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Rupmag4: Pulse Generator For Magnetron Sputtering

The RUPmag4 is a small pulse generator for magnetron sputtering applications that can operate at frequencies up to 20 kHz, voltages up to 1000V, and power up to 3 kW for two channels. It allows operating two magnetrons in parallel or one magnetron in bipolar mode. The internal power supply is adjustable from 0-1000V with a maximum current of 3.5A and power of 3 kW. It is intended for use in dry laboratory rooms at temperatures from 5-35°C and humidity up to 80%.

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76 views1 page

Rupmag4: Pulse Generator For Magnetron Sputtering

The RUPmag4 is a small pulse generator for magnetron sputtering applications that can operate at frequencies up to 20 kHz, voltages up to 1000V, and power up to 3 kW for two channels. It allows operating two magnetrons in parallel or one magnetron in bipolar mode. The internal power supply is adjustable from 0-1000V with a maximum current of 3.5A and power of 3 kW. It is intended for use in dry laboratory rooms at temperatures from 5-35°C and humidity up to 80%.

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© © All Rights Reserved
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RUPmag4

Pulse generator for magnetron sputtering

The pulse generator RUPmag4 is a smaller


pulse generator for magnetron sputter
applications. It allows frequencies up to 20
kHz, voltages up to 1000V and a power up to
3 kW for both channels.
Depending on operation mode, it allows to
operate two magnetrons in parallel or one
magnetron in bipolar mode. Both outputs can
be connected alternatively through a
protective resistor, a protective inductor or
directly. Typically, the positive output is
connected to ground whereas the negative
output is connected to the magnetron Principal scheme RUPmag4
cathode.

Voltage and Current 2 voltage monitor outputs 1:100


2 current monitor outputs 100 mV/A, AC coupled
Internal power supply 0-1000V adjustable,
Outputs with 4mm laboratory plugs.
maximum current 3.5A, maximum power 3 kW.
Optional connectable output resistor: 10 Ohm,
Peak current up to 80A, peak short circuit current
100W
up to 130A.
Optional connectable output inductor: 12 H
The internal power supply is principally potential-
Manual with complete circuit diagrams included.
free. But the positve pose must not get more
negative than ground, and the negative supply
Environmental conditions
must not get more positive than ground. Diodes
inhibit otherwise operation. Environmental temperature 5-35C
Humitity 0-80%, the pulse generator is intended
Waveform and frequency for use in dry laboratory rooms.
protection class I, IP20
square wave,
supply voltage 220V-240V~, 16A max, optional
rise times around 100-200 ns,
3*208VAC, 60Hz, 10A max.
fall times about 500-700ns.
Both outputs can be operated synchronous or
Safety
with 180 phase shift.
duty cycle 0%-100%, External interlock
adjustable, error <5%. The pulse generator is protected against short
Frequency 1-20 kHz, adjustable. circuits and flashovers by protection resistors, by
fast arc detection switch off, and over temperature
Mechanical, included items monitors. Positive pulses without protection
resistors are not allowed as the arc detection
Small 19" rack, 600*600*860mm
does not work in this case. Maximum short circuit
(width*depth*height).
current 130 A.
Digital meters for voltage and average current.
The pulse generator, correctly connected, will be
10-turn Potentiometers for adjustment of voltage,
conformal to regulations about electromagnetic
max. current and max. power.
compatibility (EMC). It is the responsibility of the
10-turn Potentiometers for frequency and duty
user that the outputs cannot be touched in
cycle.
operation.
Switch for Phase 0/180

27.02.2012

GBS Elektronik GmbH Tel.: 0049 (0)351 21 70 07 - 0


Bautzner Landstrae 22 Fax.: 0049 (0)351 21 70 07 - 21
01454 Groerkmannsdorf E-Mail: [email protected]
Germany Website: www.gbs-elektronik.de

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