Integrated Circuit
Integrated Circuit
Silicon chip redirects here. For the electronics magazine, see Silicon Chip.
Microchip redirects here.
For other uses, see
Microchip (disambiguation).
An integrated circuit or monolithic integrated cir-
GENERATIONS
Terminology
Invention
1958, successfully demonstrating the rst working integrated example on 12 September 1958.[11] In his patent
application of 6 February 1959,[12] Kilby described his
new device as a body of semiconductor material
wherein all the components of the electronic circuit are
completely integrated.[13] The rst customer for the new
invention was the US Air Force.[14]
Kilby won the 2000 Nobel Prize in Physics for his part in
the invention of the integrated circuit.[15] His work was
named an IEEE Milestone in 2009.[16]
Half a year after Kilby, Robert Noyce at Fairchild Semiconductor developed his own idea of an integrated circuit that solved many practical problems Kilbys had not.
Noyces design was made of silicon, whereas Kilbys chip
was made of germanium. Noyce credited Kurt Lehovec
of Sprague Electric for the principle of pn junction isolation caused by the action of a biased pn junction (the
diode) as a key concept behind the IC.[17]
3 Generations
In the early days of simple integrated circuits, the technologys large scale limited each chip to only a few transistors, and the low degree of integration meant the design
process was relatively simple. Manufacturing yields were
also quite low by todays standards. As the technology
progressed, millions, then billions[18] of transistors could
Newly employed by Texas Instruments, Kilby recorded be placed on one chip, and good designs required thorhis initial ideas concerning the integrated circuit in July ough planning, giving rise to new design methods.
3.2
3.1
VLSI
3.2 VLSI
duced, containing more than one million transistors. Microprocessor chips passed the million-transistor mark in
1989 and the billion-transistor mark in 2005.[26] The
trend continues largely unabated, with chips introduced in
2007 containing tens of billions of memory transistors.[27]
3.3
7 Manufacturing
7.1 Fabrication
Main article: Semiconductor fabrication
The semiconductors of the periodic table of the chemical
Classication
metal interconnect, with the vertical pillars being contacts, typically plugs of tungsten. The reddish structures are polysilicon
gates, and the solid at the bottom is the crystalline silicon bulk.
mixed-signal integrated circuits are further subcategorized as data acquisition ICs (including A/D
converters, D/A converter, digital potentiometers)
and clock/timing ICs.
Integrated circuits are composed of many overlapping layers, each dened by photolithography, and
normally shown in dierent colors. Some layers mark where various dopants are diused into
7 MANUFACTURING
back-end /
"Advanced Packaging"
Legend:
Silicon (Si)
n-Si
p-Si
Polysilicon (Poly-Si)
Undoped silicon glass (USG, SiO2)
Silicon dioxide (TEOS oxide, SiO2)
Cobalt disilicide (CoSi2)
Spin-on dielectric (SOD)
Phosphor-silicate glass (PSG)
Tungsten (W)
Copper (Cu)
Silicon nitride (SiN)
Silicon nitride (SiN)
Silicon carbide (SiC)
lead-free
solder bump
Cu 5
BEOL
Cu 4
SOD
Cu 4
Cu 4
Cu 3
SiC etch stop layer
Cu 2
Cu 2
Cu 2
Cu1
SOD
PSG
USG
tungsten
n-Si
n-Si
p-well
CoSi2
p-Si
p-Si
USG
n-well
SiN barrier
layer
poly-Si gate
FEOL
front-end
SOD
PE-TEOS
SOD
STI
spacer
buried SiO2
p-silicon wafer
7.3
A Soviet MSI nMOS chip made in 1977, part of a four-chip calculator set designed in 1970[39]
Most integrated circuits large enough to include identifying information include four common sections: the manufacturers name or logo, the part number, a part production batch number and serial number, and a four-digit
code that identies when the chip was manufactured. Extremely small surface mount technology parts often bear
only a number used in a manufacturers lookup table to
nd the chip characteristics.
The Treaty on Intellectual Property in respect of Integrated Circuits, also called Washington Treaty or IPIC
Treaty (signed at Washington on 26 May 1989) is currently not in force, but was partially integrated into the
TRIPS agreement.
National laws protecting IC layout designs have been
adopted in a number of countries.
Other developments
In the 1980s, programmable logic devices were developed. These devices contain circuits whose logical function and connectivity can be programmed by the user,
rather than being xed by the integrated circuit manufacturer. This allows a single chip to be programmed
to implement dierent LSI-type functions such as logic
gates, adders and registers. Current devices called eldprogrammable gate arrays can now implement tens of
thousands of LSI circuits in parallel and operate up to 1.5
GHz.
Future developments seem to follow the multi-core multimicroprocessor paradigm, already used by the Intel and
AMD dual-core processors. Rapport Inc. and IBM
started shipping the KC256 in 2006, a 256-core microprocessor. Intel, as recently as FebruaryAugust 2011,
unveiled a prototype, not for commercial sale chip that
bears 80 cores. Each core is capable of handling its own
task independently of the others. This is in response to
the heat-versus-speed limit that is about to be reached
using existing transistor technology (see: thermal design
power). This design provides a new challenge to chip programming. Parallel programming languages such as the
open-source X10 programming language are designed to
assist with this task.[45]
Since the early 2000s, the integration of optical functionality (optical computing) into silicon chips has been actively pursued in both academic research and in industry resulting in the successful commercialization of siliThe techniques perfected by the integrated circuits indus- con based integrated optical transceivers combining optitry over the last three decades have been used to create cal devices (modulators, detectors, routing) with CMOS
[46]
very small mechanical devices driven by electricity us- based electronics.
ing a technology known as microelectromechanical systems. These devices are used in a variety of commercial and military applications. Example commercial ap- 10 Silicon labelling and grati
plications include DLP projectors, inkjet printers, and
accelerometers and MEMS gyroscopes used to deploy au- To allow identication during production most silicon
tomobile airbags.
chips will have a serial number in one corner. It is also
As of 2014, the vast majority of all transistors are fabricated in a single layer on one side of a chip of silicon in a
at 2-dimensional planar process. Researchers have produced prototypes of several promising alternatives, such
as:
fabricating transistors over the entire surface of a
small sphere of silicon.[41][42]
various approaches to stacking several layers of
transistors to make a three-dimensional integrated
circuit, such as through-silicon via, monolithic
3D,[43] stacked wire bonding,[44] etc.
transistors built from other materials: graphene
transistors, molybdenite transistors, carbon nanotube eld-eect transistor, gallium nitride transistor, transistor-like nanowire electronic devices,
organic eld-eect transistor, etc.
modications to the substrate, typically to make
"exible transistors" for a exible display or other
exible electronics, possibly leading to a roll-away
computer.
In the past, radios could not be fabricated in the same
low-cost processes as microprocessors. But since 1998,
a large number of radio chips have been developed using
CMOS processes. Examples include Intels DECT cordless phone, or Atheros's 802.11 card.
12
See also
13 References
[1] Intel to Invest More than $5 Billion to Build New Factory
in Arizona. Retrieved 3 February 2013.
[2] Ultra-fast, energy-sipping devices powered by Intel. Intel.
[3] Hachman, Mark (July 15, 2014). Intel shipping Broadwell, but next-gen Skylake chip could slip. PC World.
[4] Integrated circuit (IC)". JEDEC.
[5] Andrew Wylie (2009). The rst monolithic integrated
circuits. Retrieved 14 March 2011. Nowadays when
people say 'integrated circuit' they usually mean a monolithic IC, where the entire circuit is constructed in a single
piece of silicon.
[6] Horowitz, Paul; Hill, Wineld (1989). The Art of Electronics (2nd ed.). Cambridge University Press. p. 61.
ISBN 0-521-37095-7. Integrated circuits, which have
largely replaced circuits constructed from discrete transistors, are themselves merely arrays of transistors and other
components built from a single chip of semiconductor material.
[7] Integrated circuits help Invention.
cuithelp.com. Retrieved 2012-08-13.
Integratedcir-
[8] DE 833366 W. Jacobi/SIEMENS AG: Halbleiterverstrker priority ling on 14 April 1949, published on 15
May 1952.
[9] The Hapless Tale of Georey Dummer, (n.d.),
(HTML), Electronic Product News, accessed 8 July 2008.
[10] George Rostky, (n. d.), Micromodules: the ultimate
package, (HTML), EE Times, accessed 8 July 2008.
[11] The Chip that Jack Built, (c. 2008), (HTML), Texas Instruments, Retrieved 29 May 2008.
[12] Jack S. Kilby, Miniaturized Electronic Circuits, United
States Patent Oce, US Patent 3,138,743, led 6 February 1959, issued 23 June 1964.
[13] Winston, Brian (1998). Media Technology and Society: A
History : From the Telegraph to the Internet. Routledge.
p. 221. ISBN 978-0-415-14230-4.
[14] Texas Instruments 1961 First IC-based computer.
Ti.com. Retrieved 2012-08-13.
[15] Nobel Web AB, (10 October 2000),(The Nobel Prize in
Physics 2000, Retrieved 29 May 2008
[16] "Milestones:First Semiconductor Integrated Circuit (IC),
1958. IEEE Global History Network. IEEE. Retrieved 3
August 2011.
[17] Kurt Lehovecs patent on the isolation pn junction: U.S.
Patent 3,029,366 granted on 10 April 1962, led 22 April
1959. Robert Noyce credits Lehovec in his article
Microelectronics, Scientic American, September 1977,
Volume 23, Number 3, pp. 639.
[18] Peter Clarke, Intel enters billion-transistor processor era,
EE Times, 14 October 2005
10
14 FURTHER READING
[19] http://www.iutbayonne.univ-pau.fr/~{}dalmau/
documents/cours/archi/MICROPancien.pdf
[20] Bulletin de la Societe fribourgeoise des sciences naturelles,
Volumes 62 63 (in French). 1973.
[21] Mindell, David A. (2008). Digital Apollo: Human and
Machine in Spaceight. The MIT Press. ISBN 978-0-26213497-2.
[22] Ginzberg, Eli (1976). Economic impact of large public
programs: the NASA Experience. Olympus Publishing
Company. p. 57. ISBN 0-913420-68-9.
[23] Bob Johnstone (1999). We were burning: Japanese entrepreneurs and the forging of the electronic age. Basic
Books. pp. 4748. ISBN 978-0-465-09118-8.
[24] Lee Boysel (2007-10-12). Making Your First Million
(and other tips for aspiring entrepreneurs)". U. Mich.
EECS Presentation / ECE Recordings.
[25] C. F. O'Donnell. Engineering for systems using large
scale integration. p. 870.
[26] Peter Clarke, EE Times: Intel enters billion-transistor processor era, 14 November 2005
[27] Antone Gonsalves, EE Times, Samsung begins production of 16-Gb ash, 30 April 2007
[28] Meindl, J.D. Ultra-large scale integration.
IEEE. Retrieved 21 September 2014.
ieee.org.
//copyright.gov/circs/circ100.pdf
14 Further reading
The rst monolithic integrated circuits
Baker, R. J. (2010). CMOS: Circuit Design, Layout,
and Simulation, Third Edition. Wiley-IEEE. ISBN
978-0-470-88132-3. http://cmosedu.com/
Hodges, David; Jackson, Horace; Saleh, Resve
(2003). Analysis and Design of Digital Integrated
Circuits. McGraw-Hill Science/Engineering/Math.
ISBN 978-0-07-228365-5.
Rabaey, J. M.; Chandrakasan, A.; Nikolic, B.
(2003). Digital Integrated Circuits (2nd ed.). ISBN
0-13-090996-3.
Mead, Carver; Conway, Lynn (1980). Introduction
to VLSI systems. Addison Wesley Publishing Company. ISBN 978-0-201-04358-7.
Veendrick, H. J. M. (2008). Nanometer CMOS ICs,
from Basics to ASICs. Springer. p. 770. ISBN
978-1-4020-8332-7. http://springer.com/cn/book/
9781402083327?referer=springer.com
11
Arjun N. Saxena (2009). Invention of Integrated
Circuits: Untold Important Facts. World Scientic.
ISBN 978-981-281-446-3.
Veendrick, H.J.M. (2011). Bits on Chips. p.
253. ISBN 978-1-61627-947-9.https://openlibrary.
org/works/OL15759799W/Bits_on_Chips/
15
External links
General
a large chart listing ICs by generic number including
access to most of the datasheets for the parts.
Stephen P. Marsh (2006). Practical MMIC design.
Artech House. ISBN 978-1-59693-036-0.
Introduction to Circuit Boards and Integrated Circuits 6/21/2011
The History of the Integrated Circuit at Nobelprize.org
Patents
US3,138,743 Miniaturized electronic circuit J.
S. Kilby
US3,138,747 Integrated semiconductor circuit device R. F. Stewart
US3,261,081 Method of making miniaturized
electronic circuits J. S. Kilby
US3,434,015 Capacitor for miniaturized electronic circuits or the like J. S. Kilby
Integrated circuit die manufacturing
IC Die Photography A gallery of IC die photographs
Zeptobars Yet another gallery of IC die photographs
Silicon Chip Wafer Fab Mailbag on YouTube A
look at some equipment and wafers used in the manufacturing of silicon chip wafers
12
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16.1
16.2
Images
16.3
Content license
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16.3
Content license