Abstract

There is increasing demand for in situ shape measurements performed on ultraprecision processing machines. One major source of error during interferometric measurements performed on machines is fringe displacement due to external disturbances. We have developed an interferometer equipped with an electro-optic phase modulator that measures the phase of interference fringes before they are displaced by air turbulence. The frequency characteristics of air turbulence induced by a heat source are derived from successive measurements of a test surface. Experimental results show that the phase of the interference fringes can be accurately measured in the presence of air turbulence when the intensity of the fringes is sampled at a speed of several hundred hertz.

© 2003 Optical Society of America

Wiener filtering of interferometry measurements through turbulent air using an exponential forgetting factor

Henrik Lycksam, Mikael Sjödahl, Per Gren, and James Leblanc
Appl. Opt. 47(16) 2971-2978 (2008)

Measurement of spatiotemporal phase statistics in turbulent air flow using high-speed digital holographic interferometry

Henrik Lycksam, Mikael Sjödahl, and Per Gren
Appl. Opt. 49(8) 1314-1322 (2010)

Residual errors in laser interferometry from air turbulence and nonlinearity

Norman Bobroff
Appl. Opt. 26(13) 2676-2682 (1987)

Synthetic aperture interferometry: in-process measurement of aspheric optics

Richard Tomlinson, Jeremy M. Coupland, and Jon Petzing
Appl. Opt. 42(4) 701-707 (2003)

Direct measurement of refractive-index dispersion of transparent media by white-light interferometry

Matteo Galli, Franco Marabelli, and Giorgio Guizzetti
Appl. Opt. 42(19) 3910-3914 (2003)