Tapered photonic crystal microcavities embedded in photonic wire waveguides with large resonance quality-factor and high transmission

Abstract

We present the design, fabrication, and characterization of a microcavity that exhibits simultaneously high transmission and large resonance quality-factor (Q-factor). This microcavity is formed by a single-row photonic crystal (PhC) embedded in a 500-nm-wide photonic wire waveguide - and is based on silicon-on-insulator. A normalized transmission of 85%, together with a Q-factor of 18 500, have been achieved experimentally through the use of carefully designed tapering on both sides of each of the hole-type PhC mirrors that form the microcavity. We have also demonstrated reasonably accurate control of the cavity resonance frequency. Simulation of the device using a three-dimensional finite-difference time-domain approach shows good agreement with the experimental results.