?url_ver=Z39.88-2004&rft_id=10.1116%2F1.2998694&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aulast=Samarelli&rft.au=Samarelli%2C+A.&rft.aufirst=A.&rft.atitle=Optical+characterization+of+a+hydrogen+silsesquioxane+lithography+process&rft.date=2008&rft.issn=1071-1023&rft.volume=26&rft.title=Journal+of+Vacuum+Science+and+Technology+B%3A+Microelectronics+and+Nanometer+Structures+%3Chttps%3A%2F%2Fround-lake.dustinice.workers.dev%3A443%2Fhttps%2Feprints.gla.ac.uk%2Fview%2Fjournal_volume%2FJournal_of_Vacuum_Science_and_Technology_B%3D3A_Microelectronics_and_Nanometer_Structures.html%3E&rft.pages=2290-2294&rft.issue=6&rft.genre=article