + )exp(-φ/Vt) = q Dn [n exp(-φ/Vt)] [3.1.30]
Vt dx dx dx

Integration of both sides of the equation over the depletion region yields:

x
q Dn [n exp(-φ/Vt)] | 0 d q Dn Nc exp(-φB/Vt)] (exp(Va/Vt) - 1)
J= = [3.1.31]
xd xd
⌠
⌡ exp(-φ/Vt) dx ⌠ *
⌡ exp(-φ /Vt) dx
0 0

Where the following values were used for the electron density and the potential:

x n(x) φ(x)

0 Nc exp(-φB/Vt) -φi+Va

xd Nd = Nc exp(-φB/Vt) exp(φi/Vt) 0

and φ* = φ + φi - Va. The integral in the denominator can be solved using the potential

obtained from the full depletion approximation [3.1.5], or:

qNd
φ=- (x - xd)2 [3.1.32]
2εs

Principles of Electronic Devices 3.14 © Bart J. Van Zeghbroeck 1996

so that φ* can be written as:

qNd x qN x
φ* = x (xd - ) ≅ d x xd = (φi - Va) [3.1.33]
εs 2 εs xd

where the second term is dropped since the linear term is dominant. Using this

approximation one can solve the integral as:

xd
⌠
⌡ exp(-φ /Vt) dx ≅ xd (φi - Va)/Vt
* [3.1.34]
0

for (φi - Va)>Vt. This yields the final expression for the current due to diffusion:

q Dn Nc 2q(φi - Va)Nd
J= exp(-φB/Vt) [exp(Va/Vt) - 1] [3.1.35]
Vt εs

b) Thermionic emission theory

The thermionic emission theory2 assumes that electrons which have an energy larger than

the top of the barrier will cross the barrier provided they move towards the barrier. The

actual shape of the barrier is hereby ignored. The current can be expressed as:

∞
⌠ q v dn dE [3.1.36]
Jright-left =  x dE
⌡
Ec(x = ∞) + qφn

For non-degenerately doped material, the density of electrons between E and E + dE is

given by: (using [A.1.12] and assuming Efn+ < Ec - 3kT)

dn 4π(2m*)3/2 E - Efn
= 3D(E) F(E) = 3 E-Ec exp[- ( )] [3.1.37]
dE h kT

2see also S.M. Sze "Physics of Semiconductor Devices", Wiley and Sons, second edition, p. 255

Principles of Electronic Devices 3.15 © Bart J. Van Zeghbroeck 1996

Assuming a parabolic conduction band (with constant effective mass m*), the carrier

energy E can be related to its velocity v as:

1 m*
E - Ec = m*v2 dE = m*v dv E - Ec = v 2 [3.1.38]
2

Combining [3.1.37] with [3.1.38] yields:

dn m* E (x = ∞) - Efn m*v2
dE = 2 ( )3 exp[- ( c )] exp[- ] 4π v2 dv [3.1.39]
dE h kT 2kT

while replacing v2 by vx2 + vy2 + vz2 and 4π v2dv by dvx dvy dvz the current becomes:

∞ ∞
m* 3 ⌠ m*vy2 m*vz2
Jr-l = 2 ( )  exp[- ] dvy ⌠ exp[- ] dvz
h ⌡ 2kT ⌡ 2kT
-∞ -∞

− v0x
⌠ q v exp[- m*vx2] dv exp[- (Ec(x = ∞) - Efn)]
 x x
⌡ 2kT kT
−∞

m* 2πkT E (x = ∞) - Efn m*v0x2 kT

= 2q ( )3 * exp[- c ] exp[- ] m* [3.1.40]
h m kT 2kT

using

∞ ∞
⌠ exp[- m vy ] dv = ⌠ exp[- m*vz2] dv =
* 2 2πkT
[3.1.41]
 y  z m*
⌡ 2kT ⌡ 2kT
-∞ -∞

The velocity v0x is obtained by setting the kinetic energy equal to the potential across the

n-type region:

1 *
m v0x2 = qφn [3.1.42]
2

Principles of Electronic Devices 3.16 © Bart J. Van Zeghbroeck 1996

vox is the minimal velocity of an electron in the quasi-neutral n-type region, needed to

cross the barrier. Using

1
φi -Va = φB - [E (x = ∞) - Efn] = φn,
q c

which is only valid for a metal-semiconductor junction3 one obtains

JMS = A*T2 e -φB /Vt [eVa/Vt -1] [3.1.43]

4πqm*k2
where A* = is the Richardson constant and φB is the Schottky barrier height
h3

which equals the difference between the Fermi level in the metal, EfM, and the conduction
band edge, Ec, evaluated at the interface between the metal and the semiconductor. The -1

is added to account for the current flowing from right to left4. The current flow from right

to left is independent of the applied voltage since the barrier is independent of the
bandbending5 in the semiconductor and equal to φB. Therefore it can be evaluated at any

voltage. For Va = 0 the total current must be zero, yielding the -1 term.

c) Tunneling across a barrier.

Quantum mechanical tunneling of carriers through a barrier is an important mechanism for

thin barriers. We start from the time independent Schrödinger equation:

3for a n+-n junction (section 3.2.3) we will have to modify this expression

4This method assumes that the effective mass of the carriers is the same on both sides of the barrier. This

issue is discussed in more detail in section 3.2.3.

5ignoring the Schottky barrier lowering due to image charges

Principles of Electronic Devices 3.17 © Bart J. Van Zeghbroeck 1996

 /h2
- ψ'' + ψ V(x) = E ψ [3.1.44]
2m*

which can be rewritten as

d(ψ'2) 2m*(V-E) d(ψ2)

2ψ'ψ'' = = /h2 [3.1.45]
dx dx

provided V-E is independent of position. Integration yields:

2m*[V(x)-E]
ψ' = ± k ψ with k = /h [3.1.46]

Again assuming V to be constant this equation can be solved between x and x + dx

ψ (x+dx) = ψ (x) e-kdx [3.1.47]

The minus sign is chosen since we assume the particle to move from left to right. For a

slowly varying potential the amplitude of the wave function at x = L can be related to the

wave function at x = 0 :

L
⌠ 2m*[V(x)-E]
ψ(L) = ψ(0) exp(-  dx) [3.1.48]
⌡ /h
0

This equation is referred to as the WKB approximation6. From this the tunneling
x
probability, Θ, can be calculated7 for a triangular barrier for which V(x)-E = qφB(1- )
L

6Named after Wigner, Kramers and Brillouin

L
7Using ⌠ 1-
x
dx =
2L
⌡ L 3
0

Principles of Electronic Devices 3.18 © Bart J. Van Zeghbroeck 1996

 L
ψ(L) ψ∗(L) ⌠ 2m* x
Θ= = exp{ -2 /h φB (1 - ) dx} [3.1.49]
ψ(0) ψ∗(0) ⌡ L
0

the tunneling probability then becomes

4 2m* (qφB)3/2
Θ = exp[- ] [3.1.50]
3 q /h

The tunnel current is proportional to Θ and therefore has the same dependence on φB.

3.2 The n-n+ junction

3.2.1 The n-n+ homojunction

When contacting semiconductor devices one very often includes highly doped

semiconductor layers to lower the contact resistance between the semiconductor and the

metal contact. This added layer causes a n-n+ junction within the device. Most often these

junctions are ignored in the analysis of devices, in part because of the difficulty treating

them correctly, in part because they can simply be ignored. The build-in voltage of a n-n+

junction is given by:

1 N +
φi = (Efn+ - Efn) = Vt ln d [3.2.1]
q Nd

Which means that the built-in voltage is about 59.4 meV if the doping concentrations

differ by a factor 10. It is because of this small built-in voltage that this junction is often

ignored. However large ratios in doping concentration do cause significant potential

variations.

The influence of the n-n+ junction must be evaluated in conjunction with its current

voltage characteristics: if the n-n+ junction is in series with a p-n diode, the issue is

whether or not the n-n+ junction affects the operation of the p-n junction in any way. At

Principles of Electronic Devices 3.19 © Bart J. Van Zeghbroeck 1996

low current densities one can expect the p-n diode to dominate the current flow, whereas

at high current densities the n-n+ junction could play a role if not designed properly.

For the analysis of the n-n+ junction we start from a flat band energy band diagram

connecting the two regions in absence of an electric field. One can visualize that electrons

will flow from the n+ region and accumulate in the n region. However, since the carrier

concentration must be continuous (this is only required in a homojunction), the carrier

density in the n region is smaller that the doping concentration of the n+ region, and the n+

region is not completely depleted. The full depletion approximation is therefore not

applicable. Instead one recognizes the situation to be similar to that of a metal-

semiconductor junction: the n+ is depleted but has a small voltage across the
semiconductor as in a Schottky barrier with small voltage applied, whereas the n region is

accumulated as in an ohmic contact. A general solution of this structure requires the use of

equation [3.1.4].

A simple solution is obtained in the limit where the potential across both regions is smaller

than the thermal voltage. The charge in the n-n+ structure region is then given by:

ε φi - Va
ρ(x) = - sn ex/LDn for x < 0
LDn LDn + LDn+

esn+ φi - Va
ρ(x) = e-x/LDn+ for x > 0 [3.2.2]
LDn LDn + LDn+
+

where the interface is assumed at x equal zero, and LDn and LDn are the extrinsic Debye

lengths in the material. Applying Poisson's equation one finds the potentials to be:

φi - Va
φn(x) = LDn ex/LDn for x < 0
LDn + LDn+

φi - Va
φn+(x) = LDn e-x/LDn+ for x > 0 [3.2.3]
LDn + LDn+

Principles of Electronic Devices 3.20 © Bart J. Van Zeghbroeck 1996

 The solutions for the charge density, electric field, potential and energy banddiagram

are plotted in the figures below:

0.01

0.008

Charge Density [C/cm2]

0.006

0.004

0.002

-0.002

-0.004
-200 -150 -100 -50 0 50 100
Distance [nm]

Distance
-200 -150 -100 -50 0 50 100
0

-2000 Electric Field [V/cm]

-4000

-6000

-8000

-10000

-12000

Principles of Electronic Devices 3.21 © Bart J. Van Zeghbroeck 1996

 0.06

0.05

Potential [V]
0.04

0.03

0.02

0.01

0
-200 -150 -100 -50 0 50 100
Distance [nm]

0.4
Ec 0.2

Energy [eV]
-0.2
Ei -0.4

-0.6

-0.8
Ev
-1
-200 -150 -100 -50 0 50 100
Distance [nm]

Fig.3.8. Charge, electric field, potential and energy banddiagram in a silicon n-n+
structure with Nd = 1016 cm-3, Nd+ = 1017 cm-3 and Va = 0.

Principles of Electronic Devices 3.22 © Bart J. Van Zeghbroeck 1996

 3.2.2 The n-n+ heterojunction

Consider a n-n+ heterojunction including a spacer layer with thickness d as shown in the

figure below.

Ecn+
Efn +
∆E c
φi
qφ
Ecn
Efn

Evn
∆E v
Evn+
x

-d 0

n+-layer spacer n-layer

layer

Fig.3.9 Flatband energy diagram of a n-n+ heterojunction with a spacer layer with
thickness d.

The built-in voltage for a n-n+ heterojunction with doping concentrations Nd and Nd+ is
given by:

1 N +N
φi = (Efn+ - Efn) = Vt ln [ d cn+] + ∆Ec [3.2.4]
q Nd Ncn

Where Ncn and Ncn+ are the effective densities of states of the low and high doped region

respectively. Unlike a homojunction, the heterojunction can have a built-in voltage which

is substantially larger than the thermal voltage. This justifies using the full depletion

approximation for the depleted region. For the accumulated region one has to consider the

influence of quantization of energy levels because of the confinement of carriers by the

electric field and the hetero-interface.

a) Analysis without quantization

Principles of Electronic Devices 3.23 © Bart J. Van Zeghbroeck 1996

For the classic case where the material does not become degenerate at the interface one

can use [3.1.4b] to find the total charge in the accumulation layer:

V φ φ
-Qacc = q Nd+ xn+ = εsn n = εsn t 2 [exp( n ) - n -1] [3.2.5]
LD Vt Vt

while the potentials and the field can be solved for a given applied voltage using:

φn+ + φsp + φn = φi - Va [3.2.6]

εsn2 n2
φn+ = [3.2.7]
2qεsn+ Nd+

εsn n d
φsp = [3.2.8]
εssp

The subscript sp refers to the undoped spacer layer with thickness d, which is located

between the two doped regions. These equations can be solved by starting with a certain
value of φn which enables to calculate the electric field, the other potentials and the

corresponding applied voltage, Va.

b) Analysis including quantization

The analysis of a n-n+ heterojunction including quantized levels is more complicated

because the energy levels depend on the potential which can only be calculated if the

energy levels are known. A self-consistent calculation is therefore required to obtain a

correct solution. An approximate method which also clarifies the steps needed for a

correct solution is described below8.

8A similar analysis can also be found in Weisbuch and Vinter, Quantum Semiconductor Structures, pp 40-

41, Academic Press, 1991.

Principles of Electronic Devices 3.24 © Bart J. Van Zeghbroeck 1996

Starting from a certain density of electrons per unit area, Ns, which are present in the

accumulation layer, one finds the field at the interface:

qN s
n= ε [3.2.9]
sn

We assume that only the = 1 energy level is populated with electrons. The minimal

energy can be expressed as a function of the electric field using equation 9 [A.1.17]:

/h2 9π
E1n = ( )1/3 ( q n)2/3 [3.2.10]
2m* 8

The bandgap discontinuity ∆Ec can then be related to the other potentials of the junction

using [3.2.4], [3.2.6] and [A.1.8], yielding:

εsn n N +
∆Ec - Va = E1n + kT ln [exp( ) - 1] + kT ln cn + qφn+ + qφsp [3.2.11]
qNcqw Nd+

where the potentials in turn can be expressed as a function of n:

εsn2 n2
φn+ = [3.2.12]
2qεsn+ Nd+

εsn n d
φsp = [3.2.13]
εssp

These equations can be combined into one transcendental equation as a function of the
electric field, n.

εsn n Ncn+ εsn2 n2 qεsn n d

∆Ec - Va = E1n + kT ln [exp( ) - 1] + kT ln + + [3.2.14]
qNcqw Nd+ 2εsn+ Nd+ εssp

9A more detailed quantum mechanical derivation yields the 9π/8 term instead of 3π/2. See for instance F.

Stern, Phys. Rev. B 5 p 4891, (1972). The two differ by (3/4)3/2=0.826 or 17.5%

Principles of Electronic Devices 3.25 © Bart J. Van Zeghbroeck 1996

Once n is known all potentials can be obtained.

0.15
0.1
0.05
Energy [eV]

0
-0.05 Efn+
-0.1 Ec
-0.15
-0.2 Efn
-0.25
-0.3
-0.00001 -0.000005 0 0.000005 0.00001
Distance [cm]

Fig.3.10 Energy banddiagram of a Al0.4Ga0.6As/GaAs n+-n heterostructure with Nd+ =

1017 cm-3, Nd = 1016 cm-3, d = 10 nm and Va = 0.15. Comparison of analysis
without quantization (upper curve) to that with quantization (lower curve)

9E+11
8E+11
7E+11
6E+11
Ns [cm-2]

5E+11
4E+11
3E+11
2E+11
1E+11
0
-0.6 -0.4 -0.2 0 0.2 0.4
Va [V]

Fig.3.11 Electron density, Ns, in the accumulation region versus applied voltage, Va, with
quantization (top curve) and without quantization (bottom curve).

Principles of Electronic Devices 3.26 © Bart J. Van Zeghbroeck 1996

 3.2.3 Currents across a n+-n heterojunction

Current transport across a n+-n heterojunction is similar to that of a metal-semiconductor

junction: Diffusion, thermionic emission as well as tunneling of carriers across the barrier

can occur. However to identify the current components one must first identify the
potentials φn+ and φn by solving the electrostatic problem. From the band diagram one

finds that a barrier exists for electrons going from the n+ to the n-doped region as well as

for electrons going in the opposite direction.

The analysis in the first section discusses the thermionic emission and yields a closed form

expression based on a set of specific assumptions. The derivation also illustrates how a

more general expression could be obtained. The next section describes the current-voltage

characteristics of carriers traversing a depletion region, while the last section discusses

how both effects can be combined.

a) Thermionic emission current across a n+-n heterojunction

The total current due to thermionic emission across the barrier is given by the difference of

the current flowing from left to right and the current flowing from right to left. Rather

than re-deriving the expression for thermionic emission, we will apply equation [3.1.40] to

the n+-n heterojunction. One complication arises from the fact that the effective mass of

the carriers is different on each side of the hetero-junction which would seem to indicate

that the Richardson constant is different for carrier flow from left to right compared to the

flow from right to left. A more detailed analysis reveals that the difference in effective

mass causes a quantum mechanical reflection at the interface, causing carriers with the

higher effective mass to be reflected back while carriers with the smaller effective mass are

Principles of Electronic Devices 3.27 © Bart J. Van Zeghbroeck 1996

to first order unaffected10. We therefore use equation [3.1.40] for flow in both directions

while using the Richardson constant corresponding to the smaller of the two effective

masses, yielding:

Ec(x=-∞) - Efn+ + qφn+ Ec(x=∞) - Efn - qφn + ∆Ec

JHJ = A* T2{exp[- ] - exp[- ][3.2.15]
kT kT

where the potentials are related to the applied voltage by11:

φn+ + φn = φi - Va [3.2.16]

and the built-in voltage is given by:

∆Ec - (Ec(x=-∞) - Efn+) + (Ec(x=∞) - Efn)

φi = [3.2.17]
q

Combining these relations yields:

φn φ *
JHJ = A* T2 exp[ ] exp[- B ] [eVa/Vt - 1] [3.2.18]
Vt Vt

where the barrier height φB* is defined as:

∆Ec + (Ec(x=∞) - Efn)

φB* = [3.2.19]
q

10A.A. Grinberg, "Thermionic emission in heterojunction systems with different effective electronic

masses," Phys. Rev. B, pp. 7256-7258, 1986

11No spacer layer is assumed in this derivation, but could easily be added if desired.

Principles of Electronic Devices 3.28 © Bart J. Van Zeghbroeck 1996

Assuming full depletion in the n+ depletion region and using equation [3.1.10] for the

accumulated region, the charge balance between the depletion and accumulation layer

takes the following form:

Vt φ φ
2εsn+ qNd+ φn+ = εsn 2 [exp( n ) - n -1] [3.2.20]
LD Vt Vt

Combining equations [3.2.20] with [3.2.16] yields a solution for φn+ and φn.

For the special case where εsn+Nd+ = εsnNd and φn>>Vt these equations reduce to:

φ
φi - Va = φn+ + φn = Vt exp[ n ] [3.2.21]
Vt

The current (given by [3.2.18]) can then be expressed as a function of the applied voltage

Va

q A* T φi V
JHJ = (1- a ) e -φB*/Vt [e Va/Vt - 1] [3.2.22]
k φi

Whereas this expression is similar to that of a metal-semiconductor barrier, it differs in

that the temperature dependence is somewhat modified and the reverse bias current

increases almost linearly with voltage. Under reverse bias the junction can be characterized

as a constant resistance, RHJ, which equals:

A JHJ A A* T2 -φB*/Vt
RHJ = = e [3.2.23]
Va Vt

Where A is the area of the junction. This shows that the resistance changes exponentially

with the barrier height. Grading of the heterojunction is typically used to reduce the spike

in the energy band diagram and with it the resistance across the interface.

b) Calculation of the Current and quasi-Fermi level throughout a Depletion Region

Principles of Electronic Devices 3.29 © Bart J. Van Zeghbroeck 1996

We typically assume the quasi-Fermi level to be constant throughout the depletion region.

This assumption can be justified for a homojunction but is not necessarily correct for a

heterojunction p-n diode.

For a homojunction p-n diode we derived the following expression for the minority carrier

density in the quasi-neutral region of a "long" diode

n ≅ n - np0 = np0(eVa/Vt -1) e -x/Ln [3.2.24]

so that the maximum change in the quasi-Fermi level, which occurs at the edge of the

depletion region, equals:

dFn d(kT ln n/ni) kT

= ≅ [3.2.25]
dx dx Ln

so that the change of the quasi-Fermi level can be ignored if the depletion region width is

smaller than the diffusion length as is typically the case in silicon p-n diodes.

For a hetero-junction p-n diode one can not assume that the quasi-Fermi level is

continuous, especially when the minority carriers enter a narrow bandgap region in which

the recombination rate is so high that the current is limited by the drift/diffusion current in

the depletion region located in the wide bandgap semiconductor.

The current density can be calculated from:

Jn = q µn n + q Dn dn/dx [3.2.26]

Assuming the field to be constant throughout the depletion region one finds for a constant

current density the following expression for the carrier density at the interface:

J
n= + Nd e - xn/Vt [3.2.27]
q µn

Principles of Electronic Devices 3.30 © Bart J. Van Zeghbroeck 1996

While for zero current one finds, for an arbitrary field

0
⌠ (x) dx
n = Nd exp(-  ) = Nd exp(-φn/Vt) [3.2.28]
⌡ Vt
-∞

Combining the two expressions we postulate the following expression for the carrier

density:

J
n= + Nd e - φn/Vt [3.2.29]
q µn max

The carrier density can also be expressed as a function of the total change in the quasi-
Fermi level across the depletion region, ∆Efn;

n = Nd e - φn/Vt e -∆Efn/kT [3.2.30]

which yields the following expressions for the current density due to drift/diffusion:

J = - q µn max Nd e - φn/Vt ( 1 - e -∆Efn/kT ) [3.2.31]

where is max the field at the heterojunction interface. If ∆Efn equals the applied voltage,

as is the case for an n+- n heterostructure, this expression equals:

J = q µn max Nd e - φn/Vt (e -Va/Vt -1 ) [3.2.32]

which reduces for a MS junction to:

Jdd = Jthermionic µn max /vR [3.2.33]

Principles of Electronic Devices 3.31 © Bart J. Van Zeghbroeck 1996

so that thermionic emission dominates for vR << µn max or when the drift velocity is

larger than the Richardson velocity.12

c) Calculation of the current due to thermionic emission and drift/diffusion

The calculation of the current through a n+-n junction due to thermionic emission and

drift/diffusion becomes straightforward once one realizes that the total applied voltage
equals the sum of the quasi-Fermi level variation, ∆Efn, across each region. For this

analysis we therefore rewrite the current expressions as a function of ∆Efn, while applying

the expression for the drift/diffusion current to the n+ material.

φ
Jthermionic = A* T2 exp[ n ] e -φB*/Vt [e∆Efn1/kT - 1]
Vt

Jdrift/diffusion = - q µn+ max Ncn+ e -φB*/Vt (e∆Efn2/kT - 1) [3.2.34]

12It should be noted here that the drift/diffusion model is not valid anymore as the drift velocity of the

carriers approaches the thermal velocity.

Principles of Electronic Devices 3.32 © Bart J. Van Zeghbroeck 1996

3.3 Currents through insulators

Current mechanisms through materials which do not contain free carriers can be distinctly

different from those in doped semiconductors or metals. The following section discusses

Fowler-Nordheim Tunneling, Poole-Frenkel emission, Space charge effects as well as

Ballistic transport

3.3.1 Fowler-Nordheim tunneling

Fowler-Nordheim tunneling has been studied extensively in Metal-Oxide-Semiconductor

structures where it has been shown to be the dominant current mechanism, especially for

thick oxides. The basic idea is that quantum mechanical tunneling from the adjacent

conductor into the insulator limits the current through the structure. Once the carriers

have tunneled into the insulator they are free to move within the valence or conduction

band of the insulator. The calculation of the current is based on the WKB approximation

(as derived for the Schottky barrier diode in section 3.1.4) yielding the following relation
between the current density, JFN, and the electric field in the oxide, ox:

4 2 mox* (q φB)3/2
JFN = CFN ox2 exp[- 3 ] [3.3.1]
q h/ ox

where φB is the barrier height at the conductor/insulator interface in Volt, as shown in the

figure below for electron tunneling from highly13 n-type doped silicon into the silicon

dioxide.

To check for this current mechanism, experimental I-V characteristics are typically plotted
as ln(JFN/ ox2) versus 1/ ox, a so-called Fowler-Nordheim plot. Provided the effective

13This condition is added to eliminate additional complexity caused by bandbending at the interface.

Principles of Electronic Devices 3.33 © Bart J. Van Zeghbroeck 1996

mass of the insulator is known (for SiO2, mox* = 0.42 m0) one can then fit the

experimental data to a straight line yielding a value for the barrier height.

It is this type of measurement which has yielded experimental values for the conduction

band difference between silicon and silicon-dioxide. The same method could also be used

to determine heterojunction energy band off-sets provided Fowler-Nordheim tunneling is

indeed the dominant current mechanism14. It is important to stress that carriers must

tunnel through the insulator which requires:

ox d ≥ φB [3.3.2]

which is typically the case for thick oxides and high electric fields.

3.3.2 Poole-Frenkel emission

The expression for Fowler-Nordheim tunneling implies that carriers are free to move

through the insulator. Whereas this is indeed the case in thermally grown silicon-dioxide it

is frequently not so in deposited insulators which contain a high density of structural

defects. Silicon nitride (Si3N4) is an example of such material. The structural defects cause

additional energy states close to the bandedge called traps. These traps restrict the current

flow because of a capture and emission process, thereby becoming the dominant current

mechanism. The current is a simple drift current described by

J=qnµ N [3.3.3]

14This condition would required very large energy band discontinuities.

Principles of Electronic Devices 3.34 © Bart J. Van Zeghbroeck 1996

while the carrier density depends exponentially on the depth of the trap which is corrected

for the electric field15.

q q N
n = no exp[- (φ - )] [3.3.4]
kT B π εN

The total current then equals:

q q N
JPF = q no µ N exp[- (φ - )] [3.3.5]
kT B π εN

The existence of a large density of shallow16 traps in CVD silicon nitride makes Poole-

Frenkel emission17 a frequently observed and well characterized mechanism.

3.3.3 Space charge limited current

Both Fowler-Nordheim tunneling and Poole-Frenkel emission mechanism yield very low

current densities with correspondingly low carrier densities. For structures where carriers

can readily enter the insulator and freely flow through the insulator one finds that the

resulting current and carrier densities are much higher. The density of free carriers causes

15This correction is equivalent to the Schottky barrier lowering due to the presence of an electric field.

16deep traps also exist in silicon nitride. While these easily capture carriers, they are too deep to allow

emission even in the presence of large fields. This causes a fixed charge in the silicon nitride which

remains when the applied bias is removed. This charge trapping mechanism is used in non-volatile

MNOS memory devices.

17J. Frenkel, "On Pre-Breakdown Phenomena in insulators and Electronic Semiconductors," Phys. Rev.,

Vol 54, p 647, 1938.

Principles of Electronic Devices 3.35 © Bart J. Van Zeghbroeck 1996

a field gradient which limits the current density. This situation occurs in lowly doped

semiconductors and vacuum tubes. Starting from an expression for the drift current and

Gauss's law (where we assume that the insulator contains no free carriers if no current

flows)

J=qpµ [3.3.6]

d qp
= [3.3.7]
dx ε

we can eliminate the carrier density, p, yielding:

J d
= [3.3.8]
εµ dx

Integrating this expression from 0 to x, where we assume the electric field to be zero18 at x

= 0 one obtains:
2
Jx 2xJ
= or (x) = [3.3.9]
εµ 2 εµ

integrating once again from x = 9 to x = d with V(0) = V and V(d) = 0, one finds:

d
2 J d3/2
V=⌠
⌡ dx = [3.3.10]
ε µ 3/2
0

from which one obtains the expression for the space-charge-limited current:

18This implies an infinite carrier density. The analysis can be modified to allow for a finite carrier density.

However the carrier pile-up do to the current restriction typically provides a very high carrier density at

x=0.

Principles of Electronic Devices 3.36 © Bart J. Van Zeghbroeck 1996

 9 ε µ V2
J= [3.3.11]
8 d3

3.3.4 Ballistic Transport in insulators

Ballistic transport is carrier transport without scattering or any other mechanism which

would cause a loss of energy. Combining energy conservation, current continuity and

Gauss's law one finds the following current-voltage relation:

4ε 2 q V3/2
J= [3.3.12]
9 m* d2

where d is the thickness of the insulator and m* is the effective mass of the carriers.

Principles of Electronic Devices 3.37 © Bart J. Van Zeghbroeck 1996