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Designation: E 1392 96

Standard Practice for

Angle Resolved Optical Scatter Measurements on Specular

or Diffuse Surfaces1
This standard is issued under the fixed designation E 1392; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
This standard has been approved for use by agencies of the Department of Defense.

obtaining appropriate sources, detectors, and low scatter optics

complicate its practical application at wavelengths less than
about 0.25 m. Diffraction effects that start to become important for wavelengths greater than 15 m complicate its practical
application at longer wavelengths. Diffraction effects can be
properly dealt with in scatter measurements (3), but they are
not discussed in this practice.
1.6 Any experimental parameter is a possible variable.
Parameters that remain constant during a measurement sequence are reported as header information for the tabular data
set. Appendix X3 gives a recommended reporting format that is
adaptable to varying any of the sample or system parameters.
1.7 This practice applies to flat or curved samples of
arbitrary shape. However, only a flat, circular sample is
addressed in the discussion and examples. It is the users
responsibility to define an appropriate sample coordinate
system to specify the measurement location on the sample
surface for samples that are not flat.
1.8 The apparatus and measurement procedure are generic,
so that specific instruments are neither excluded nor implied in
the use of this practice.
1.9 This standard does not purport to address the safety
concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.

1. Scope
1.1 This practice explains a procedure for the determination
of the amount and angular distribution of optical scatter from
an opaque surface. In particular it focuses on measurement of
the bidirectional reflectance distribution function (BRDF).
BRDF is a convenient and well accepted means of expressing
optical scatter levels for many purposes (1,2). 2 Additional data
presentation formats described in Appendix X1 have advantages for certain applications. Surface parameters can be
calculated from optical scatter data when assumptions are
made about model relationships. Some of these extrapolated
parameters are described in Appendix X2.
1.2 Optical scatter from an opaque surface results from
surface topography, surface contamination, and subsurface
effects. It is the users responsibility to be certain that measured
scatter levels are ascribed to the correct mechanism. Scatter
from small amounts of contamination can easily dominate the
scatter from a smooth surface. Likewise, subsurface effects
may play a more important scatter role than typically realized
when surfaces are superpolished.
1.3 This practice does not provide a method to extrapolate
data for one wavelength from data for any other wavelength.
Data taken at particular incident and scatter directions are not
extrapolated to other directions. In other words, no wavelength
or angle scaling is to be inferred from this practice. Normally
the user must make measurements at the wavelengths and
angles of interest.
1.4 This practice applies only to BRDF measurements on
opaque samples. It does not apply to scatter from translucent or
transparent materials. There are subtle complications which
affect measurement of translucent or transparent materials that
are best addressed in separate standards (see Practice E 167
and Guide E 179).
1.5 The wavelengths for which this practice applies include
the ultraviolet, visible, and infrared regions. Difficulty in

2. Referenced Documents
2.1 ASTM Standards:
E 167 Practice for Goniophotometry of Objects and Materials3
E 179 Guide for Selection of Geometric Conditions for
Measurement of Reflection and Transmission Properties of
Materials3
E 284 Terminology Relating to Appearance3
F 1048 Test Method for Measuring the Effective Surface
Roughness of Optical Components by Total Integrated
Scattering4
2.2 ANSI Standard:

1
This practice is under the jurisdiction of ASTM Committee F01 on Electronics
and is the direct responsibility of Subcommittee F01.06 on Silicon Materials and
Process Control.
Current edition approved Dec. 10, 1996. Published December 1997. Originally
published as E 1392 - 90. Last previous edition E 1392 90.
2
The boldface numbers in parentheses refer to a list of references at the end of
the text.

3
4

Annual Book of ASTM Standards, Vol 06.01.

Annual Book of ASTM Standards, Vol 10.05.

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E 1392
the XB axis to the projection of the incident direction onto the
XB-YB plane.
[Link] DiscussionIt is convenient to use a beam coordinate system (refer to Fig. A1.2) in which fi = 180, since this
makes fs the correct angle to use directly in the familiar form
of the grating equation. Conversion to a sample coordinate
system is straight forward, provided the sample location and
rotation are known.
3.2.8 incident directionthe central ray of the incident flux
specified by ui and fi in the beam coordinate system.
3.2.9 incident power, Pithe radiant flux incident on the
sample.
[Link] DiscussionFor relative BRDF measurements, the
incident power is not measured directly. For absolute BRDF
measurements it is important to verify the linearity, and if
necessary correct for the nonlinearity, of the detector system
over the range from the incident power level down to the
scatter level which may be as many as 13 to 15 orders of
magnitude lower. If the same detector is used to measure the
incident power and the scattered flux, then it is not necessary to
correct for the detector responsivity; otherwise, the signal from
each detector must be normalized by its responsivity.
3.2.10 instrument signaturethe mean scatter level detected when there is no sample scatter present expressed as
BRDF.
[Link] DiscussionSince BRDF is defined only for a
surface, the instrument signature provides an equivalent BRDF
for the no-sample situation. The limitation on instrument
signature is normally stray scatter from instrument components
and out-of-plane aperture position errors for receiver positions
near the specular direction. For high grade electronic detection
systems, at large scatter angles, the limitation on instrument
signature is normally Rayleigh scatter from molecules within
the volume of the incident light beam that is sampled by the
receiver field of view. As us approaches 90, the accuracy of us
becomes important because of the l/cos us term in BRDF. The
signature can be measured by scanning a very low scatter
reference sample in which case the signature is adjusted by
dividing by the reference sample reflectance. The signature is
commonly measured by moving the receiver near the optical
axis of the source and making an angle scan with no sample in
the sample holder. It is necessary to furnish the instrument
signature when reporting BRDF data so that the user can
decide at what scatter direction the sample BRDF is lost in the
signature.. Preferably the signature is several decades below
the sample data and can be ignored.
3.2.11 noise equivalent BRDF, NEBRDFthe root mean
square (r/min) of the noise fluctuation expressed as equivalent
BRDF.
[Link] DiscussionMeasurement precision is limited by
the acceptable signal to noise ratio with respect to these
fluctuations. It should be noted that although the detector noise
is independent of us, the NEBRDF will increase at large values
of us because of the 1/cos us factor. Measurement precision can
also be limited by other experimental parameters as discussed
in Section 10. The NEBRDF can be measured by blocking the
source light.
3.2.12 plane of incidence, PLINthe plane containing the

ANSI/ASME B46.1, Surface Texture (Surface Roughness,

Waviness, and Lay)5
3. Terminology
3.1 Definitions:
3.1.1 Definitions of terms not included here will be found in
Terminology E 284 or ANSI Standard B 46.1. Additional
graphic information will be found in Figs. A1.1-A1.3 in Annex
A1.
3.2 Definitions of Terms Specific to This Standard:
3.2.1 angle of incidence, uipolar angle between the central ray of the incident flux and the ZB axis.
3.2.2 beam coordinate system, XB YB ZBa cartesian
coordinate system with the origin on the central ray of the
incident flux at the sample surface, the XB axis in the plane of
incidence (PLIN) and the ZB axis normal to the surface as
shown in Fig. A1.1.
[Link] DiscussionThe angle of incidence, scatter angle,
and incident and scatter azimuth angles are defined with
respect to the beam coordinate system.
3.2.3 bidirectional reflectance distribution function,
BRDFthe sample radiance divided by the sample irradiance.
The procedures given in this practice are correct only if the
field of view (FOV) determined by the receiver field stop is
sufficiently large to include the entire illuminated area for all
angles of incidence of interest.
Le ~Ps /VA cos u s!
Ps
BRDF 5 E 5
5 P V cos u @sr 21#
~Pi /A!
e
i
s

(1)

[Link] DiscussionBRDF is a differential function dependent on the wavelength, incident direction, scatter direction,
and polarization states of the incident and scattered fluxes. In
practice, it is calculated from the average radiance divided by
the average irradiance. The BRDF of a lambertian surface is
independent of scatter direction. If a surface scatters nonuniformly from one position to another then a series of measurements over the sample surface must be averaged to obtain
suitable statistical uncertainty. Nonuniformity may be caused
by irregularity of the surface microughness or film, optical
property nonhomogeneity, or subsurface defects.
3.2.4 cosine-corrected BRDFthe BRDF times the cosine
of the scatter polar angle.
[Link] DiscussionThe cos us in the BRDF definition is a
result of the radiometric definition of BRDF. It is sometimes
useful to express the scattered field as normalized scatter
intensity [(watts scattered/solid angle)/incident power] as a
function of scatter direction. This is accomplished by multiplying the BRDF by cos us.
3.2.5 delta beta, Dbthe projection of Db onto the XB-YB
plane, that is, the delta theta angle measured in direction cosine
space. For scatter in the PLIN, Db = sin us sin ui. For scatter
out of the plan of incidence (PLIN), the calculation of Db
becomes more complicated (see Appendix X1.2).
3.2.6 delta theta, Duthe angle between the specular direction and the scatter direction.
3.2.7 incident azimuth angle, fithe fixed 180 angle from
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E 1392
found by integrating the BRDF over the hemisphere can be
related to surface roughness. The amount of scatter at a given
scatter angle can be associated with a specific surface spatial
frequency.
4.3 The microroughness and contamination due to particulates and films on silicon wafers are interrogated with varying
forms of light scattering techniques. The angular distribution of
light scattered by semiconductor surfaces is a generalized basis
for most scanning surface inspection systems and as such may
be used to cross-correlate various tools.

sample normal and central ray of the incident flux.

3.2.13 receivera system that generally contains apertures,
filters and focussing optics that gathers the scatter signal over
a known solid angle and transmits it to the scatter detector
element.
3.2.14 receiver solid angle, V the solid angle subtended
by the receiver aperture stop from the sample origin.
3.2.15 sample coordinate systema coordinate system
fixed to the sample and used to specify position on the sample
surface for the measurement.
[Link] DiscussionThe sample coordinate system is application and sample specific. The cartesian coordinate system
shown in Fig. A1.1 is recommended for flat samples. The
origin is at the geometric center of the sample face with the Z
axis normal to the sample. A fiducial mark must be shown at
the periphery of the sample; it is most conveniently placed
along either the X or Y axes. For silicon wafers, the fiducial
mark is commonly placed on the y-axis.
3.2.16 sample irradiance, Eethe radiant flux incident on
the sample surface per unit area.
[Link] DiscussionIn practice, Ee is an average calculated from the incident power, Pi, divided by the illuminated
area, A. The incident flux should arrive from a single direction;
however, the acceptable degree of collimation or amount of
divergence is application specific and should be reported.
3.2.17 sample radiance, Lea differential quantity that is
the reflected radiant flux per unit projected receiver solid angle
per unit sample area.
[Link] DiscussionIn practice, Le is an average calculated from the scattered power, Ps, collected by the projected
receiver solid angle, V cos us, from the illuminated area, A. The
receiver aperature and distance from the sample determines V
and the angular resolution of the instrument.
3.2.18 scatterthe radiant flux that has been redirected
over a range of angles by interaction with the sample.
3.2.19 scatter azimuth angle, fsangle from the XB axis to
the projection of the scatter direction onto the XB-YB plane.
3.2.20 scatter directionthe central ray of the collection
solid angle of the scattered flux specified by us and fs in the
beam coordinate system.
3.2.21 scatter planethe plane containing the central rays
of the incident flux and the scatter direction.
3.2.22 scatter polar angle, uspolar angle between the
central ray of the scattered flux and the ZB axis.
3.2.23 specular directionthe central ray of the reflected
flux that lies in the PLIN with us = ui and fs = 0.

5. Apparatus
5.1 GeneralNon-specular reflectometers or instruments
(4) used to measure scattered light utilizes some form of the
five components described in this section. These components
are described in a general manner so as to not exclude any
particular type of scatter instrument. To achieve (ui, fi; us, fs)
positioning the instrument design must incorporate four df
between the source, sample holder, and receiver assemblies.
5.2 Source Assembly containing the source and associated
optics to produce irradiance, Ee, on the sample over a specified
spot area, A. If a broad band source is used, the wavelength
selection technique should be specified. Depending on the
bandwidth and selection techniques, the detector assembly may
affect the wavelength sensitivity. If a laser source is used, it is
usually sufficient to specify the center wavelength; however, it
is sometimes necessary to be more specific such as providing
the particular line in a CO2 laser.
5.2.1 A source monitor is used to correct for fluctutions in
the source intensity. If it is located at the source output it only
measures variations in the source power and is not sensitive to
variations due to angular drift or downstream transmission.
The source monitor should monitor incident power as close to
the sample as possible while minimizing additional system
scatter. Attention should be paid to possible laser mode
hopping and consequent wander of the beam on spatial filter
pinholes and to fluctuations in source polarization.
5.2.2 Collimated or slightly converging source light can be
used to measure BRDF. Most instruments use a converging
beam focused at the receiver. If the convergence angle is small,
the uncertainty introduced by a non-unique angle of incidence
is usually negligible. The same considerations apply if a curved
sample is measured. It is the users responsibility to assure that
any spread in ui does not compromise the results. Normal
practice limits convergence to f/20 or greater with a focus at
the receiver to increase the angular resolution of measurements
near the specular beam or diffraction peaks.
5.2.3 Typically the source assembly is fixed in position and
variations in ui are made with the sample holder. Good
reduction of the instrument signature requires baffling around
the source assembly and use of a spatial filter to limit off-axis
light. The final mirror (or lens) which directs light to the
sample should have low scatter, since it contributes directly to
small angle scatter in the instrument signature.
5.2.4 A means should be provided for controlling the
polarization state of the incident flux as this can impact the
measured BRDF. Orthogonal source polarization components
(parallel, or p, and perpendicular, or s) are defined relative to

4. Significance and Use

4.1 The angular distribution of scatter is a property of
surfaces that may have direct consequences. Scatter from
mirrors and other components in an optical system can be the
limiting factor in resolution or optical signal to noise level.
Scatter can be an important design parameter for telescopes.
Scatter measurements are crucial to correct operation of ring
laser gyros. Scatter from a painted surface such as on automobiles can influence sales appeal.
4.2 The angular distribution of scatter from optically
smooth surfaces can be used to calculate surface parameters or
reveal surface characteristics. For example, the total scatter
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E 1392
ization analyzer at the receiver. The scatter reflux can be
broken into perpendicular and parallel components that are
respectively perpendicular and parallel to the scatter plane (see
Fig. A1.2).

the plane defined by the source direction and the sample

surface normal.
5.2.5 Absorbing samples may be heated by the incident flux
and may change their scatter characteristics, mechanically
distort or burn. Special care must be taken with IR laser
sources on absorbing samples.
5.3 Sample Holder The sample holder should provide a
secure mount for the sample that does not introduce any warp.
The rotation axes of the stages that achieve the (ui, fi, us fs)
positioning must be relative to the sample front surface; this
can be accomplished by orienting the sample holder or the
source, or both, and receiver assemblies. Some sample mounts
incorporate positioning stages for a raster scan of the sample
surface at fixed incident and scatter angles. The sample mount
must be kept unobtrusive so that it does not contribute stray
flux to the signature or block large us scatter.
5.4 Beam DumpIt is important to trap any specular
reflection from the sample so that it cannot contribute to the
scatter signal through lab/instrument reflections. Examples of
beam dumps are black paper, a razor blade stack, absorbing
glass plates, or a tapered blackened glass tube.
5.5 Receiver AssemblyIf the system design includes df at
the receiver for achieving the scatter direction, then the
receiver assembly should normally have provisions for rotating
about an axis on the front face of the sample in order to vary
us. If out of the PLIN measurements are required, the receiver
assembly may also rotate out of the PLIN. This capability may
also be provided by pitch, yaw, and roll of the sample, but it
becomes more diffcult to dump the specularly reflected beam.
5.5.1 The acceptance aperture for the receiver must be well
defined, since the solid angle, V, subtended by the receiver
aperture stop from the sample, is used in the BRDF calculation
and defines the angular resolution. The field of view of the
detector must include the entire irradiated area, A. There can be
an exception to these requirements if a relative BRDF or
relative total reflectance normalization is used. In that case it is
the users responsibility to ensure that the system parameters
remain constant between measurements.
5.5.2 If the acceptance aperture is too small and a coherent
source is used to irradiate the sample, speckle may cause
strong, unpredictable variations in the scatter. This is a common problem when measuring diffuse (that is, rough) samples.
It is sometimes desirable to spin a diffuse sample about its
normal to average the effects of speckle while making a
measurement. It is the users responsibility to ensure that
BRDF features are not due to speckle. The user may wish to
employ a variable aperture stop to trade sensitivity for angular
resolution when measuring specular surfaces, since best angular resolution is needed near specular where BRDF has a steep
slope. Best sensitivity is needed at larger angles where BRDF
might approach the NEBRDF.
5.5.3 It may be necessary to use an optical bandpass filter on
the detector to minimize acceptance of background light. This
can also be accomplished by modulating the amplitude (with a
mechanical chopper) of the source light, and using a synchronized, phase sensitive (lock-in) amplifier with the detector.
5.5.4 Since depolarization can occur in scattering, complete
characterization of scatter requires measurements with a polar-

6. Calibration and Normalization

6.1 GeneralInstrument calibration is often confused with
measurement of Pi. Calibration of a BRDF instrument involves
systematic standardization and verification of its quantitative
results. Incident power must be measured for correct normalization of the scattered power. Absolute measurement of powers
is not required as long as the Ps/Pi ratio is correctly measured.
Alternatively, a reference sample can be used as a normalization reference.
6.2 Calibration A leading cause of inaccuracy in BRDF
measurement is a lack of instrument calibration. An error
analysis of the four quantities defining the BRDF (Pi, Ps, V, us)
can help to accomplish a calibration (5). Each of these four
independent variables is a function of system parameters. For
example, Ps depends on receiver linearity, electrical noise and
system alignment parameters. The total error is also a function
of incidence angle and scatter angle. It is reasonable to expect
errors in the 3 to 10 % range for measurements taken a few
degrees from specular to about us = 85. System nonlinearity is
a major contributor to error in this central region. At either
end of this central region errors rise dramatically. Near
specular this is caused by out of plane receiver position error,
and near the grazing angle the increase is due to uncertainty in
us. Error is also a function of the type of sample being
measured. For example, larger errors are expected in the
relatively steep BRDF associated with specular samples than
for the flatter response of a diffuse surface.
6.2.1 The receiver and preamplifier must be calibrated
together over their useful operating range. The final result is a
calibration curve showing relative optical power versus voltage
for each preamplifier gain setting. Operating regimes are
selected for each gain setting to avoid saturating the detector
while remaining on a low gain setting. The source monitor
must also be calibrated in the same way.
6.2.2 There are several ways to vary the optical power and
make this calibration curve. Optical filters with a known
attenuation can be used, but multiple reflections and coherent
effects (interference between the two filter faces) can change
the attenuation. An excellent method of changing the optical
power at the receiver is by moving away from a diffuse source
for 1/r2 attenuation. Other methods include crossed polarizers
or changing the duty cycle of a chopper. The user must select
an attenuation method with suitable reproducibility to perform
the calibration.
6.2.3 The receiver and preamplifier each have a maximum
output voltage to avoid saturation, but there is also a minimum
electronic noise level which should be kept in mind to avoid
reporting noise as BRDF. When electronic noise is expressed
as NEBRDF, note that although the noise may be constant,
NEBRDF depends on the receiver solid angle, V, the incident
power, Pi, and cos us. This means NEBRDF can be lowered by
changing these system parameters.
6.2.4 A full system calibration is not required on a daily
basis, but the system should be checked daily. This check can
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E 1392
6.3.4 Relative Total ReflectanceThe fourth method involves integration of relative BRDF over the hemisphere and
adjustment of constants to match the directional hemispherical
reflectance, r (also referred to as total hemispherical reflectance). Normalization can only be accomplished after sufficient
scatter data are accumulated to define the integral. This method
depends on a separately measured directional hemispherical
reflectance and knowing relative scatter over the entire hemisphere. It is best suited to isotropic, diffuse samples.
[Link] When sufficient scatter data has been accumulated
the following integral is performed.

be accomplished by measuring the instrument signature and a

stable reference sample that provides data over several decades. Changes from past results are an indication of calibration problems and the cause of the change must be determined.
It is good operating practice to maintain a reference sample at
the scatter facility for this calibration check. Recalibration
must be accomplished when components are changed, repaired
or realigned. Include a data file number for the most recent
reference sample measurement with every set of BRDF data as
a record of instrument response in case the data set is
questioned at a later time.
6.3 NormalizationThere are four acceptable methods for
normalizing the scattered power to the incident power. Each
method is dependent on different measured parameters.
6.3.1 AbsoluteAn absolute normalization is made by
moving the receiver assembly onto the optical axis of the
source with no sample in the sample holder. This method
depends on extending receiver calibration to high power levels.
The entire incident beam must enter the receiver assembly and
a voltage, Vi, is recorded. If the unsaturated detector response
is Rl(watts/volt):
Pi 5 Vi Rl

rcalc 5

(2)

p/2

BRDF cos us sin u s dus dfs

(5)

7. Procedure
7.1 Sample cleanliness can be a significant factor in the
scatter level. The user should adopt a procedure for cleaning
samples prior to measurement and this cleaning procedure
should be reported with the BRDF results.
7.2 Correct alignment of the source, sample, and receiver
are essential for accurate BRDF measurements. A typical
example of a subtle error that can be introduced by misalignment occurs when the receiver does not rotate in us about the
sample face. The receiver field-of-view will walk off the
illuminated area, A, and the measured BRDF is then lower
than actual BRDF as us increases. Although it is not necessary
to perform a total system alignment every day, alignment must
be verified on a daily basis for movable components.
7.3 After cleaning the sample and verification of alignment,
the sample is inserted in the sample holder. The detector
voltage, Vs, and the source monitor voltage, Vsm, are recorded
for each parameter set of interest. For example, BRDF
measured in the plane-of-incidence requires changing us while
holding other parameters constant. The measurement results
consist of three columns of data for us, Vs, Vsm. The constant
parameters, ui and fs, are retained in the header information
for this data set. Post processing is used to calculate BRDF
and express the results in the desired tabular or graphical
format, but we can calculate Ps at this time. In this calculation,
the ratio of source monitor voltages is included to correct for
variation of source intensity.
.

(3)

It is not necessary to know V or us for the sample BRDF

calculation if they remain constant. The source monitor voltage, V, must also be recorded at this time.
6.3.3 Relative Specular Reflectance An alternative relative normalization can be made with a specular reference
sample having a known specular reflectance, R. This method
depends on knowing R for the same collection solid angle as
used in the Pi measurement.
[Link] Insert the specular reference sample in the sample
holder and measure the voltage, Vr, for the entire specular
beam into the receiver assembly. The following can now be
calculated:
P i 5 VrRl /R

2p

BRDF is obtained with constants, V Rl/Pi, removed from the

integral. These constants are adjusted to make r equal to the
externally measured r. The constants are then returned to Eq 7
for calculation of absolute BRDF.
[Link] A perfectly reflecting (r = 1) and diffuse sample has
constant BRDF and integration of the above equation shows
that it is equal to 1/p. A diffuse sample will depolarize incident
plane polarized light, therefore care must be exercised so that
the polarization state of the light is taken into account for both
the scatter and directional hemispherical reflectance measurements.

It is not necessary to know Rl for the sample BRDF

calculation if it remains constant. The source monitor voltage,
V, must also be recorded at this time.
6.3.2 Relative BRDFA relative normalization is made by
measuring a reference sample that has a known BRDF level.
This method depends on knowing the reference sample BRDF.
This reference sample is usually a high reflectance, diffuse
surface. They are readily available for visible wavelengths and
the BRDF is the same for a large range of ui and us. Ideally the
reference sample has a known BRDF that is similar to the
unknown sample to be tested in both magnitude and incident/
scatter directions, but this is rarely true. The reference sample
should be spatially uniform and isotropic to alleviate alignment concerns.
[Link] The reference sample is inserted in the sample
holder and a detector voltage, V, corresponding to the scattered
light for the known BRDF is recorded. The following can now
be calculated:
P i 5 VRl /BRDF V cos us

* *

Ps 5 VsRlVsmo/Vsm

(4)

(6)

7.4 BRDF can exhibit strong sensitivity to azimuthal orientation, spot size and position changes on the sample face. Good
operating practice dictates checking for sensitivity to these and
other system parameters.

It is not necessary to know Rl for the sample BRDF

calculation if it remains constant. The source monitor voltage,
V, must also be recorded at this time.
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E 1392
9.5 Appendix X3 provides a reporting format recommended
for use. This format is general in nature and allows for
variation of any sample or system parameters.

8. Calculation
8.1 The BRDF of an unknown sample is calculated at each
incident and scattered direction from the following relationship:
BRDF 5 Ps/Pi V cos us 5 ~V /V!@VsRl /Pi V cos us#sr21

10. Precision and Bias

10.1 PrecisionThe precision of this practice is inconclusive based on the results of an interlaboratory round robin
conducted in 1988 (6). This round robin was conducted at a
single wavelength (0.6328 m), angle of incidence (10),
polarization state (s incident) and with four specific sample
surfaces. It was found that precision depends on the BRDF
level and scatter angle as discussed in Ref (7). Additional
information on precision was accumulated in a 10.6-m round
robin conducted in 1989 (8).
10.1.1 A white diffuse sample with mean BRDF = 0.27/sr
gave a fractional deviation (standard deviation of the 18
measurement sets divided by the mean BRDF) close to 17 % at
scatter angles from 15 to 70. A black diffuse sample with
mean BRDF = 0.01/sr gave fractional deviations from 24 to
39 % depending on scatter angle. Specular mirrors gave
fractional deviations from 31 to 134 % depending on scatter
angle. Variations were larger at large scatter angles where
detector noise levels of some instruments and errors in us had
a large effect. These variations are much larger then expected
from a typical error analysis.
10.2 BiasThere is no bias inherent in this practice. BRDF
is a number derived from the ratio of physical parameters that
can be specified in absolute units. However, individual laboratories may have measurement errors that lead to systematic
offsets, such as an inaccurately measured solid angle. Other
possible mechanisms are discussed in Ref. (7). It is not possible
at this time to separate these systematic errors from bias;
however, intralaboratory measurements on the same instrument
typically repeat within 5 % Ref (5).

(7)

The value of Pi is determined by the normalization method

used. The correct angular variables may also be calculated in
post processing with BRDF. In all cases ui and us are
referenced to the sample normal.
8.2 Many facilities prefer to store only raw data and
calculate BRDF and display variables as required to produce a
graph or data table. If data are sent to another facility, it is
essential to convert to BRDF and the angular variables defined
in this practice. A recommended reporting format is given in
Appendix X3.
9. Report
9.1 BRDF data is expressed in tabular or graphical format as
a function of the variable parameter. It is necessary to state the
accuracy of angular measurements and the size of the receiver
solid angle, V. These latter parameters are important for small
angle scatter. It is usually meaningless to measure within 1 of
specular or to measure very narrow diffraction spikes when
V spans several degrees.
9.2 It is necessary to furnish the instrument signature with
the sample BRDF data so that the user can make an informed
decision about the angle where the samples scatter becomes
lost in the signature. Correct comparison of the signature with
BRDF data requires multiplying the signature by the samples
specular reflectance for that portion of the signature due to
instrument scattered stray light (usually the case for us near
specular). The portion of the signature due to electronic noise
is not reduced by the sample reflectance.
9.3 It is necessary to furnish the normalization method with
BRDF data. If a relative normalization is used the source of the
reference sample BRDF must be stated.
9.4 BRDF data can span many decades so it is usually
expressed in base ten exponential form or plotted on a
logarithmic scale.

11. Keywords
11.1 bidirectional reflectance distribution function (BRDF);
diffuse; irradiance; power spectrum; radiance; reflectance;
reflectance factor; roughness; scatter; specular; total integrated
scatter

ANNEX
(Mandatory Information)
A1. GEOMETRY

A1.1 Relationship Between the Sample (X, Y, Z) and

Beam (XB, YB, ZB) Coordinate SystemsThe Z and ZB axes
are always the local normal to the sample face. Locations on
the sample face are measured in the sample coordinate system.
The incident and scatter directions are measured in the beam
coordinate system. If the sample fiducial mark is not an X axis
mark, the intended value must be indicated on the sample.

Azimuth angles are measured from the XB axis. The incident

azimuth angle, fi, is always 180 so fs can be used directly in
the common form of the grating equation.
A1.3 The Receiver GeometryIn many cases the field stop
is set by the detector size; however, as the aperture stop
approaches the field stop the risk of seeing unwanted stray light
increases. Other receiver geometries may be used. They all
have effective aperture and field stops and it is good operating
practice to make them well defined.

A1.2 Angle Conventions for the Incident and Scattered

Light in the Beam Coordinate SystemThe projection of the
incident direction onto the sample face is the XB axis.
6

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E 1392

NOTE 1The X-Y zero position on the sample face is assumed to be the
geometric center of the sample.
NOTE 2The fiducial mark can be on the edge or back of the sample.
FIG. A1.1 Relationship Between Sample and Beam Coordinate
Systems

NOTE 1The PLIN is the I-O-ZB plane. The scatter plane is the
S-O-ZB plane.
FIG. A1.2 Angle Conventions

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E 1392

NOTE 1A = illuminated area with average E = Pi/A, FOV = field of

view that must include all area, A, Aperture Stop, limits; V , and Field
Stop; limits FOV.
FIG. A1.3 Receiver Geometry

APPENDIXES
(Nonmandatory Information)
X1. ADDITIONAL DATA PRESENTATIONS

This equation can be used to relate us to f. Only the first order

(n = 1) is significant for roughness << the wavelength. BRDF
can now be interpreted as the ability of each f to scatter light.
If BRDF is plotted versus a Db scale it may be independent of
ui and proportional to f. If the surface behaves in this way the
BRDF is shift invariant (9). In the general case for scatter out
of the PLIN the following two dimensional grating equations
apply:

X1.1 Du PresentationIt is common practice to plot

BRDF with respect to the angle from the specular beam, Du. If
scatter is measured only in the PLIN, Du = us ui. However, in
the more general case for scatter out of the PLIN:
Du 5 cos 21~cos ui cos us 1 sin ui sin us cos fs!

(X1.1)

This is a useful angular reference for specular samples.

However, when using this format care must be taken that Du is
not confused with us in the calculation of BRDF. This
presentation format is normally used only when Du passes
through zero, that is, when the scatter scan includes the
specular beam. The terms forward scatter and back scatter
refer to PLIN scatter directions for which Du is respectively
positive or negative. Note that Du continues to increase as a
negative angle when passing the surface normal since the sign
of fs switches in the above equation.

(X1.3)

sin us sin us 5 6 nlf y

(X1.4)

The definition of Db must be expanded to include the

projection of the scattered light in the X and Y directions:
Db2 5 sin2 u i 1 sin2 u s 2 2 sin ui sin us cos us

X1.2 Db PresentationDb = b bo, where b = sin us

and bo = sin ui, a method of expressing the angle between the
specular and scatter directions in direction cosine space along
the surface for scatter in the PLIN. This is a very useful
normalization when scatter results only from surface microroughness, and the grating equation:
sin us 5 sin ui 6 nlf

cos fs sin us 5 sin ui 6 nlf x

(X1.5)

X1.3 Reflectance FactorA measure of diffuse reflectance

in common use is the reflectance factor, R, that is the ratio of
flux propagated from source to receiver in a reflectometer with
a specimen, to the flux propagated with a perfectly reflecting
diffuser. Regarding a scatterometer as a very directional
bi-directional reflectometer the following relationship between
R and BRDF is obtained as follows:

(X1.2)

BRDF
R 5 BRDF

where:
l = wavelength of the incident flux,
f = linear spatial frequency for the microroughness in the x
or y direction, and
n = diffraction order.

diffuser

BRDF
5 1/p 5 p BRDF

(X1.6)

Additional information can be found in Practice E 167.

Reflectance factor and specular reflectance share the same
symbol, R, but they are not the same parameter.

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E 1392
X2. MODEL DEPENDENT CALCULATED PARAMETERS

X2.2.1 The user must confirm the usefulness of this s

calculation based on the particular measurement circumstances. It may have strong frequency limitations and not agree
with surface roughness derived from optical or mechanical
profile instruments (which can have different spatial frequency
limits (12)).

X2.1 Total Integrated Scatter (TIS)TIS can be calculated

from BRDF by integrating BRDF over the hemisphere (10).
Typically a 5 total angle hole is left around the specular
beam since specular light is not included in total integrated
scatter (see Test Method F 1048).
X2.1.1 For an isotropic surface we can measure in-plane
BRDF at ui = 0 and calculate the expected total integrated
scatter by integrating over the angle limits specified in Test
Method F 1048.

X2.3 Power SpectrumThe surface power spectral density

function (PSD) can be calculated from the BRDF through a
scatter model. For example, the grating equation model discussed in Appendix X1.2 shows that high frequency surface
perturbations will scatter light far from specular and low
frequency perturbations will scatter close to specular. The PSD
shows the amount of modulation versus f, that is, the square of
the Fourier transform of the surface profile. Since it is a sample
property, the same PSD should be obtained regardless of
wavelength and incident angle dependent differences in the
BRDF data.

TIS ~calculated! 5 2pR21702.5 cos us BRDF sin usdus

(X2.1)

X2.1.2 Sample specular reflectance, R, must be included,

since total integrated scatter is referenced to reflected and not
incident power. The cos us term must be included since BRDF
is defined in terms of the projected receiver aperture. This
comparison between total integrated scatter and BRDF may not
be exact since the total integrated scatter detector is less
sensitive to light incident on the detector at large angles and if
low f (close to specular) scatter dominates the 5 hole size is
critical. In addition a TIS instrument is not polarization
selective.

X2.3.1 Wavelength scaling is another check on system

calibration. Smooth, clean, nonabsorbing front surface reflectors should yield the same PSD for different BRDF measurement wavelengths. If the instrument does not wavelength scale
on appropriate samples, the BRDF measurement may be
suspect. Polished molybdenum and silicon wafers are two
examples of surfaces that have been shown to wavelength scale
from the visible into the infrared. Many beryllium mirrors and
silicon carbide mirrors have been shown to not wavelength
scale because of anomalous scatter that arises from features
other than surface roughness.

X2.2 RoughnessThe r/min surface roughness, s, is an

often quoted number that can be obtained from direct profile
measurements with stylus or optical profilometers. It can also
be inferred from total integrated scatter when, s << l/4p for
front surface scatter from a clean, smooth surface (11), as
described in Test Method F 1048.
s 5 ~l/4p!~TIS! 1 / 2

(X2.2)

X3. REPORTING FORMAT

X3.3 The data sequence must come at the end of the file.
Each line in the data sequence represents a single data point. It
must begin with a numeric character or the + , character.
Multiple variables for each data point are on the same line but
separated by commas. This permits the data sequence to be
printed as a set of columns. Each variable must remain in the
same column throughout a file. The VARS field specifies which
variable is in each column.

X3.1 There is a considerable amount of information that

should accompany BRDF measurements. This recommended
data file format divides the information into descriptive headers
followed by a data sequence of variables. The headers consist
of laboratory information, system information, sample information and measurement parameters. These are simply generic
labels that help to organize the fields under the headers. Any of
the header fields can be a variable in the data sequence;
however, variables are normally limited to measurement parameters.

X3.4 Because of the name tag, there is no position

dependence for information in the headers. The number of
header fields can vary from one data file to another. If a certain
field is not in the file it means that information was not
recorded or does not apply to that measurement. Every user
should supply a format template for their header and data
sequence. This will expedite conversion from site to site and
avoid confusion over units and field size. Fields can easily be
added to the headers if sufficient descriptive text is provided in
the field or on the template. Fields can be added or deleted
from old data sets without obsoleting the data file. This is a
suggested list of fields in a recommended grouping and order.
Additional fields will be defined by users and as they become

X3.2 The data files are stored as ASCII text fields. Each set
of data taken is stored as a separate data file. Each field in the
headers and each data point in the data sequence will begin on
a new line (carriage returnline feed pair terminates each
line). Multiple items under each field in the headers and
multiple variables per data point field in the data sequence are
separated by commas. Each field in the headers will have a
unique one word name preceding the field contents on the same
line. This name identifies the contents of the field. The first
character of a name must be an alpha character.
9

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E 1392
accepted by the scatter community they can be added to this
practice.

LABORATORY INFORMATION
LAB_NAME
LAB_ADD
LAB_CITY
LAB_STATE
LAB_ZIP
LAB_PHONE
LAB_OPERATOR
LAB_COMMENTS

text field with the name of the facility

street address of the facility
city the facility is located in
state the facility is located in
zip code
phone number of the laboratory
name of the operator
comments that pertain to the laboratory in open format

SYSTEM INFORMATION
SYSTEM_NAME
SOURCE_KW
RX_KW
APERTURE
NORM
FILE_REF
FILE_SIG
NEBRDF
ERROR
SYSTEM_COMMENTS

name of the instrument the data was measured with; many facilities have more than one scatter instrument
key words describing the source assembly such as laser, coherent, broad band, blackbody, or vendor
key words describing the receiver assembly such as cooled, silicon, array, HgCdTe
text field that describes the type of receiver aperture (circular, slit, bow tie, other)
normalization methodabsolute (A), relative BRDF (R), relative specular reflectance (S), relative total
reflectance (T)
name/number/id of the file that contains the reference sample information for the instrument and this
measurement
name/number/id of the file that contains the signature information for the instrument and this measurement
noise equivalent BRDF of the instrument
error levels expected in the BRDF measurement
comments that pertain to the system, for example, the type of normalization used

SAMPLE INFORMATION
SAMPLE_NAME
SAMPLE_TYPE
SAMPLE_VEND
SAMPLE_ADD
SAMPLE_CITY
SAMPLE_STATE
SAMPLE_ZIP
SAMPLE_PHONE
SAMPLE_CONTACT
SAMPLE_KW
MANUF_KW
TREAT_KW
SHAPE_KW
FS_AREA
SIZE_DIM
SIZE_X
SIZE_Y
SIZE_Z
SUB_MAT
SUB_N
SUB_K
FS_FINISH_KW
BS_FINISH_KW
FS_CURV
BS_CURV
FS_COAT
FS_SPEC_REFL
FS_SPEC_TRAN
FS_DIFF_REFL
FS_DIFF_TRAN
CLEAN
SAMPLE_COMMENTS

name or id number of the sample

type of sample such as mirror, lens, window, grating, baffle substrate, paper
name of the sample vendor
street address of the sample vendor
city of the sample vendor
state of the sample vendor
zip code of the sample vendor
phone number of the sample vendor
name of a contact person for the sample
key words describing the sample such as silver, black, diffuse, grating, specular, one-dimensional, twodimensional, color
key words describing the manufacturing process of the sample such as molded, polished, ground,
diamond-turned, crystal
key words describing the treatment process of the sample such as cleaned, radiated, e-beam, dust,
contaminated
key words describing the shape of the sample such as flat, square, circular, spherical, hemisphere, ellipse, irregular
surface area of the front surface of the sample
diameter or the sample
size of the sample at the sample center from edge to edge in the x dimension
size of the sample at the sample center from edge to edge in the y dimension
thickness of the sample at the sample center
sample substrate material
substrate index of refraction, n
substrate extinction coefficient, k
key words describing sample front surface finish such as coated, superpolish, hardened, ground, irradiated, smooth, rough
key words describing the sample back surface finish
the inverse of the radius of curvature of the sample front surface, convex is positive, concave is negative
the inverse of the radius of curvature of the sample back surface
description of the coating on the front surface
specular reflectance of the sample front surface
specular transmittance of the sample when the front surface is incident
total hemispherical reflectance of the sample front surface
total hemispherical transmittance of the sample when the front surface is incident
description of the cleaning procedure
comments that pertain to the sample

MEASUREMENT
PARAMETERS
MEAS_NAME

a descriptive name for the measurement

10

NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
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E 1392
FILE_NAME
MEAS_DATE
MEAS_TIME
MODE
NUM_AVE
NUM_POINTS
VARS

BRDF
WAVELENGTH
BANDWIDTH
ALPHA
THETA_I
PHI_I
THETA_S
PHI_S
POWER_INC
POWER_SCTR
SPOT_SIZE
SOURCE_POL_I
SOURCE_POL_M
SOURCE_POL_C
SOURCE_POL_S
RX_POL_I
RX_POL_M
RX_POL_C
RX_POL_S
SOURCE_POL_ORN
RX_POL_ORN
RX_DIST
APER_SIZE
RX_FOV
SAMPLE_TEMP
SAMPLE_ATM_KW
SAMPLE_PRES
SAMPLE_HUMID
SOURCE_CONV
SPOT_X
SPOT_Y
SPOT_Z

MEAS_COMMENTS
DATA SEQUENCE

name/number/id of this data file

date the measurement was made, mm-dd-yyyy
time the measurement finished, hh:mm:ss, 24 h format
indicates whether the sample was measured in a reflective (R), transmissive (T) or both (B) mode or is
a signature (S), Values are R, T, B, S
the number of measurements averaged for each data point in the data sequence
the number of data points in the data sequence, this is a mandatory field
list of the field names for the variables that will appear in the data sequence, the entry after each of
these fields in the headers will be var1, var2, var3, etc. depending on the position (column) in the data
sequence
BRDF of the sample, this is normally var1
center wavelength of the source, units are m
bandwidth of the source, FWHM
the sample x axis position as measured from the incident plane or XB axis in degrees
angle of incidence, ui
incident azimuthal angle, fi
polar angle from sample normal, us
scatter azimuthal angle, fs
total incident power on sample in watts
scattered power from the sample in watts
illuminated spot size, A, on the sample defined by the exp 2 power points
I component of the stokes vector defining the source polarization
M component of the stokes vector defining the source polarization
C component of the stokes vector defining the source polarization
S component of the stokes vector defining the source polarization
I component of the stokes vector defining the receiver polarization selection
M component of the stokes vector defining the receiver polarization selection
C component of the stokes vector defining the receiver polarization selection
S component of the stokes vector defining the receiver polarization selection
the angular orientation of linear polarization for the source light wrt the PLIN, p = 0, s = 90, in degrees
from 0 to 90
the angular orientation of a linear polarizer in the receiver wrt the scatter plane, P = 0, S = 90, in degrees from 0 to 90
rotational radius of the aperture stop defining the solid angle for the BRDF calculation
size of the aperture stop, this is the width of a slit or the diameter of a circular aperture or the area of a
bow tie or other type of complex aperture
receiver FOV in steradians
sample temperature in degrees K
key words that describe the test atmosphere surrounding the sample during the measurement such as
vacuum, air, vapor, chemical
pressure of the gas surrounding the sample in torr
humidity of the gas surrounding the sample in percent
the source convergence or divergence at the sample in radians, convergence is positive and divergence is negative
illuminated spot position in the X direction with respect to sample center
illuminated spot position in the Y direction with respect to sample center
sample front surface location with respect to the center of rotation of the instrument. A sample mounted
so the front surface was the surface inspected would have a value of 0.0. A sample mounted so the
back surface was the surface inspected such as a back surface reflector would have a value equal to
the sample thickness
comments that pertain to the measurement
This section of the data file is a list of all data for the measurement. Each data point is stored on a
separate line ending in a carriage returnline feed pair. Separate variables in the line are delimitated
with commas. There is no imposed limit to the number of variables in the line. Variables that do not
change from the data point to the next do not have to be repeated, but two commas are needed to reserve the column.

REFERENCES
(1) Nicodemus, Fred E., Directional Reflectance and Emissivity of an
Opaque Object,Applied Optics, Vol 4, 1965, p. 767.
(2) Nicodemus, F. E., Richmond, J. C., and Hsia, J. J., Geometrical
Considerations and Nomenclature for Reflectance, NBS Monograph
160, 1977.
(3) Smith, Sheldon M., Reflectance of AMES 24E, Infrablack and Martin
Black, Proceedings, Society of Photo-Optical Instrumentation Engineers (SPIE) 967, 1988, p. 251.
(4) Hsia, J. J. and Richmond, J. C., A High Resolution Laser Bidirectional Reflectometer with Results on Several Optical Coatings,
Journal of Research of the NBS-A. Physics and Chemistry, Vol 80A,
1976, pp. 189-205.
(5) Bjork, D. R., Rifkin, J., and Cady, F. M., BRDF Error Analysis,
Proceedings, SPIE 1165, 1989.

(6) Leonard, Thomas A. and Pantoliano, Michael, BRDF Round Robin,

Proceedings, SPIE 967, p. 226, 1988.
(7) Leonard, Thomas A., The Art of Optical ScatterMeasurement,
Proceedings, Laser Induced Damage in Optical Materials: 1988
Symposium, Special Publication 775, National Institute of Standards
and Technology, 1998.
(8) Leonard, Thomas A., Pantoliano, Michael, and Reilly, James, Results
of a CO2 BRDF Round Robin, Proceedings, SPIE 1165, 1989.
(9) Harvey, James E., Light Scattering Characteristics of Optical
Surfaces, Proceedings , SPIE 107, 1977, p. 41.
(10) Stover, John C., Hourmand, Bahram, and Kahler, Jeffrey, A., Comparison of Roughness Measurements by Differential Scatter and Total
Integrated Scatter, Proceedings, SPIE 511, 1984.
(11) Stover, John C., Optical Scattering: Measurement and Analysis, 2nd

11

NOTICE: This standard has either been superceded and replaced by a new version or discontinued.
Contact ASTM International ([Link]) for the latest information.

E 1392
Edition, SPIE Optical Engineering Press. Bellingham, WA, 1995,
Chapter 4.
(12) Bennet, Jean M. and Mattsson, Lars, Introduction to Surface Rough-

ness and Scattering, Optical Society of America, Washington, DC

1989, p. 32.

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