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Syllabus

This document outlines the details of the ME119 Fall 2013 course at UC Berkeley including instructors, class meetings, course description, prerequisites, required and reference textbooks, projects, grading breakdown, and links to additional resources. The course covers fundamentals of microelectromechanical systems including design, fabrication processes, scaling issues, and device analysis. Prof. Liwei Lin is the primary instructor who can be reached in Room 621E Sutardja Dai Hall. The class meets on Tuesdays and Thursdays from 9:30-11:00am in 3108 Etcheverry. An individual final project is required including a proposal, presentation, and written report. Grading is based on homework, exams,

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56 views

Syllabus

This document outlines the details of the ME119 Fall 2013 course at UC Berkeley including instructors, class meetings, course description, prerequisites, required and reference textbooks, projects, grading breakdown, and links to additional resources. The course covers fundamentals of microelectromechanical systems including design, fabrication processes, scaling issues, and device analysis. Prof. Liwei Lin is the primary instructor who can be reached in Room 621E Sutardja Dai Hall. The class meets on Tuesdays and Thursdays from 9:30-11:00am in 3108 Etcheverry. An individual final project is required including a proposal, presentation, and written report. Grading is based on homework, exams,

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copkutusu2012
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ME119

Fall 2013
Instructors:
Prof. Liwei Lin, Room 621E Sutardja Dai Hall, (510)643-5495, [email protected]
Teaching Assistants, Xining Zange-mail
Class Meetings:
Lecture, Tuesday and Thursday, 3108 Etcheverry, 9:30 - 11:00am
Office Hours, Monday & Thursday 1-2pm
TA Office Hours, Monday 5-6pm, and Wed 4-5pm, 1113 Etcheverry
Course Descriptions:
Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-
micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles
of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio
microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device
design, analysis, and mask layout
Prerequisite: Physics 7B,
Text Books:
R.C. J aeger, "Introduction to Microelectronics Fabrication," 2nd edition, Addison-Wesley, 2000.
(required)
S. Senturia, "Microsystem Design," Kluwer Academic Publishers, 2000. (reference)
M. Madou, "Fundamentals of Microfabrication," CRC Press, 1997. (reference)
T.R. Hsu, "MEMS & Microsystems Design and Manufacture," McGraw Hill, 2001. (reference)
G.T.A. Kovacs, "Micromachined Transducers - Sourcebook," McGraw-Hill, 1998. (reference)
J .P. Uyemura, "Principle Desing of CMOS Integrated Circuits Using L-EDIT," PWS Publishing
Company, 1995. (reference)
S.M. Sze, "Semiconductor Sensors," J ohn Wiley & Sons, Inc, New York, 1994. (reference)
Projects:
An individual final project is required. The project proposal is due at the middle of the semester and an oral
project presentation is to be held at the end of the semester.
Grading:
25% homework and participation (paper reading)
10% MUMPs Design
30% 2 exams (10% Quiz I, 20% Quiz II)
35% final project (concept 10%, oral presentation 10%, written report 15%)
http://www.me.berkeley.edu/~lwlin/me119/2013.html
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Class Schedule
Selected Papers
Supplementary Webside
Projects
Last updated: May 10, 2013 by Liwei Lin
http://www.me.berkeley.edu/~lwlin/me119/2013.html
2 of 2 11/11/2013 4:57 PM

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