Pruiti, N. G. , Gough, C., May, S. and Sorel, M. (2022) Optical Properties of Silicon-rich Silicon Nitride for Photonic Integrated Circuits. In: Conference on Lasers and Electro-Optics CLEO SI 2022, San Jose, CA., USA, 15-20 May 2022, SF3O.2. ISBN 9781957171050 (doi: 10.1364/CLEO_SI.2022.SF3O.2)
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Abstract
The optical properties of silicon-rich silicon nitride are analyzed for different compositions, obtained by varying the deposition parameters. Here we demonstrate how the bandgap, refractive index, and thermo-optic coefficient depends on the relative silicon composition.
| Item Type: | Conference Proceedings |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Pruiti, Dr Natale G and Gough, Christopher and May, Mr Stuart and Sorel, Professor Marc |
| Authors: | Pruiti, N. G., Gough, C., May, S., and Sorel, M. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| ISBN: | 9781957171050 |
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