May 2008 Rev 1 1/13

13
LISY300AL
MEMS inertial sensor:
single-axis 300/s analog output yaw rate gyroscope
Features
2.7 V to 3.6 V single supply operation
Low power consumption
Embedded power-down
300 /s full scale
Absolute analog rate output
Integrated low-pass filters
Embedded self-test
High shock survivability
ECOPACK

RoHS and Green compliant

(see Section 4)
Description
The LISY300AL is a low-power single-axis yaw
rate sensor. It includes a sensing element and an
IC interface able to provide the measured angular
rate to the external world through an analog
output voltage.
The sensing element, capable of detecting the
yaw rate, is manufactured using a dedicated
micromachining process developed by ST to
produce inertial sensors and actuators on silicon
wafers.
The IC interface is manufactured using a CMOS
process that allows a high level of integration to
design a dedicated circuit which is trimmed to
better match the sensing element characteristics.
The LISY300AL has a full scale of 300 /s and is
capable of measuring rates with a -3 dB
bandwidth up to 88 Hz.
The LISY300AL is available in a plastic land grid
array (LGA) package and can operate within a
temperature range from -40 C to +85 C.
The LISY300AL belongs to a family of products
suitable for a variety of applications, including:
Gaming and virtual reality input devices
Motion control with MMI (man-machine
interface)
Image stabilization for digital video and
digital still cameras
GPS navigation systems
Appliances and robotics
LGA-28 (7x7x1.5mm)
Table 1. Device summary
Order code Temperature range (C) Package Packing
LISY300AL -40 to +85 LGA-28 (7x7x1.5) Tray
LISY300ALTR -40 to +85 LGA-28 (7x7x1.5) Tape and reel
www.st.com
Contents LISY300AL
2/13
Contents
1 Block diagram and pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Mechanical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.4.1 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.4.2 Zero-rate level . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.4.3 Self-test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3 Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4 Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
LISY300AL Block diagram and pin description
3/13
1 Block diagram and pin description
Figure 1. Block diagram
The vibration of the structure is maintained by a drive circuitry in a feedback loop. The
sensing signal is filtered and appears as an analog signal at the output.
1.1 Pin description
Figure 2. Pin connection
Drive+
Sens+
Drive-
Sens-
Feedback+
Feedback-
CLOCK
TRIMMING
CIRCUITS
REFERENCE
DEMODULATOR
CHARGE
AMPLIFIER
PID
control
PLL
ANALOG
CONDITIONING
PHASE GENERATOR
SWITCHED
ACTIVE
FILTER
ANALOG OUTPUT
TRANS-
IMPEDANCE
AMPLIFIER
VOLTAGE
AUTOMATIC
GAIN
CONTROL
LOW-PASS
CAPACITOR
FILTER
LOW-PASS
GAIN
AMPLIFIER
+
z
LISY300AL
NC
GND
NC
GND
CACT
ANALOG OUTPUT
NC
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
NC
N
C
S
T
R
e
s
e
r
v
e
d
R
e
s
e
r
v
e
d
N
C
N
C
V
d
d
V
d
d
V
d
d
F
I
L
T
V
D
D
V
C
O
N
T
N
C
1
7
28 22
21
15
8 14
(TOP VIEW)
N
C
P
D
(TOP VIEW)
DIRECTION OF THE
DETECTABLE
ANGULAR RATE
+
z
Block diagram and pin description LISY300AL
4/13

Table 2. Pin description
Pin # Pin Name Function
1 NC Internally not connected
2 GND 0V supply
3 GND 0V supply
4 NC Internally not connected
5 CACT Active filter capacitor
6
ANALOG
OUTPUT
Rate signal output voltage
7-9 NC Internally not connected
10 PD Power-down (logic 0: normal mode; logic 1: power-down mode)
11 ST Self-test (logic 0: normal mode; logic 1: self-test)
12-13 Reserved Leave unconnected
14-15 NC Internally not connected
16-21 Reserved Leave unconnected
22 NC Internally not connected
23 VCONT PLL filter connection pad #1
24 FILTVDD PLL filter connection pad #2
25 Vdd Power supply
26 Vdd Power supply
27 Vdd Power supply
28 NC Internally not connected
LISY300AL Mechanical and electrical specifications
5/13
2 Mechanical and electrical specifications
2.1 Mechanical characteristics

Table 3. Mechanical characteristics @ Vdd = 3.3 V, T = 25 C unless otherwise noted
(1)

Symbol Parameter Test condition Min. Typ.
(2)
Max. Unit
FS Measurement range 300 /s
So Sensitivity 3.3 mV/ /s
SoDr
Sensitivity change vs.
temperature
From -40 C to +85 C 4 %
Voff Zero-rate level
(3)
1.65 V
OffDr
Zero-rate level change
vs. temperature
From -40 C to +85 C 5 /s
NL Non linearity
(4)
Best fit straight line 0.8 % FS
BW -3dB bandwidth
(3)(5)
C
ACT
= 10 nF 88 Hz
Rn Rate noise density 0.1
/s /
Vt
Self-test output
voltage change
(6)
+300 mV
Sup Start-up time Settling to 5 /s 300 ms
Fres
Sensing element
resonant frequency
4.5 kHz
Top
Operating
temperature range
-40 +85 C
Wh Product weight 160 mg
1. The product is factory calibrated at 3.3 V. The operational power supply range is specified in Table 4.
2. Typical specifications are not guaranteed
3. The product is capable of sensing angular rates extending from DC to the selected bandwidth
4. Guaranteed by design
5. User selectable by external capacitor C
ACT
6. Self-test output voltage change is defined as Vout
(Vst = logic 1)
- Vout
(Vst = logic 0)
Hz
Mechanical and electrical specifications LISY300AL
6/13
2.2 Electrical characteristics
Table 4. Electrical characteristics @ Vdd =3.3 V, T=25 C unless otherwise noted
(1)
1. The product is factory calibrated at 3.3 V
Symbol Parameter Test condition Min. Typ.
(2)
2. Typical specifications are not guaranteed
Max. Unit
Vdd Supply voltage 2.7 3.3 3.6 V
Idd Supply current PD pin connected to GND 4.8 mA
IddPdn
Supply current in
power-down mode
PD pin connected to Vdd 1 A
VST Self-test input
Logic 0 level 0 0.2*Vdd
V
Logic 1 level 0.8*Vdd Vdd
VPD Power-down input
Logic 0 level 0 0.2*Vdd
V
Logic 1 level 0.8*Vdd Vdd
C
ACT
Active low-pass filter
capacitor
10 nF
OVS Output voltage swing
(3)
3. Referred to ANALOG OUTPUT pin #6
Iout = 100A 0.4 V
dd
-0.4 V
C
LOAD
Capacitive load drive
(3)
0.4 10 nF
Top
Operating temperature
range
-40 +85 C
LISY300AL Mechanical and electrical specifications
7/13
2.3 Absolute maximum ratings
Stresses above those listed as Absolute maximum ratings may cause permanent damage
to the device. This is a stress rating only and functional operation of the device under these
conditions is not implied. Exposure to maximum rating conditions for extended periods may
affect device reliability.


Table 5. Absolute maximum ratings
Symbol Ratings Maximum value Unit
Vdd Supply voltage -0.3 to 6 V
Vin Input voltage on any control pin (PD, ST) -0.3 to Vdd +0.3 V
A
UNP
Acceleration (not powered)
3000 g for 0.5 ms
10000 g for 0.1 ms
T
STG
Storage temperature range -40 to +125 C
ESD Electrostatic discharge protection 2 (HBM) kV
This is a mechanical shock sensitive device, improper handling can cause permanent
damage to the part
This is an ESD sensitive device, improper handling can cause permanent damage to
the part
Mechanical and electrical specifications LISY300AL
8/13
2.4 Terminology
2.4.1 Sensitivity
A yaw rate gyroscope is a Z-axis rate device that produces a positive-going output voltage
for counterclockwise rotation around the axis normal to the package top. Sensitivity
describes the gain of the sensor and can be determined by applying a defined angular
velocity to it. This value changes very little over temperature and also very little over time.
2.4.2 Zero-rate level
Zero-rate level describes the actual output signal if there is no angular rate present. For a
3.3 V powered sensor the absolute zero-rate output is ideally 1.65 V. Zero-rate level of
precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore
zero-rate level can slightly change after mounting the sensor onto a printed circuit board or
after exposing it to extensive mechanical stress. This value changes very little over
temperature and also very little over time.
2.4.3 Self-test
Self-test allows to test the mechanical and electric part of the sensor, allowing the seismic
mass to be moved by means of an electrostatic test-force. The Self-test function is off when
the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is
applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will
exhibit a voltage change in its DC level which is also depending on the supply voltage. When
ST is active, the device output level is given by the algebraic sum of the signals produced by
the velocity acting on the sensor and by the electrostatic test-force. If the output signals
change within the amplitude specified in Table 3, then the mechanical element is working
properly and the parameters of the interface chip are within the defined specification.
LISY300AL Application hints
9/13
3 Application hints
Figure 3. LISY300AL electrical connections and external components values
Power supply decoupling capacitors (100 nF ceramic or polyester + 10 F Aluminum)
should be placed as near as possible to the device (common design practice).
The LISY300AL allows to band limit the output rate response through the use of two first-
order on-chip filters: a switched capacitor low-pass filter, with 400Hz -3dB bandwidth, in
combination with an active low-pass filter. The active filter -3 dB nominal frequency (f
tA
) is
set through an internal resistor R
ACT
and the external capacitor C
ACT
(added between
CACT pin #5 and ANALOG OUTPUT pin #6), by the formula:
The value of the internal resistor R
ACT
is 180 k, while the external capacitor C
ACT
is used to
select the signal bandwidth. The sensed frequency range spans from DC up to the selected
bandwidth.
In order to further reduce high-frequency noise, the LISY300AL supports an additional
optional low-pass filter on ANALOG OUTPUT pin #6 (Figure 3). The cutoff frequency (f
tP
) is
given by the formula:
100 nF
9.5kOhm 450nF
9nF
0.4nF
VDD
1
7
2
3
4
5
6
8 9 10 11 12 13 14
15
16
17
18
19
20
21
22 23 24 25 26 27 28
GND
GND
GND
P
D
S
T
LISY300AL
(top view)
C2
R1 C1
C
LOAD
C
ACT
GND
10 F
GND
C
OPT
R
OPT
Optional
Low-pass filter
Digital signals
Vout
YAW
+
z
f
tA
1
2 R
ACT
C
ACT

--------------------------------------------------- =
f
tP
1
2 R
OPT
C
OPT

---------------------------------------------------- =
Application hints LISY300AL
10/13
The LISY300AL IC includes a PLL (phase locked loop) circuit to synchronize driving and
sensing interfaces. Capacitors and resistors must be added at the FILTVDD and VCONT
pads (as shown in Figure 3) to implement a second-order low-pass filter. Table 6
summarizes the PLL low-pass filter components values.

3.1 Soldering information
The LGA package is compliant with the ECOPACK

, RoHS and Green standard.

It is qualified for soldering heat resistance according to JEDEC J-STD-020C.
Leave Pin 1 Indicator unconnected during soldering.
Land pattern and soldering recommendations are available at www.st.com/mems.
Table 6. PLL low-pass filter components values
Component Value
C1 450 nF 10%
C2 9 nF 10%
R1 9.5 k 10%
LISY300AL Package information
11/13
4 Package information
In order to meet environmental requirements, ST offers these devices in ECOPACK
packages. These packages have a lead-free second level interconnect. The category of
second level interconnect is marked on the inner box label, in compliance with JEDEC
Standard JESD97. The maximum ratings related to soldering conditions are also marked on
the inner box label. ECOPACK

is an ST trademark.
ECOPACK

specifications are available at: www.st.com.

Figure 4. LGA-28: mechanical data and package dimensions
OUTLINE AND
MECHANICAL DATA
DIM.
mm inch
MIN. TYP. MAX. MIN. TYP. MAX.
A 1.600 0.0630
A2 1.300 0.0512
A3 0.170 0.200 0.230 0.0067 0.0079 0.0091
D 6.900 7.000 7.100 0.2717 0.2756 0.2795
E 6.900 7.000 7.100 0.2717 0.2756 0.2795
F 0.350 0.0138
G 0.800 0.0315
L 0.450 0.0177
L1 0.100 0.0039
M 0.800 0.0315
N 1.600 0.0630
O 4.800 0.1890
P 2.400 0.0945
K 0.050 0.0020
LGA28 (7x7x1.5mm)
Land Grid Array Package
8003444 A
OUTLINE AND
MECHANICAL DATA
DIM.
mm inch
MIN. TYP. MAX. MIN. TYP. MAX.
A 1.600 0.0630
A2 1.300 0.0512
A3 0.170 0.200 0.230 0.0067 0.0079 0.0091
D 6.900 7.000 7.100 0.2717 0.2756 0.2795
E 6.900 7.000 7.100 0.2717 0.2756 0.2795
F 0.350 0.0138
G 0.800 0.0315
L 0.450 0.0177
L1 0.100 0.0039
M 0.800 0.0315
N 1.600 0.0630
O 4.800 0.1890
P 2.400 0.0945
K 0.050 0.0020
LGA28 (7x7x1.5mm)
Land Grid Array Package
8003444 A
Revision history LISY300AL
12/13
5 Revision history

Table 7. Document revision history
Date Revision Changes
29-May-08 1 Initial release
LISY300AL
13/13


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