About: Plasma-activated bonding

Property	Value
dbo:thumbnail	wiki-commons:Special:FilePath/B-pab-dielectricbarrierdischarge.png?width=300
dbo:wikiPageWikiLink	dbr:Atmospheric_pressure dbr:Contamination dbr:Nitrogen dbr:Oxygen dbr:Atmosphere dbr:Plasma_(physics) dbr:Plasma_torch dbr:Glass dbr:Chuck_(engineering) dbr:Temperature dbr:Vacuum dbr:Voltage dbr:Dielectric_barrier_discharge dbr:Dielectric dbr:Corona_discharge dbr:Indium_tin_oxide dbr:Ambient_pressure dbr:Fracture_toughness dbr:Remote_plasma dbr:Electrode dbr:Wafer_(electronics) dbr:Radical_(chemistry) dbr:Microwave dbr:Coefficient_of_thermal_expansion dbr:Mass_diffusivity dbr:Electric_spark dbr:Ground_(electricity) dbr:Inductively_coupled_plasma dbr:Plasma_activation dbr:Bond_strength dbr:Direct_bonding dbr:Reactive-ion_etching dbr:Activation dbc:Electronics_manufacturing dbc:Packaging_(microfabrication) dbc:Wafer_bonding dbc:Semiconductor_technology dbr:Electrons dbr:Chemical-mechanical_planarization dbr:Bias_voltage dbr:Annealing_(metallurgy) dbr:Ions dbr:Bond_characterization dbr:Bulk_material dbr:Hydrophilic dbr:File:B-pab-dielectricbarrierdischarge.png dbr:File:B-pab-plasmareactorlpplasmaactivation.png dbr:File:B-pab-remoteplasmasystem.png
dbp:wikiPageUsesTemplate	dbt:Clear dbt:Wafer_bonding
dct:subject	dbc:Electronics_manufacturing dbc:Packaging_(microfabrication) dbc:Wafer_bonding dbc:Semiconductor_technology
gold:hypernym	dbr:Derivative
rdfs:label	Plasma-activated bonding (en)
owl:sameAs	freebase:Plasma-activated bonding wikidata:Plasma-activated bonding dbpedia-global:Plasma-activated bonding
prov:wasDerivedFrom	wikipedia-en:Plasma-activated_bonding?oldid=1301475030&ns=0
foaf:depiction	wiki-commons:Special:FilePath/B-pab-dielectricbarrierdischarge.png wiki-commons:Special:FilePath/B-pab-plasmareactorlpplasmaactivation.png wiki-commons:Special:FilePath/B-pab-remoteplasmasystem.png
foaf:isPrimaryTopicOf	wikipedia-en:Plasma-activated_bonding
is dbo:wikiPageRedirects of	dbr:Plasma_activated_bonding
is dbo:wikiPageWikiLink of	dbr:Remote_plasma dbr:Plasma_activated_bonding
is foaf:primaryTopic of	wikipedia-en:Plasma-activated_bonding