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Plasma Sources Sci. Technol. 9 (2000) 574–582. Printed in the UK PII: S0963-0252(00)17074-4

Sheath formation in low-pressure

discharges
H-B Valentini
Institut für Physikalische Hochtechnologie e. V., 07702 Jena, Germany

Received 3 March 2000, in final form 8 August 2000

Abstract. Sheath formation is studied for slightly ionized plasmas, i.e. for many typical
low-pressure discharges. A sheath adjacent to an insulating wall is a space charge region
where the electron flux to the wall is reduced to the corresponding ion flux. Numerical and
analytical results show that no lower bound of the ion drift speed vi exists to form a sheath
under collisional conditions. The product of the ambipolar ion speed vB and the square root
of the ratio of the number density of the ions to that of the electrons occurs as a characteristic
ion drift speed vc for the sheath formation. In the interval 0 < vi < vc the collisions promote
the sheath formation, whereas the electric field inhibits it. The effect of the collisions
dominates. In the interval vi > vc both the electric field and the collisions support the sheath
formation. The effect of the electric field alone can form the sheath. When the electron
density is relatively small under collision-dominated conditions the space charge density can
become relatively large in the neighbourhood of the point where vi = vB , and then the
difference between vc and vB is significant. It is also possible that such a point does not exist.
At low collisionality, in the centre of the plasma and close to the wall vi < vc can hold,
whereas in an intermediate region vi > vc can be satisfied. When the collisionality is high
vi < vc everywhere. This relation can also hold when vi > vB occurs close to the wall. The
sheath formation can be dominated by collisions in a larger range of parameters than
recognized to date. The application of the Bohm criterion is inappropriate when the
collisionality is high and the electron density is relative low. Multi-component plasmas are
discussed briefly. The concept of a sheath edge is examined critically.

1. Introduction It is important to stress that numerical results of many

authors [11–19] have clearly shown that under collisional
The relevant modelling of the formation of the boundary conditions a space charge sheath can exist when vi < vB .
sheath in discharges at low pressures is important for The physical interpretation and the mathematical description
plasma processing and plasma diagnostics, and has attracted of these results by analytical expressions [19–25] has led
considerable interest for many years [1–7]. Under to different views [21–23]. This is mainly because of the
collisionless conditions the mathematical description is use of incompletely defined terms, a few simple errors and
relatively easy and leads to the well known Bohm criterion insufficient attention to the numerical results.
[2, 3]. The Bohm criterion states that a space charge sheath Furthermore, to date, the papers deriving analytical
adjacent to a wall can develop when the drift velocity vi of expressions for the sheath formation under collisional
the ions directed to the wall exceeds the ambipolar ion sound conditions [4, 6, 7, 20–25] assume a very small space charge
speed vB . Often vB is called the Bohm velocity. Without density near vi = vB . This assumption is correct only
collisions the space charge density steeply increases with when the effect of the collisions is small and the electron
increasing vi . Thus, the sheath edge can be defined by vi = density is high. It does not correspond with typical discharge
vB . The sheath edge separates a quasineutral presheath from conditions in the diffusion regime. In addition, the analysis
a sheath involving a space charge. Using asymptotic methods performed in [23] did not take into account the fact that
it is shown in [4–7] that an intermediate or transitional layer the potential difference between the centre and the wall is
is required between the presheath and sheath to achieve a bounded by the floating potential. Comparing the results
smooth transition under collisionless conditions. given in [11–19] with the results of [4–7, 23] shows that an
It is well known that describing the plasma as a asymptotic analysis of the transition between bulk and sheath
quasineutral fluid and including the inertia of the ions that in the neighbourhood of vB leads to interesting conclusions
the basic equations involve a singularity at vB , indicating about slightly collisional plasmas. On the other hand,
the bound of the quasineutral model [8, 9]. An asymptotic it is evident that such an analysis is not very useful for
analysis of the plasma sheath transition is performed in [10] collision-dominated discharges where vi does not reach the
for a collision-dominated plasma where the ion inertia is left neighbourhood of vB .
out. The latter implies that the sonic barrier does not occur. In the present paper, the sheath adjacent to an insulating
In this case a transitional layer is not necessary. wall is considered as a space charge domain where the

0963-0252/00/040574+09$30.00 © 2000 IOP Publishing Ltd

 Sheath formation in low-pressure discharges

electron flux is reduced to the ion flux with both being directed e is the positive elementary charge, k is the Boltzmann
to the wall. The sheath formation is investigated for low- constant, 0 is the permittivity of the vacuum, E is the electric
pressure discharges under various conditions. The space field strength and φ is the electric potential. The geometry
charge density which occurs for small ion drift velocities, is taken into account by β, where β = 0 holds for the planar
when charged particles are generated within the plasma and model and β = 1 for the cylindrical model. The walls are
momentum is transferred from the charged particles to the taken at x = ±d and r = R, respectively.
neutral gas by collisions, is also taken into consideration. Moreover, it is useful to introduce the ambipolar ion
A local analysis is performed at several points in order to sound speed vB , the electron drift velocity vew at the wall
describe the conditions for the sheath formation as precisely and the effective local collision frequency  where
as possible. A multi-scale theory is not the aim of this


paper. Such asymptotic methods are appropriate only when kTe kTe
vB = vew =
the scales for the presheath, the transitional region and the mi 2π me
sheath are very different.
To this end, in section 2 the physical model, the basic ne
 = νi + 2νni . (1)
equations and the boundary conditions are specified. In ni
section 3 a general analysis of the sheath formation is given. The basic equations for the ions are the equation of continuity
The sheath formation in multi-component plasmas is also
briefly taken into account. The normalization and the scaling d β
r −β (r ni vi ) = νni ne (2)
of the boundary value problem is treated briefly in section 4. dr
A few numerical results are discussed in section 5. At special
and the equation of momentum transfer
points, detailed investigations are described in section 6.
There, it is shown that the intermediate scale known for dvi
low collisionality [6] can be easily derived without using ni mi vi = ni eE − (νni ne + νi ni )mi vi . (3)
dr
asymptotic methods. A short critical review of several
statements taken from the literature to define an appropriate The electron density is given by
sheath edge under collisional conditions is given in section 7. dne
Conclusions are drawn in section 8. kTe = −ne eE. (4)
dr
The electric field is determined by the Poisson equation
2. Model, basic equations and boundary
conditions d β
ε0 r −β (r E) = e(ni − ne ) (5)
dr
The sheath formation in low-pressure discharges is taken into
consideration by means of a two-fluid model for compressible and the electric potential by
media. The plasma is assumed to consist of electrons and
dφ
singly charged ions in an immobile neutral gas. A planar = −E. (6)
geometry symmetric to the midplane and a coaxial cylindrical dr
geometry with insulating walls are considered. Steady- Furthermore, we have
state conditions and homogeneity parallel to the walls are
assumed to prevail. The electrons and ions are generated by ne ve = ni vi . (7)
electron collisions within the plasma and they recombine at
the walls. It is well known that a wall is charged negatively At the midplane or the axis the boundary conditions read
with respect to the plasma. The inertia of the ions, elastic dni
collisions between ions and atoms and the charge exchange =0 vi = 0 E = 0. (8)
dr
are taken into account. The neutral gas density and the
electron temperature are taken as constant. In order to avoid In addition, we set
treating the regular singularity where the drift velocity of the
ions passes their individual sound speed and to obtain a two- ne (0) = ne0 φ(0) = 0 (9)
point boundary problem, the ion temperature is assumed to be
where ne0 must be stated. Note that equations (2) and (3) are
zero [13, 16, 26]. In several papers [13, 16, 25, 26] it has been
homogeneous in ni and ne . At the wall
shown that this assumption leads to a good approximation for
low-pressure discharges. The space charge density is taken ve = vew (10)
into account throughout the whole plasma.
In the following, x denotes the distance from the can be used as a boundary condition. Together with
midplane in the planar model, r the distance from the axis equation (7), equation (10) determines the floating potential
in the cylindrical model, ni and ne the number densities and and the ion drift velocity reached at the wall. The condition
vi and ve the drift velocities of the ions and the electrons, (10) and a few modifications of vew have been investigated in
respectively, Te the electron temperature, νni the ionization several papers (e.g. [13]). It is well known that the floating
frequency and νi the collision frequency between ions and potential varies with vew /vB logarithmically only. The ratio
atoms where the charge exchange is included. Furthermore, ni (0)/ne (0) and Te occur as eigenvalues of the boundary
mi and me are the mass of an ion and an electron, respectively, value problem.

575
H-B Valentini

3. Sheath formation. General analysis because vc is a function of the space coordinate, whereas vB
is a constant if the electron temperature is constant.
From equations (1)–(3) one obtains In section 6 it is shown that E/vi > 0 always. Thus,
  condition (16) can be written as
dni ni eE ni
= − −β (11)  
dr vi mi vi r vi vi vc
+ > 1. (19)
vc v c v 
and
    Conditions (16) and (19) are not relations for vi alone as
d ne ni  β
(ni − ne ) = eE − + ni − . (12) the Bohm criterion is, but they inter-relate vi and E. If an
dr kTe mi v22 vi r
appropriate value of E can be stated, an interval for vi follows
The sheath occurs in a region of the plasma where dne / dr < and vice versa.
0 and Both conditions (14) and (16) can be combined to give
dni  
< 0. (13) vi vi vi vc
dr <1< + . (20)
Using equations (4) and (11), therefore E > 0 and v v c v c v

vi eE The appropriate electric field must be in a narrow corridor

−β < (14) when vi  vc . According to condition (14) we have vi < v .
r mi vi
Using relations (15) but taking the equality, then (16)
result, E/vi must be large enough for sheath formation. and (19) are conditions for the extremes of the space charge
Starting from a region within the plasma where the space density. A minimum exists on the midplane or the axis
charge density is very small or zero, the formation of a sheath [11–19] where vi = 0. A maximum can occur close to the
demands, in particular, that wall where ne  ni . In this case we have an almost pure
ionic sheath between the point of the maximum and the wall.
d In addition, a plasma containing p positive ion species is
(ni − ne ) > 0. (15)
dr taken into account (see [27] and the references given therein).
As noted later, close to the wall this condition is not met. In equation (12) ni is replaced by the sum over the number
Condition (15) is also used in [3, 13] and in a slightly modified densities of all the ion species. The number density of an ion
form in [2, 7]. Taking into account equations (4) and (11), species can be much smaller than the number density of the
the sheath condition (15) leads to electrons and can be a non-monotonic function of x or r. For
each ion species the ion sound speed viB , the ion mobility
 
eE ne vi2 vi and the corresponding velocity (17), i.e. vi , are introduced.
1− <−β . (16) Condition (15) can then be written as
mi vi ni vB2 r

p  
It can be seen that ni v 2iB vi
1> Zi − (21)
 i=1 ne vi
2 vi
ni eE
ve = vB v = (17)
ne mi  where Zi is the charge number of the species.
occur as two characteristic drift velocities of the ions. In the
discharge plasmas under consideration, vc
vB results. vc 4. Normalization and scaling
is identical to the ion sonic speed vB in quasineutral plasmas,
only. It is useful to introduce the dimensionless variables
For simplicity β = 0 and x > 0 are taken into account x ns vs
only. Due to inequality (16) a sheath can be formed in ξ= Ns = Vs =
λ ne0 vB
the region where vi < vc when the effect of the collisions
dominates the effect of the electric field. In this case the eφ eEλ
η=− f = . (22)
electric field inhibits the sheath formation. kTe kTe
It can be seen that the sheath condition (16) is always
The index s = i represents the ions and s = e the electrons.
satisfied if
The characteristic length λ is determined below. Moreover,
vi > vc (18)
in the following the ion plasma frequency ωpi and the Debye
since the left-hand side of (16) becomes negative. In this case length λD are used where
both the electric field and the collisions promote the formation


of the sheath. Note that the electric field alone is sufficient e2 ne0 0 kTe vB
to form the sheath. The sheath condition (18) reduces to the ωpi = λD = = . (23)
0 m i e ne0
2 ωpi
Bohm criterion if ne = ni . It is interesting to mention that in
collisional discharges, since vc > vB holds, the electric field The basic equations (2), (3) and (5) written in these variables
determines the sheath formation in a narrower interval of the read
ion drift velocity than described by the Bohm criterion. The d
ξ −β (ξ β Ni Vi ) = ani Ne
criterion (18) is more complicated than the Bohm criterion dξ

576
 Sheath formation in low-pressure discharges

dVi 5. Numerical results

Ni V i = Ni f − (ani Ne + ac Ni )Vi
dξ
The numerical solution of the boundary value problem
df
a0 = Ni − Ne (24) (2)–(10) is described in [11–19]. A constant frequency
dξ νi for the momentum transfer of the ions is assumed in
with the parameters [11, 13–15, 22]. In [16–19] and the present paper a constant
 2 mean free path λi of the ions is taken into account. Close
νni νi λD to the midplane, due to physical and mathematical reasons,
ani = λ ac = λ a0 = . (25)
vB vB λ in [16–19] a slight modification by the thermal motion of
the neutrals is included. The results are similar for both
According to equation (25) the characteristic lengths are the the models. From equations (30) and (31) it can easily be
Debye length λD and a length λni for the ionization, seen that the statement νi = constant leads to a slightly
larger influence of the momentum transfer near the centre
λni = vB /νni . (26)
of the discharge than the statement λi = constant when
The statements of the mean free path λi or the collision ν/ νni = λni /λi is assumed.
frequency νi of the ions depend on the model of the As a typical example, a positive column in argon with
momentum transfer. It is reasonable to set planar geometry and a constant mean free path of the ions is
taken into consideration. Supposing kTe = 1.5 eV, d = 1 cm
λi = vB /νi (27) and ne0 /nn = 10−7 , where nn is the number density of the
neutral gas; this leads to nn = 1.3 × 1017 cm−3 , vB =
when νi = constant is assumed. However, taking into 1.9 × 105 cm s−1 , ωpi = 2.3 × 107 s−1 , νni = 1.0 × 105 s−1 ,
account λi = constant we have λD = 8.2 × 10−3 cm, λni = 1.9 cm, λi = 7.9 × 10−3 cm
and a0 = 2.4 × 10−5 , K = 2.4 × 102 and νi = 2.4 × 107 s−1
νi = |vi |/λi . (28) when vi = vB . Furthermore, the numerical results yield
ni /ne0 = 0.16, ne /ne0 = 0.002 and vc /vB = 8.6 if
The characteristic lengths λD , λni and λi are often used in the
vi = vB . At the wall vi /vB = 1.04 and vc /vB = 14.4
theory of a positive column (e.g. [13]).
follow. Assuming a neutral gas temperature of 300 K yields
The use of a suitable length scale can become interesting
a pressure of 530 Pa.
for the physical interpretation of the phenomena and the
The transverse distributions of ni and ne are plotted
numerical solution of the boundary value problem. The
appropriate scale for the whole plasma or the presheath is in figure 1 under almost collisionless conditions (K = 1)
given by λ = d or R, respectively, or by λ = λni or λ = λi . and under collisional conditions (K = 100, 1000). With
Often λ = λni is used [11, 13–18], where increasing K the space charge zone can penetrate deep into
the plasma. The same conclusion holds when a0 is growing
 2  2 [11–19]. At the wall we have vi > vB if K = 1, 100 and
νni λD
ani = 1 a0 = = . (29) vi < vB if K = 1000 (figure 2).
ωpi λni
New results can be seen from figures 3(a) and 3(b).
Furthermore, we obtain There Vi = vi /vB and Vc = vc /vB are shown as functions
of x. In a short distance to the wall a narrow range exists
ac = νi /vni (30) where vi > vc when a0 = 10−5 and K = 1. In this range,
only a sheath formation without the effect of the collisions
if νi = constant and is possible. Closer to the wall we have vi < vc again, as
within the centre of the discharge. Considering a0 = 10−5
ac = Vi K K = λni /λi (31)
and K = 100 then vi < vc results in the whole discharge.
if λi = constant. K is the reciprocal of the modified Knudsen This means that the sheath is formed by the effect of collisions
number. in the whole discharge although close to the wall vi > vB is
Note that a0 decreases with decreasing electron satisfied. A small interval exists where vi > vc if a0 = 10−7
temperature and increasing electron number density. The and K = 100.
coefficients ac and K increase with decreasing electron The transverse profile of the space charge density is
temperature. In several papers [11–18] and in section 6.1 depicted in figure 4. A maximum of the space charge
it is shown that at the centre the excess of positive space density occurs under collisionless and collisional conditions
charge increases when a0 and the product a0 ac or a0 K, if a0 = 10−5 . The point of the maximum is shifted away from
respectively, increase. It is well known (e.g. [13]) that in the wall inward a little with growing K. The same conclusion
a discharge collisionless conditions exist when the electron holds for increasing a0 .
temperature is high and collisional ones occur when the From the numerical results it can be seen that in a
electron temperature is low. The number density of the discharge far from the wall the sheath condition (15) is
electrons increases with increasing discharge current. satisfied for all vi > 0 when charged particles are generated
The sheath scale is defined by λ = λD where a0 = 1. and momentum is transferred from the charge carriers to the
An intermediate scale appropriate for a transitional layer is neutrals in the volume. This conclusion is confirmed by the
treated briefly in section 6.3. analytical analysis given in the following section.

577
H-B Valentini

Figure 1. The normalized number densities of the ions

Ni = ni (x)/ne (0) (full curves) and of the electrons (broken and
dotted curves) Ne = ne (x)/ne (0) in the planar model as functions
of the normalized distance x/d from the midplane for
a0 = (νni /ωpi )2 = 10−5 and different values of the parameter
K = λni /λi , where K = 1 represents almost collisionless
conditions, and K = 100 and K = 1000 collisional conditions. A
constant mean free path λi of the ions is taken into account. d is
the distance of the wall from the midplane.

Figure 3. The normalized transverse ion drift velocity Vi and the

characteristic velocity Vc = vc /vB both as functions of x for
a0 = 10−5 under almost collisionless conditions (a) (K = 1) and
collisional ones (b) (K = 100 and 1000).

6.1. Power series expansion at the midplane

Setting β = 0 on the midplane, the solution of the set of
equations (2)–(6) can be expanded into a series with integer
Figure 2. The normalized drift velocity of the ions Vi = vi (x)/vB powers of x. Taking into account the boundary conditions (8)
as a function of x if a0 = 10−5 and with K as a parameter. and (9) and restricting the calculations to the first terms yields

ns = ns0 + ns2 x 2 s = i, e
6. Sheath formation. Local analysis at special
points vi = x(vi + v3 x 2 ) E = x(E1 + E3 x 2 )
φ = x 2 (φ2 + φ4 x 2 ) (32)
In this section at special points a local analysis of the solution
of the basic equations is performed. The aims are to verify if νi = constant where ns0 = ns (0). The space charge
that the sheath conditions (16) or (19) are really fulfilled in density + becomes
the interval 0  vi  vc and to determine the dominant +/e = ni0 − ne0 + (ni2 − ne2 )x 2 . (33)
effects in the neighbourhood of vc under various conditions.
For the sake of simplicity we restrict ourselves to the planar The space charge density is small in the neighbourhood of the
geometry. midplane. Inserting equations (32) into equations (2)–(5) and

578
 Sheath formation in low-pressure discharges

vsp = vs (xp ) nsp = ns (xp ) s = i, e

Ep = E(xp ) p = (xp ) (38)
and integrating equations (2) and (3) in the neighbourhood
of xp yields
ni vi = nip vip + νni nep h (39)
and  1/2
2eϕ 2p h
vi = vip 1 − − . (40)
mi vip2 vip
From equation (4)
 
eϕ
ne = nep exp (41)
kTe
results. The first terms of the Taylor series of the number
densities read
 2
ni eϕ p h 3 eϕ eϕh
=1+ + + + (2p + νi )
nip mi vip
2 vip 2 mi vip2
mi vip
3

(42)
Figure 4. The normalized space charge density
and  2
σ = η = (ni (x) − ne (x))/ne (0) as a function of x for a0 = 10−5
ne eϕ 1 eϕ
with K as a parameter. =1+ + . (43)
nep kTe 2 kTe
taking into account (ni0 − ne0 )/ne0  1 gives [11, 13–17] Inserting equations (42) and (43) into equation (5), retaining
the first-order terms only and using the dimensionless
ni0 − ne0 νni (2νni + νi ) variables (22) where x is replaced by h, φ by ϕ and λni by
= (34) λD (xp ) yields
ne0 ωpi
2
d2 η
= δ − Aη + Bξ (44)
ni2 − ne2 ν 2 (2νni + νi )(5νni + νi ) dξ 2
= ni (35) with ωpi = ωpi (xp ) and
ne0 vB2 ωpi
2

ne2 νni (2νni + νi ) nip − nep Vcp

2

= (36) δ= A= −1
ne0 2vB2 nep Vip2

Additional coefficients can be found in the appendix. Such p Vcp
2
nip
an expansion is used to determine the initial values for the B= Vcp = . (45)
ωpi Vip nep
numerical solution. Note that the case λi = constant without Note that A = 0 if Vip = Vcp , A > 0 if Vip < Vcp and A < 0
the modifications described in [16–19] demands additional if Vip > Vcp .
terms in equation (32), for instance, v2 |x|x in the statement Considering the case A > 0 the solution of equation (44)
of vi . reads
On the midplane the condition of the sheath formation 1 1
(15) corresponds to η = (−δ cos(gξ ) + (fp A − B) sin(gξ ) + Bξ + δ) (46)
A g
√
ni2 − ne2 > 0. (37) with g = A and

A space charge density occurs when charged particles are fp = Ep /ED Ed = kTe /eλD . (47)
generated within the plasma. The sheath begins to form at The trigonometric functions have to be replaced by the
the midplane, since there the curvature of the profile of the corresponding hyperbolic functions when A < 0.
space charge density given by equation (35) is positive due Equation (46) holds in a domain only where g|ξ |  1.
to inelastic and elastic collisions. Therefore, as approximation as
The example of a discharge described in section 5 yields η = fp ξ + 21 δξ 2 + 16 (B − fp A)ξ 2 (48)
(ni0 − ne0 )/ne0 = 0.7 × 10−2 , (ni2 − ne2 )/ne0 = 1.2 cm−2 ,
ne2 /ne0 = −84 cm−2 and (ni2 − ne2 )/ne2 = −1.4 × 10−2 . and
η = δ + (B − fp A)ξ (49)

6.2. Power series expansion outside the midplane can be used where η = (ni − ne )/nep . According to (15) a
sheath can be formed when
The sheath formation condition is studied for a point x = xp
B − fp A > 0. (50)
outside the midplane, that means for vi > 0. A similar
method is known from the treatment of the collisionless case. Writing (50) in the dimensionless variables (22) with
Introducing λ = λD leads to (16) or (19) again. Note that equation (44)
must not integrated numerically over the whole plasma since
h = x − xp ϕ = φ(x) − φ(xp ) it is correct for g|ξ |  1 only.

579
H-B Valentini

6.3. Power series expansion on the characteristic point, 7. The sheath edge under collisional conditions
the intermediate scale and a limit of asymptotic methods
In a few papers the demand is made that the sheath or the
In this section the sheath formation is investigated in the transitional layer must adjoin a utterly quasineutral plasma
neighbourhood of the characteristic point xc , that means (e.g. Riemann [6, 7, 23]). However, it can clearly be seen
at vi = vc . Using equations (42) and (43) the Poisson from equation (34) that this demand cannot be satisfied
equation (5) becomes correctly in a discharge plasma. A lot of gas discharges would
d2 η be excluded from the investigation of the plasma sheath
= δ + Bξ + η2 − Dηξ (51) transition by such a demand. It is reasonable to define the
dξ 2
sheath less precisely by its function in the discharge.
since A = 0. A series in powers of ξ gives
It is well known that for plasmas without ion collisions
η = fc ξ + 21 δξ 2 + 16 Bξ 3 + 1
f (f
12 c c
− D)ξ 4 (52) and without charged particle generation the Bohm criterion
and leads to a precise definition of the sheath edge at the place
η = δ + Bξ + fc (fc − D)ξ 2 (53) where vi = vB (e.g. [6, 7]). The sheath is formed by the
electric field when vi > vB . Applying the same concept to
where |ξ |  1 is assumed. From equation (53) it can easily
discharge plasmas yields the sheath edge at the point where
be seen that in the neighbourhood of Vc the sheath formation
vi = vc as derived above. However, the space charge density
is dominated by the collision term Bc ξ . The electric field
can be already large at this point. It is also possible that
leads to the quadratic term (fc ξ )2 and determines the sheath
formation under collisionless conditions, i.e. B = D = 0. such a point does not occur at all. Another concept is to
In the latter case the domain ξ < 0 must be excluded since define the sheath edge at the point where vi = 0 since the
there η ∼
= 0. space charge density is generated by collisions when vi > 0.
In the neighbourhood of xc an intermediate scale and However, in the neighbourhood of this point the space charge
a characteristic field strength can easily be derived. Due density is very small and varies with the point very slowly.
to the shape of the right-hand side of equation (51) and Therefore, both the concepts are not very useful for discharge
following Riemann [6, 7, 22] we define a new length scale plasmas. Other concepts have been suggested where the
and a modified potential ψ by domain vi < vB is of interest.
1/2
It can be qualitatively seen from figures 1 and 2 that the
ζ = x/λm ξ = γ1 ζ η = γ2 ψ. (54) sheath edge is shifted inward with increasing collisionality
In these variables equation (51) reads and to values of vi a little smaller than vB . A useful
definition of the sheath edge by a characteristic ion drift
d2 ψ γ12 γ13 1/2
= δ 1/2
+ B 1/2
ζ + γ12 γ2 ψ 2 − Dγ13 ζ ψ. (55) speed or a characteristic electric field strength has to take into
dζ 2 γ2 γ2 consideration the shift. Such a field strength can be written
Setting as
kTe
Bγ13 /γ2
1/2
=1
1/2
γ12 γ2 =1 (56) E=α (60)
eλD
yields
−1/4 with a characteristic coefficient α.
γ1 = γ2 γ2 = B 4/5 . (57) From Riemann’s result given in equation (59) it follows
The modified electric field strength F is defined by that the magnitude of α is of the order of
F = E/Em = dψ/ dζ (58)
α = (λD /6)3/5 (61)
where Em is a characteristic field strength on the intermediate
scale. It can easily be seen that F = f γ2
−3/4
and where α  1. By the aid of a three-scale theory, Riemann
 3/5 showed that the solutions of the quasineutral presheath and
4/5 λD the space charge sheath can be well matched in a transitional
λm = λD 61/5 Em = ED (59)
6 interval around vB . The length of this interval increases with
follow where 6 = vB / . The results given in equations (57) increasing α. It would probably be reasonable to define the
and (59) agree with Riemann’s results [6, 7, 22, 28] when the sheath edge by the region near the end of this interval where
frequency of the momentum transfer νi is replaced by . vi < vB . However, to date no explicit equation is known for
It is important to note that the analysis elaborated in this the length of this interval.
section is appropriate only if the characteristic point is indeed Godjak [20] somewhat arbitrarily used the condition
reached. This is the case if a point of intersection between vi  
λD  dne 
and vc exists on the left of the maximum of the space charge = 1. (62)
density (figure 3(a)). ne  dx 
In several cases (e.g. [4, 6, 7, 28]) asymptotic methods In [18, 21] and [22] the Maxwellian tension of the electric
use equation (51) close to the singular point of the one-fluid field is set equal the electron pressure as a convenient
model where vi = vB . In the two-fluid model equation (51) approximation, which means in the planar case that
is satisfied close to vi = vc . The characteristic points of
both the models are quite near only when the collisionality 1
 E2
2 e
= kTe ne . (63)
is very small (figure 3(a)). Therefore, these methods are
inappropriate if vi and vc have no point of intersection that α = 1 from equation (62) (see [20, 21])
It follows √
(figure 3(b)) or if vc is substantially larger than vB . and α = 2 from equation (63) (see [18, 19, 22]). The

580
 Sheath formation in low-pressure discharges

statements (62) and (63) do not depend explicitly on the with decreasing distance to the wall the ion density decreases
collision frequencies. more slowly than the electron density (equations (42), (45),
Writing the governing equations (2)–(6) in the (49)).
dimensionless variables (22), one can derive Under collisional conditions the space charge density
can become relatively large in the neighbourhood of the
α = /ωpi = λD /6. (64) point where vi = vB . Then the difference between vc
and vB becomes substantial. It is also possible that such
The numerical example considered in section 5 gives
a point does not occur at all. Numerical investigations have
α = 1.73.
shown that at low collisionality in the centre of the discharge
Inserting equation (63) into equation (17) leads to
vi < vc is valid, and this is surrounded by a region where
v /vB = α6/λD . (65) vi > vc and then close to the wall vi < vc holds again
(figure 3(a)). When the collisionality is relatively high, vi is
Furthermore, using the condition (19) also with the equals always smaller than vc although vi can become larger than
sign and setting vc = vB gives vB close to the wall (figure 3(b)). Therefore, the numerical

and analytical results (figure 3, section 6.3) show that in
  many cases investigations which restrict the analysis of the
vi 1 vB 2 1 vB

1+ − . (66) transition from the quasineutral presheath to the sheath in an
vB 4 v 2 v
active plasma on the region close to vB do not describe the
It can be seen that vi /vB decreases from one to zero with physical situation adequately under collisional conditions.
increasing vB /v . In particular, one obtains vi /vB
0.568 Close to the wall the space charge density can pass
if vB /v = 1, vi /vB
1 − vB /2v if vB /v  1, i.e. through a maximum under both collisionless and collisional
kTe  eE6, and vi
v if vB /v
1. Note that the latter conditions (figure 4). There is an almost unipolar ionic
result contradicts condition (14). Condition (66) is arbitrary sheath between the point of the maximum and the wall, and
as well. condition (15) is not necessary. Obviously, we have vc
vB
there. Plasmas containing several ion species can be included
(equation (21)).
8. Conclusions
The concept of a sheath edge resulting from the Bohm
The sheath formation is studied for discharge plasmas criterion while suitable for collisionless plasmas is not useful
involving charged particle generation and momentum for discharges under collisional conditions. Considering the
transfer from the charged particles to the neutral gas. A subsonic domain of the ion drift speed a few statements are
local analysis is performed for a two-fluid model at several taken from the literature which describe characteristic values
characteristic points. It is shown that no lower bound of of the field strength (equations (60)–(64)) and characteristic
the transverse ion drift velocity vi exists to form a sheath in values of the ion drift speed (equation (66)), separating the
discharge plasmas. The sheath or a transitional layer cannot regions with a significant space charge effect and a non-
adjoin an utterly quasineutral plasma under these conditions. significant one. A review of these statements is given.
It is reasonable to define the sheath in front of an The statements are somewhat arbitrary, and often not very
insulating wall as a space charge region where the electron appropriate. Summarizing the results yields that a two-
flux is reduced to the ion flux both directed to the wall. In fluid model has to be used throughout the discharge under
front of an electrode the electron flux is reduced to a level collisional conditions.
where within the plasma the total current equals the driven Further detailed computations of the plasma–sheath
current. The restriction to the asymptotic case λD /λi → 0 is transition for an active plasma in a large range of parameters
inappropriate for a large range of discharge parameters. are given in a recently published paper by Franklin and Snell
The product of the ambipolar ion speed vB (equation (1)) [29]. The conclusions they reach are consistent with the
and the square root of the ratio of the number density of results of the present paper.
the ions to that of the electrons occurs as a characteristic
ion drift speed vc (equation (17)) for the sheath formation. Acknowledgments
In the interval vi < vc the collisions promote the sheath
formation, whereas the electric field inhibits its formation. This work was stimulated by discussions with Dr K-U
The effect of the collisions dominates the effect of the electric Riemann (Bochum) and Professor Dr R N Franklin (Oxford).
field. However, assuming vi > vc , both the electric field and The author thanks Professor Dr R N Franklin for useful
collisions support the sheath formation. The effect of the comments.
field alone can form a sheath in this interval. This is the main
object of the Bohm criterion when one restricts oneself to Appendix. Coefficients of the power series at the
vc = vB . midplane
The electric field accelerates the ions towards the wall
and causes the ion density to decrease. The collisions retard In addition to the coefficients given in equations (34)–(36)
the increase of the ion velocity and, thus, the decrease of one obtains
the ion density as well (equation (42)). Under the conditions  
considered, this conclusion holds for all values of the ion drift ne0 1 ne2 ni2
v1 = νni v 3 = v1 −3 (A1)
velocity. In the case vi > vc , i.e. A < 0 (equation (45)), ni0 3 ne0 ni0

581
H-B Valentini

eE1 [4] Lam S H 1968 Proc. 8th Int. Conf. on Phenomena in Ionized
= v1 (2v1 + νi ) Gases (Vienna, 1967) (Vienna: IAEA) Invited Papers
mi
  p 545
eE3 2 ni2 ne2 [5] Franklin R N and Ockendon J R 1970 J. Plasma Phys. 4 371
= −v1 − + v3 (5v1 + νi ) (A2) [6] Riemann K-U 1991 J. Phys. D: Appl. Phys. 24 493
mi ni0 ne0
[7] Riemann K-U 1992 J. Phys. D: Appl. Phys. 25 1432
 
ne2 eE1 ne4 e ne2 [8] Woods L C 1962 J. Fluids 13 570
=− =− E3 + E1 . (A3) [9] Persson K B 1962 Phys. Fluids 5 1625
ne0 2kTe ne0 4kTe ne0 [10] Blank J L 1968 Phys. Fluids 11 1689
The Poisson equation (5) leads to [11] Forrest J R and Franklin R N 1968 J. Phys. D: Appl. Phys. 1
1357
e e [12] Ingold J H 1972 Phys. Fluids 15 75
E1 = (ni0 − ne0 ) E3 = (ni2 − ne2 ). (A4) [13] Franklin R N 1976 Plasma Phenomena in Gas Discharges
0 30
(Oxford: Clarendon) ch 4
Using ni0 /ne0 = 1 + δ0 and ni2 /ne2 = 1 + δ2 , where δ0  1 [14] Valentini H-B 1979 Beitr. Plasmaphys. 19 221
[15] Metze A, Ernie D W and Oskam H J 1989 Phys. Rev. A 39
and δ2  1, equations (34) and (35) result and in addition 4117
[16] Valentini H-B 1991 Contrib. Plasma Phys. 31 211
ni2 − ne2 2v1 (5v1 + νi )
= . (A5) [17] Valentini H-B 1994 J. Phys. D: Appl. Phys. 27 119
ne2 ωpi
2
[18] Valentini H-B, Wolff D and Glauche E 1995 J. Phys. D:
Appl. Phys. 28 716
It is a little more precise to replace νni by v1 in equations [19] Valentini H-B 1991 Proc. 18th European Conf. on
(34)–(36). Controlled Fusion and Plasma Physics (Berlin, June
1991) vol 15C, ed P Bachmann and D C Robinson
In the corresponding one-fluid model, equation (5) has to (European Physical Society) part IV, p 177
be replaced by ni = ne . In this case the basic equations yield [20] Godjak V A 1982 Phys. Lett. A 89 80
E1 as in (A3) again, where v1 = νni . Differences between [21] Godjak V A and Sternberg N 1990 IEEE Trans. Plasma Sci.
the one-fluid model and the two-fluid model exist for the 18 159
coefficients of higher order only. [22] Valentini H-B 1996 Phys. Plasmas 3 1459
[23] Riemann K-U 1997 Phys. Plasmas 4 4158
[24] Mahanta M K and Goswami K S 1999 Phys. Plasmas 6 4781
References [25] Benilov M S 2000 Phys. Plasmas 7 135
[26] Valentini H-B 1988 J. Phys. D: Appl. Phys. 21 311
[1] Tonks L and Langmuir I 1929 Phys. Rev. 34 876 [27] Valentini H-B and Herrmann F 1996 J. Phys. D: Appl. Phys.
[2] Bohm D 1949 The Characteristics of Electrical Discharges 29 1175
in Magnetic Fields ed A Guthrie and R K Wakerling (New [28] Riemann K-U 2000 J. Tech. Phys. 41 89 (Special issue)
York: McGraw-Hill) p 77 [29] Franklin R N and Snell J 2000 Phys. Plasmas 7 3077
[3] Harrison E R and Thompson W P 1959 Proc. Phys. Soc.
London 74 145

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