Microelectronics Overview
Microelectronics Overview
1
What is
Manufacturing
Microelectronics
OUTLINE Manufacturing
World wide
Wafer Dicing
MICROELECTRONIC MANUFACTURING
Packaging Wire Bond
MANUFACTURING PROCESS
Testing
Market Change
Microelectronic
Challenges
Overview
Future Trends
2
1 INTRODUCTION
We will deal with the explanation of the microelectronics
manufacturing, general steps in microelectronics manufacturing
process, and manufacturing process companies world wide.
3
MICROELECTRONICS
MANUFACTURING PROCESS
In simple explanation,
Microelectronic Manufacturing
can be defined as the process by which raw materials are
converted into finished products of microelectronics. [1]
Microelectronics, which are actually produced from the semiconductor materials are generally
created by almost all semiconductor manufacturing companies around the world.
[1] Source from : Fundamentals of Semiconductor Manufacturing and Process Control, By Gary S. May and Costas J. Spanos Copyright 2006 John Wiley & Sons, Inc. 4
Lets check it out!
5
MICROELECTRONIC MANUFACTURING PROCESS
ASSEMBLY
Wafer Dicing Die Bond Wire Bond
TEST PACKAGE
We have seen the general process of microelectronic manufacturing from semiconductor material. Now let us see top 50 semiconductor
companies that involved in microelectronics manufacturing process around the world !!
7
TOP 50 SEMICONDUCTOR COMPANIES WORLDWIDE [3]
1. AMI Semiconductor: Manufacturers of semiconductor and integrated circuit devices.
2. Advanced Semiconductor Engineering: The ASE Group is the worlds largest provider of independent semiconductor manufacturing services in
assembly and test.
3. Analog Devices: High performance signal processing solutions.
4. Atmel: Design and manufacture advanced semiconductors.
5. Avago Technologies: Manufacturers and suppliers of semiconductors analog, mixed-signal and optoelectronic components and subsystems.
6. Cosmic Circuits: Provider of differentiated Analog and Mixed-Signal silicon IP for integration on to System-on-Chips.
7. Crocus Technology: Manufacturers of Magnetic Random Access Memory (MRAM) products and technologies for the semiconductor and electronic
systems industries.
8. Dynex Semiconductor: Manufacturer of power semiconductors, IGBTs, SCRs, GTO Thyristors, fast recovery and rectifier diodes, SCR/Diode modules,
power assemblies, SAW filters and SOS ICs.
9. Elpida Memory: Leading manufacturer of dynamic random access memory (DRAM), RDRAM(R), SDRAM, DDR SDRAM, mobile RAM and consumer
SDRAM.
10. Fairchild Semiconductor: Global supplier of high performance semiconductor products for electronics industry.
9
TOP 50 SEMICONDUCTOR COMPANIES WORLDWIDE [3]
21. Jennic Limited: Market leader in ZigBee, 6LoWPAN, IEEE802.15.4 wireless microcontrollers, modules and evaluation kits.
22. Luxtera: Silicon photonics, CMOS photonics.
23. Materials Research Corporation (Praxair): Global manufacturer and supplier of highly specialized semiconductor materials and equipment.
24. Maxim Integrated Products: Analog and mixed signal ICs in 28 categories.
25. Microchip Technology: Microcontroller and analog semiconductors.
26. Micron Technology: Offers DRAM components, modules, and NAND flash memory.
27. National Semiconductor: Manufacturer and supplier of analog and mixed-signal technologies for systems on a chip.
28. NEC: Providers of Internet, broadband network and enterprise business solutions.
29. Nemotek Technologie: Manufactures customized wafer level cameras (WLC) for portable applications such as mobile phones and laptop computers.
30. Numonyx: A semiconductor company making flash memories.
10
TOP 50 SEMICONDUCTOR COMPANIES WORLDWIDE [3]
31. Nuvoton: Offers consumer IC design, and foundry service.
32. NXP Semiconductors: semiconductors, system solutions and software.
33. ON Semiconductor: Supplies a broad portfolio of semiconductors and integrated circuit devices.
34. Oramir (now Applied Materials): Advanced technology for cleaning silicon wafers
35. Panasonic Corporation: Electronics manufacturing.
36. Qimonda: Memory / DRAM
37. Reading Works (Now Closed): Manufacturer of integrated circuit and optoelectronic equipment for communication and computing.
38. Renesas Technology: Semiconductor, microcomputers, logic and analog devices, discrete devices and memory products.
39. Samsung Electronics: Semiconductors including DRAM, flash, SRAM, graphics memory, MCP, mask ROM, system LSI, TFT LCD modules etc.
40. Sanyo: Semiconductors including discrete devices, flash memory and ICs.
11
TOP 50 SEMICONDUCTOR COMPANIES WORLDWIDE [3]
41. Seiko: Semiconductor CMOS IC, power management ICs, EEPROMs, sensors and real-time clocks.
42. SensorDynamics: Micro- and wireless semiconductor sensor.
43. Sharp Corporation: Among the Worldwide top 20 semiconductor sales leaders
44. Sitronics: Offers telecommunications solutions, information technologies, system integration and consulting, and the development and manufacture of
microelectronics products.
45. Sony: Sony semiconductor
46. STMicroelectronics: Offers System-on-Chip (SoC) and semiconductor solutions.
47. Texas Instruments: Designer and supplier of digital signal processors, discrete and integrated circuits, calculators, and digital light processing (DLP).
48. Toshiba: Manufacturer and supplier of semiconductor, memory storages device, general-purpose logic IC, transistors, diode, optical semiconductor
device, sensor, radio-frequency device, microcomputer, ASIC, ASSP, general-purpose linear IC, power supply IC, transistor array, motor driver,
operational amplifier IC, comparator IC, Op Amp.
49. TriQuint Semiconductor: High-performance RF components for wireless communication.
50. Winbond: Semiconductor memory solutions.
12
2 MANUFACTURING PROCESS
We will go through all the microelectronics manufacturing process
step by step ; Assembly, Packaging, Testing.
13
WHAT IS ASSEMBLY?
A process in which fully processed
semiconductor device or circuit in
the form of a chip is mechanically
and electrically connected to the
package.
14
Assembly Process Overview..
15
Steps in Assembly Process
Wafer
Die Bond Wire Bond
Dicing
16
Assembly : Wafer Dicing [4]
Wafer dicing is the process by which die are separated from a wafer of semiconductor following the processing of the wafer. The
dicing process can involve scribing and breaking, mechanical sawing (normally with a machine called a dicing saw) or laser
cutting. ......
During dicing, wafers are typically mounted on dicing tape which has a sticky backing
that holds the wafer on a thin sheet metal frame. Dicing tape has different properties
depending on the dicing application. UV curable tapes are used for smaller sizes and
non-UV dicing tape for larger die sizes.
Once a wafer has been diced, the pieces left on the dicing tape are referred to as die,
dice or dies. Each will be packaged in a suitable package or placed directly on a
printed circuit board substrate as a "bare die".
Dicing tape is a backing tape used during wafer dicing, the cutting apart of pieces of
semiconductor material following wafer microfabrication. The tape holds the pieces
of semiconductor, known as dies, together during the cutting process, mounting them
to a thin metal frame.
17
[4] Source/Photo from : www.furukawa.co.jp
Assembly : Wafer Dicing
Type of Wafer Dicing : Diamond Blade Dicing
There are three common type of dicing : Diamond Blade Dicing, Stealth Dicing and Plasma Dicing.
18
Assembly : Wafer Dicing
Type of Wafer Dicing : Stealth Dicing
......2. STEALTH DICING
Stealth dicing is an innovative, high-quality dicing technology that uses a laser to cut a semiconductor wafer into small pieces by
internal processing. Stealth dicing is a technology absolutely essential for meeting these harsh conditions. This is one part of the overall
flow in the semiconductor fabrication process where a change in the dicing step can exert drastic effects on the entire process.
Separation Process
19
Assembly : Wafer Dicing
......2. STEALTH DICING
Type of Wafer Dicing : Stealth DicingSeparation
[5] Process
Laser Processing Process
In the laser processing process, a laser beam scans along the pre- In the separation process, an external force such as tape
planned dicing line on the wafer affixed by tape, forming an SD layer expansion is applied to the wafer that has now been laser-
internally in the wafer. machined to form the SD layer along the preplanned SD lines.
Stealth dicing allows processing optional positions within the wafer by This force or expansion creates cracks that extend perpendicularly
using a dedicated laser and optical system. from the SD layer towards the front and back sides of the wafer,
splitting it into individual chips.
This means that the processing forms no debris or damage on the
front and back side surfaces and no purified water is needed for Crack extension causes the wafer to split so that cutting loss is
washing. Stealth dicing can be performed in a completely dry process. essentially zero. It is therefore possible to allow the split surface to
A dedicated AF function also allows high-speed operation. approach the active area or to separate ultra-thin wafers and
MEMS wafers into chips without applying mechanical stress
20
[5] Source/Photo from : www.hanamatsu.com
Assembly : Wafer Dicing
Type of Wafer Dicing : Plasma Dicing
......3. PLASMA DICING
Plasma dicing, using Deep Reactive Ion Etching (DRIE) processing, is gaining rapid acceptance within the semiconductor industry as a
viable alternative to conventional singulation methods using saw blades or LASERs.
Plasma dicing can be carried out before grinding, where deep dicing lanes are etched into the wafer and the die are singulated by a
final backside grind operation, or after grind where DRIE is used to etch through thinned wafers mounted on taped frames, or carriers.
Benefits of
Plasma Dicing
21
22
COMPARISONS OF TYPE OF DICING : Blade, Laser, Stealth
Assembly : Die Bond
Type of Die Bond: Eutectic Bonding [6]
Die Bonding is the process of attaching the semiconductor die either to its package or to some substrate. Common types of die
bond ; Eutectic Bond, Epoxy Bond, Solder Attach Bond.
......1. EUTECTIC BONDING
Parameters for Eutectic Bonding A eutectic bond is formed by melting a preform consisting of a mixture or alloy of two
or more dissimilar metals in the joint between the die and substrate.
In some cases the die may have a eutectic alloy pre-plated on its back omitting the
Bonding Bonding need for a preform. The preform has a melting point which is lower than the melting
Tool pressure
temperature duration point of its base materials.
Pros Cons
Good thermal conductivity High processing temperature
Electrically conductive Requires use of inert gas to prevent oxidation
Good fatigue/creep resistance
Low contamination
23
[6] Source/Photo from : www.eetimes.com
Assembly : Die Bond
Type of Die Bond: Epoxy Bonding
......2. EPOXY BONDING
An epoxy bond is formed by attaching the die to the substrate with the use of epoxy glue. A drop of epoxy is dispensed on the
package and the die placed on top of it.
This process uses adhesives such as polyimide, epoxy and silver-filled glass as die attach material to mount the die on the die pad. The
mass of epoxy climbing the edges of the die is known as the die attach fillet.
Pros Cons
Low curing temperatures Outgassing
Wide range of die sizes Voids in the bond (sometimes)
Rework is possible Inferior thermal/electrical conductivity
Low cost Sensitive to harsh environments
Reduced die stresses Dimensional changes during processing and service life
24
Assembly : Die Bond
Type of Die Bond: Solder Attach Bonding
......3. SOLDER ATTACH BONDING
Solder attach is the most preferably type of die bonding because of the better thermal conductivity of the solder material .
As there is extreme variation of temperature on die during its operation, solder attach is used as the important concept to dissipate
heat generated from the power device efficiently.
Pros Cons
Relatively insensitive to metallization High processing temperature
Good thermal & electrical conductivity Heat during processing causes oxidation
25
Assembly : Wire Bond
Wire Bond
Wire bonding is the method of making interconnections between an integrated circuit (IC) or other semiconductor device and its
packaging during semiconductor device fabrication
Copper wire
Material of bond
Pure gold wire
wire
Techniques of Wire Bonding
Alloyed aluminium wire
26
Flip Chip Bonding [9]
Known as controlled collapse chip connection or its
abbreviation, C4, is a method for interconnecting
semiconductor devices, such as IC chips and
Assembly : Wire Bond microelectromechanical systems (MEMS), to external
circuitry with solder bumps that have been
Type of Wire Bonding: Ball, Wedge, Flip deposited onto the chip pads.
Ball Bonding [7] Chip Bonding Advantages : greatly reduce inductance
allowing higher-speed signals
Ball bonding is the process in which pads are connected onto a die and leadframe (or substrate) conduct heat better
using very fine diameter wire. The basic steps of ball bonding include the formation of: the first Disadvantages : not suitable for easy replacement or
bond (normally on the chip), the wire loop, and the second bond (normally on the substrate). manual installation, require very flat surfaces to
mount to.
Wedge Bonding [8]
In wedge bonding, the wire must be drawn in a straight line
according to the first bond. This slows down the process
due to time needed for tool alignment
28
Electronic Packaging...
29
Electronic Packaging Requirements
Large Requirements for packaging :
Must provide acceptable electrical properties,
including capacitance, resistance and inductance
IC assembly technologies should provide a low cost
solution for the electrical interface between the chip
and package
High throughput manufacturing
High reliability
Repair ability or replace ability where
interconnection between IC and package should
provide removal of the failed IC
30
Packaging Characteristics
31
Materials used in packaging
32
Issues in electronic packaging
33
Hierarchy of Interconnection level [10]
Level 0
Gate-to-gate interconnections on the
silicon die
Level 1
Connections from the chip to its
package
Level 2
PCB, from component to component
or to external connector
Level 3
Connections between PCBs, including
backplanes or motherboards
Level 4
Connections between subassemblies,
for example a rack
Level 5
Connections between physically
separate systems, using for example an
Ethernet LAN 34
[10] Source from : http://www.doe.carleton.ca/~tjs/10-Packaging.pdf
INTEGRATED CIRCUITS PACKAGE FAMILY TREE [11]
35
[11] Source from : http://www.pcbheaven.com/userpages/semiconductor_package_families/
INDUSTRIAL PACKAGING HISTORY [12]
SMT (surface-mount-technology):
SMT packages have leads that are soldered
directly to corresponding exposed metal lands on
the surface of the circuit board
* Elimination of holes
* Ease of manufacturing (high-speed P&P)
* Components on both sides of the PCB
* Smaller dimensions
* Improved package parasitic components
* Increased circuit-board wiring density
37
[13] Source from : http://slideplayer.com/slide/5922715/
Molding Process (in BGA)
SAMPLE
TEXT 4. After opening of top & bottom molds, the
This is a molded products are taken out, the mold
surface is automatically cleaned, and
sample text SAMPLE every molding process completes.
TEXT
This is a sample text.
1. Put the wired silicon chips Insert your desired
with the integrated circuits on text here. 3. The compound comes into the molding
a mold, and the load a TEXT areas slowly not to bend the thin wires and
particular epoxy compound a This is a not to have voids, and then keep the top &
pot sample bottom molds closing until the compound
TEXT text has been cured.
This is a *The epoxy compound has a particular
sample text
property, and it never be melt down even
by high temperature once it is cured.
TEXT
2. After closing top and bottom mold with several tens of clamping tonnage, a
transfer unit pushes compound up and the compound flows into molding areas
melting down by mold temperature(approx. 180 degrees C). 38
WHAT IS MICROELECTRONIC TESTING?
39
Microelectronics Testing
5. Stud Pull Testing
1. Microelectronics Device Testing The stud pull method of bond strength testing requires accurate specimen preparation and test
for verification and validation of modeling, reliability and alignment.
life prediction (accelerated life testing), process control The self-aligning stud pull test fixture ensure excellent test alignment, while a specimen preparation
and development, failure analysis and quality assurance fixture ensures correct specimen positioning.
8. Fatigue Testing of Solder Joints
2. Film Adhesion Testing 6. Microelectronics Materials Testing
Mechanical test techniques can be
To test fixed and variable angle fixtures for peel testing Materials testing is used to determine the basic thermo- used in place of thermal cycling for
on a range of film types. mechanical properties (e.g. modulus, yield strength,
fatigue and accelerated life testing of
In both cases the use of a special linkage system ensures Poisson's ratio) needed for realistic modeling as well as system components.
a constant peel angle during the test the advanced properties (e.g. creep, fatigue and fracture
Compared to thermal cycling,
mechanics) needed for life prediction.
3. Ball, Die and Component Shear Testing mechanical cycling allows much
7. Micro Bend Testing on Silicon Dies shorter test times and independent
The shear fixture is suitable for solder ball, die and
In order to accurately measure the strength of silicon dies control of temperature and humidity.
component shear testing.
in a bend test, the fixture must be highly precise.
It incorporates features designed to minimize variables
The micro bend fixture incorporates a stepped upper anvil 9. Determination of Interfacial
associated with this test method in order to ensure high
that engages with the lower supports, allowing separation Strength
quality data. to determine the strength of an
and alignment of the lower anvils to be set precisely.
4. Other Device and Component Tests interface between a lead frame
lead and component pull testing, fatigue of individual joints and assemblies, switch activation forces and durability material and a molding compound.
and torsion testing. A precision bend fixture with the
10. Determination of Interfacial Strength ability to locate the specimen
to determine the strength of an interface between a lead frame material and a molding compound. position allows this test to be carried
A precision bend fixture with the ability to locate the specimen position allows this test to be carried out simply and out simply and accurately. 40
accurately.
3 MICROELECTRONICS OVERVIEW
We will study the market change, and challenges in microelectronics
manufacturing process, and also the future trends in this field.
41
MARKET CHANGE
Consumer wants more & more functionality
MEMs, Sensors & more.
Product Cost expectations are given
Smart Phone superseded PC as the Market
Driver
Dynamic consumer business is the new
players dominating
45
Miniaturized Wafer
-Level-Camera [17]
Thin film technologies,
Wafer level integration of optics and camera electronics
Module size: 0.7 x 0.7 x 1.0 mm Wafer thinning, Thin Wafer Handling
Application: Medical Devices
Through Silicon Via (TSV) Formation
High density metallization, redistribution
Interposer, assembly and interconnection
technologies
46
Thanks! 47